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@@ -22,10 +22,21 @@ namespace Venus_RT.Modules.PMs
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public RState Start(params object[] objs)
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{
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- if (!_chamber.IsFastPumpOpened)
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+ //if (!_chamber.IsFastPumpOpened)
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+ //{
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+ // StopFlow();
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+ // Stop("Pump 阀没有打开");
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+ // return RState.Failed;
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+ //}
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+
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+ if(!CheckTurboPump())
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{
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- StopFlow();
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- Stop("Pump 阀没有打开");
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+ return RState.Failed;
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+ }
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+
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+ if(_chamber.GetPVPosition() == 0)
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+ {
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+ Stop("钟摆阀没有打开");
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return RState.Failed;
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}
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@@ -63,12 +74,25 @@ namespace Venus_RT.Modules.PMs
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{
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for (int index = 0; index < _mfcSetPoint.Length; index++)
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{
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+ if (_mfcSetPoint[index] > 0)
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+ OpenPVNVlv(index, true);
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+
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_chamber.FlowGas(index, _mfcSetPoint[index]);
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+
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}
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return true;
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}
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+ private void OpenPVNVlv(int mfcIndex, bool on)
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+ {
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+ ValveType[] vlvs = new ValveType[] { ValveType.PV11, ValveType.PV21, ValveType.PV31, ValveType.PV41 };
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+ if (mfcIndex < 4)
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+ {
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+ _chamber.OpenValve(vlvs[mfcIndex], on);
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+ }
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+ }
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+
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private bool CheckRange()
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{
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if (_chamber.HasGasOutOfRange)
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@@ -87,6 +111,10 @@ namespace Venus_RT.Modules.PMs
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_chamber.OpenValve(ValveType.GasFinal, false);
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_chamber.StopAllGases();
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+ OpenPVNVlv(0, false);
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+ OpenPVNVlv(1, false);
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+ OpenPVNVlv(2, false);
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+ OpenPVNVlv(3, false);
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}
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}
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