 lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
 zhouhr
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c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
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1 year ago |
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lixiang
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4338503e2a
1.添加霍庭格RF Device
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1 year ago |
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zhouhr
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cf4cf64edc
Optimize SEView.
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1 year ago |
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zhouhr
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a5ba0d3c6b
add Process in PMChamber for SEOpertaion
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1 year ago |
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lixiang
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e511d1f387
1.添加PM控压功能
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1 year ago |
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lixiang
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b6acfe2e29
优化TM leak check功能
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2 years ago |
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lixiang
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edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
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lixiang
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4ffafb6001
EFEM界面优化
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2 years ago |
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lixiang
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dbf06a2134
添加TM Operation界面
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2 years ago |
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lixiang
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2d424f4cab
优化漏气检测算法，给TM界面添加 1.删除/添加wafer 2.PM/LL自动隐藏功能
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2 years ago |
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lixiang
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280432bb82
1.TM传片动画制作，UI界面优化
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2 years ago |
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lixiang
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39fe214261
1.完善PartialPressure 功能
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2 years ago |
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lixiang
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7299abbcd2
1.优化TM界面
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2 years ago |
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lixiang
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b6c2517c51
1.添加加热功能
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2 years ago |
