TM IO配置更新

Venus/Venus_RT/Config/TM/TMInterlock.xml

@@ -118,6 +118,18 @@
     <Limit di="DI_LLA_ATM_Switch"				value="false" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
     <Limit do="DO_TM_VAC_ATM_MODE"				value="false" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
 	</Action>
+
+  <Action do="DO_LLA_Slit_Door_T_Open"					value="true" tip="Loadlock A TM Side Door Open"		tip.zh-CN="" tip.en-US="DO-13" >
+    <Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLA"			value="true" tip="EFEM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-11" />
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLA_E_Slit_Door_close_Position"	value="true" tip="LLA EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-23" />
+    <Limit di="DI_LLA_Lid_Door_Closed"				value="true" tip="LLA Lid Closed"					tip.zh-CN="" tip.en-US="DI-26" />
+    <Limit di="DI_LLA_VAC_Switch"				value="false" tip="LLA VAC Switch"					tip.zh-CN="" tip.en-US="DI-34" />
+    <Limit di="DI_LLA_ATM_Switch"				value="true" tip="LLA ATM Switch"					tip.zh-CN="" tip.en-US="DI-35" />
+    <Limit do="DO_TM_VAC_ATM_MODE"				value="true" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
+  </Action>
   
 	<Action do="DO_LLA_Slit_Door_T_Close"				value="true" tip="Loadlock A TM Side Door Close"	tip.zh-CN="" tip.en-US="DO-14" >
 		<Limit di="DI_TM_RB_Not_Extend_LLA"				value="true" tip="TM Robot Net Extend to LLA"		tip.zh-CN="" tip.en-US="DI-8" />
@@ -144,7 +156,7 @@
     <Limit do="DO_Vent_Valve_LLB"				value="false" tip="Vent Valve LLB"			tip.zh-CN="" tip.en-US="DO-19" />
   </Action>
 
-  <Action do="DO_Fast_Pumping_Valve_LLB"					value="true" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" >
+  <Action do="DO_Purge_Valve_LLB"					value="true" tip="Purge Valve LLB"		tip.zh-CN="" tip.en-US="DO-18" >
     <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
     <Limit di="DI_N2_Pressure_Switch"			value="true" tip="N2 Pressure Switch"		tip.zh-CN="" tip.en-US="DI-21" />
     <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
@@ -190,6 +202,18 @@
     <Limit di="DI_LLB_ATM_Switch"				value="false" tip="LLB ATM Switch"			tip.zh-CN="" tip.en-US="DI-37" />
     <Limit do="DO_TM_VAC_ATM_MODE"				value="false" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
 	</Action>
+
+  <Action do="DO_LLB_Slit_Door_T_Open"					value="true" tip="LLB Slit Door/O Open"		tip.zh-CN="" tip.en-US="DO-23" >
+    <Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />
+    <Limit di="DI_EFEM_RB_Not_Extend_LLB"				value="true" tip="EFEM RB Not Extend LLB"			tip.zh-CN="" tip.en-US="DI-12" />
+    <Limit di="DI_TM_CHB_Door_Closed"	value="true" tip="TM CHB Lid Door Closed"			tip.zh-CN="" tip.en-US="DI-17" />
+    <Limit di="DI_CDA_Pressure_Switch"			value="true" tip="CDA Pressure Switch"		tip.zh-CN="" tip.en-US="DI-19" />
+    <Limit di="DI_LLB_E_Slit_Door_close_Position"	value="true" tip="LLB EFEM Side Door Closed"		tip.zh-CN="" tip.en-US="DI-28" />
+    <Limit di="DI_LLB_Lid_Door_Closed"				value="true" tip="LLB Lid Closed"					tip.zh-CN="" tip.en-US="DI-31" />
+    <Limit di="DI_LLB_VAC_Switch"				value="false" tip="LLB VAC Switch"			tip.zh-CN="" tip.en-US="DI-36" />
+    <Limit di="DI_LLB_ATM_Switch"				value="true" tip="LLB ATM Switch"			tip.zh-CN="" tip.en-US="DI-37" />
+    <Limit do="DO_TM_VAC_ATM_MODE"				value="true" tip="TM  VAC/ATM  MODE"					tip.zh-CN="" tip.en-US="DO-72" />
+  </Action>
 	
 	<Action do="DO_LLB_Slit_Door_T_Close"				value="true" tip="LLB Slit Door/O Close"	tip.zh-CN="" tip.en-US="DO-24" >
 		<Limit di="DI_TM_RB_Not_Extend_LLB"				value="true" tip="TM Robot Net Extend to LLB"		tip.zh-CN="" tip.en-US="DI-9" />