|
@@ -2,59 +2,59 @@
|
|
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
|
|
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
|
|
|
|
|
|
<!--文件根据IO list_Venus样机_V1.0_2022_08_26.xlsx生成-->
|
|
<!--文件根据IO list_Venus样机_V1.0_2022_08_26.xlsx生成-->
|
|
- <!--生成时间:09/07/2022 17:09:44-->
|
|
|
|
|
|
+ <!--生成时间:09/15/2022 10:50:11-->
|
|
<Dig_In>
|
|
<Dig_In>
|
|
- <DI_ITEM Index="0" Name="DI_PM_Lid_Closed" Device="" Addr="Interlock-HW" Note="w20.00" />
|
|
|
|
- <DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="Interlock-PLC" Note="w20.01" />
|
|
|
|
- <DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="" Addr="Interlock-HW" Note="w20.02" />
|
|
|
|
- <DI_ITEM Index="3" Name="DI_PCW_Flow_SW" Device="" Addr="Interlock-HW,冷却水流量开关" Note="w20.03" />
|
|
|
|
- <DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="1=normal, 0=alarm" Note="w20.04" />
|
|
|
|
- <DI_ITEM Index="5" Name="DI_Lift_Pin_Up_POS" Device="" Addr="1=on, 0=off" Note="w20.05" />
|
|
|
|
- <DI_ITEM Index="6" Name="DI_Lift_Pin_Down_POS" Device="" Addr="1=on, 0=off" Note="w20.06" />
|
|
|
|
- <DI_ITEM Index="7" Name="DI_Generator_Hardware_Interlock" Device="" Addr="1=RF interlock normal, 0=RF interlock off" Note="w20.07" />
|
|
|
|
- <DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="1=normal, 0=alarm, Interlock-HW" Note="w20.08" />
|
|
|
|
- <DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="1= interlock normal, 0= interlock off" Note="w20.09" />
|
|
|
|
- <DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="Interlock-HW" Note="w20.10" />
|
|
|
|
- <DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="Interlock-HW" Note="w20.11" />
|
|
|
|
- <DI_ITEM Index="12" Name="DI_CDA_Pressure" Device="" Addr="1=normal, 0=alarm" Note="w20.12" />
|
|
|
|
- <DI_ITEM Index="13" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w20.13" />
|
|
|
|
- <DI_ITEM Index="14" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w20.14" />
|
|
|
|
- <DI_ITEM Index="15" Name="DI_Process_Vacuum_Gauge_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w20.15" />
|
|
|
|
- <DI_ITEM Index="16" Name="DI_Chamber_Vacuum_Gauge_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.00" />
|
|
|
|
- <DI_ITEM Index="17" Name="DI_Chamber_Vacuum_Gauge_2_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.01" />
|
|
|
|
- <DI_ITEM Index="18" Name="DI_Foreline_Vacuum_Gauge_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.02" />
|
|
|
|
- <DI_ITEM Index="19" Name="DI_Loadlock_Vacuum_Gauge_Alarm" Device="" Addr="0=normal, 1=alarm, Loadlock Config" Note="w21.03" />
|
|
|
|
- <DI_ITEM Index="20" Name="DI_Valve_TC_Deviation_out_of_range" Device="" Addr="0=normal, 1=alarm" Note="w21.04" />
|
|
|
|
- <DI_ITEM Index="21" Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.05" />
|
|
|
|
- <DI_ITEM Index="22" Name="DI_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.06" />
|
|
|
|
- <DI_ITEM Index="23" Name="DI_Valve_Heater_On_FB" Device="" Addr="0=off, 1=on" Note="w21.07" />
|
|
|
|
- <DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="0=normal, 1=alarm" Note="w21.08" />
|
|
|
|
- <DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.09" />
|
|
|
|
- <DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.10" />
|
|
|
|
- <DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="0=off, 1=on" Note="w21.11" />
|
|
|
|
- <DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="0=normal, 1=alarm" Note="w21.12" />
|
|
|
|
- <DI_ITEM Index="29" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.13" />
|
|
|
|
- <DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w21.14" />
|
|
|
|
- <DI_ITEM Index="31" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="0=off, 1=on" Note="w21.15" />
|
|
|
|
- <DI_ITEM Index="32" Name="DI_CHB_Wall_OT_SW_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w22.00" />
|
|
|
|
- <DI_ITEM Index="33" Name="DI_GB_Interlock" Device="" Addr="1= interlock normal, 0= interlock off" Note="w22.01" />
|
|
|
|
- <DI_ITEM Index="34" Name="DI_PN2_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.02" />
|
|
|
|
- <DI_ITEM Index="35" Name="DI_MFC1_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.03" />
|
|
|
|
- <DI_ITEM Index="36" Name="DI_MFC2_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.04" />
|
|
|
|
- <DI_ITEM Index="37" Name="DI_MFC3_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.05" />
|
|
|
|
- <DI_ITEM Index="38" Name="DI_MFC4_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.06" />
|
|
|
|
- <DI_ITEM Index="39" Name="DI_MFC5_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.07" />
|
|
|
|
- <DI_ITEM Index="40" Name="DI_MFC6_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.08" />
|
|
|
|
- <DI_ITEM Index="41" Name="DI_MFC7_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.09" />
|
|
|
|
- <DI_ITEM Index="42" Name="DI_MFC8_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.10" />
|
|
|
|
- <DI_ITEM Index="43" Name="DI_He_Pressure_SW" Device="" Addr="1=normal, 0=alarm, Interlock-PLC" Note="w22.11" />
|
|
|
|
- <DI_ITEM Index="44" Name="DI_Gas_pressure_gauge_Alarm" Device="" Addr="0=normal, 1=alarm" Note="w22.12" />
|
|
|
|
- <DI_ITEM Index="45" Name="DI_Loadlock_Lid_Closed" Device="" Addr="Loadlock" Note="w22.13" />
|
|
|
|
- <DI_ITEM Index="46" Name="DI_Loadlock_Arm_Extend_POS" Device="" Addr="" Note="w22.14" />
|
|
|
|
- <DI_ITEM Index="47" Name="DI_Loadlock_Arm_Retract_POS" Device="" Addr="" Note="w22.15" />
|
|
|
|
- <DI_ITEM Index="48" Name="DI_Small_Wafer_In_POS" Device="" Addr="" Note="w23.00" />
|
|
|
|
- <DI_ITEM Index="49" Name="DI_Big_Wafer_In_POS" Device="" Addr="" Note="w23.01" />
|
|
|
|
- <DI_ITEM Index="50" Name="DI_Loadlock_ATM_SW" Device="" Addr="" Note="w23.02" />
|
|
|
|
|
|
+ <DI_ITEM Index="0" Name="DI_PM_Lid_Closed" Device="" Addr="w20.00" Note="Interlock-HW" />
|
|
|
|
+ <DI_ITEM Index="1" Name="DI_PM_ATM_SW" Device="" Addr="w20.01" Note="Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="2" Name="DI_PM_VAC_SW" Device="" Addr="w20.02" Note="Interlock-HW" />
|
|
|
|
+ <DI_ITEM Index="3" Name="DI_PCW_Flow_SW" Device="" Addr="w20.03" Note="Interlock-HW,冷却水流量开关" />
|
|
|
|
+ <DI_ITEM Index="4" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" Note="1=normal, 0=alarm" />
|
|
|
|
+ <DI_ITEM Index="5" Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" Note="1=on, 0=off" />
|
|
|
|
+ <DI_ITEM Index="6" Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" Note="1=on, 0=off" />
|
|
|
|
+ <DI_ITEM Index="7" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.07" Note="1=RF interlock normal, 0=RF interlock off" />
|
|
|
|
+ <DI_ITEM Index="8" Name="DI_Source_RF_Fan" Device="" Addr="w20.08" Note="1=normal, 0=alarm, Interlock-HW" />
|
|
|
|
+ <DI_ITEM Index="9" Name="DI_Turbo_Pump_Interlock" Device="" Addr="w20.09" Note="1= interlock normal, 0= interlock off" />
|
|
|
|
+ <DI_ITEM Index="10" Name="DI_Slit_Door_Open_POS" Device="" Addr="w20.10" Note="Interlock-HW" />
|
|
|
|
+ <DI_ITEM Index="11" Name="DI_Slit_Door_Close_POS" Device="" Addr="w20.11" Note="Interlock-HW" />
|
|
|
|
+ <DI_ITEM Index="12" Name="DI_CDA_Pressure" Device="" Addr="w20.12" Note="1=normal, 0=alarm" />
|
|
|
|
+ <DI_ITEM Index="13" Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="" Addr="w20.13" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="14" Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="" Addr="w20.14" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="15" Name="DI_Process_Vacuum_Gauge_Alarm" Device="" Addr="w20.15" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="16" Name="DI_Chamber_Vacuum_Gauge_Alarm" Device="" Addr="w21.00" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="17" Name="DI_Chamber_Vacuum_Gauge_2_Alarm" Device="" Addr="w21.01" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="18" Name="DI_Foreline_Vacuum_Gauge_Alarm" Device="" Addr="w21.02" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="19" Name="DI_Loadlock_Vacuum_Gauge_Alarm" Device="" Addr="w21.03" Note="0=normal, 1=alarm, Loadlock Config" />
|
|
|
|
+ <DI_ITEM Index="20" Name="DI_Valve_TC_Deviation_out_of_range" Device="" Addr="w21.04" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="21" Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="22" Name="DI_Valve_Monitor_TC_Broken_Alarm" Device="" Addr="w21.06" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="23" Name="DI_Valve_Heater_On_FB" Device="" Addr="w21.07" Note="0=off, 1=on" />
|
|
|
|
+ <DI_ITEM Index="24" Name="DI_Foreline_TC_Deviation_out_of_range" Device="" Addr="w21.08" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="25" Name="DI_Foreline_Control_TC_Broken_Alarm" Device="" Addr="w21.09" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="26" Name="DI_Foreline_Monitor_TC_Broken_Alarm" Device="" Addr="w21.10" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="27" Name="DI_Foreline_Heater_On_FB" Device="" Addr="w21.11" Note="0=off, 1=on" />
|
|
|
|
+ <DI_ITEM Index="28" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="" Addr="w21.12" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="29" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="" Addr="w21.13" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="30" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="" Addr="w21.14" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="31" Name="DI_CHB_Wall_Heater_On_FB" Device="" Addr="w21.15" Note="0=off, 1=on" />
|
|
|
|
+ <DI_ITEM Index="32" Name="DI_CHB_Wall_OT_SW_Alarm" Device="" Addr="w22.00" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="33" Name="DI_GB_Interlock" Device="" Addr="w22.01" Note="1= interlock normal, 0= interlock off" />
|
|
|
|
+ <DI_ITEM Index="34" Name="DI_PN2_Pressure_SW" Device="" Addr="w22.02" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="35" Name="DI_MFC1_Pressure_SW" Device="" Addr="w22.03" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="36" Name="DI_MFC2_Pressure_SW" Device="" Addr="w22.04" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="37" Name="DI_MFC3_Pressure_SW" Device="" Addr="w22.05" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="38" Name="DI_MFC4_Pressure_SW" Device="" Addr="w22.06" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="39" Name="DI_MFC5_Pressure_SW" Device="" Addr="w22.07" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="40" Name="DI_MFC6_Pressure_SW" Device="" Addr="w22.08" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="41" Name="DI_MFC7_Pressure_SW" Device="" Addr="w22.09" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="42" Name="DI_MFC8_Pressure_SW" Device="" Addr="w22.10" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="43" Name="DI_He_Pressure_SW" Device="" Addr="w22.11" Note="1=normal, 0=alarm, Interlock-PLC" />
|
|
|
|
+ <DI_ITEM Index="44" Name="DI_Gas_pressure_gauge_Alarm" Device="" Addr="w22.12" Note="0=normal, 1=alarm" />
|
|
|
|
+ <DI_ITEM Index="45" Name="DI_Loadlock_Lid_Closed" Device="" Addr="w22.13" Note="Loadlock" />
|
|
|
|
+ <DI_ITEM Index="46" Name="DI_Loadlock_Arm_Extend_POS" Device="" Addr="w22.14" />
|
|
|
|
+ <DI_ITEM Index="47" Name="DI_Loadlock_Arm_Retract_POS" Device="" Addr="w22.15" />
|
|
|
|
+ <DI_ITEM Index="48" Name="DI_Small_Wafer_In_POS" Device="" Addr="w23.00" />
|
|
|
|
+ <DI_ITEM Index="49" Name="DI_Big_Wafer_In_POS" Device="" Addr="w23.01" />
|
|
|
|
+ <DI_ITEM Index="50" Name="DI_Loadlock_ATM_SW" Device="" Addr="w23.02" />
|
|
<DI_ITEM Index="51" Name="" />
|
|
<DI_ITEM Index="51" Name="" />
|
|
<DI_ITEM Index="52" Name="" />
|
|
<DI_ITEM Index="52" Name="" />
|
|
<DI_ITEM Index="53" Name="" />
|
|
<DI_ITEM Index="53" Name="" />
|