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@@ -7,11 +7,11 @@
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<DI_ITEM Index="2" Name="DI_TM_DI3" Device="" Addr="w0.02" Note="VCE SLIT DOOR OPEN ENABLE" />
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<DI_ITEM Index="3" Name="DI_TM_DI5" Device="" Addr="w0.03" Note="PMA SLIT DOOR OPEN ENABLE" />
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<DI_ITEM Index="4" Name="DI_TM_DI7" Device="" Addr="w0.04" Note="PMB SLIT DOOR OPEN ENABLE" />
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- <DI_ITEM Index="5" Name="DI_TM_DI9" Device="" Addr="w0.05" Note="PMC SLIT DOOR OPEN ENABLE" />
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- <DI_ITEM Index="6" Name="DI_TM_DI4" Device="" Addr="w0.06" Note="TM RB EXTEND VCE ENABLE" />
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- <DI_ITEM Index="7" Name="DI_TM_DI6" Device="" Addr="w0.07" Note="TM RB EXTEND PMA ENABLE" />
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- <DI_ITEM Index="8" Name="DI_TM_DI8" Device="" Addr="w0.08" Note="TM RB EXTEND PMB ENABLE" />
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- <DI_ITEM Index="9" Name="DI_TM_DI10" Device="" Addr="w0.09" Note="TM RB EXTEND PMC ENABLE" />
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+ <DI_ITEM Index="5" Name="DI_VCE_A" Device="" Addr="w0.05" Note="VCE大气信号" />
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+ <DI_ITEM Index="6" Name="DI_TM_A" Device="" Addr="w0.06" Note="TM大气信号" />
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+ <DI_ITEM Index="7" Name="DI_VCE_SS" Device="" Addr="w0.07" Note="VCE wafer senser" />
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+ <DI_ITEM Index="8" Name="DI_PMA_SS" Device="" Addr="w0.08" Note="PMA wafer senser" />
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+ <DI_ITEM Index="9" Name="DI_PMB_SS" Device="" Addr="w0.09" Note="PMB wafer senser" />
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<DI_ITEM Index="10" Name="DI_SYS_C1" Device="" Addr="w0.10" Note="AC RACK FAN OK" />
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<DI_ITEM Index="11" Name="DI_SYS_C2" Device="" Addr="w0.11" Note="AC RACK Smoke Detector out1" />
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<DI_ITEM Index="12" Name="DI_SYS_C3" Device="" Addr="w0.12" Note="AC RACK Smoke Detector out2" />
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@@ -34,11 +34,10 @@
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<DI_ITEM Index="29" Name="DI_PMA_RB_RET" Device="" Addr="w1.13" Note="ROBOT TO PMA RETRACT" />
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<DI_ITEM Index="30" Name="DI_PMB_RB_RET" Device="" Addr="w1.14" Note="ROBOT TO PMB RETRACT" />
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<DI_ITEM Index="31" Name="DI_PMC_RB_RET" Device="" Addr="w1.15" Note="ROBOT TO PMC RETRACT" />
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- <DI_ITEM Index="32" Name="DI_PMD_RB_RET" Device="" Addr="w2.00" Note="ROBOT TO PMD RETRACT" />
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- <DI_ITEM Index="33" Name="DI_TM_PMC_OPS" Device="" Addr="w2.01" Note="TM到PMC门阀开信号" />
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- <DI_ITEM Index="34" Name="DI_TM_PMC_CLS" Device="" Addr="w2.02" Note="TM到PMC门阀关信号" />
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- <DI_ITEM Index="35" Name="DI_TM_PMD_OPS" Device="" Addr="w2.03" Note="TM到PMD门阀开信号" />
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- <DI_ITEM Index="36" Name="DI_TM_PMD_CLS" Device="" Addr="w2.04" Note="TM到PMD门阀关信号" />
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+ <DI_ITEM Index="32" Name="DI_TM_DI8" Device="" Addr="w2.00" Note="PMC SLIT DOOR OPEN ENABLE" />
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+ <DI_ITEM Index="33" Name="DI_PMC_SS" Device="" Addr="w2.01" Note="PMC wafer senser" />
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+ <DI_ITEM Index="34" Name="DI_TM_PMC_OPS" Device="" Addr="w2.02" Note="TM到PMC门阀开信号" />
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+ <DI_ITEM Index="35" Name="DI_TM_PMC_CLS" Device="" Addr="w2.03" Note="TM到PMC门阀关信号" />
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</Dig_In>
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<Dig_Out>
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<DO_ITEM Index="0" Name="" Device="" Addr="" />
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@@ -49,30 +48,30 @@
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<DO_ITEM Index="5" Name="" Device="" Addr="" />
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<DO_ITEM Index="6" Name="" Device="" Addr="" />
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<DO_ITEM Index="7" Name="" Device="" Addr="" />
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- <DO_ITEM Index="8" Name="" Device="" Addr="" />
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- <DO_ITEM Index="9" Name="" Device="" Addr="" />
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- <DO_ITEM Index="10" Name="" Device="" Addr="" />
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- <DO_ITEM Index="11" Name="DO_TM_PMD_OP" Device="" Addr="w199.14" Note="TM到PMD门阀开"/>
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- <DO_ITEM Index="12" Name="DO_TM_PMD_CL" Device="" Addr="w199.15" Note="TM到PMD门阀关" />
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+ <DO_ITEM Index="8" Name="DO_TM_PMC_OP" Device="" Addr="w199.11" Note="TM到PMC门阀开"/>
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+ <DO_ITEM Index="9" Name="DO_TM_PMC_CL" Device="" Addr="w199.12" Note="TM到PMC门阀关"/>
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+ <DO_ITEM Index="10" Name="DO_TM_V_LS" Device="" Addr="w199.13" Note="TM腔慢抽真空"/>
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+ <DO_ITEM Index="11" Name="DO_TM_BUZZER" Device="" Addr="w199.14" Note="蜂鸣"/>
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+ <DO_ITEM Index="12" Name="DO_RED" Device="" Addr="w199.15" Note="报警灯1(红灯)" />
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<DO_ITEM Index="13" Name="DO_VCE_TM_OP" Device="" Addr="w200.00" Note="VCE到TM门阀开" />
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<DO_ITEM Index="14" Name="DO_VCE_TM_CL" Device="" Addr="w200.01" Note="VCE到TM门阀关" />
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<DO_ITEM Index="15" Name="DO_TM_PMA_OP" Device="" Addr="w200.02" Note="TM到PMA门阀开"/>
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<DO_ITEM Index="16" Name="DO_TM_PMA_CL" Device="" Addr="w200.03" Note="TM到PMA门阀关"/>
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<DO_ITEM Index="17" Name="DO_TM_PMB_OP" Device="" Addr="w200.04" Note="TM到PMB门阀开"/>
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<DO_ITEM Index="18" Name="DO_TM_PMB_CL" Device="" Addr="w200.05" Note="TM到PMB门阀关"/>
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- <DO_ITEM Index="19" Name="DO_TM_PMC_OP" Device="" Addr="w200.06" Note="TM到PMC门阀开"/>
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- <DO_ITEM Index="20" Name="DO_TM_PMC_CL" Device="" Addr="w200.07" Note="TM到PMC门阀关"/>
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+ <DO_ITEM Index="19" Name="DO_ORANGE" Device="" Addr="w200.06" Note="报警灯2(橙灯)"/>
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+ <DO_ITEM Index="20" Name="DO_GREEN" Device="" Addr="w200.07" Note="报警灯3(绿灯)"/>
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<DO_ITEM Index="21" Name="DO_TM_V_HS" Device="" Addr="w200.08" Note="TM腔快抽真空"/>
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- <DO_ITEM Index="22" Name="DO_TM_V_LS" Device="" Addr="w200.09" Note="TM腔慢抽真空"/>
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+ <DO_ITEM Index="22" Name="DO_BLUE" Device="" Addr="w200.09" Note="报警灯4(蓝灯)"/>
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<DO_ITEM Index="23" Name="DO_TM_B_HS" Device="" Addr="w200.10" Note="TM腔快破真空"/>
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<DO_ITEM Index="24" Name="DO_TM_B_LS" Device="" Addr="w200.11" Note="TM腔慢破真空"/>
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<DO_ITEM Index="25" Name="DO_VCE_V_HS" Device="" Addr="w200.12" Note="VCE腔快抽真空"/>
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<DO_ITEM Index="26" Name="DO_VCE_V_LS" Device="" Addr="w200.13" Note="VCE腔慢抽真空" />
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<DO_ITEM Index="27" Name="DO_VCE_B_HS" Device="" Addr="w200.14" Note="VCE腔快破真空"/>
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<DO_ITEM Index="28" Name="DO_VCE_B_LS" Device="" Addr="w200.15" Note="VCE腔慢破真空"/>
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- <DO_ITEM Index="29" Name="DO_V_220V" Device="" Addr="w201.00" Note="220V线圈"/>
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- <DO_ITEM Index="30" Name="DO_TM_C1" Device="" Addr="w201.01" Note="系统允许断电"/>
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- <DO_ITEM Index="31" Name="DO_TM_C2" Device="" Addr="w201.02" Note="备用"/>
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+ <DO_ITEM Index="29" Name="DO_V_220V" Device="" Addr="w201.00" Note="水阀"/>
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+ <DO_ITEM Index="30" Name="" Device="" Addr="" Note=""/>
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+ <DO_ITEM Index="31" Name="" Device="" Addr="" Note=""/>
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<DO_ITEM Index="32" Name="" Device="" Addr="" />
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<DO_ITEM Index="33" Name="" Device="" Addr="" />
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<DO_ITEM Index="34" Name="" Device="" Addr="" />
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@@ -80,8 +79,8 @@
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<DO_ITEM Index="36" Name="" Device="" Addr="" />
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</Dig_Out>
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<Ana_Out>
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- <AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d200" Note="MFC Flow Setpoint" />
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- <AO_ITEM Index="1" Name="AO_TM_Vacuum_Gauge" BufferOffset="1" Device="" Addr="d201" Note="TM"/>
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+ <AO_ITEM Index="0" Name="AO_MFC_Flow_Setpoint" BufferOffset="0" Device="" Addr="d308" Note="MFC Flow Setpoint" />
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+ <AO_ITEM Index="1" Name="" BufferOffset="" />
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<AO_ITEM Index="2" Name="" BufferOffset="" />
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<AO_ITEM Index="3" Name="" BufferOffset="" />
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<AO_ITEM Index="4" Name="" BufferOffset="" />
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@@ -132,11 +131,11 @@
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<AO_ITEM Index="49" Name="" />
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</Ana_Out>
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<Ana_In>
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- <AI_ITEM Index="0" Name="AI_MFC_Flow_Setpoint" BufferOffset="2" Device="" Addr="D100" />
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- <AI_ITEM Index="1" Name="AI_VCE_Vacuum_Gauge" BufferOffset="10" Device="" Addr="D101" />
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- <AI_ITEM Index="2" Name="AI_TM_Vacuum_Gauge" BufferOffset="2" Device="" Addr="D102"/>
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- <AI_ITEM Index="3" Name="AI_VCE_Pipeline_Vacuum_Gauge" BufferOffset="10" Device="" Addr="D103"/>
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- <AI_ITEM Index="4" Name="AI_TM_Pipeline_Vacuum_Gauge" BufferOffset="22" Device="" Addr="D104"/>
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+ <AI_ITEM Index="0" Name="AI_VCE_Vacuum_Gauge" BufferOffset="0" Device="" Addr="D300" />
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+ <AI_ITEM Index="1" Name="AI_TM_Vacuum_Gauge" BufferOffset="2" Device="" Addr="D302" />
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+ <AI_ITEM Index="2" Name="AI_Pipeline_Vacuum_Gauge" BufferOffset="4" Device="" Addr="D304"/>
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+ <AI_ITEM Index="3" Name="AI_MFC_Flow" BufferOffset="6" Device="" Addr="D306"/>
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+ <AI_ITEM Index="4" Name=""/>
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<AI_ITEM Index="5" Name=""/>
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<AI_ITEM Index="6" Name="" />
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<AI_ITEM Index="7" Name=""/>
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