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- <?xml version="1.0" encoding="utf-8" ?>
- <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
- <Dig_In>
- <!--<DI_ITEM Index="0" BufferOffset="0" Addr="DI-00" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="1" BufferOffset="1" Addr="DI-01" Name="SPARE" Description="SPARE"/>-->
- <DI_ITEM Index="2" BufferOffset="2" Addr="DI-02" Name="DI_LightCurtainSensor" Description="LIGHT CURTAIN SENSOR"/>
- <!--<DI_ITEM Index="3" BufferOffset="3" Addr="DI-03" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="4" BufferOffset="4" Addr="DI-04" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="5" BufferOffset="5" Addr="DI-05" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="6" BufferOffset="6" Addr="DI-06" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="7" BufferOffset="7" Addr="DI-07" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="8" BufferOffset="8" Addr="DI-08" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="9" BufferOffset="9" Addr="DI-09" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="10" BufferOffset="10" Addr="DI-10" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="11" BufferOffset="11" Addr="DI-11" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="12" BufferOffset="12" Addr="DI-12" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="13" BufferOffset="13" Addr="DI-13" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="14" BufferOffset="14" Addr="DI-14" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="15" BufferOffset="15" Addr="DI-15" Name="SPARE" Description="SPARE"/>-->
- <DI_ITEM Index="16" BufferOffset="16" Addr="DI-16" Name="DI_FlipperTurnOverHorizontalSensor" Description="FLIPPER TURNOVER HORIZONTAL SENSOR"/>
- <DI_ITEM Index="17" BufferOffset="17" Addr="DI-17" Name="DI_FlipperTurnOverOriginSensor" Description="FLIPPER TURNOVER ORIGIN SENSOR"/>
- <DI_ITEM Index="18" BufferOffset="18" Addr="DI-18" Name="DI_FlipperTurnOverMotorPosCompleted" Description="FLIPPER TURNOVER MOTOR POS COMPLETED"/>
- <!--<DI_ITEM Index="19" BufferOffset="19" Addr="DI-19" Name="DI_FlipperTurnOverMotorHomeResetCompleted" Description="FLIPPER TURNOVER MOTOR HOME RESET COMPLETED"/>-->
- <DI_ITEM Index="20" BufferOffset="20" Addr="DI-20" Name="DI_FlipperTurnOverMotorAlarm" Description="FLIPPER TURNOVER MOTOR ALARM"/>
- <DI_ITEM Index="21" BufferOffset="21" Addr="DI-21" Name="DI_FlipperEnableToRobot" Description="FLIPPER ENABLE TO ROBOT"/>
- <DI_ITEM Index="22" BufferOffset="22" Addr="DI-22" Name="DI_FlipperClampClosedSensor" Description="FLIPPER CLAMP CLOSED SENSOR"/>
- <DI_ITEM Index="23" BufferOffset="23" Addr="DI-23" Name="DI_FlipperClampOpenedSensor" Description="FLIPPER CLAMP OPENED SENSOR"/>
- <DI_ITEM Index="24" BufferOffset="24" Addr="DI-24" Name="DI_FlipperClampMotorPosCompleted" Description="FLIPPER CLAMP MOTOR POS COMPLETED"/>
- <!--<DI_ITEM Index="25" BufferOffset="25" Addr="DI-25" Name="DI_FlipperClampMotorHomeResetCompleted" Description="FLIPPER CLAMP MOTOR HOME RESET COMPLETED"/>-->
- <DI_ITEM Index="26" BufferOffset="26" Addr="DI-26" Name="DI_FlipperClampMotorAlarm" Description="FLIPPER CLAMP MOTOR ALARM"/>
- <!--<DI_ITEM Index="27" BufferOffset="27" Addr="DI-27" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="28" BufferOffset="28" Addr="DI-28" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="29" BufferOffset="29" Addr="DI-29" Name="SPARE" Description="SPARE"/>-->
- <DI_ITEM Index="30" BufferOffset="30" Addr="DI-30" Name="DI_FFUSIGNAL" Description="FFU SIGNAL"/>
- <DI_ITEM Index="31" BufferOffset="31" Addr="DI-31" Name="DI_CDAPressureSW" Description="CDA Pressure SW"/>
- <DI_ITEM Index="32" BufferOffset="32" Addr="DI-32" Name="DI_VACPressureSW" Description="VAC Pressure SW"/>
- <DI_ITEM Index="33" BufferOffset="33" Addr="DI-33" Name="DI_IONCDAPressureSW" Description="ION CDA Pressure SW"/>
- <DI_ITEM Index="34" BufferOffset="34" Addr="DI-34" Name="DI_IONSIGNAL" Description="ION SIGNAL"/>
- <DI_ITEM Index="35" BufferOffset="35" Addr="DI-35" Name="DI_SideDoorOpened" Description="SIDE DOOR OPENED"/>
- <DI_ITEM Index="36" BufferOffset="36" Addr="DI-36" Name="DI_PMADoorOpenedInterlock" Description="PMA System Interlock (Door Opened)"/>
- <DI_ITEM Index="37" BufferOffset="37" Addr="DI-37" Name="DI_PMBDoorOpenedInterlock" Description="PMB System Interlock (Door Opened)"/>
- <DI_ITEM Index="38" BufferOffset="38" Addr="DI-38" Name="DI_OuterSideDoorClosed" Description="OUTER SIDE DOOR CLOSED"/>
- <DI_ITEM Index="39" BufferOffset="39" Addr="DI-39" Name="DI_RunMode" Description="RUN Mode"/>
- <DI_ITEM Index="40" BufferOffset="40" Addr="DI-40" Name="DI_EFEMPowerON" Description="EFEM Power ON"/>
- <DI_ITEM Index="41" BufferOffset="41" Addr="DI-41" Name="DI_PreAlignerEnableToRobot" Description="PRE-ALIGNER ENABLE TO ROBOT"/>
- <!--<DI_ITEM Index="42" BufferOffset="42" Addr="DI-42" Name="SPARE" Description="SPARE"/>-->
- <DI_ITEM Index="43" BufferOffset="43" Addr="DI-43" Name="DI_RobotEMSToEFEM" Description="Robot EMS to EFEM"/>
- <!--<DI_ITEM Index="44" BufferOffset="44" Addr="DI-44" Name="SPARE" Description="SPARE"/>-->
- <DI_ITEM Index="45" BufferOffset="45" Addr="DI-45" Name="DI_RobotTeachingModeToEFEM" Description="Robot Teaching Mode to EFEM"/>
- <!--<DI_ITEM Index="46" BufferOffset="46" Addr="DI-46" Name="SPARE" Description="SPARE"/>
- <DI_ITEM Index="47" BufferOffset="47" Addr="DI-47" Name="SPARE" Description="SPARE"/>-->
- <DI_ITEM Index="48" BufferOffset="48" Addr="DI-48" Name="DI_RBNotExtendToPMA" Description="RB Not Extend to PMA"/>
- <DI_ITEM Index="49" BufferOffset="49" Addr="DI-49" Name="DI_RBNotExtendToPMB" Description="RB Not Extend to PMB"/>
- <DI_ITEM Index="50" BufferOffset="50" Addr="DI-50" Name="DI_RBNotExtendToLP1" Description="RB Not Extend to LP1"/>
- <DI_ITEM Index="51" BufferOffset="51" Addr="DI-51" Name="DI_RBNotExtendToLP2" Description="RB Not Extend to LP2"/>
- <DI_ITEM Index="52" BufferOffset="52" Addr="DI-52" Name="DI_RBNotExtendPreAligner" Description="RB Not Extend PRE-ALIGNER"/>
- <DI_ITEM Index="53" BufferOffset="53" Addr="DI-53" Name="DI_RBNotExtendFlipper" Description="RB Not Extend Flipper"/>
- <DI_ITEM Index="54" BufferOffset="54" Addr="DI-54" Name="DI_LP1OperationStatus" Description="LP1 OPERATION STATUS"/>
- <DI_ITEM Index="55" BufferOffset="55" Addr="DI-55" Name="DI_LP1FoupOpen" Description="LP1 FOUP OPEN"/>
- <DI_ITEM Index="56" BufferOffset="56" Addr="DI-56" Name="DI_LP1FoupPlacement" Description="LP1 FOUP PLACEMENT"/>
- <DI_ITEM Index="57" BufferOffset="57" Addr="DI-57" Name="DI_LP1Ready" Description="LP1 READY"/>
- <DI_ITEM Index="58" BufferOffset="58" Addr="DI-58" Name="DI_LP1Presence" Description="LP1 PRESENCE"/>
- <DI_ITEM Index="59" BufferOffset="59" Addr="DI-59" Name="DI_LP2OperationStatus" Description="LP2 OPERATION STATUS"/>
- <DI_ITEM Index="60" BufferOffset="60" Addr="DI-60" Name="DI_LP2FoupOpen" Description="LP2 FOUP OPEN"/>
- <DI_ITEM Index="61" BufferOffset="61" Addr="DI-61" Name="DI_LP2FoupPlacement" Description="LP2 FOUP PLACEMENT"/>
- <DI_ITEM Index="62" BufferOffset="62" Addr="DI-62" Name="DI_LP2Ready" Description="LP2 READY"/>
- <DI_ITEM Index="63" BufferOffset="63" Addr="DI-63" Name="DI_LP2Presence" Description="LP2 PRESENCE"/>
- </Dig_In>
- <Dig_Out>
- <DO_ITEM Index="0" BufferOffset="0" Addr="DO-00" Name="DO_YellowLight" Description="Yellow light"/>
- <DO_ITEM Index="1" BufferOffset="1" Addr="DO-01" Name="DO_GreenLight" Description="Green light"/>
- <DO_ITEM Index="2" BufferOffset="2" Addr="DO-02" Name="DO_RedLight" Description="Red light"/>
- <DO_ITEM Index="3" BufferOffset="3" Addr="DO-03" Name="DO_BuleLight" Description="Bule light"/>
- <DO_ITEM Index="4" BufferOffset="4" Addr="DO-04" Name="DO_Buzzer1" Description="Buzzer1"/>
- <DO_ITEM Index="5" BufferOffset="5" Addr="DO-05" Name="DO_Buzzer2" Description="Buzzer2"/>
- <!--<DO_ITEM Index="6" BufferOffset="6" Addr="DI-06" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="7" BufferOffset="7" Addr="DI-07" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="8" BufferOffset="8" Addr="DI-08" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="9" BufferOffset="9" Addr="DI-09" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="10" BufferOffset="10" Addr="DI-10" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="11" BufferOffset="11" Addr="DI-11" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="12" BufferOffset="12" Addr="DI-12" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="13" BufferOffset="13" Addr="DI-13" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="14" BufferOffset="14" Addr="DI-14" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="15" BufferOffset="15" Addr="DI-15" Name="SPARE" Description="SPARE"/>-->
- <DO_ITEM Index="16" BufferOffset="16" Addr="DO-16" Name="DO_FlipperTurnOverMotorModeSW" Description="FLP TURNOVER MOTOR MODE SW"/>
- <DO_ITEM Index="17" BufferOffset="17" Addr="DO-17" Name="DO_FlipperTurnOverStartStop/HOME" Description="FLP TURNOVER START-STOP/HOME"/>
- <DO_ITEM Index="18" BufferOffset="18" Addr="DO-18" Name="DO_FlipperTurnOverSEL0/JOGP" Description="FLP TURNOVER SEL0/JOGP"/>
- <DO_ITEM Index="19" BufferOffset="19" Addr="DO-19" Name="DO_FlipperTurnOverSEL1/JOGN" Description="FLP TURNOVER SEL1/JOGN"/>
- <DO_ITEM Index="20" BufferOffset="20" Addr="DO-20" Name="DO_FlipperTurnOverSEL2/JOG0" Description="FLP TURNOVER SEL2/JOG0"/>
- <DO_ITEM Index="21" BufferOffset="21" Addr="DO-21" Name="DO_FlipperTurnOverPgmres/ALM-RST" Description="FLP TURNOVER PGMRES/ALM-RST"/>
- <!--<DO_ITEM Index="22" BufferOffset="22" Addr="DO-22" Name="DO_FlipperTurnOverMotorBrakeON" Description="FLP TURNOVER MOTOR BRAKE ON"/>-->
- <!--<DO_ITEM Index="23" BufferOffset="23" Addr="DI-23" Name="SPARE" Description="SPARE"/>-->
- <DO_ITEM Index="24" BufferOffset="24" Addr="DO-24" Name="DO_FlipperClampMotorModeSW" Description="FLP CLAMP MOTOR MODE SW"/>
- <DO_ITEM Index="25" BufferOffset="25" Addr="DO-25" Name="DO_FlipperClampSTART-STOP/HOME" Description="FLP CLAMP START-STOP/HOME"/>
- <DO_ITEM Index="26" BufferOffset="26" Addr="DO-26" Name="DO_FlipperClampSEL0/JOGP" Description="FLP CLAMP SEL0/JOGP"/>
- <DO_ITEM Index="27" BufferOffset="27" Addr="DO-27" Name="DO_FlipperClampSEL1/JOGN" Description="FLP CLAMP SEL1/JOGN"/>
- <DO_ITEM Index="28" BufferOffset="28" Addr="DO-28" Name="DO_FlipperClampSEL2/JOG0" Description="FLP CLAMP SEL2/JOG0"/>
- <DO_ITEM Index="29" BufferOffset="29" Addr="DO-29" Name="DO_FlipperClampPGMRES/ALM-RST" Description="FLP CLAMP PGMRES/ALM-RST"/>
- <!--<DO_ITEM Index="30" BufferOffset="30" Addr="DI-30" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="31" BufferOffset="31" Addr="DI-31" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="32" BufferOffset="32" Addr="DI-32" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="33" BufferOffset="33" Addr="DI-33" Name="SPARE" Description="SPARE"/>-->
- <DO_ITEM Index="34" BufferOffset="34" Addr="DO-34" Name="DO_IonizerInterrupt" Description="Ionizer Interrupt"/>
- <!--<DO_ITEM Index="35" BufferOffset="35" Addr="DI-35" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="36" BufferOffset="36" Addr="DI-36" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="37" BufferOffset="37" Addr="DI-37" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="38" BufferOffset="38" Addr="DI-38" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="39" BufferOffset="39" Addr="DI-39" Name="SPARE" Description="SPARE"/>-->
- <DO_ITEM Index="40" BufferOffset="40" Addr="DO-40" Name="DO_Pause/ResumeToRobot" Description="Pause/Resume to Robot (ON PAUSE)"/>
- <!--<DO_ITEM Index="41" BufferOffset="41" Addr="DI-41" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="42" BufferOffset="42" Addr="DI-42" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="43" BufferOffset="43" Addr="DI-43" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="44" BufferOffset="44" Addr="DI-44" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="45" BufferOffset="45" Addr="DI-45" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="46" BufferOffset="46" Addr="DI-46" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="47" BufferOffset="47" Addr="DI-47" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="48" BufferOffset="48" Addr="DI-48" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="49" BufferOffset="49" Addr="DI-49" Name="SPARE" Description="SPARE"/>-->
- <DO_ITEM Index="50" BufferOffset="50" Addr="DO-50" Name="DO_RobotSafetyToLP1" Description="Robot Safety to LP1"/>
- <DO_ITEM Index="51" BufferOffset="51" Addr="DO-51" Name="DO_RobotSafetyToLP2" Description="Robot Safety to LP2"/>
- <DO_ITEM Index="52" BufferOffset="52" Addr="DO-52" Name="DO_OKToOperateLP1" Description="OK to Operate LP1"/>
- <DO_ITEM Index="53" BufferOffset="53" Addr="DO-53" Name="DO_OKToOperateLP2" Description="OK to Operate LP2"/>
- <!--<DO_ITEM Index="54" BufferOffset="54" Addr="DI-54" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="55" BufferOffset="55" Addr="DI-55" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="56" BufferOffset="56" Addr="DI-56" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="57" BufferOffset="57" Addr="DI-57" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="58" BufferOffset="58" Addr="DI-58" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="59" BufferOffset="59" Addr="DI-59" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="60" BufferOffset="60" Addr="DI-60" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="61" BufferOffset="61" Addr="DI-61" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="62" BufferOffset="62" Addr="DI-62" Name="SPARE" Description="SPARE"/>
- <DO_ITEM Index="63" BufferOffset="63" Addr="DI-63" Name="SPARE" Description="SPARE"/>-->
-
- </Dig_Out>
- </IO_DEFINE>
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