 sangwq
|
09e8c5db30
Fix the post clean not running bug.
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vor 10 Monaten |
|
sangwq
|
260120e0d5
Change the PreClean/PostClean design.
|
vor 10 Monaten |
 zhouhr
|
afa8662437
Changed from VPA to Aligner1 && Removed PreClean, PostClean in SequenceInfo
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vor 10 Monaten |
|
sangwq
|
9d5c9aa491
Reset PMTask while after system abort.
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vor 11 Monaten |
|
sangwq
|
02c63fca6d
Return wafers functions.
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vor 11 Monaten |
|
zhouhr
|
3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
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vor 11 Monaten |
|
sangwq
|
c8e945317e
develop Pre/Post Clean functionalities.
|
vor 11 Monaten |
|
sangwq
|
5b6817486a
enhance Venus dispatcher module.
|
vor 11 Monaten |
|
sangwq
|
98c6162bf2
fix the atm cycle bug.
|
vor 11 Monaten |
|
sangwq
|
7bf784cc5a
New routing algorithm for Venus SE/DE system.
|
vor 11 Monaten |
|
sangwq
|
75b6c4548e
submit new venus routing algorithm.
|
vor 11 Monaten |
