 lixiang
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01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 gadu atpakaļ |
 hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 gadu atpakaļ |
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lixiang
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d35b997884
1.优化RevtechMatch状态机
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1 gadu atpakaļ |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 gadu atpakaļ |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 gadu atpakaļ |
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lixiang
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0f905564d0
加入登录界面和权限管理
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1 gadu atpakaļ |
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lixiang
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96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
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1 gadu atpakaļ |
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lixiang
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2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
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1 gadu atpakaļ |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 gadu atpakaļ |
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lixiang
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b2406d6f78
1.添加signalTonwer ui界面
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1 gadu atpakaļ |
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lixiang
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1929a3510b
1.新版ui界面开发
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1 gadu atpakaļ |
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lixiang
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 gadu atpakaļ |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 gadu atpakaļ |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 gadu atpakaļ |
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lixiang
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6910d4754e
代码合并
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1 gadu atpakaļ |
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lixiang
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6d7ee9b8a3
1.根据新版kepler2200A IO跟新kepler2200A PM功能
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1 gadu atpakaļ |
|
lixiang
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ab095ba2a8
修复钟摆阀状态错误bug
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1 gadu atpakaļ |
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lixiang
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41d50f69e3
1.钟摆阀关闭，加入压力和位置自动设0功能
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1 gadu atpakaļ |
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lixiang
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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1 gadu atpakaļ |
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lixiang
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4992e94a4e
代码提交
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1 gadu atpakaļ |
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lixiang
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de406b964e
1.添加EFEM等ui界面
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1 gadu atpakaļ |
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lixiang
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c060fde154
1.Recipe Edit 添加配置功能
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1 gadu atpakaļ |
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lixiang
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a48b743e88
1.完成PartialPressure功能
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2 gadi atpakaļ |
 sangwq
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096c873956
Sequence SPEC update.
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2 gadi atpakaļ |
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lixiang
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1759ebd070
修改rf ui
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2 gadi atpakaļ |
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sangwq
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4ae8734407
PendulumValve pressure full range.
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2 gadi atpakaļ |
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lixiang
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e12f20870b
钟摆阀压力送出/接收值乘以/除以10
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2 gadi atpakaļ |
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sangwq
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6187ad5b4f
Interlock 优化
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2 gadi atpakaļ |
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lixiang
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1f1fb71be3
1.2023/02/17现场rt代码修改
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2 gadi atpakaļ |
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sangwq
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d22b60372f
Debug devices on tools
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2 gadi atpakaļ |
