 lixiang
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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1 year ago |
 sangwq
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03063bae6a
Enhance the routine framework.
|
2 years ago |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
2 years ago |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
2 years ago |
|
lixiang
|
6dd42b5fb0
添加process数据分析功能
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2 years ago |
|
lixiang
|
de406b964e
1.添加EFEM等ui界面
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2 years ago |
|
lixiang
|
ec1eeba67c
添加数据分析界面
|
2 years ago |
|
lixiang
|
a64bed3d6c
1.Run recipe 功能现场修改
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2 years ago |
|
sangwq
|
c3154ba629
wafer manager.
|
2 years ago |
|
sangwq
|
630c7b7548
Wafer transfer routine done.
|
2 years ago |
