修复TM跑片bug

Pm 跑recipe abort添加关闭hv功能

Venus/Venus_MainPages/ViewModels/OperationOverViewModel.cs

@@ -731,7 +731,7 @@ namespace Venus_MainPages.ViewModels
                     Robot2TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true);
                     await Task.Delay(600);
                     Robot2XAction = WaferRobotXAction.Extend;
-                    while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0].WaferStatus == 0))
+                    while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1].WaferStatus == 0))
                     {
                         await Task.Delay(100);
                     }

Venus/Venus_MainPages/ViewModels/TMViewModel.cs

@@ -194,7 +194,7 @@ namespace Venus_MainPages.ViewModels
                 if (arm == "ArmA")
                 {
                     Robot1TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true);
-                    await Task.Delay(1100);
+                    await Task.Delay(600);
                     Robot1XAction = WaferRobotXAction.Extend;
                     //await Task.Delay(3000);
                     while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0].WaferStatus!= 0)|| (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[0].WaferStatus == 0))
@@ -206,7 +206,7 @@ namespace Venus_MainPages.ViewModels
                 else if (arm == "ArmB")
                 {
                     Robot2TAction = (WaferRobotTAction)Enum.Parse(typeof(WaferRobotTAction), module, true);
-                    await Task.Delay(1100);
+                    await Task.Delay(600);
                     Robot2XAction = WaferRobotXAction.Extend;
                     while ((newValue.Action == RobotAction.Placing && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1].WaferStatus != 0) || (newValue.Action == RobotAction.Picking && ModuleManager.ModuleInfos["TMRobot"].WaferManager.Wafers[1].WaferStatus == 0))
                     {

Venus/Venus_RT/Modules/PMs/PMProcessRoutine.cs

@@ -469,6 +469,7 @@ namespace Venus_RT.Modules.PMs
             _chamber.GeneratorBiasPowerOn(false);
             _chamber.GeneratorPowerOn(false);
             _chamber.TurnPendulumValve(false);
+            _chamber.OnOffSetESCHV(false);
             CloseAllValves();
             _chamber.OpenValve(ValveType.TurboPumpPumping, true);
             _chamber.OpenValve(ValveType.TurboPumpPurge, true);