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@@ -9,13 +9,13 @@
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<DI_ITEM Index="2" Name="DI_VAC_Switch" Device="" Addr="w20.02" />
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<DI_ITEM Index="2" Name="DI_VAC_Switch" Device="" Addr="w20.02" />
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<DI_ITEM Index="3" Name="" />
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<DI_ITEM Index="3" Name="" />
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<DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
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<DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
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- <DI_ITEM Index="5" Name="DI_Lift_Pin_Up_Position" Device="" Addr="w20.05" />
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- <DI_ITEM Index="6" Name="DI_Lift_Pin_Down_Position" Device="" Addr="w20.06" />
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+ <DI_ITEM Index="5" Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" />
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+ <DI_ITEM Index="6" Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" />
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<DI_ITEM Index="7" Name="DI_Source_RF_Generator_Interlock" Device="" Addr="w20.07" />
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<DI_ITEM Index="7" Name="DI_Source_RF_Generator_Interlock" Device="" Addr="w20.07" />
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<DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="w20.08" />
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<DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="w20.08" />
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<DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" />
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<DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" />
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- <DI_ITEM Index="10" Name="DI_Slit_Door_Open_Position" Device="" Addr="w20.10" />
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- <DI_ITEM Index="11" Name="DI_Slit_Door_Close_Position" Device="" Addr="w20.11" />
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+ <DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="w20.10" />
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+ <DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="w20.11" />
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<DI_ITEM Index="12" Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
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<DI_ITEM Index="12" Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
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<DI_ITEM Index="13" Name="" />
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<DI_ITEM Index="13" Name="" />
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<DI_ITEM Index="14" Name="" />
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<DI_ITEM Index="14" Name="" />
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@@ -24,17 +24,17 @@
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<DI_ITEM Index="17" Name="" />
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<DI_ITEM Index="17" Name="" />
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<DI_ITEM Index="18" Name="DI_Foreline_Pressure_10t_Guage_Alarm" Device="VG_FL" Addr="w21.02" />
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<DI_ITEM Index="18" Name="DI_Foreline_Pressure_10t_Guage_Alarm" Device="VG_FL" Addr="w21.02" />
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<DI_ITEM Index="19" Name="" />
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<DI_ITEM Index="19" Name="" />
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- <!--<DI_ITEM Index="20" Name="DI_S_Valve_TC_Deviation_out_of_range" Device="" Addr="w21.04" />-->
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+ <DI_ITEM Index="20" Name="DI_S_Valve_TC_Deviation_out_of_range" Device="" Addr="w21.04" />
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<DI_ITEM Index="21" Name="DI_S_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
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<DI_ITEM Index="21" Name="DI_S_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
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- <!--<DI_ITEM Index="22" Name="DI_S_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w21.06" />-->
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+ <DI_ITEM Index="22" Name="DI_S_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w21.06" />
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<DI_ITEM Index="23" Name="DI_S_Valve_Heater_On_FB" Device="" Addr="w21.07" />
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<DI_ITEM Index="23" Name="DI_S_Valve_Heater_On_FB" Device="" Addr="w21.07" />
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- <!--<DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w21.08" />
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+ <DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w21.08" />
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<DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w21.09" />
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<DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w21.09" />
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<DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w21.10" />
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<DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w21.10" />
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<DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w21.11" />
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<DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w21.11" />
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- <DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w21.12" />-->
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+ <DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w21.12" />
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<DI_ITEM Index="29" Name="DI_CHB_H-HT_Control_TC_Broken_Alarm" Device="" Addr="w21.13" />
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<DI_ITEM Index="29" Name="DI_CHB_H-HT_Control_TC_Broken_Alarm" Device="" Addr="w21.13" />
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- <!--<DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w21.14" />-->
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+ <DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w21.14" />
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<DI_ITEM Index="31" Name="DI_CHB_H-HT_Heater_On_FB" Device="" Addr="w21.15" />
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<DI_ITEM Index="31" Name="DI_CHB_H-HT_Heater_On_FB" Device="" Addr="w21.15" />
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<DI_ITEM Index="32" Name="DI_CHB_H-HT_OT_Switch_Alarm" Device="" Addr="w22.00" />
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<DI_ITEM Index="32" Name="DI_CHB_H-HT_OT_Switch_Alarm" Device="" Addr="w22.00" />
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<DI_ITEM Index="33" Name="" />
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<DI_ITEM Index="33" Name="" />
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@@ -60,18 +60,18 @@
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<DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
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<DI_ITEM Index="53" Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
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<DI_ITEM Index="54" Name="DI_Source_RF_Water_Flow_Switch" Device="" Addr="w23.06" />
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<DI_ITEM Index="54" Name="DI_Source_RF_Water_Flow_Switch" Device="" Addr="w23.06" />
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<DI_ITEM Index="55" Name="" />
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<DI_ITEM Index="55" Name="" />
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- <!--<DI_ITEM Index="56" Name="DI_P_Valve_TC_Deviation_out_of_range" Device="" Addr="w23.08" />
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+ <DI_ITEM Index="56" Name="DI_P_Valve_TC_Deviation_out_of_range" Device="" Addr="w23.08" />
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<DI_ITEM Index="57" Name="DI_P_Valve_Control_TC_Broken_Alarm" Device="" Addr="w23.09" />
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<DI_ITEM Index="57" Name="DI_P_Valve_Control_TC_Broken_Alarm" Device="" Addr="w23.09" />
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<DI_ITEM Index="58" Name="DI_P_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w23.10" />
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<DI_ITEM Index="58" Name="DI_P_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w23.10" />
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- <DI_ITEM Index="59" Name="DI_P_Valve_Heater_On_FB" Device="" Addr="w23.11" />-->
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+ <DI_ITEM Index="59" Name="DI_P_Valve_Heater_On_FB" Device="" Addr="w23.11" />
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<DI_ITEM Index="60" Name="" />
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<DI_ITEM Index="60" Name="" />
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- <!--<DI_ITEM Index="61" Name="DI_Gas_Line_TC_Deviation_out_of_range" Device="" Addr="w23.13" />-->
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+ <DI_ITEM Index="61" Name="DI_Gas_Line_TC_Deviation_out_of_range" Device="" Addr="w23.13" />
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<DI_ITEM Index="62" Name="DI_Gas_Line_Control_TC_Broken_Alarm" Device="" Addr="w23.14" />
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<DI_ITEM Index="62" Name="DI_Gas_Line_Control_TC_Broken_Alarm" Device="" Addr="w23.14" />
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- <!--<DI_ITEM Index="63" Name="DI_Gas_Line_Monitor_TC_Broken_Alarm" Device="" Addr="w23.15" />-->
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+ <DI_ITEM Index="63" Name="DI_Gas_Line_Monitor_TC_Broken_Alarm" Device="" Addr="w23.15" />
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<DI_ITEM Index="64" Name="DI_Gas_Line_Heater_On_FB" Device="" Addr="w24.00" />
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<DI_ITEM Index="64" Name="DI_Gas_Line_Heater_On_FB" Device="" Addr="w24.00" />
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- <!--<DI_ITEM Index="65" Name="DI_Gas_Line_OT_Switch_Alarm" Device="" Addr="w24.01" />-->
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+ <DI_ITEM Index="65" Name="DI_Gas_Line_OT_Switch_Alarm" Device="" Addr="w24.01" />
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<DI_ITEM Index="66" Name="DI_S_Valve_OT_Switch_Alarm" Device="" Addr="w24.02" />
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<DI_ITEM Index="66" Name="DI_S_Valve_OT_Switch_Alarm" Device="" Addr="w24.02" />
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- <!--<DI_ITEM Index="67" Name="DI_Foreline_OT_Switch_Alarm" Device="" Addr="w24.03" />-->
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+ <DI_ITEM Index="67" Name="DI_Foreline_OT_Switch_Alarm" Device="" Addr="w24.03" />
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<DI_ITEM Index="68" Name="" />
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<DI_ITEM Index="68" Name="" />
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<DI_ITEM Index="69" Name="" />
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<DI_ITEM Index="69" Name="" />
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<DI_ITEM Index="70" Name="" />
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<DI_ITEM Index="70" Name="" />
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@@ -82,21 +82,21 @@
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<DI_ITEM Index="75" Name="DI_Lid_Down_Limit_Pos_SW" Device="" Addr="w24.11" />
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<DI_ITEM Index="75" Name="DI_Lid_Down_Limit_Pos_SW" Device="" Addr="w24.11" />
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<DI_ITEM Index="76" Name="DI_Arm_Not_Extend_to_PM" Device="" Addr="w24.12" />
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<DI_ITEM Index="76" Name="DI_Arm_Not_Extend_to_PM" Device="" Addr="w24.12" />
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<DI_ITEM Index="77" Name="DI_TM_Safety_Door_Colse" Device="" Addr="w24.13" />
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<DI_ITEM Index="77" Name="DI_TM_Safety_Door_Colse" Device="" Addr="w24.13" />
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- <!--<DI_ITEM Index="78" Name="DI_ESC_Inner_Coolant_Flow_SW" Device="" Addr="w24.14" />
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- <DI_ITEM Index="79" Name="DI_ESC_Outer_Coolant_Flow_SW" Device="" Addr="w24.15" />-->
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+ <DI_ITEM Index="78" Name="DI_ESC_Inner_Coolant_Flow_SW" Device="" Addr="w24.14" />
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+ <DI_ITEM Index="79" Name="DI_ESC_Outer_Coolant_Flow_SW" Device="" Addr="w24.15" />
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<DI_ITEM Index="80" Name="DI_Top_Plate_Coolant_Flow_SW" Device="" Addr="w25.00" />
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<DI_ITEM Index="80" Name="DI_Top_Plate_Coolant_Flow_SW" Device="" Addr="w25.00" />
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<DI_ITEM Index="81" Name="" />
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<DI_ITEM Index="81" Name="" />
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<DI_ITEM Index="82" Name="" />
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<DI_ITEM Index="82" Name="" />
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<DI_ITEM Index="83" Name="DI_Lid_Servo_Alarm" Device="" Addr="w25.03" />
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<DI_ITEM Index="83" Name="DI_Lid_Servo_Alarm" Device="" Addr="w25.03" />
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- <!--<DI_ITEM Index="84" Name="DI_ADAM-1_communication_Alarm" Device="" Addr="w25.04" />
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- <DI_ITEM Index="85" Name="DI_ADAM-2_communication_Alarm" Device="" Addr="w25.05" />-->
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+ <DI_ITEM Index="84" Name="DI_ADAM-1_communication_Alarm" Device="" Addr="w25.04" />
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+ <DI_ITEM Index="85" Name="DI_ADAM-2_communication_Alarm" Device="" Addr="w25.05" />
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<DI_ITEM Index="86" Name="" />
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<DI_ITEM Index="86" Name="" />
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- <!--<DI_ITEM Index="87" Name="DI_ESC_inner_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.07" />
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+ <DI_ITEM Index="87" Name="DI_ESC_inner_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.07" />
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<DI_ITEM Index="88" Name="DI_ESC_inner_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.08" />
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<DI_ITEM Index="88" Name="DI_ESC_inner_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.08" />
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<DI_ITEM Index="89" Name="DI_ESC_outer_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.09" />
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<DI_ITEM Index="89" Name="DI_ESC_outer_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.09" />
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<DI_ITEM Index="90" Name="DI_ESC_outer_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.10" />
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<DI_ITEM Index="90" Name="DI_ESC_outer_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.10" />
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<DI_ITEM Index="91" Name="DI_Top_Plate_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.11" />
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<DI_ITEM Index="91" Name="DI_Top_Plate_coolant_inlet_TC_Broken_Alarm" Device="" Addr="w25.11" />
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- <DI_ITEM Index="92" Name="DI_Top_Plate_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.12" />-->
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+ <DI_ITEM Index="92" Name="DI_Top_Plate_coolant_outlet_TC_Broken_Alarm" Device="" Addr="w25.12" />
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<DI_ITEM Index="93" Name="" />
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<DI_ITEM Index="93" Name="" />
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<DI_ITEM Index="94" Name="" />
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<DI_ITEM Index="94" Name="" />
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<DI_ITEM Index="95" Name="" />
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<DI_ITEM Index="95" Name="" />
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@@ -144,8 +144,8 @@
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<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
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<DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
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<DO_ITEM Index="24" Name="DO_Slit_Door_Open" Device="PV4" Addr="w1.08" />
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<DO_ITEM Index="24" Name="DO_Slit_Door_Open" Device="PV4" Addr="w1.08" />
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<DO_ITEM Index="25" Name="DO_Slit_Door_Close" Device="PV4" Addr="w1.09" />
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<DO_ITEM Index="25" Name="DO_Slit_Door_Close" Device="PV4" Addr="w1.09" />
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- <DO_ITEM Index="26" Name="" />
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- <DO_ITEM Index="27" Name="" />
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+ <DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
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+ <DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
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<DO_ITEM Index="28" Name="" />
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<DO_ITEM Index="28" Name="" />
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<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
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<DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
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<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
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<DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
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