 Intern01
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171eef8acc
Add to chart@@to slot switch page function
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2 lat temu |
 lixiang
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 lat temu |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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2 lat temu |
 sangwq
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d22b60372f
Debug devices on tools
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2 lat temu |
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lixiang
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ffda76b488
修改rt与ui交互功能
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2 lat temu |
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sangwq
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3f8df8cade
DEVICE UPDATE
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2 lat temu |
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sangwq
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3222fa143a
Process module and Interlock .
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2 lat temu |
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sangwq
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630c7b7548
Wafer transfer routine done.
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2 lat temu |
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sangwq
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8565810192
Servo Pressure and Gas Flow done.
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2 lat temu |
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sangwq
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af96d139ff
2022年11月24日 提交 RT 部分更改
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2 lat temu |
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sangwq
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c8cfb4008d
check in HV, PendulumValve, TurboPump drivers.
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3 lat temu |
