 hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
 lixiang
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d4d56a3cf3
1.添加Recipe内部外部名称，chamberTYpe 比对
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1 year ago |
|
lixiang
|
e2cd173579
1.添加Kepler2200 流气 Tolerance
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1 year ago |
|
lixiang
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 year ago |
|
lixiang
|
038bcab52c
Operation界面添加PreCleanRecipe/PostCleanRecipe选择功能
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1 year ago |
|
lixiang
|
b1e6a9ce63
bug提交
|
2 years ago |
|
lixiang
|
cdf41d68fe
1.优化数据库实时数据插入功能，恢复数据查询/实时数据查看等功能
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2 years ago |
|
lixiang
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
 zhouhr
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f56f80e34a
完善UI 拖片 LP的job显示效果、传参 修改Robot槽位显示效果 TM数据绑定 return wafer等
|
2 years ago |
|
lixiang
|
2cc409c5f8
合并代码
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2 years ago |
|
lixiang
|
85fc03f838
1.添加部分OpertionOverView ui功能
|
2 years ago |
