|
@@ -13,6 +13,7 @@ namespace Venus_RT.Modules.PMs
|
|
{
|
|
{
|
|
kPrepareTransfer,
|
|
kPrepareTransfer,
|
|
kExtend,
|
|
kExtend,
|
|
|
|
+ KDelay2s,
|
|
kPinUp,
|
|
kPinUp,
|
|
kRetract,
|
|
kRetract,
|
|
kPostTransfer,
|
|
kPostTransfer,
|
|
@@ -80,6 +81,7 @@ namespace Venus_RT.Modules.PMs
|
|
{
|
|
{
|
|
Runner.Run((int)LLPickStep.kPrepareTransfer, PrepareTransfer, IsPrepareReady, _prepareTransferTimeout * 1000)
|
|
Runner.Run((int)LLPickStep.kPrepareTransfer, PrepareTransfer, IsPrepareReady, _prepareTransferTimeout * 1000)
|
|
.Run((int)LLPickStep.kExtend, _chamber.ExtendWafer, () => { return _chamber.IsLoadlockArmExtend; }, _transferWaferTimeout * 1000)
|
|
.Run((int)LLPickStep.kExtend, _chamber.ExtendWafer, () => { return _chamber.IsLoadlockArmExtend; }, _transferWaferTimeout * 1000)
|
|
|
|
+ .Delay((int)LLPickStep.KDelay2s,2000)
|
|
.Run((int)LLPickStep.kPinUp, SetLiftPinDown, () => { return _chamber.CheckLiftDown(); })
|
|
.Run((int)LLPickStep.kPinUp, SetLiftPinDown, () => { return _chamber.CheckLiftDown(); })
|
|
.Run((int)LLPickStep.kRetract, _chamber.RetractWafer, () => { return _chamber.IsLoadlockArmRetract; }, _transferWaferTimeout * 1000)
|
|
.Run((int)LLPickStep.kRetract, _chamber.RetractWafer, () => { return _chamber.IsLoadlockArmRetract; }, _transferWaferTimeout * 1000)
|
|
.Run((int)LLPickStep.kPostTransfer, PostTransfer, IsPostTransferReady, _prepareTransferTimeout * 1000)
|
|
.Run((int)LLPickStep.kPostTransfer, PostTransfer, IsPostTransferReady, _prepareTransferTimeout * 1000)
|
|
@@ -120,27 +122,29 @@ namespace Venus_RT.Modules.PMs
|
|
|
|
|
|
private bool VentLoadLock()
|
|
private bool VentLoadLock()
|
|
{
|
|
{
|
|
- if (!_isATMMode)
|
|
|
|
- {
|
|
|
|
- return _loadLockVentRoutine.Start() == RState.Running;
|
|
|
|
- }
|
|
|
|
- else
|
|
|
|
|
|
+ //2023/06/08朱让取消
|
|
|
|
+ //if (!_isATMMode)
|
|
|
|
+ //{
|
|
|
|
+ // return _loadLockVentRoutine.Start() == RState.Running;
|
|
|
|
+ //}
|
|
|
|
+ //else
|
|
return true;
|
|
return true;
|
|
}
|
|
}
|
|
|
|
|
|
private bool IsVentDone()
|
|
private bool IsVentDone()
|
|
{
|
|
{
|
|
- if(!_isATMMode)
|
|
|
|
- {
|
|
|
|
- RState ret = _loadLockVentRoutine.Monitor();
|
|
|
|
- if (ret == RState.Failed || ret == RState.Timeout)
|
|
|
|
- {
|
|
|
|
- Runner.Stop("Vent Failed");
|
|
|
|
- return false;
|
|
|
|
- }
|
|
|
|
-
|
|
|
|
- return ret == RState.End;
|
|
|
|
- }
|
|
|
|
|
|
+ //2023/06/08朱让取消
|
|
|
|
+ //if(!_isATMMode)
|
|
|
|
+ //{
|
|
|
|
+ // RState ret = _loadLockVentRoutine.Monitor();
|
|
|
|
+ // if (ret == RState.Failed || ret == RState.Timeout)
|
|
|
|
+ // {
|
|
|
|
+ // Runner.Stop("Vent Failed");
|
|
|
|
+ // return false;
|
|
|
|
+ // }
|
|
|
|
+
|
|
|
|
+ // return ret == RState.End;
|
|
|
|
+ //}
|
|
|
|
|
|
return true;
|
|
return true;
|
|
}
|
|
}
|