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@@ -54,7 +54,8 @@ namespace Venus_Simulator.Instances
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SetDefaultValue(ModuleName.PMA, SimulatorJetChamber.CurrentPMAChamber);
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SetDefaultValue(ModuleName.PMB, SimulatorJetChamber.CurrentPMBChamber);
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- SetTMDefaultValue();
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+ SetDefaultValue(ModuleName.PMC, SimulatorJetChamber.CurrentPMCChamber);
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+ SetTMDefaultValue();
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@@ -66,194 +67,266 @@ namespace Venus_Simulator.Instances
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private void SetDefaultValue(ModuleName mod,JetChamber jetChamber)
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{
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- if (jetChamber == JetChamber.Venus)
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+ switch (jetChamber)
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{
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- // chamber
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- IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
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- IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
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- IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
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- IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
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- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
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-
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- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
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- IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
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- IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
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- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
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+ case JetChamber.Venus:
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+ IO.DI[$"{mod}.DI_PM_Lid_Closed"].Value = true;
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+ IO.DI[$"{mod}.DI_PM_ATM_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_PM_VAC_SW"].Value = false;
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+ IO.DI[$"{mod}.DI_PCW_Flow_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
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+
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+ IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
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+ IO.DI[$"{mod}.DI_RF_Generator_Interlock"].Value = true;
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+ IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
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+ IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
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+
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+ IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
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+ IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
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+ IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
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+
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+ IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
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+
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+ IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
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+ IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
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+ IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
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+
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+ IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
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+ IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
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+ IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
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+
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+ IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
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+ IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
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+
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+ IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
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+
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+ IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
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+
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+ IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
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+ IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
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+ IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
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+
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+ IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
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+ IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
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+ IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
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+
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- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
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- IO.DI[$"{mod}.DI_CDA_Pressure"].Value = true;
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- IO.DI[$"{mod}.DI_Coolant_Inlet_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Coolant_Outlet_TC_Broken_Alarm"].Value = true;
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-
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- IO.DI[$"{mod}.DI_Chamber_Pressure_10t_Gauge_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Process_Pressure_100mt_Gauge_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Chamber_Pressure_760t_Gauge_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_Pressure_760t_Gauge_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_LL_Pressure_760t_Gauge_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
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-
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- IO.DI[$"{mod}.DI_Valve_TC_Deviation_out_of_range"].Value = false;
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- IO.DI[$"{mod}.DI_Valve_Control_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Valve_Monitor_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Valve_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
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-
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- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
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-
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- IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_OT_SW_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_PN2_Pressure_SW"].Value = true;
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-
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- IO.DI[$"{mod}.DI_MFC1_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_MFC2_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_MFC3_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_MFC4_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_MFC5_Pressure_SW"].Value = true;
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-
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- IO.DI[$"{mod}.DI_MFC6_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_MFC7_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_MFC8_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_He_Pressure_SW"].Value = true;
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- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Gauge_Alarm"].Value = false;
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-
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- IO.DI[$"{mod}.DI_Loadlock_Lid_Closed"].Value = true;
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- IO.DI[$"{mod}.DI_Loadlock_Arm_Extend_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Loadlock_Arm_Retract_POS"].Value = true;
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- IO.DI[$"{mod}.DI_Small_Wafer_In_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Big_Wafer_In_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Loadlock_ATM_SW"].Value = false;
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- IO.DI[$"{mod}.DI_Gas_Box_Door_SW"].Value = true;
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- IO.DI[$"{mod}.DI_Gas_Box_Pressure_SW"].Value = true;
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+ //// pressure
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+ SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
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+ //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
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+ SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
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+ //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
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+ SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
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+ SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
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+ SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
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+ //// Temperature
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- //// pressure
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- SetAiValue($"{mod}.AI_Foreline_Pressure_760t", 5001);
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- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
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- SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
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- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", ATM_PRESSURE);
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- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
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+ SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
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+ SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
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+ SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
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+ SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
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+ SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
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+ SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
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+ SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
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+ //if (mod == ModuleName.PMA)
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+ //{
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+ // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
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+ //}
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+ //else if (mod == ModuleName.PMB)
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+ //{
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+ // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
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+ //}
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- SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
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- SetAiValue($"{mod}.AI_LL_Pressure_760t", ATM_LoadLock_PRESSURE);
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-
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- //// Temperature
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-
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- SetAiValue($"{mod}.AI_Valve_Control_TC_Temp", 28);
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- SetAiValue($"{mod}.AI_Valve_Monitor_TC_Temp", 27);
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- SetAiValue($"{mod}.AI_Fline_Control_TC_Temp", 28);
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- SetAiValue($"{mod}.AI_Fline_Monitor_TC_Temp", 27);
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- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
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- SetAiValue($"{mod}.AI_CHB_Wall_Monitor_TC_Temp", 27);
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- SetAiValue($"{mod}.AI_Coolant_Inlet_Temp", 28);
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- //if (mod == ModuleName.PMA)
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- //{
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- // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 29);
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- //}
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- //else if (mod == ModuleName.PMB)
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- //{
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- // SetAiValue($"{mod}.AI_Coolant_Outlet_Temp", 30);
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- //}
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-
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- // Datetime
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- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
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- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
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- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
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- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
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- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
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- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
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- }
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- else
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- {
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- // chamber
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- IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
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- IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
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- IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
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+ // Datetime
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+ SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
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+ SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
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+ SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
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+ SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
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+ SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
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+ SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
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+ break;
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+ case JetChamber.Kepler2300:
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+ // chamber
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+ IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
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+ IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
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+ IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
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- IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
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+ IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
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- IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
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- IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
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- IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
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- IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
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+ IO.DI[$"{mod}.DI_Lift_Pin_Up_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Lift_Pin_Down_POS"].Value = true;
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+ IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
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+ IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
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+ IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
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- IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
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- IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
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- IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
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+ IO.DI[$"{mod}.DI_Slit_Door_Open_POS"].Value = false;
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+ IO.DI[$"{mod}.DI_Slit_Door_Close_POS"].Value = true;
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+ IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
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-
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-
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- IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
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- IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
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+ IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
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- IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
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- IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
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+ IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
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+ IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
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+ IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
|
|
|
|
|
|
- IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_Control_TC_Broken_Alarm"].Value = false;
|
|
|
|
|
|
- IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_Heater_On_FB"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_OT_Switch_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
|
|
|
|
|
|
- IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
|
|
|
- IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
|
|
|
|
|
|
+ IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_ESC_He_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
|
|
|
|
|
|
+ IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
|
|
|
|
|
|
- //// pressure
|
|
|
- SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
|
|
|
- //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
|
|
|
- SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
|
|
|
- //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
|
|
|
- SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
|
|
|
|
|
|
|
|
|
+ //// pressure
|
|
|
+ SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
|
|
|
+ //SetAiValue($"{mod}.AI_Chamber_Pressure_10t", 5000);
|
|
|
+ SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
|
|
|
+ //SetAiValue($"{mod}.AI_Chamber_Pressure_760t", ATM_PRESSURE);
|
|
|
+ SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
|
|
|
+
|
|
|
+
|
|
|
+
|
|
|
+ //// Temperature
|
|
|
+
|
|
|
+ SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
|
|
|
+
|
|
|
+ SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
|
|
|
+
|
|
|
+ SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
|
|
|
+
|
|
|
+
|
|
|
+ // Datetime
|
|
|
+ SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
|
|
|
+ SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
|
|
|
+ SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
|
|
|
+ SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
|
|
|
+ SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
|
|
|
+ SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
|
|
|
+ break;
|
|
|
+
|
|
|
+ case JetChamber.Kepler2200A:
|
|
|
+ IO.DI[$"{mod}.DI_Lid_Closed"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_ATM_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_VAC_Switch"].Value = false;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_Water_Leak_Sensor"].Value = true;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_Lift_Pin_Up_Position"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_Lift_Pin_Down_Position"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_Source_RF_Generator_Interlock"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_Source_RF_Fan"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_Turbo_Pump_Interlock"].Value = true;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_Slit_Door_Open_Position"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_Slit_Door_Close_Position"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_CDA_Pressure_Switch"].Value = true;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_S_Valve_TC_Deviation_out_of_range"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_S_Valve_Control_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_S_Valve_Monitor_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_S_Valve_Heater_On_FB"].Value = false;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_Foreline_TC_Deviation_out_of_range"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_Foreline_Control_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_Foreline_Monitor_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_Foreline_Heater_On_FB"].Value = false;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_TC_Deviation_out_of_range"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_H-HT_Control_TC_Broken_Alarm"].Value = false;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_CHB_Wall_Monitor_TC_Broken_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_H-HT_Heater_On_FB"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_CHB_H-HT_OT_Switch_Alarm"].Value = false;
|
|
|
+ IO.DI[$"{mod}.DI_PN2_Pressure_Switch"].Value = true;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_MFC1_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC2_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC3_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC4_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC5_Pressure_Switch"].Value = true;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_MFC6_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC7_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_MFC8_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_N2_Purge_Pressure_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_ESC_He_Pressure_100t_Guage_Alarm"].Value = false;
|
|
|
+
|
|
|
+ IO.DI[$"{mod}.DI_Gas_Box_Door_Switch"].Value = true;
|
|
|
+ IO.DI[$"{mod}.DI_Gas_Box_Pressure_Switch"].Value = true;
|
|
|
|
|
|
- //// Temperature
|
|
|
+ //// pressure
|
|
|
+ SetAiValue($"{mod}.AI_Foreline_Pressure_10t", 5001);
|
|
|
+ SetAiValue($"{mod}.AI_Process_Pressure_100mt", 1000);
|
|
|
+ SetAiValue($"{mod}.AI_Chamber_Pressure_Virtual", PROCESS_GAUGE);
|
|
|
|
|
|
- SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
|
|
|
+ //// Temperature
|
|
|
|
|
|
- SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
|
|
|
+ SetAiValue($"{mod}.AI_S_Valve_Control_TC_Temp", 28);
|
|
|
|
|
|
- SetAiValue($"{mod}.AI_CHB_Wall_Control_TC_Temp", 28);
|
|
|
+ SetAiValue($"{mod}.AI_Foreline_Control_TC_Temp", 28);
|
|
|
|
|
|
+ SetAiValue($"{mod}.AI_CHB_H-HT_Control_TC_Temp", 28);
|
|
|
|
|
|
- // Datetime
|
|
|
- SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
|
|
|
- SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
|
|
|
- SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
|
|
|
- SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
|
|
|
- SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
|
|
|
- SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
|
|
|
+ // Datetime
|
|
|
+ SetAiValue($"{mod}.AI_Year", DateTime.Today.Year);
|
|
|
+ SetAiValue($"{mod}.AI_Month", DateTime.Today.Month);
|
|
|
+ SetAiValue($"{mod}.AI_Day", DateTime.Today.Day);
|
|
|
+ SetAiValue($"{mod}.AI_Time", DateTime.Now.Hour);
|
|
|
+ SetAiValue($"{mod}.AI_Minute", DateTime.Now.Minute);
|
|
|
+ SetAiValue($"{mod}.AI_Second", DateTime.Now.Second);
|
|
|
+ break;
|
|
|
}
|
|
|
|
|
|
}
|
Intern01