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@@ -283,8 +283,21 @@
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<config default="50" name="WithPMPressureDifference" nameView="TM PM Pressure Difference" description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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<config default="50" name="WithPMPressureDifference" nameView="TM PM Pressure Difference" description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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<config default="0" name="SingleArmOption" nameView="Single Arm Option" description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="SingleArmOption" nameView="Single Arm Option" description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="QueryAWCOption" nameView="Query AWC Option" description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="QueryAWCOption" nameView="Query AWC Option" description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <configs name="TM_MFC1" nameView="MFC1" >
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+ <config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
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+ <config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
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+ <config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
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+ <config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
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+ <config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
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+ <config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
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+ <config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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+ <config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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+ </configs>
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<configs name="DryPump" nameView="Dry Pump" >
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<configs name="DryPump" nameView="Dry Pump" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -315,7 +328,11 @@
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<config default="760000" name="ATMTargetPressure" nameView="VCE ATM Target Pressure" description="TM ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
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<config default="760000" name="ATMTargetPressure" nameView="VCE ATM Target Pressure" description="TM ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
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<config default="25" name="SlotNumber" nameView="VCE SlotNumber" description="槽位个数" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="25" name="SlotNumber" nameView="VCE SlotNumber" description="槽位个数" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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-
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+ <configs name="SMIF" nameView="SMIF" >
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+ <config default="1" name="Manufacturer" nameView="Manufacturer" description="厂商, 1:Fortrend;" max="2" min="1" paramter="" tag="" unit="" type="Integer" />
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+ <config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="COM24" name="Port" nameView="Port" description="serial port" max="" min="" paramter="" tag="" unit="" type="String" />
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+ </configs>
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</configs>
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</configs>
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<!--PMA-->
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<!--PMA-->
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@@ -646,6 +663,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas10" nameView="MFC Gas10" >
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<configs name="MfcGas10" nameView="MFC Gas10" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
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@@ -659,6 +677,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas11" nameView="MFC Gas8" >
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<configs name="MfcGas11" nameView="MFC Gas8" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
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@@ -672,6 +691,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas12" nameView="MFC Gas12" >
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<configs name="MfcGas12" nameView="MFC Gas12" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
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@@ -685,6 +705,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcN2" nameView="MFC N2" >
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<configs name="MfcN2" nameView="MFC N2" >
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<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
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@@ -1242,6 +1263,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas10" nameView="MFC Gas10" >
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<configs name="MfcGas10" nameView="MFC Gas10" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
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@@ -1255,6 +1277,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas11" nameView="MFC Gas8" >
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<configs name="MfcGas11" nameView="MFC Gas8" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
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@@ -1268,6 +1291,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas12" nameView="MFC Gas12" >
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<configs name="MfcGas12" nameView="MFC Gas12" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
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@@ -1281,6 +1305,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcN2" nameView="MFC N2" >
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<configs name="MfcN2" nameView="MFC N2" >
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<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
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@@ -1838,6 +1863,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas10" nameView="MFC Gas10" >
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<configs name="MfcGas10" nameView="MFC Gas10" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
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@@ -1851,6 +1877,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas11" nameView="MFC Gas8" >
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<configs name="MfcGas11" nameView="MFC Gas8" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
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@@ -1864,6 +1891,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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<configs name="MfcGas12" nameView="MFC Gas12" >
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<configs name="MfcGas12" nameView="MFC Gas12" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
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@@ -1877,6 +1905,7 @@
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
|
+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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|
<configs name="MfcN2" nameView="MFC N2" >
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<configs name="MfcN2" nameView="MFC N2" >
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<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
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<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
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|
@@ -2434,6 +2463,7 @@
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
|
+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
</configs>
|
|
</configs>
|
|
<configs name="MfcGas10" nameView="MFC Gas10" >
|
|
<configs name="MfcGas10" nameView="MFC Gas10" >
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
|
|
@@ -2447,6 +2477,7 @@
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
|
+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
</configs>
|
|
</configs>
|
|
<configs name="MfcGas11" nameView="MFC Gas8" >
|
|
<configs name="MfcGas11" nameView="MFC Gas8" >
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
|
|
@@ -2460,6 +2491,7 @@
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
|
+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
</configs>
|
|
</configs>
|
|
<configs name="MfcGas12" nameView="MFC Gas12" >
|
|
<configs name="MfcGas12" nameView="MFC Gas12" >
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
|
|
@@ -2473,6 +2505,7 @@
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
|
|
|
|
+ <config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
|
|
</configs>
|
|
</configs>
|
|
<configs name="MfcN2" nameView="MFC N2" >
|
|
<configs name="MfcN2" nameView="MFC N2" >
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
|
|
<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
|