_ioDefineCardNew.xml 14 KB

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  1. <?xml version="1.0" encoding="utf-8" ?>
  2. <IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>
  3. <Dig_In>
  4. <!--<DI_ITEM Index="0" BufferOffset="0" Addr="DI-00" Name="SPARE" Description="SPARE"/>
  5. <DI_ITEM Index="1" BufferOffset="1" Addr="DI-01" Name="SPARE" Description="SPARE"/>-->
  6. <DI_ITEM Index="2" BufferOffset="2" Addr="DI-02" Name="DI_LightCurtainSensor" Description="LIGHT CURTAIN SENSOR"/>
  7. <!--<DI_ITEM Index="3" BufferOffset="3" Addr="DI-03" Name="SPARE" Description="SPARE"/>
  8. <DI_ITEM Index="4" BufferOffset="4" Addr="DI-04" Name="SPARE" Description="SPARE"/>
  9. <DI_ITEM Index="5" BufferOffset="5" Addr="DI-05" Name="SPARE" Description="SPARE"/>
  10. <DI_ITEM Index="6" BufferOffset="6" Addr="DI-06" Name="SPARE" Description="SPARE"/>
  11. <DI_ITEM Index="7" BufferOffset="7" Addr="DI-07" Name="SPARE" Description="SPARE"/>
  12. <DI_ITEM Index="8" BufferOffset="8" Addr="DI-08" Name="SPARE" Description="SPARE"/>
  13. <DI_ITEM Index="9" BufferOffset="9" Addr="DI-09" Name="SPARE" Description="SPARE"/>
  14. <DI_ITEM Index="10" BufferOffset="10" Addr="DI-10" Name="SPARE" Description="SPARE"/>
  15. <DI_ITEM Index="11" BufferOffset="11" Addr="DI-11" Name="SPARE" Description="SPARE"/>
  16. <DI_ITEM Index="12" BufferOffset="12" Addr="DI-12" Name="SPARE" Description="SPARE"/>
  17. <DI_ITEM Index="13" BufferOffset="13" Addr="DI-13" Name="SPARE" Description="SPARE"/>
  18. <DI_ITEM Index="14" BufferOffset="14" Addr="DI-14" Name="SPARE" Description="SPARE"/>
  19. <DI_ITEM Index="15" BufferOffset="15" Addr="DI-15" Name="SPARE" Description="SPARE"/>-->
  20. <DI_ITEM Index="16" BufferOffset="16" Addr="DI-16" Name="DI_FlipperTurnOverHorizontalSensor" Description="FLIPPER TURNOVER HORIZONTAL SENSOR"/>
  21. <DI_ITEM Index="17" BufferOffset="17" Addr="DI-17" Name="DI_FlipperTurnOverOriginSensor" Description="FLIPPER TURNOVER ORIGIN SENSOR"/>
  22. <DI_ITEM Index="18" BufferOffset="18" Addr="DI-18" Name="DI_FlipperTurnOverMotorPosCompleted" Description="FLIPPER TURNOVER MOTOR POS COMPLETED"/>
  23. <!--<DI_ITEM Index="19" BufferOffset="19" Addr="DI-19" Name="DI_FlipperTurnOverMotorHomeResetCompleted" Description="FLIPPER TURNOVER MOTOR HOME RESET COMPLETED"/>-->
  24. <DI_ITEM Index="20" BufferOffset="20" Addr="DI-20" Name="DI_FlipperTurnOverMotorAlarm" Description="FLIPPER TURNOVER MOTOR ALARM"/>
  25. <DI_ITEM Index="21" BufferOffset="21" Addr="DI-21" Name="DI_FlipperEnableToRobot" Description="FLIPPER ENABLE TO ROBOT"/>
  26. <DI_ITEM Index="22" BufferOffset="22" Addr="DI-22" Name="DI_FlipperClampClosedSensor" Description="FLIPPER CLAMP CLOSED SENSOR"/>
  27. <DI_ITEM Index="23" BufferOffset="23" Addr="DI-23" Name="DI_FlipperClampOpenedSensor" Description="FLIPPER CLAMP OPENED SENSOR"/>
  28. <DI_ITEM Index="24" BufferOffset="24" Addr="DI-24" Name="DI_FlipperClampMotorPosCompleted" Description="FLIPPER CLAMP MOTOR POS COMPLETED"/>
  29. <!--<DI_ITEM Index="25" BufferOffset="25" Addr="DI-25" Name="DI_FlipperClampMotorHomeResetCompleted" Description="FLIPPER CLAMP MOTOR HOME RESET COMPLETED"/>-->
  30. <DI_ITEM Index="26" BufferOffset="26" Addr="DI-26" Name="DI_FlipperClampMotorAlarm" Description="FLIPPER CLAMP MOTOR ALARM"/>
  31. <!--<DI_ITEM Index="27" BufferOffset="27" Addr="DI-27" Name="SPARE" Description="SPARE"/>
  32. <DI_ITEM Index="28" BufferOffset="28" Addr="DI-28" Name="SPARE" Description="SPARE"/>
  33. <DI_ITEM Index="29" BufferOffset="29" Addr="DI-29" Name="SPARE" Description="SPARE"/>-->
  34. <DI_ITEM Index="30" BufferOffset="30" Addr="DI-30" Name="DI_FFUSIGNAL" Description="FFU SIGNAL"/>
  35. <DI_ITEM Index="31" BufferOffset="31" Addr="DI-31" Name="DI_CDAPressureSW" Description="CDA Pressure SW"/>
  36. <DI_ITEM Index="32" BufferOffset="32" Addr="DI-32" Name="DI_VACPressureSW" Description="VAC Pressure SW"/>
  37. <DI_ITEM Index="33" BufferOffset="33" Addr="DI-33" Name="DI_IONCDAPressureSW" Description="ION CDA Pressure SW"/>
  38. <DI_ITEM Index="34" BufferOffset="34" Addr="DI-34" Name="DI_IONSIGNAL" Description="ION SIGNAL"/>
  39. <DI_ITEM Index="35" BufferOffset="35" Addr="DI-35" Name="DI_SideDoorOpened" Description="SIDE DOOR OPENED"/>
  40. <DI_ITEM Index="36" BufferOffset="36" Addr="DI-36" Name="DI_PMADoorOpenedInterlock" Description="PMA System Interlock (Door Opened)"/>
  41. <DI_ITEM Index="37" BufferOffset="37" Addr="DI-37" Name="DI_PMBDoorOpenedInterlock" Description="PMB System Interlock (Door Opened)"/>
  42. <DI_ITEM Index="38" BufferOffset="38" Addr="DI-38" Name="DI_OuterSideDoorClosed" Description="OUTER SIDE DOOR CLOSED"/>
  43. <DI_ITEM Index="39" BufferOffset="39" Addr="DI-39" Name="DI_RunMode" Description="RUN Mode"/>
  44. <DI_ITEM Index="40" BufferOffset="40" Addr="DI-40" Name="DI_EFEMPowerON" Description="EFEM Power ON"/>
  45. <DI_ITEM Index="41" BufferOffset="41" Addr="DI-41" Name="DI_PreAlignerEnableToRobot" Description="PRE-ALIGNER ENABLE TO ROBOT"/>
  46. <!--<DI_ITEM Index="42" BufferOffset="42" Addr="DI-42" Name="SPARE" Description="SPARE"/>-->
  47. <DI_ITEM Index="43" BufferOffset="43" Addr="DI-43" Name="DI_RobotEMSToEFEM" Description="Robot EMS to EFEM"/>
  48. <!--<DI_ITEM Index="44" BufferOffset="44" Addr="DI-44" Name="SPARE" Description="SPARE"/>-->
  49. <DI_ITEM Index="45" BufferOffset="45" Addr="DI-45" Name="DI_RobotTeachingModeToEFEM" Description="Robot Teaching Mode to EFEM"/>
  50. <!--<DI_ITEM Index="46" BufferOffset="46" Addr="DI-46" Name="SPARE" Description="SPARE"/>
  51. <DI_ITEM Index="47" BufferOffset="47" Addr="DI-47" Name="SPARE" Description="SPARE"/>-->
  52. <DI_ITEM Index="48" BufferOffset="48" Addr="DI-48" Name="DI_RBNotExtendToPMA" Description="RB Not Extend to PMA"/>
  53. <DI_ITEM Index="49" BufferOffset="49" Addr="DI-49" Name="DI_RBNotExtendToPMB" Description="RB Not Extend to PMB"/>
  54. <DI_ITEM Index="50" BufferOffset="50" Addr="DI-50" Name="DI_RBNotExtendToLP1" Description="RB Not Extend to LP1"/>
  55. <DI_ITEM Index="51" BufferOffset="51" Addr="DI-51" Name="DI_RBNotExtendToLP2" Description="RB Not Extend to LP2"/>
  56. <DI_ITEM Index="52" BufferOffset="52" Addr="DI-52" Name="DI_RBNotExtendPreAligner" Description="RB Not Extend PRE-ALIGNER"/>
  57. <DI_ITEM Index="53" BufferOffset="53" Addr="DI-53" Name="DI_RBNotExtendFlipper" Description="RB Not Extend Flipper"/>
  58. <DI_ITEM Index="54" BufferOffset="54" Addr="DI-54" Name="DI_LP1OperationStatus" Description="LP1 OPERATION STATUS"/>
  59. <DI_ITEM Index="55" BufferOffset="55" Addr="DI-55" Name="DI_LP1FoupOpen" Description="LP1 FOUP OPEN"/>
  60. <DI_ITEM Index="56" BufferOffset="56" Addr="DI-56" Name="DI_LP1FoupPlacement" Description="LP1 FOUP PLACEMENT"/>
  61. <DI_ITEM Index="57" BufferOffset="57" Addr="DI-57" Name="DI_LP1Ready" Description="LP1 READY"/>
  62. <DI_ITEM Index="58" BufferOffset="58" Addr="DI-58" Name="DI_LP1Presence" Description="LP1 PRESENCE"/>
  63. <DI_ITEM Index="59" BufferOffset="59" Addr="DI-59" Name="DI_LP2OperationStatus" Description="LP2 OPERATION STATUS"/>
  64. <DI_ITEM Index="60" BufferOffset="60" Addr="DI-60" Name="DI_LP2FoupOpen" Description="LP2 FOUP OPEN"/>
  65. <DI_ITEM Index="61" BufferOffset="61" Addr="DI-61" Name="DI_LP2FoupPlacement" Description="LP2 FOUP PLACEMENT"/>
  66. <DI_ITEM Index="62" BufferOffset="62" Addr="DI-62" Name="DI_LP2Ready" Description="LP2 READY"/>
  67. <DI_ITEM Index="63" BufferOffset="63" Addr="DI-63" Name="DI_LP2Presence" Description="LP2 PRESENCE"/>
  68. </Dig_In>
  69. <Dig_Out>
  70. <DO_ITEM Index="0" BufferOffset="0" Addr="DO-00" Name="DO_YellowLight" Description="Yellow light"/>
  71. <DO_ITEM Index="1" BufferOffset="1" Addr="DO-01" Name="DO_GreenLight" Description="Green light"/>
  72. <DO_ITEM Index="2" BufferOffset="2" Addr="DO-02" Name="DO_RedLight" Description="Red light"/>
  73. <DO_ITEM Index="3" BufferOffset="3" Addr="DO-03" Name="DO_BuleLight" Description="Bule light"/>
  74. <DO_ITEM Index="4" BufferOffset="4" Addr="DO-04" Name="DO_Buzzer1" Description="Buzzer1"/>
  75. <DO_ITEM Index="5" BufferOffset="5" Addr="DO-05" Name="DO_Buzzer2" Description="Buzzer2"/>
  76. <!--<DO_ITEM Index="6" BufferOffset="6" Addr="DI-06" Name="SPARE" Description="SPARE"/>
  77. <DO_ITEM Index="7" BufferOffset="7" Addr="DI-07" Name="SPARE" Description="SPARE"/>
  78. <DO_ITEM Index="8" BufferOffset="8" Addr="DI-08" Name="SPARE" Description="SPARE"/>
  79. <DO_ITEM Index="9" BufferOffset="9" Addr="DI-09" Name="SPARE" Description="SPARE"/>
  80. <DO_ITEM Index="10" BufferOffset="10" Addr="DI-10" Name="SPARE" Description="SPARE"/>
  81. <DO_ITEM Index="11" BufferOffset="11" Addr="DI-11" Name="SPARE" Description="SPARE"/>
  82. <DO_ITEM Index="12" BufferOffset="12" Addr="DI-12" Name="SPARE" Description="SPARE"/>
  83. <DO_ITEM Index="13" BufferOffset="13" Addr="DI-13" Name="SPARE" Description="SPARE"/>
  84. <DO_ITEM Index="14" BufferOffset="14" Addr="DI-14" Name="SPARE" Description="SPARE"/>
  85. <DO_ITEM Index="15" BufferOffset="15" Addr="DI-15" Name="SPARE" Description="SPARE"/>-->
  86. <DO_ITEM Index="16" BufferOffset="16" Addr="DO-16" Name="DO_FlipperTurnOverMotorModeSW" Description="FLP TURNOVER MOTOR MODE SW"/>
  87. <DO_ITEM Index="17" BufferOffset="17" Addr="DO-17" Name="DO_FlipperTurnOverStartStop/HOME" Description="FLP TURNOVER START-STOP/HOME"/>
  88. <DO_ITEM Index="18" BufferOffset="18" Addr="DO-18" Name="DO_FlipperTurnOverSEL0/JOGP" Description="FLP TURNOVER SEL0/JOGP"/>
  89. <DO_ITEM Index="19" BufferOffset="19" Addr="DO-19" Name="DO_FlipperTurnOverSEL1/JOGN" Description="FLP TURNOVER SEL1/JOGN"/>
  90. <DO_ITEM Index="20" BufferOffset="20" Addr="DO-20" Name="DO_FlipperTurnOverSEL2/JOG0" Description="FLP TURNOVER SEL2/JOG0"/>
  91. <DO_ITEM Index="21" BufferOffset="21" Addr="DO-21" Name="DO_FlipperTurnOverPgmres/ALM-RST" Description="FLP TURNOVER PGMRES/ALM-RST"/>
  92. <!--<DO_ITEM Index="22" BufferOffset="22" Addr="DO-22" Name="DO_FlipperTurnOverMotorBrakeON" Description="FLP TURNOVER MOTOR BRAKE ON"/>-->
  93. <!--<DO_ITEM Index="23" BufferOffset="23" Addr="DI-23" Name="SPARE" Description="SPARE"/>-->
  94. <DO_ITEM Index="24" BufferOffset="24" Addr="DO-24" Name="DO_FlipperClampMotorModeSW" Description="FLP CLAMP MOTOR MODE SW"/>
  95. <DO_ITEM Index="25" BufferOffset="25" Addr="DO-25" Name="DO_FlipperClampSTART-STOP/HOME" Description="FLP CLAMP START-STOP/HOME"/>
  96. <DO_ITEM Index="26" BufferOffset="26" Addr="DO-26" Name="DO_FlipperClampSEL0/JOGP" Description="FLP CLAMP SEL0/JOGP"/>
  97. <DO_ITEM Index="27" BufferOffset="27" Addr="DO-27" Name="DO_FlipperClampSEL1/JOGN" Description="FLP CLAMP SEL1/JOGN"/>
  98. <DO_ITEM Index="28" BufferOffset="28" Addr="DO-28" Name="DO_FlipperClampSEL2/JOG0" Description="FLP CLAMP SEL2/JOG0"/>
  99. <DO_ITEM Index="29" BufferOffset="29" Addr="DO-29" Name="DO_FlipperClampPGMRES/ALM-RST" Description="FLP CLAMP PGMRES/ALM-RST"/>
  100. <!--<DO_ITEM Index="30" BufferOffset="30" Addr="DI-30" Name="SPARE" Description="SPARE"/>
  101. <DO_ITEM Index="31" BufferOffset="31" Addr="DI-31" Name="SPARE" Description="SPARE"/>
  102. <DO_ITEM Index="32" BufferOffset="32" Addr="DI-32" Name="SPARE" Description="SPARE"/>
  103. <DO_ITEM Index="33" BufferOffset="33" Addr="DI-33" Name="SPARE" Description="SPARE"/>-->
  104. <DO_ITEM Index="34" BufferOffset="34" Addr="DO-34" Name="DO_IonizerInterrupt" Description="Ionizer Interrupt"/>
  105. <!--<DO_ITEM Index="35" BufferOffset="35" Addr="DI-35" Name="SPARE" Description="SPARE"/>
  106. <DO_ITEM Index="36" BufferOffset="36" Addr="DI-36" Name="SPARE" Description="SPARE"/>
  107. <DO_ITEM Index="37" BufferOffset="37" Addr="DI-37" Name="SPARE" Description="SPARE"/>
  108. <DO_ITEM Index="38" BufferOffset="38" Addr="DI-38" Name="SPARE" Description="SPARE"/>
  109. <DO_ITEM Index="39" BufferOffset="39" Addr="DI-39" Name="SPARE" Description="SPARE"/>-->
  110. <DO_ITEM Index="40" BufferOffset="40" Addr="DO-40" Name="DO_Pause/ResumeToRobot" Description="Pause/Resume to Robot (ON PAUSE)"/>
  111. <!--<DO_ITEM Index="41" BufferOffset="41" Addr="DI-41" Name="SPARE" Description="SPARE"/>
  112. <DO_ITEM Index="42" BufferOffset="42" Addr="DI-42" Name="SPARE" Description="SPARE"/>
  113. <DO_ITEM Index="43" BufferOffset="43" Addr="DI-43" Name="SPARE" Description="SPARE"/>
  114. <DO_ITEM Index="44" BufferOffset="44" Addr="DI-44" Name="SPARE" Description="SPARE"/>
  115. <DO_ITEM Index="45" BufferOffset="45" Addr="DI-45" Name="SPARE" Description="SPARE"/>
  116. <DO_ITEM Index="46" BufferOffset="46" Addr="DI-46" Name="SPARE" Description="SPARE"/>
  117. <DO_ITEM Index="47" BufferOffset="47" Addr="DI-47" Name="SPARE" Description="SPARE"/>
  118. <DO_ITEM Index="48" BufferOffset="48" Addr="DI-48" Name="SPARE" Description="SPARE"/>
  119. <DO_ITEM Index="49" BufferOffset="49" Addr="DI-49" Name="SPARE" Description="SPARE"/>-->
  120. <DO_ITEM Index="50" BufferOffset="50" Addr="DO-50" Name="DO_RobotSafetyToLP1" Description="Robot Safety to LP1"/>
  121. <DO_ITEM Index="51" BufferOffset="51" Addr="DO-51" Name="DO_RobotSafetyToLP2" Description="Robot Safety to LP2"/>
  122. <DO_ITEM Index="52" BufferOffset="52" Addr="DO-52" Name="DO_OKToOperateLP1" Description="OK to Operate LP1"/>
  123. <DO_ITEM Index="53" BufferOffset="53" Addr="DO-53" Name="DO_OKToOperateLP2" Description="OK to Operate LP2"/>
  124. <!--<DO_ITEM Index="54" BufferOffset="54" Addr="DI-54" Name="SPARE" Description="SPARE"/>
  125. <DO_ITEM Index="55" BufferOffset="55" Addr="DI-55" Name="SPARE" Description="SPARE"/>
  126. <DO_ITEM Index="56" BufferOffset="56" Addr="DI-56" Name="SPARE" Description="SPARE"/>
  127. <DO_ITEM Index="57" BufferOffset="57" Addr="DI-57" Name="SPARE" Description="SPARE"/>
  128. <DO_ITEM Index="58" BufferOffset="58" Addr="DI-58" Name="SPARE" Description="SPARE"/>
  129. <DO_ITEM Index="59" BufferOffset="59" Addr="DI-59" Name="SPARE" Description="SPARE"/>
  130. <DO_ITEM Index="60" BufferOffset="60" Addr="DI-60" Name="SPARE" Description="SPARE"/>
  131. <DO_ITEM Index="61" BufferOffset="61" Addr="DI-61" Name="SPARE" Description="SPARE"/>
  132. <DO_ITEM Index="62" BufferOffset="62" Addr="DI-62" Name="SPARE" Description="SPARE"/>
  133. <DO_ITEM Index="63" BufferOffset="63" Addr="DI-63" Name="SPARE" Description="SPARE"/>-->
  134. </Dig_Out>
  135. </IO_DEFINE>