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@@ -19,8 +19,7 @@
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<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
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<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
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<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
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<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库,2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库,2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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- <config default="10" name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔,单位为分钟,0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
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- <config default="1" name="SystemType" nameView="SystemType" description="0 = Venus;1 = Kepler 2300;2 = Kepler 2200A;3 = Kepler 2200B;4 = Venus SE;5 = Venus DE;" max="9" min="0" paramter="" tag="" unit="min" type="Integer"/>
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+ <config default="10" name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔,单位为分钟,0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
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<config default="1000" name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
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<config default="1000" name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
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<config default="0" name="PressureUnitType" nameView="Pressure Unit Type" description="0=>mtorr,1=>Pa" max="1" min="0" paramter="" tag="" unit="" type="Integer"/>
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<config default="0" name="PressureUnitType" nameView="Pressure Unit Type" description="0=>mtorr,1=>Pa" max="1" min="0" paramter="" tag="" unit="" type="Integer"/>
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<config default="Kepler" name="Name" nameView="Name" description="Name" tag="" unit="" type="String" />
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<config default="Kepler" name="Name" nameView="Name" description="Name" tag="" unit="" type="String" />
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@@ -190,6 +189,7 @@
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</configs>
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</configs>
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</configs>
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</configs>
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+
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<!--LLA-->
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<!--LLA-->
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<configs name="LLA" nameView="LLA">
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<configs name="LLA" nameView="LLA">
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<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
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<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
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@@ -310,6 +310,7 @@
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</configs>
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</configs>
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</configs>
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</configs>
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+
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<!--VCE-->
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<!--VCE-->
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<configs name="VCE1" nameView="VCE1">
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<configs name="VCE1" nameView="VCE1">
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<config default="COM15" name="Port" nameView="Port" description="" max="" min="0" paramter="" tag="" unit="" type="String" />
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<config default="COM15" name="Port" nameView="Port" description="" max="" min="0" paramter="" tag="" unit="" type="String" />
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@@ -348,7 +349,6 @@
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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@@ -495,7 +495,6 @@
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<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
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<!--<config default="10" name="MatchPositionC1" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />
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<config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
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<config default="10" name="MatchPositionC2" nameView="CycleCount" description="" max="100" min="0" paramter="" tag="" unit="" type="Double" />-->
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</configs>
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</configs>
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-
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<configs name="BiasRf" nameView="Bias RF" >
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<configs name="BiasRf" nameView="Bias RF" >
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<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
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<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -799,7 +798,6 @@
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<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
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<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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</configs>
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-
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<configs name="WallHeater" nameView="Heater Wall" >
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<configs name="WallHeater" nameView="Heater Wall" >
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<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
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<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
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@@ -826,7 +824,6 @@
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<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
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<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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</configs>
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-
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<configs name="ForelineHeater" nameView="Heater Foreline" >
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<configs name="ForelineHeater" nameView="Heater Foreline" >
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<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
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<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
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@@ -853,7 +850,6 @@
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<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
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<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
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</configs>
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</configs>
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-
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<configs name="ValveHeater" nameView="Valve Heater" >
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<configs name="ValveHeater" nameView="Valve Heater" >
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<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
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<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
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@@ -922,7 +918,6 @@
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="100" name="TurboPumpSpeedLimit" nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
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</configs>
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</configs>
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-
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<!--Clean-->
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<!--Clean-->
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<configs name="IdleClean" nameView="Idle Clean" visible="false">
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<configs name="IdleClean" nameView="Idle Clean" visible="false">
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<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -932,7 +927,6 @@
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<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="Wafer Count Since Last Runing Clean" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
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<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="Wafer Count Since Last Runing Clean" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
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<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="The Time Chamber Last Run Wafer" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="The Time Chamber Last Run Wafer" max="" min="" paramter="" tag="" unit="" type="String" />
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</configs>
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</configs>
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-
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<configs name="EPD" nameView="EPD Setting">
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<configs name="EPD" nameView="EPD Setting">
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<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -963,7 +957,6 @@
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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@@ -1562,7 +1555,6 @@
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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@@ -2163,7 +2155,6 @@
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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- <config default="180" name="VentTime" nameView="Vent Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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