 lixiang
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13b51bff63
提交TM Vent配置文件报错gug
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11 months ago |
 sangwq
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72419fe36a
enhance throughput and skip repeat loadlock pumping/venting.
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11 months ago |
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sangwq
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5687e44ebc
Enhance routing algorithm.
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11 months ago |
|
lixiang
|
401ccfc861
1.修复TM控压不稳bug，LL Vent未计时关闭原因
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1 year ago |
|
lixiang
|
5ce110574e
1，添加cooling功能
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1 year ago |
|
lixiang
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
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1 year ago |
|
lixiang
|
9163903164
Kepler2200优化
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1 year ago |
|
lixiang
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 year ago |
|
lixiang
|
464c53cd94
1.Datalog添加高温Haeter开关显示
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1 year ago |
|
lixiang
|
d33079596b
1.优化新版跑片动画
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1 year ago |
|
lixiang
|
b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
|
lixiang
|
e511d1f387
1.添加PM控压功能
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1 year ago |
 zhouhr
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187a5c453d
Kepler operation页面增加PMB、PMC、TM压力值和真空大气信号 去除MFVentRoutine结束后关闭N2valve
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1 year ago |
|
sangwq
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03063bae6a
Enhance the routine framework.
|
1 year ago |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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1 year ago |
|
lixiang
|
e0817cb012
现场bug修改
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1 year ago |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
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1 year ago |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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1 year ago |
|
lixiang
|
b96ac701fb
1.添加TM Simulator
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1 year ago |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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1 year ago |
|
sangwq
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b8bd250b4e
TM/LL Pump/Vent/Purge done.
|
2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
