 zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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11 months ago |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 months ago |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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1 year ago |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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1 year ago |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 year ago |
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zhouhr
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08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
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1 year ago |
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zhouhr
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b3948aca8e
Update driver of HongHuVce,log in LoadPrepareRoutine && fix VenusSeOperationOverView
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1 year ago |
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zhouhr
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b9a935138d
add vpa vce simulator && update honghuvce driver,SETMEntity,seTMEntity pick place home routine && update VenusSEoverviewmodel......
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1 year ago |
