 zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
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zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
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zhouhr
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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zhouhr
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724b0ca304
add ReturnWafer for Venus SE.
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1 year ago |
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zhouhr
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1b999083c8
add WaferTransfer for VenusSE && fix bug in VceControl as param is null && fix bug in Pick,Place as target slot is negative.
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1 year ago |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 year ago |
 sangwq
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b4c441532d
Clean Recipe functions, include IdleClean/PreJobClean/WTWJobClean/PostJobClean.
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2 years ago |
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zhouhr
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883eb268eb
add TM Robot Home && delete PrefixPath of the selected recipe in sequence
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2 years ago |
 lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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lixiang
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f3bd6b016b
添加部分efem功能
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2 years ago |
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sangwq
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652afa77f9
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
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2 years ago |
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sangwq
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66557b65bb
TMCycle not finished.
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 years ago |
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sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 years ago |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 years ago |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 years ago |
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sangwq
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3cad102221
更新 RT
|
3 years ago |
