 lixiang
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fc317f2d07
添加控压状态，开关slitdoor，check压差的功能
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2 years ago |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
 yangdb
|
045eae5c75
1.sequence和recipe修改日志输出格式
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2 years ago |
|
lixiang
|
39fe214261
1.完善PartialPressure 功能
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2 years ago |
 sangwq
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a54944a308
PM TM Wafer Transfer Ready.
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2 years ago |
|
lixiang
|
b6c2517c51
1.添加加热功能
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2 years ago |
|
sangwq
|
2b930e56b9
Log output for exception.
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
|
sangwq
|
a5245356d0
source files
|
3 years ago |
