JET-EFEM/athos/athosRT/bin/x86/Debug/Config/DeviceDefine.xml

<?xml version="1.0" encoding="utf-8"?>
<Configs>
  <!--    硬件配置-->
  <IoCardQuantity>1</IoCardQuantity>
  <DmcCardInstalled>false</DmcCardInstalled>
  <PLCIoInstalled>false</PLCIoInstalled>
	<DisableSignalTower>true</DisableSignalTower>

  <!--    LoadPort 设置项-->
  <LoadPortType>OpenStageWithWaferSize</LoadPortType>
  <LoadPortQuantity>2</LoadPortQuantity>
  <RFIDInstallment>00</RFIDInstallment>

  <!--    Robot 设置项-->
  <RobotType>NXC100</RobotType> <!--    NXC100 or SR100-->
  <MotionAxisInstalled>false</MotionAxisInstalled>
  <AlignerInstalled>false</AlignerInstalled>
  <OcrInstalled>false</OcrInstalled>
  <AlignerNeedMoveUpCommand>false</AlignerNeedMoveUpCommand>

  <!--    Load Lock设置项-->
  <LoadLockQuantity>2</LoadLockQuantity>
  <LoadLockSlot>1</LoadLockSlot>
  <LLDoorControlByStation>false</LLDoorControlByStation>

  <!--    EFEM指令配置项-->
  <WAFSHEnable>false</WAFSHEnable>
  
  <!--Cooling buffer-->
  <CoolingBufferInstalled>true</CoolingBufferInstalled>
  
  <RobotIsSingleArm>false</RobotIsSingleArm>
  <!--Buffer 设置项-->
	<BufferQuantity>0</BufferQuantity>
	<BufferSlot>8</BufferSlot>
	<MultiWaferSize>true</MultiWaferSize>
	<!--Is Maintenance-->
	<MaintenanceSignal>false</MaintenanceSignal>
	<EfemDoorOpenSignal>true</EfemDoorOpenSignal>
</Configs>