 hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
преди 1 година |
|
hecl
|
ed38ed5c95
1.check load function bugs fix
|
преди 1 година |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
преди 1 година |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
преди 1 година |
 zhouhr
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
преди 1 година |
|
zhouhr
|
5266d6e42b
fix the Chamber Pressure not show && Add CheckLoad Station to PA Position && fix CheckLoad cannot finish in Simulator.
|
преди 1 година |
|
zhouhr
|
9d9b666ea4
Venus SE Update
|
преди 1 година |
|
zhouhr
|
57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
|
преди 1 година |
 intern02
|
d308f9a645
Improved TM Transfer and Robot Arm, updated and uploaded SeTMViewModel.cs、VenusSeOperationOverView.cs、HongHuVR.cs、SETMEntity.cs、Generic、SERobot.cs、SEMFPMRetractRoutine.cs、SEMFPMExtendRoutine.cs.
|
преди 1 година |
|
zhouhr
|
a84b9b9f89
add CheckLoad in HongHuVR a&& add TMRobot Home for SE
|
преди 1 година |
|
zhouhr
|
9094188c54
add CheckLoad in HongHuVR && fix the bug in seRobot
|
преди 1 година |
|
intern02
|
109e1ee3a2
Added SE Robot movement, updated and uploaded VenusSeOperationOverViewModel.cs, VenusSeOperationOverView.xaml, SERobot.cs, HongHuVR.cs, SETMEntity.cs, Generic, SERobot1.xaml, SERobot2.xaml .
|
преди 1 година |
|
zhouhr
|
c80e520ac1
update Drive of HONGHU Robot to Dual-Arms && add VCE cassette in UI.RT && add SMIF/ISMIF.cs,LoadWithSMIFRoutine,UnloadWithSMIFRoutine
|
преди 1 година |
|
zhouhr
|
0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
|
преди 1 година |
|
zhouhr
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
преди 1 година |
|
zhouhr
|
5decb7ce4a
fix the bug of SE TMRobot StationNumber
|
преди 1 година |
|
zhouhr
|
31bbc4482b
update ui && rt && simu for Venus SE
|
преди 1 година |
|
zhouhr
|
08029e238d
update Venus SE pick place && drivers of HongHu deivce && ui
|
преди 1 година |
|
zhouhr
|
1c44773767
Add missing files
|
преди 1 година |
