 zhouhr
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01f4eaa5de
fix the bug in SEMFSwapRoutine
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11 月之前 |
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zhouhr
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253fcb8be2
add CassetteArrive,CurrentSlot in UI,RT,Simulator
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11 月之前 |
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zhouhr
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3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
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11 月之前 |
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zhouhr
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d425906355
add Cassette arrive, leave, map with all empty or full in VCE's Simulator && Change the logic of control SlitDoor in PM && Change SE Pick Place Swap DoublePick for PM & VCE && fix some bug in View for Venus VCE && DE UI Design.
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11 月之前 |
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zhouhr
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 月之前 |
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zhouhr
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8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
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11 月之前 |
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zhouhr
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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1 年之前 |
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zhouhr
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cc62abde94
fix some bug in DETMOperationView
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1 年之前 |
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zhouhr
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d95b8c7876
cancel Open PVN22 in SE,DE && add VenusVentRoutine && fix the bug in GasBoxLeakCheck && Change Logic in pumpdown&Vent in SE,DE
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1 年之前 |
