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@@ -17,50 +17,23 @@
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<converters:BoolToColor x:Key="boolToColor"/>
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<converters:BoolToColor x:Key="boolToColor"/>
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<converters:BoolToColor2 x:Key="boolToColor2"/>
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<converters:BoolToColor2 x:Key="boolToColor2"/>
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<converters:VisibilityToReverse x:Key="VisibilityToReverse"/>
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<converters:VisibilityToReverse x:Key="VisibilityToReverse"/>
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+ <converters:ToBoolMultiValueConverter x:Key="toBoolMultiValueConverter"/>
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+ <converters:ToBoolMultiValueConverter2 x:Key="toBoolMultiValueConverter2"/>
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+ <converters:ToBoolMultiValueConverter3 x:Key="toBoolMultiValueConverter3"/>
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+ <converters:ToBoolMultiValueConverter4 x:Key="toBoolMultiValueConverter4"/>
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+ <converters:BoolToColor5 x:Key="boolToColor5"/>
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+ <converters:BoolToColor4 x:Key="boolToColor4"/>
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</UserControl.Resources>
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</UserControl.Resources>
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<Canvas>
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<Canvas>
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- <!--<ctrls:Chamber Canvas.Left="150" Canvas.Top="500"
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-
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- />-->
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<Image Canvas.Left="200" Canvas.Top="500" Width="150" Height="150" Source="Pack://application:,,,/Venus_Themes;Component/Resources/LoadLock.png">
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<Image Canvas.Left="200" Canvas.Top="500" Width="150" Height="150" Source="Pack://application:,,,/Venus_Themes;Component/Resources/LoadLock.png">
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- <!--<Image.ContextMenu>
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- <ContextMenu Visibility="{Binding WaferIsVisibility,Converter={StaticResource VisibilityToReverse}}">
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- <MenuItem Header="新建晶圆" Command="{Binding NewWaferCommand}"/>
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- </ContextMenu>
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- </Image.ContextMenu>-->
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- </Image>
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- <ctrls:WaferCtrl Canvas.Left="242" Canvas.Top="542" WaferData="{Binding PMAWafer}">
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- <!--<ctrls:WaferCtrl.ContextMenu>
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- <ContextMenu >
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- <MenuItem Header="删除晶圆" Command="{Binding DeleteWaferCommand}" />
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- </ContextMenu>
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- </ctrls:WaferCtrl.ContextMenu>-->
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- </ctrls:WaferCtrl>
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- <!--<Ellipse Stroke="White" Width="80" Height="80" Canvas.Left="235" Canvas.Top="536" Visibility="{Binding PMAWaferIsVisibility}">
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- <Ellipse.ContextMenu>
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- <ContextMenu >
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- <MenuItem Header="删除晶圆" Command="{Binding DeleteWaferCommand}" />
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- </ContextMenu>
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- </Ellipse.ContextMenu>
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- <Ellipse.Fill>
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- <LinearGradientBrush StartPoint="0.5 0" EndPoint="0.5 1">
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- <GradientStop Color="Gray" Offset="0"/>
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- <GradientStop Color="White" Offset="0.7"/>
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- <GradientStop Color="Silver" Offset="1"/>
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- </LinearGradientBrush>
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- </Ellipse.Fill>
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- </Ellipse>-->
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-
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- <ctrls:FlowPipe x:Name="N2Pipe1" Height="8" Width="120" Canvas.Left="90" Canvas.Top="120" IsFlowing="{Binding LoadLockVentValveIsOpen,Mode=TwoWay}">
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-
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- </ctrls:FlowPipe>
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+ </Image>
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+ <ctrls:WaferCtrl Canvas.Left="242" Canvas.Top="542" WaferData="{Binding PMAWafer}"/>
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+ <ctrls:FlowPipe x:Name="N2Pipe1" Height="8" Width="120" Canvas.Left="90" Canvas.Top="120" IsFlowing="{Binding LoadLockVentValveIsOpen,Mode=TwoWay}"/>
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<ctrls:FlowPipe x:Name="purgeFlow2" Height="8" Width="142" Canvas.Left="276" Canvas.Top="220" RotateTransformValue="90" IsFlowing="{Binding LoadLockPumpValveIsOpen,Mode=TwoWay}"/>
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<ctrls:FlowPipe x:Name="purgeFlow2" Height="8" Width="142" Canvas.Left="276" Canvas.Top="220" RotateTransformValue="90" IsFlowing="{Binding LoadLockPumpValveIsOpen,Mode=TwoWay}"/>
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<ctrls:Pump Canvas.Top="360" Canvas.Left="254" Width="35" Height="35" IsOpen="{Binding PumpIsOpen,Mode=TwoWay}">
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<ctrls:Pump Canvas.Top="360" Canvas.Left="254" Width="35" Height="35" IsOpen="{Binding PumpIsOpen,Mode=TwoWay}">
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<ctrls:Pump.ContextMenu>
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<ctrls:Pump.ContextMenu>
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<ContextMenu>
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<ContextMenu>
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- <!--<RadioButton Content="Open" Command="{Binding OpenPumpCommand}" IsChecked="{Binding PumpIsOpen}"/>
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- <RadioButton Content="Close" Command="{Binding ClosePumpCommand}" IsChecked="{Binding PumpIsOpen,Converter={StaticResource boolToBool}}"/>-->
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<MenuItem Header="ON" Command="{Binding OpenPumpCommand}" IsChecked="{Binding PumpIsOpen,Mode=OneWay}" IsEnabled="{Binding PumpIsOpen,Converter={StaticResource boolToBool},Mode=OneWay}"/>
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<MenuItem Header="ON" Command="{Binding OpenPumpCommand}" IsChecked="{Binding PumpIsOpen,Mode=OneWay}" IsEnabled="{Binding PumpIsOpen,Converter={StaticResource boolToBool},Mode=OneWay}"/>
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<MenuItem Header="OFF" Command="{Binding ClosePumpCommand}" IsChecked="{Binding PumpIsOpen,Converter={StaticResource boolToBool},Mode=OneWay}" IsEnabled="{Binding PumpIsOpen,Mode=OneWay}"/>
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<MenuItem Header="OFF" Command="{Binding ClosePumpCommand}" IsChecked="{Binding PumpIsOpen,Converter={StaticResource boolToBool},Mode=OneWay}" IsEnabled="{Binding PumpIsOpen,Mode=OneWay}"/>
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</ContextMenu>
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</ContextMenu>
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@@ -72,10 +45,6 @@
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<customControls:CommonValveControl Status="{Binding LoadLockVentValveIsOpen,Mode=TwoWay}" ValveOrientation="Horizontal" Height="20" Width="20" Canvas.Left="130" Canvas.Top="113" IsCanEdit="True" Tag="28" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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<customControls:CommonValveControl Status="{Binding LoadLockVentValveIsOpen,Mode=TwoWay}" ValveOrientation="Horizontal" Height="20" Width="20" Canvas.Left="130" Canvas.Top="113" IsCanEdit="True" Tag="28" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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<!--<ctrls:FlowPipeValve x:Name="purgevalve" Height="20" Width="24" Canvas.Left="285.5" Canvas.Top="310" RotateTransformValue="90" IsOpen="{Binding PumpValveIsOpen,Mode=TwoWay}"/>-->
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<!--<ctrls:FlowPipeValve x:Name="purgevalve" Height="20" Width="24" Canvas.Left="285.5" Canvas.Top="310" RotateTransformValue="90" IsOpen="{Binding PumpValveIsOpen,Mode=TwoWay}"/>-->
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<customControls:CommonValveControl Status="{Binding LoadLockPumpValveIsOpen,Mode=TwoWay}" ValveOrientation="Vertical" Height="20" Width="20" Canvas.Left="262" Canvas.Top="270" IsCanEdit="True" Tag="29" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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<customControls:CommonValveControl Status="{Binding LoadLockPumpValveIsOpen,Mode=TwoWay}" ValveOrientation="Vertical" Height="20" Width="20" Canvas.Left="262" Canvas.Top="270" IsCanEdit="True" Tag="29" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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-
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- <!--<ctrls:CustomSwitch Height="20" Value=" Slit Door Open " Canvas.Left="100" Canvas.Top="300" IsOpen="{Binding LoadLockDoorIsOpen,Mode=TwoWay}">
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-
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- </ctrls:CustomSwitch>-->
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<Ellipse Width="20" Height="20" Fill="{Binding RtDataValues[PMA.IsSlitDoorClosed],Converter={StaticResource boolToColor2}}" Canvas.Left="70" Canvas.Top="302" Stroke="Silver" StrokeThickness="2"/>
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<Ellipse Width="20" Height="20" Fill="{Binding RtDataValues[PMA.IsSlitDoorClosed],Converter={StaticResource boolToColor2}}" Canvas.Left="70" Canvas.Top="302" Stroke="Silver" StrokeThickness="2"/>
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<Button Height="22" Content=" Slit Door Open " Canvas.Left="100" Canvas.Top="300" Command="{Binding OpenDoorCommand}" Style="{StaticResource SysBtnStyle}" Foreground="White"/>
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<Button Height="22" Content=" Slit Door Open " Canvas.Left="100" Canvas.Top="300" Command="{Binding OpenDoorCommand}" Style="{StaticResource SysBtnStyle}" Foreground="White"/>
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<Ellipse Width="20" Height="20" Fill="{Binding RtDataValues[PMA.IsSlitDoorClosed],Converter={StaticResource boolToColor}}" Canvas.Left="70" Canvas.Top="342" Stroke="Silver" StrokeThickness="2"/>
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<Ellipse Width="20" Height="20" Fill="{Binding RtDataValues[PMA.IsSlitDoorClosed],Converter={StaticResource boolToColor}}" Canvas.Left="70" Canvas.Top="342" Stroke="Silver" StrokeThickness="2"/>
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@@ -131,34 +100,14 @@
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<TextBlock Text="VAC" Canvas.Left="387" Canvas.Top="185"/>
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<TextBlock Text="VAC" Canvas.Left="387" Canvas.Top="185"/>
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<TextBlock Text="N2" Canvas.Left="30" Canvas.Top="116"/>
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<TextBlock Text="N2" Canvas.Left="30" Canvas.Top="116"/>
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<Image Canvas.Left="50" Canvas.Top="110" Width="40" Height="25" Source="Pack://application:,,,/Venus_Themes;Component/Resources/Arrow.png" Stretch="Uniform" />
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<Image Canvas.Left="50" Canvas.Top="110" Width="40" Height="25" Source="Pack://application:,,,/Venus_Themes;Component/Resources/Arrow.png" Stretch="Uniform" />
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- <Image Canvas.Left="200" Canvas.Top="100" Width="141" Height="141" Source="Pack://application:,,,/Venus_Themes;Component/Resources/LoadLock.png">
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- <!--<Image.ContextMenu>
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- <ContextMenu Visibility="{Binding WaferIsVisibility,Converter={StaticResource VisibilityToReverse}}">
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- <MenuItem Header="新建晶圆" Command="{Binding NewWaferCommand}"/>
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- </ContextMenu>
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- </Image.ContextMenu>-->
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- </Image>
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- <!--<Ellipse Stroke="White" Width="80" Height="80" Canvas.Left="231" Canvas.Top="130" Visibility="{Binding WaferInPosSensor.Value,Converter={StaticResource bool2VisibilityConverter}}">
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-
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- <Ellipse.Fill>
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- <LinearGradientBrush StartPoint="0,1" EndPoint="1,1">
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- <GradientStop Color="Silver" Offset="0"/>
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- <GradientStop Color="White" Offset="0.5"/>
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- <GradientStop Color="Gray" Offset="1"/>
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- </LinearGradientBrush>
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- </Ellipse.Fill>
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- </Ellipse>-->
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+ <Image Canvas.Left="200" Canvas.Top="100" Width="141" Height="141" Source="Pack://application:,,,/Venus_Themes;Component/Resources/LoadLock.png"/>
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+
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<ctrls:WaferCtrl Canvas.Left="238" Canvas.Top="140" WaferData="{Binding LLAWafer}"/>
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<ctrls:WaferCtrl Canvas.Left="238" Canvas.Top="140" WaferData="{Binding LLAWafer}"/>
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<Grid Canvas.Left="600" Canvas.Top="120" >
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<Grid Canvas.Left="600" Canvas.Top="120" >
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<Grid.RowDefinitions>
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<Grid.RowDefinitions>
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<RowDefinition Height="30"/>
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<RowDefinition Height="30"/>
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<RowDefinition Height="Auto"/>
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<RowDefinition Height="Auto"/>
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- <!--<RowDefinition Height="30"/>
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- <RowDefinition Height="Auto"/>
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- <RowDefinition Height="Auto"/>
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- <RowDefinition Height="30"/>
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- <RowDefinition Height="Auto"/>-->
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<RowDefinition />
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<RowDefinition />
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</Grid.RowDefinitions>
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</Grid.RowDefinitions>
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@@ -212,6 +161,214 @@
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</StackPanel>
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</StackPanel>
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</Border>
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</Border>
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</Grid>
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</Grid>
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+
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+ <Canvas Canvas.Right="1900" Canvas.Top="-50">
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+
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+
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+ <!--与chamber右上角连接的管道-->
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+ <ctrls:FlowPipe Height="8" Width="40" Canvas.Left="1262" Canvas.Top="275" RotateTransformValue="90" />
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+ <ctrls:FlowPipe Height="8" Width="126" Canvas.Left="1250" Canvas.Top="192" RotateTransformValue="90" />
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+ <ctrls:Pipe2 Canvas.Left="1254" Canvas.Top="285" HorizontalAlignment="Left" VerticalAlignment="Top" RotateTransformValue="-90" />
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+
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+ <ctrls:FlowPipe Height="8" Width="80" Canvas.Left="1252" Canvas.Top="182" />
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+ <ctrls:FlowPipe Height="8" Width="70" Canvas.Left="1264" Canvas.Top="272" />
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+ <TextBlock Text="Guage" Canvas.Left="1272" Canvas.Top="248"/>
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+
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+ <customControls:CommonValveControl ValveOrientation="Horizontal" Status="{Binding GuageValveIsOpen,Mode=TwoWay}" Height="20" Width="20" Canvas.Left="1280" Canvas.Top="265" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Tag="27" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+
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+ <Border BorderBrush="Gray" BorderThickness="0" Width="18" Height="6" Canvas.Left="1315" Canvas.Top="164" >
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+ <Border.RenderTransform>
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+ <RotateTransform Angle="90"/>
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+ </Border.RenderTransform>
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+ <Border.Background>
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+ <LinearGradientBrush StartPoint="0.5 0" EndPoint="0.5 1">
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+ <GradientStop Color="Gray" Offset="0"/>
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+ <GradientStop Color="White" Offset="0.5"/>
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+ <GradientStop Color="Gray" Offset="1"/>
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+ </LinearGradientBrush>
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+ </Border.Background>
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+ </Border>
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+ <Border BorderBrush="Gray" BorderThickness="0" Width="20" Height="6" Canvas.Left="1285" Canvas.Top="188" >
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+ <Border.RenderTransform>
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+ <RotateTransform Angle="90"/>
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+ </Border.RenderTransform>
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+ <Border.Background>
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+ <LinearGradientBrush StartPoint="0.5 0" EndPoint="0.5 1">
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+ <GradientStop Color="Gray" Offset="0"/>
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+ <GradientStop Color="White" Offset="0.5"/>
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+ <GradientStop Color="Gray" Offset="1"/>
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+ </LinearGradientBrush>
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+ </Border.Background>
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+ </Border>
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+ <Ellipse Width="20" Height="20" Canvas.Left="1302" Canvas.Top="150" Fill="{Binding RtDataValues[PMA.IsATM],Converter={StaticResource boolToColor}}" Stroke="Silver" StrokeThickness="2"></Ellipse>
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+ <Ellipse Width="20" Height="20" Canvas.Left="1272" Canvas.Top="200" Fill="{Binding RtDataValues[PMA.IsVAC],Converter={StaticResource boolToColor}}" Stroke="Silver" StrokeThickness="2"></Ellipse>
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+ <TextBlock Text="ATM" Canvas.Left="1300" Canvas.Top="134"/>
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+ <TextBlock Text="VAC" Canvas.Left="1270" Canvas.Top="220"/>
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+ <ctrls:Pipe2 Canvas.Left="1242" Canvas.Top="195" HorizontalAlignment="Left" VerticalAlignment="Top" RotateTransformValue="-90" />
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+
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+
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+
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+ <!--与chamber底部连接的管道-->
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+ <ctrls:FlowPipe Height="8" Width="193" Canvas.Left="860" Canvas.Top="658" IsFlowing="{Binding PVHe1ValveIsOpen}"/>
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+ <ctrls:FlowPipe Height="8" Width="198" Canvas.Left="1055" Canvas.Top="463" RotateTransformValue="90" IsReverse="{Binding PVHe1ValveIsOpen}">
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+ <ctrls:FlowPipe.IsFlowing>
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+ <MultiBinding Converter="{StaticResource toBoolMultiValueConverter2}">
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+ <Binding Path="PVHe1ValveIsOpen"/>
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+ <Binding Path="PVHe2ValveIsOpen"/>
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+ </MultiBinding>
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+ </ctrls:FlowPipe.IsFlowing>
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+ </ctrls:FlowPipe>
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+ <ctrls:FlowPipe Height="8" Width="17" Canvas.Left="1055" Canvas.Top="659" RotateTransformValue="90" IsFlowing="{Binding PVHe2ValveIsOpen}"/>
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+ <ctrls:FlowPipe Height="8" Width="208" Canvas.Left="1057" Canvas.Top="680" IsFlowing="{Binding PVHe2ValveIsOpen}"/>
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+ <ctrls:FlowPipe Height="8" Width="20" Canvas.Left="1266" Canvas.Top="682" RotateTransformValue="90">
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+ <ctrls:FlowPipe.IsFlowing>
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+ <MultiBinding Converter="{StaticResource toBoolMultiValueConverter2}">
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+ <Binding Path="SoftPumpValveIsOpen"/>
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+ <Binding Path="FastPumpValveIsOpen"/>
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+ <Binding Path="TurboPumpPumpingValveIsOpen"/>
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+ <Binding Path="PVHe2ValveIsOpen"/>
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+ </MultiBinding>
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+ </ctrls:FlowPipe.IsFlowing>
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+ </ctrls:FlowPipe>
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+ <ctrls:FlowPipe Height="8" Width="40" Canvas.Left="1265" Canvas.Top="658" />
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+ <ctrls:FlowPipe Height="8" Width="178" Canvas.Left="1266" Canvas.Top="464" RotateTransformValue="90" IsFlowing="{Binding TurboPumpPumpingValveIsOpen}">
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+
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+ </ctrls:FlowPipe>
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+ <ctrls:FlowPipe Height="8" Width="45" Canvas.Left="1266" Canvas.Top="638" RotateTransformValue="90" >
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+ <ctrls:FlowPipe.IsFlowing>
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+ <MultiBinding Converter="{StaticResource toBoolMultiValueConverter2}">
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+ <Binding Path="SoftPumpValveIsOpen"/>
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+ <Binding Path="FastPumpValveIsOpen"/>
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+ <Binding Path="TurboPumpPumpingValveIsOpen"/>
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+ </MultiBinding>
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+ </ctrls:FlowPipe.IsFlowing>
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+ </ctrls:FlowPipe>
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+
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+
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+ <ctrls:Pipe2 Canvas.Left="1060" Canvas.Top="687.8" HorizontalAlignment="Left" VerticalAlignment="Top" RotateTransformValue="-180" />
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+
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+ <ctrls:FlowPipe Height="8" Width="46" Canvas.Left="1213" Canvas.Top="635" >
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+ <ctrls:FlowPipe.IsFlowing>
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+ <MultiBinding Converter="{StaticResource toBoolMultiValueConverter2}">
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+ <Binding Path="SoftPumpValveIsOpen"/>
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+ <Binding Path="FastPumpValveIsOpen"/>
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+ </MultiBinding>
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+ </ctrls:FlowPipe.IsFlowing>
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+ </ctrls:FlowPipe>
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+ <ctrls:FlowPipe Height="8" Width="52" Canvas.Left="1165" Canvas.Top="635" IsFlowing="{Binding SoftPumpValveIsOpen}" />
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+
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+ <ctrls:FlowPipe Height="8" Width="125" Canvas.Left="1219" Canvas.Top="512" RotateTransformValue="90" IsFlowing="{Binding FastPumpValveIsOpen}"/>
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+ <ctrls:FlowPipe Height="8" Width="119" Canvas.Left="1168" Canvas.Top="517" RotateTransformValue="90" IsFlowing="{Binding SoftPumpValveIsOpen}"/>
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+
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+ <ctrls:Pipe2 Canvas.Left="1173" Canvas.Top="643" HorizontalAlignment="Left" VerticalAlignment="Top" RotateTransformValue="-180" />
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+
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+ <ctrls:FlowPipe Height="8" Width="48" Canvas.Left="1165" Canvas.Top="512" HorizontalAlignment="Left" VerticalAlignment="Center" IsReverse="True" IsFlowing="{Binding SoftPumpValveIsOpen}" />
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+ <ctrls:FlowPipe Height="8" Width="50" Canvas.Left="1219" Canvas.Top="463" RotateTransformValue="90">
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+ <ctrls:FlowPipe.IsFlowing>
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+ <MultiBinding Converter="{StaticResource toBoolMultiValueConverter2}">
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+ <Binding Path="SoftPumpValveIsOpen"/>
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+ <Binding Path="FastPumpValveIsOpen"/>
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+ </MultiBinding>
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+ </ctrls:FlowPipe.IsFlowing>
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+ </ctrls:FlowPipe>
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+ <ctrls:Pipe2 Canvas.Left="1160" Canvas.Top="525" HorizontalAlignment="Left" VerticalAlignment="Top" RotateTransformValue="-90" />
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+
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+ <TextBlock Canvas.Left="1130" Canvas.Top="558" Text="Soft"/>
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+ <TextBlock Canvas.Left="1178" Canvas.Top="558" Text="Fast"/>
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+
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+ <ctrls:FlowPipe Height="8" Width="194" Canvas.Left="1246" Canvas.Top="535" IsReverse="True" IsFlowing="{Binding TurboPumpPurgeValveIsOpen,Mode=TwoWay}" >
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+
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+ </ctrls:FlowPipe>
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+ <ctrls:FlowPipe ToolTip="123" Height="8" Width="142" Canvas.Left="1448" Canvas.Top="542" RotateTransformValue="90" IsReverse="True" IsFlowing="{Binding TurboPumpPurgeValveIsOpen}"/>
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+ <ctrls:Pipe2 Canvas.Left="1435" Canvas.Top="535" HorizontalAlignment="Left" VerticalAlignment="Top" />
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+
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+ <customControls:CommonValveControl Status="{Binding TurboPumpPurgeValveIsOpen,Mode=TwoWay}" ValveOrientation="Vertical" Height="20" Width="20" Canvas.Left="1434" Canvas.Top="610" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Tag="26" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+ <TextBlock Text="Turbo N2 Purge" Canvas.Left="1365" Canvas.Top="610" FontSize="15"/>
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+
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+ <TextBlock Text="VHe1" Canvas.Top="636" Canvas.Left="985"/>
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+ <customControls:CommonValveControl ValveOrientation="Horizontal" Height="20" Width="20" Canvas.Top="652" Canvas.Left="990" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Status="{Binding PVHe1ValveIsOpen,Mode=TwoWay}" Tag="19" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+
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+
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+ <TextBlock Text="VHe2" Canvas.Top="658" Canvas.Left="1094"/>
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+
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+ <customControls:CommonValveControl ValveOrientation="Horizontal" Height="20" Width="20" Canvas.Top="674" Canvas.Left="1100" Status="{Binding PVHe2ValveIsOpen,Mode=TwoWay}" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Tag="20" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+ <customControls:CommonValveControl Status="{Binding SoftPumpValveIsOpen,Mode=TwoWay}" ValveOrientation="Vertical" Height="20" Width="20" Canvas.Top="555" Canvas.Left="1154" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Tag="22" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+ <customControls:CommonValveControl Status="{Binding FastPumpValveIsOpen,Mode=TwoWay}" ValveOrientation="Vertical" Height="20" Width="20" Canvas.Top="555" Canvas.Left="1205" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Tag="23" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+ <customControls:CommonValveControl ValveOrientation="Vertical" Height="20" Width="20" Canvas.Top="596" Canvas.Left="1252" Status="{Binding TurboPumpPumpingValveIsOpen,Mode=TwoWay}" IsCanEdit="{Binding IsAutoMode,Converter={StaticResource BoolToBool}}" Tag="25" Command="{Binding ControlValveCommand}" CommandParameter="{Binding RelativeSource={x:Static RelativeSource.Self}}"/>
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+
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+
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+
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+
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|
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+ <!--turbo-->
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|
+ <ctrls:Turbo Width="40" Height="40" Canvas.Top="521" Canvas.Left="1242" IsOpen="{Binding TurboIsOpen}"/>
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+
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|
|
+ <!--蝶阀-->
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|
+ <ctrls:ButterflyValve Canvas.Top="475" Canvas.Left="1245" RotateTransformValue="{Binding PositionValue}" IsOpen="{Binding PendulumValveData.IsOpen,Mode=TwoWay}"/>
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|
|
+
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|
|
+ <Image Canvas.Top="715" Canvas.Left="1425" Width="40" Height="25" Source="Pack://application:,,,/Venus_Themes;Component/Resources/Arrow.png" Stretch="Uniform">
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|
|
+ <Image.RenderTransform>
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|
+ <RotateTransform Angle="-90"/>
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|
|
+ </Image.RenderTransform>
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|
+ </Image>
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|
|
+ <TextBlock Text="N2" Canvas.Top="720" Canvas.Left="1438"/>
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+
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|
+ <Image Canvas.Top="650" Canvas.Left="815" Width="40" Height="25" Source="Pack://application:,,,/Venus_Themes;Component/Resources/Arrow.png" Stretch="Uniform" >
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+
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|
+ </Image>
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|
|
+ <TextBlock Text="Helium" Canvas.Top="653" Canvas.Left="770" FontSize="15"/>
|
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|
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+
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|
+
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|
|
|
+
|
|
|
|
+ <!--chamber管道标签-->
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|
|
+ <ctrls:TextboxWithLabel Canvas.Top="156" Canvas.Left="1326" LabelValue="CM2(mTorr)" TextBoxValue="{Binding ProcessHighPressure,StringFormat='F1'}" TextBoxColor="#D7E4BD"/>
|
|
|
|
+ <ctrls:TextboxWithLabel Canvas.Top="248" Canvas.Left="1318" LabelValue="CM1(mTorr)" TextBoxValue="{Binding ProcessLowPressure,StringFormat='F1'}" TextBoxColor="#D7E4BD"/>
|
|
|
|
+
|
|
|
|
+ <!--<Ellipse Width="20" Height="20" Canvas.Top="651.5" Canvas.Left="775" Fill="{Binding MFCHeData.IsWarning,Converter={StaticResource boolToColor4}}" Stroke="Silver" StrokeThickness="2" ToolTip="Pressure Alarm"></Ellipse>-->
|
|
|
|
+
|
|
|
|
+ <ctrls:TextboxWithLabel Canvas.Top="633" Canvas.Left="1280" LabelValue="CM3(mTorr)" TextBoxValue="{Binding ForelinePressure,StringFormat='F1'}" TextBoxColor="#D7E4BD" />
|
|
|
|
+ <ctrls:TextboxWithLabel Canvas.Top="464" Canvas.Left="1290" LabelValue="Position(‰)" TextBoxValue="{Binding RtDataValues[PMA.GetPVPosition],StringFormat='F0'}" TextBoxColor="#D7E4BD" />
|
|
|
|
+ <ctrls:TextboxWithLabel Canvas.Top="510" Canvas.Left="1330" LabelValue="Flow(sccm)" TextBoxValue="{Binding MFCN2Data.FeedBack,StringFormat='F1'}" TextBoxColor="#D7E4BD" />
|
|
|
|
+ <!--<ctrls:TextboxWithLabel Canvas.Top="510" Canvas.Left="1367" TextBoxValue="{Binding N2SetPoint,Mode=TwoWay}" IsReadOnly="False" LabelValue="Turbo N2" ToolTip="{Binding MFCN2Data.SetPoint,StringFormat='F1'}" TextBoxColor="White" />-->
|
|
|
|
+
|
|
|
|
+ <!--<ctrls:TextboxWithLabel Canvas.Top="556" Canvas.Left="952" LabelValue="Pressure(mTorr)" TextBoxValue="{Binding ESCHePressure,StringFormat='F1'}" TextBoxColor="#D7E4BD"/>
|
|
|
|
+ <Border BorderBrush="Gray" BorderThickness="0" Width="15" Height="6" Canvas.Top="581" Canvas.Left="1033">
|
|
|
|
+ <Border.Background>
|
|
|
|
+ <LinearGradientBrush StartPoint="0.5 0" EndPoint="0.5 1">
|
|
|
|
+ <GradientStop Color="Gray" Offset="0"/>
|
|
|
|
+ <GradientStop Color="White" Offset="0.5"/>
|
|
|
|
+ <GradientStop Color="Gray" Offset="1"/>
|
|
|
|
+ </LinearGradientBrush>
|
|
|
|
+ </Border.Background>
|
|
|
|
+ </Border>-->
|
|
|
|
+ <!--<ctrls:TextboxWithLabel Canvas.Top="506" Canvas.Left="964" LabelValue="Flow(sccm)" TextBoxValue="{Binding MFCHeData.FeedBack,StringFormat='F1'}" TextBoxColor="#D7E4BD"/>
|
|
|
|
+ <Border BorderBrush="Gray" BorderThickness="0" Width="15" Height="6" Canvas.Top="531" Canvas.Left="1033">
|
|
|
|
+ <Border.Background>
|
|
|
|
+ <LinearGradientBrush StartPoint="0.5 0" EndPoint="0.5 1">
|
|
|
|
+ <GradientStop Color="Gray" Offset="0"/>
|
|
|
|
+ <GradientStop Color="White" Offset="0.5"/>
|
|
|
|
+ <GradientStop Color="Gray" Offset="1"/>
|
|
|
|
+ </LinearGradientBrush>
|
|
|
|
+ </Border.Background>
|
|
|
|
+ </Border>-->
|
|
|
|
+ <ctrls:TextboxWithLabel Canvas.Top="550" Canvas.Left="1280" LabelValue="Speed(rpm)" TextBoxValue="{Binding TurboPumpRotationalSpeed}" TextBoxColor="#D7E4BD" />
|
|
|
|
+ <TextBlock Canvas.Top="600" Canvas.Left="1280" Text="ISO"/>
|
|
|
|
+
|
|
|
|
+
|
|
|
|
+
|
|
|
|
+ <!--Chamber-->
|
|
|
|
+ <ctrls:Chamber Canvas.Left="1034" Canvas.Top="224"
|
|
|
|
+ IsLiftPinUp="{Binding LiftPinIsUp}"
|
|
|
|
+ IsOpenSlitDoor="{Binding IsSlitDoorClosed,Converter={StaticResource BoolToBool}}"
|
|
|
|
+ IsLidOpen="{Binding IsLidClosed,Converter={StaticResource BoolToBool}}"
|
|
|
|
+ IsBRFOn="{Binding BRFData.IsRfOn}"
|
|
|
|
+ IsSRFOn="{Binding SRFData.IsRfOn}"
|
|
|
|
+ IsHasWafer="{Binding IsHasWafer}"
|
|
|
|
+ />
|
|
|
|
+
|
|
|
|
+ <ctrls:Pump Canvas.Top="700" Canvas.Left="1244" Width="35" Height="35" IsOpen="{Binding PumpIsOpen,Mode=TwoWay}"/>
|
|
|
|
+ <TextBlock Text="Rough Pump" Canvas.Top="734" Canvas.Left="1220" FontSize="15"/>
|
|
|
|
+
|
|
|
|
|
|
|
|
+ </Canvas>
|
|
</Canvas>
|
|
</Canvas>
|
|
</UserControl>
|
|
</UserControl>
|