 zhouhr
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cc04adb731
change the location of the PA from VPA to Aligner1
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vor 11 Monaten |
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zhouhr
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13460815b8
add PM ALARM_Notify while PM sensor Alarm && add TMBase for SETM&&DETM && add HongHuDETM For DE && fix some bugs in DETMUI
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vor 1 Jahr |
 hecl
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0a8ce7454b
Fix exception caused by SeTMView,SETMOperationView
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vor 1 Jahr |
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hecl
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d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
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vor 1 Jahr |
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zhouhr
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984e634945
1. Add check before Open VCE Outer Door based on ATM sensor and OutDoorOpenPressure
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vor 1 Jahr |
 intern02
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d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
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vor 1 Jahr |
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zhouhr
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376ce10782
增加LOG模块中特定eEvent id触发委托函数 && 移除UI中触发PMError && add SE TM Cycle throughput && fix vcedoor not show
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vor 1 Jahr |
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zhouhr
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a83b38ac11
Add SE VCE|TM FsmState in TopView && Fix bug of CycledWafer number in SE Cycle && Add VCE Goto slot in SwapRoutine
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vor 1 Jahr |
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zhouhr
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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vor 1 Jahr |
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intern02
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5e0dcdadc1
commit SeTMViewModel, SeTMView for Venus SE's Transfer in UI
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vor 1 Jahr |
