_sc.data 69 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <root>
  3. <scdata name="LoadPort.LP1.PortName" value="COM11" />
  4. <scdata name="LoadPort.LP1.TimeLimitAction" value="130" />
  5. <scdata name="LoadPort.LP1.CarrierIDStartString" value="LOT:" />
  6. <scdata name="LoadPort.LP1.CarrierIDEndString" value="QTY:" />
  7. <scdata name="LoadPort.LP1.AutoDetectCarrierType" value="False" />
  8. <scdata name="LoadPort.LP1.SlotsNumber" value="25" />
  9. <scdata name="LoadPort.LP1.Disable" value="False" />
  10. <scdata name="LoadPort.LP1.CarrierIndex" value="0" />
  11. <scdata name="LoadPort.LP1.CstType" value="0" />
  12. <scdata name="LoadPort.LP2.PortName" value="COM13" />
  13. <scdata name="LoadPort.LP2.TimeLimitAction" value="120" />
  14. <scdata name="LoadPort.LP2.CarrierIDStartString" value="LOT:" />
  15. <scdata name="LoadPort.LP2.CarrierIDEndString" value="QTY:" />
  16. <scdata name="LoadPort.LP2.AutoDetectCarrierType" value="False" />
  17. <scdata name="LoadPort.LP2.SlotsNumber" value="25" />
  18. <scdata name="LoadPort.LP2.Disable" value="False" />
  19. <scdata name="LoadPort.LP2.CarrierIndex" value="0" />
  20. <scdata name="LoadPort.LP2.CstType" value="0" />
  21. <scdata name="LoadPort.WaitLoadTimeOut" value="15" />
  22. <scdata name="LoadPort.TimeLimitLoadportHome" value="60" />
  23. <scdata name="LoadPort.TimeLimitLoadportLoad" value="31" />
  24. <scdata name="LoadPort.TimeLimitLoadportUnload" value="20" />
  25. <scdata name="LoadPort.TimeLimitLoadportClamp" value="11" />
  26. <scdata name="LoadPort.TimeLimitReadRFID" value="9" />
  27. <scdata name="LoadPort.TimeLimitWriteRFID" value="10" />
  28. <scdata name="LoadPort.EnableAutoLockWhenCassetteArrived" value="False" />
  29. <scdata name="LoadPort.EnableAutoDockAfterIdRead" value="True" />
  30. <scdata name="LoadPort.EnableAutoCarrierIdReadAfterLatch" value="True" />
  31. <scdata name="LoadPort.EnableAutoMappingAfterDock" value="True" />
  32. <scdata name="LoadPort.EnableAutoUndockAfterUndocking" value="True" />
  33. <scdata name="LoadPort.EnablePauseWhenVerifyIDFailed" value="True" />
  34. <scdata name="LoadPort.TimeDelayNotifyCassettePresent" value="100" />
  35. <scdata name="LoadPort.LoadPort1CarrierMode" value="1" />
  36. <scdata name="LoadPort.LoadPort2CarrierMode" value="1" />
  37. <scdata name="LoadPort.LoadPort3CarrierMode" value="1" />
  38. <scdata name="LoadPort.LoadPort4CarrierMode" value="1" />
  39. <scdata name="LoadPort.LoadPort5CarrierMode" value="1" />
  40. <scdata name="LoadPort.LoadPort6CarrierMode" value="1" />
  41. <scdata name="LoadPort.LoadPort7CarrierMode" value="1" />
  42. <scdata name="LoadPort.LoadPort8CarrierMode" value="1" />
  43. <scdata name="LoadPort.LoadPort9CarrierMode" value="1" />
  44. <scdata name="LoadPort.LoadPort10CarrierMode" value="1" />
  45. <scdata name="LoadPort.LoadPort1CarrierLabel" value="LP1" />
  46. <scdata name="LoadPort.LoadPort2CarrierLabel" value="LP2" />
  47. <scdata name="LoadPort.LoadPort3CarrierLabel" value="LP3" />
  48. <scdata name="LoadPort.LoadPort4CarrierLabel" value="LP4" />
  49. <scdata name="LoadPort.LoadPort5CarrierLabel" value="LP5" />
  50. <scdata name="LoadPort.LoadPort6CarrierLabel" value="LP6" />
  51. <scdata name="LoadPort.LoadPort7CarrierLabel" value="LP7" />
  52. <scdata name="LoadPort.LoadPort8CarrierLabel" value="LP8" />
  53. <scdata name="LoadPort.LoadPort9CarrierLabel" value="LP9" />
  54. <scdata name="LoadPort.LoadPort10CarrierLabel" value="LP10" />
  55. <scdata name="LoadPort.LoadPort1CarrierIdReaderPortName" value="COM21" />
  56. <scdata name="LoadPort.LoadPort2CarrierIdReaderPortName" value="COM23" />
  57. <scdata name="LoadPort.LoadPort3CarrierIdReaderPortName" value="COM25" />
  58. <scdata name="LoadPort.LoadPort4CarrierIdReaderPortName" value="COM27" />
  59. <scdata name="LoadPort.LoadPort5CarrierIdReaderPortName" value="COM29" />
  60. <scdata name="LoadPort.LoadPort6CarrierIdReaderPortName" value="COM31" />
  61. <scdata name="LoadPort.LoadPort7CarrierIdReaderPortName" value="COM7" />
  62. <scdata name="LoadPort.LoadPort8CarrierIdReaderPortName" value="COM8" />
  63. <scdata name="LoadPort.LoadPort9CarrierIdReaderPortName" value="COM9" />
  64. <scdata name="LoadPort.LoadPort10CarrierIdReaderPortName" value="COM10" />
  65. <scdata name="LoadPort.LoadPort1PortName" value="COM1" />
  66. <scdata name="LoadPort.LoadPort2PortName" value="COM3" />
  67. <scdata name="LoadPort.LoadPort3PortName" value="COM5" />
  68. <scdata name="LoadPort.LoadPort4PortName" value="COM7" />
  69. <scdata name="LoadPort.LoadPort1CarrierIdReaderAddress" value="127.0.0.1:7091" />
  70. <scdata name="LoadPort.LoadPort2CarrierIdReaderAddress" value="127.0.0.1:7092" />
  71. <scdata name="LoadPort.LoadPort3CarrierIdReaderAddress" value="127.0.0.1:7093" />
  72. <scdata name="LoadPort.LoadPort4CarrierIdReaderAddress" value="127.0.0.1:7094" />
  73. <scdata name="LoadPort.LoadPort5CarrierIdReaderAddress" value="127.0.0.1:7095" />
  74. <scdata name="LoadPort.LoadPort6CarrierIdReaderAddress" value="127.0.0.1:7096" />
  75. <scdata name="LoadPort.LoadPort7CarrierIdReaderAddress" value="127.0.0.1:7097" />
  76. <scdata name="LoadPort.LoadPort8CarrierIdReaderAddress" value="127.0.0.1:7098" />
  77. <scdata name="LoadPort.LoadPort9CarrierIdReaderAddress" value="127.0.0.1:7099" />
  78. <scdata name="LoadPort.LoadPort10CarrierIdReaderAddress" value="127.0.0.1:7100" />
  79. <scdata name="LoadPort.LoadPort1CarrierIdReaderPage" value="00000004" />
  80. <scdata name="LoadPort.LoadPort2CarrierIdReaderPage" value="00000004" />
  81. <scdata name="LoadPort.LoadPort3CarrierIdReaderPage" value="00000004" />
  82. <scdata name="LoadPort.LoadPort4CarrierIdReaderPage" value="00000004" />
  83. <scdata name="LoadPort.LoadPort5CarrierIdReaderPage" value="00000004" />
  84. <scdata name="LoadPort.LoadPort6CarrierIdReaderPage" value="00000004" />
  85. <scdata name="LoadPort.LoadPort7CarrierIdReaderPage" value="00000004" />
  86. <scdata name="LoadPort.LoadPort8CarrierIdReaderPage" value="00000004" />
  87. <scdata name="LoadPort.LoadPort9CarrierIdReaderPage" value="00000004" />
  88. <scdata name="LoadPort.LoadPort10CarrierIdReaderPage" value="00000004" />
  89. <scdata name="LoadPort.LoadPort1CassetteType" value="FOUP" />
  90. <scdata name="LoadPort.LoadPort2CassetteType" value="FOUP" />
  91. <scdata name="LoadPort.LoadPort3CassetteType" value="FOUP" />
  92. <scdata name="LoadPort.LoadPort4CassetteType" value="FOUP" />
  93. <scdata name="LoadPort.DefaultUseRFIDForCarrierIdRead" value="True" />
  94. <scdata name="Robot.Robot.Address" value="127.0.0.1:10110" />
  95. <scdata name="Robot.Robot.SpeedLevel" value="3" />
  96. <scdata name="Robot.Robot.ExistInterval" value="100" />
  97. <scdata name="Robot.Robot.IsVacuumMode" value="True" />
  98. <scdata name="Robot.Robot.BodyNumber" value="1" />
  99. <scdata name="Robot.Robot.PortName" value="COM27" />
  100. <scdata name="Robot.Robot.RobotModel" value="T-00902H" />
  101. <scdata name="Robot.Robot.RobotZSpeed" value="20" />
  102. <scdata name="Robot.Robot.RobotABWSpeed" value="50" />
  103. <scdata name="Robot.Robot.Speed" value="980" />
  104. <scdata name="Robot.Robot.RobotSpeed" value="98" />
  105. <scdata name="Robot.Robot.EnableLogMessage" value="True" />
  106. <scdata name="Robot.Robot.TimeLimitRobotCommand" value="60" />
  107. <scdata name="Robot.Robot.MotionTimeout" value="60" />
  108. <scdata name="Robot.Robot.EnableGotoReady" value="True" />
  109. <scdata name="Robot.Robot.GotoReadyXSpeedForPick" value="1" />
  110. <scdata name="Robot.Robot.GotoReadyZDistanceForPick" value="0" />
  111. <scdata name="Robot.Robot.GotoReadyXCheckWaferForPlace" value="0" />
  112. <scdata name="Robot.Robot.GotoReadyCICheckWaferForPlace" value="0" />
  113. <scdata name="Robot.Robot.GotoReadyXSpeedForPlace" value="1" />
  114. <scdata name="Robot.Robot.GotoReadyCISpeedForPlace" value="1" />
  115. <scdata name="Robot.Robot.GotoReadyZDistanceForPlace" value="0" />
  116. <scdata name="Robot.Robot.InitCmdNO" value="1" />
  117. <scdata name="Robot.Robot.LeftPickCmdNO" value="2" />
  118. <scdata name="Robot.Robot.RightPickCmdNO" value="3" />
  119. <scdata name="Robot.Robot.DualPickCmdNO" value="4" />
  120. <scdata name="Robot.Robot.LeftPlaceCmdNO" value="5" />
  121. <scdata name="Robot.Robot.RightPlaceCmdNO" value="6" />
  122. <scdata name="Robot.Robot.DualPlaceCmdNO" value="7" />
  123. <scdata name="Robot.Robot.LeftPickSwapCmdNO" value="8" />
  124. <scdata name="Robot.Robot.RightPickSwapCmdNO" value="9" />
  125. <scdata name="Robot.Robot.MapCmdNO" value="3" />
  126. <scdata name="Robot.Offset.OffsetXMax" value="99999" />
  127. <scdata name="Robot.Offset.OffsetXMin" value="-9999" />
  128. <scdata name="Robot.Offset.OffsetYMax" value="99999" />
  129. <scdata name="Robot.Offset.OffsetYMin" value="-9999" />
  130. <scdata name="Robot.Offset.OffsetZMax" value="99999" />
  131. <scdata name="Robot.Offset.OffsetZMin" value="-9999" />
  132. <scdata name="Robot.OffsetForLL.LLAGET" value="0000,-0000,-0000" />
  133. <scdata name="Robot.OffsetForLL.LLAPUT" value="0000,-0000,-0000" />
  134. <scdata name="Robot.OffsetForLL.LLAEXCHANGE" value="0000,-0000,-0000" />
  135. <scdata name="Robot.OffsetForLL.LLBGET" value="0000,-0000,-0000" />
  136. <scdata name="Robot.OffsetForLL.LLBPUT" value="0000,-0000,-0000" />
  137. <scdata name="Robot.OffsetForLL.LLBEXCHANGE" value="0000,-0000,-0000" />
  138. <scdata name="Robot.OffsetForLL.LL1GET" value="0000,-0000,-0000" />
  139. <scdata name="Robot.OffsetForLL.LL1PUT" value="0000,-0000,-0000" />
  140. <scdata name="Robot.OffsetForLL.LL1EXCHANGE" value="0000,-0000,-0000" />
  141. <scdata name="Robot.OffsetForLL.LL2GET" value="0000,-0000,-0000" />
  142. <scdata name="Robot.OffsetForLL.LL2PUT" value="0000,-0000,-0000" />
  143. <scdata name="Robot.OffsetForLL.LL2EXCHANGE" value="0000,-0000,-0000" />
  144. <scdata name="Robot.OffsetForLL.LL3GET" value="0000,-0000,-0000" />
  145. <scdata name="Robot.OffsetForLL.LL3PUT" value="0000,-0000,-0000" />
  146. <scdata name="Robot.OffsetForLL.LL3EXCHANGE" value="0000,-0000,-0000" />
  147. <scdata name="Robot.OffsetForLL.LL4GET" value="0000,-0000,-0000" />
  148. <scdata name="Robot.OffsetForLL.LL4PUT" value="0000,-0000,-0000" />
  149. <scdata name="Robot.OffsetForLL.LL4EXCHANGE" value="0000,-0000,-0000" />
  150. <scdata name="Robot.OffsetForLL.LL5GET" value="0000,-0000,-0000" />
  151. <scdata name="Robot.OffsetForLL.LL5PUT" value="0000,-0000,-0000" />
  152. <scdata name="Robot.OffsetForLL.LL5EXCHANGE" value="0000,-0000,-0000" />
  153. <scdata name="Robot.OffsetForLL.LL6GET" value="0000,-0000,-0000" />
  154. <scdata name="Robot.OffsetForLL.LL6PUT" value="0000,-0000,-0000" />
  155. <scdata name="Robot.OffsetForLL.LL6EXCHANGE" value="0000,-0000,-0000" />
  156. <scdata name="Robot.OffsetForLL.LL7GET" value="0000,-0000,-0000" />
  157. <scdata name="Robot.OffsetForLL.LL7PUT" value="0000,-0000,-0000" />
  158. <scdata name="Robot.OffsetForLL.LL7EXCHANGE" value="0000,-0000,-0000" />
  159. <scdata name="Robot.OffsetForLL.LL8GET" value="0000,-0000,-0000" />
  160. <scdata name="Robot.OffsetForLL.LL8PUT" value="0000,-0000,-0000" />
  161. <scdata name="Robot.OffsetForLL.LL8EXCHANGE" value="0000,-0000,-0000" />
  162. <scdata name="Robot.OffsetForLP.Type1" value="FOUP,0000,-0000,-0000" />
  163. <scdata name="Robot.OffsetForLP.Type2" value="FOUP2,0000,-0000,-0000" />
  164. <scdata name="Robot.OffsetForLP.Type3" value="FOUP3,0000,-0000,-0000" />
  165. <scdata name="Robot.OffsetForLP.Type4" value="FOUP4,0000,-0000,-0000" />
  166. <scdata name="Robot.OffsetForLP.Type5" value="FOUP5,0000,-0000,-0000" />
  167. <scdata name="Robot.OffsetForLP.Type6" value="FOUP6,0000,-0000,-0000" />
  168. <scdata name="Robot.OffsetForLP.Type7" value="FOUP7,0000,-0000,-0000" />
  169. <scdata name="Robot.OffsetForLP.Type8" value="FOUP8,0000,-0000,-0000" />
  170. <scdata name="Robot.OffsetForLP.Type9" value="FOUP9,0000,-0000,-0000" />
  171. <scdata name="Robot.OffsetForLP.Type10" value="FOUP10,0000,-0000,-0000" />
  172. <scdata name="Robot.OffsetForLP.Type11" value="FOUP11,0000,-0000,-0000" />
  173. <scdata name="Robot.OffsetForLP.Type12" value="FOUP12,0000,-0000,-0000" />
  174. <scdata name="Robot.OffsetForLP.Type13" value="FOUP13,0000,-0000,-0000" />
  175. <scdata name="Robot.OffsetForLP.Type14" value="FOUP14,0000,-0000,-0000" />
  176. <scdata name="Robot.OffsetForLP.Type15" value="FOUP15,0000,-0000,-0000" />
  177. <scdata name="Robot.OffsetForLP.Type16" value="FOUP16,0000,-0000,-0000" />
  178. <scdata name="Robot.OffsetForLP.Type17" value="FOUP17,0000,-0000,-0000" />
  179. <scdata name="Robot.OffsetForLP.Type18" value="FOUP18,0000,-0000,-0000" />
  180. <scdata name="Robot.OffsetForLP.Type19" value="FOUP19,0000,-0000,-0000" />
  181. <scdata name="Robot.OffsetForLP.Type20" value="FOUP20,0000,-0000,-0000" />
  182. <scdata name="Robot.BladeUpDownReverse" value="False" />
  183. <scdata name="Robot.Blade1Enable" value="True" />
  184. <scdata name="Robot.Blade2Enable" value="True" />
  185. <scdata name="Robot.Blade2Slots" value="1" />
  186. <scdata name="Robot.RobotSpeed" value="1" />
  187. <scdata name="Robot.TimeLimitRobotCommand" value="2" />
  188. <scdata name="Robot.TimeLimitRobotHome" value="30" />
  189. <scdata name="Robot.TimeLimitForPickWafer" value="10" />
  190. <scdata name="Robot.TimeLimitForPlaceWafer" value="20" />
  191. <scdata name="Robot.TimeLimitForExchangeWafer" value="10" />
  192. <scdata name="Robot.RobotCommunicationToken" value="0" />
  193. <scdata name="Robot.DualBlade1TransferEnable" value="True" />
  194. <scdata name="Robot.Address" value="127.0.0.1:10110" />
  195. <scdata name="Robot.SlotCount" value="1" />
  196. <scdata name="Robot.WaferSize3MappingOffset" value="2183900" />
  197. <scdata name="Robot.WaferSize4MappingOffset" value="2285000" />
  198. <scdata name="Robot.WaferSize6MappingOffset" value="2545000" />
  199. <scdata name="MotionAxis.AccSpeed" value="1000" />
  200. <scdata name="MotionAxis.JogSpeed" value="1000" />
  201. <scdata name="MotionAxis.AutoSpeed" value="10000" />
  202. <scdata name="MotionAxis.MoveTimeout" value="30" />
  203. <scdata name="MotionAxis.HomeTimeout" value="60" />
  204. <scdata name="Aligner1.TimeLimitAlignerHome" value="30" />
  205. <scdata name="Aligner1.TimeLimitForAlignWafer" value="9" />
  206. <scdata name="Aligner1.AlignerCommunicationToken" value="0" />
  207. <scdata name="Aligner1.AlignerReadAngle" value="0" />
  208. <scdata name="Aligner1.AlignerDefaultAngle" value="0" />
  209. <scdata name="Aligner1.Address" value="127.0.0.1:10118" />
  210. <scdata name="Aligner1.IsEnable" value="True" />
  211. <scdata name="Aligner2.TimeLimitAlignerHome" value="30" />
  212. <scdata name="Aligner2.TimeLimitForAlignWafer" value="9" />
  213. <scdata name="Aligner2.AlignerCommunicationToken" value="0" />
  214. <scdata name="Aligner2.AlignerReadAngle" value="0" />
  215. <scdata name="Aligner2.AlignerDefaultAngle" value="0" />
  216. <scdata name="Aligner2.Address" value="127.0.0.1:10119" />
  217. <scdata name="Aligner2.IsEnable" value="True" />
  218. <scdata name="OcrReader.TimeLimitForWID" value="9" />
  219. <scdata name="OcrReader.EnableReadLaserMarker1" value="True" />
  220. <scdata name="OcrReader.EnableReadLaserMarker2" value="True" />
  221. <scdata name="OcrReader.ReaderJob1Main" value="" />
  222. <scdata name="OcrReader.ReaderJob1Slave" value="" />
  223. <scdata name="OcrReader.ReaderJob2Main" value="" />
  224. <scdata name="OcrReader.ReaderJob2Slave" value="" />
  225. <scdata name="OcrReader.EnablePauseOnWaferIdVerifyFailed" value="False" />
  226. <scdata name="OcrReader.Address1" value="127.0.0.1:23" />
  227. <scdata name="OcrReader.Address2" value="127.0.0.1:24" />
  228. <scdata name="Fa.E84.TP1" value="30" />
  229. <scdata name="Fa.E84.TP2" value="30" />
  230. <scdata name="Fa.E84.TP3" value="30" />
  231. <scdata name="Fa.E84.TP4" value="30" />
  232. <scdata name="Fa.E84.TP5" value="30" />
  233. <scdata name="Fa.ConnectionMode" value="Passive" />
  234. <scdata name="Fa.LocalIpAddress" value="127.0.0.1" />
  235. <scdata name="Fa.LocalPortNumber" value="5021" />
  236. <scdata name="Fa.RemoteIpAddress" value="127.0.0.1" />
  237. <scdata name="Fa.RemotePortNumber" value="5020" />
  238. <scdata name="Fa.T3Timeout" value="45" />
  239. <scdata name="Fa.T5Timeout" value="10" />
  240. <scdata name="Fa.T6Timeout" value="5" />
  241. <scdata name="Fa.T7Timeout" value="10" />
  242. <scdata name="Fa.T8Timeout" value="5" />
  243. <scdata name="Fa.EnableSpooling" value="False" />
  244. <scdata name="Fa.FaLinkTestInterval" value="30" />
  245. <scdata name="Fa.FaDefaultCommunicationState" value="Enabled" />
  246. <scdata name="Fa.FaDefaultControlState" value="Online" />
  247. <scdata name="Fa.FaDefaultControlSubState" value="Local" />
  248. <scdata name="Fa.DeviceId" value="0" />
  249. <scdata name="System.FFU.Address" value="COM40" />
  250. <scdata name="System.FFU.DeviceAddress" value="1" />
  251. <scdata name="System.FFU.MaxSpeed" value="1440" />
  252. <scdata name="System.FFU.EnableLogMessage" value="False" />
  253. <scdata name="System.FFU.FFUFanSpeedSetPoint" value="1" />
  254. <scdata name="System.EFEMNUM" value="001" />
  255. <scdata name="System.DeviceType" value="" />
  256. <scdata name="System.IsSimulatorMode" value="True" />
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  277. <scdata name="System.FFUComPortName" value="COM21" />
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  833. <scdata name="CarrierInfo.Carrier15.CarrierSlotsNumber" value="25" />
  834. <scdata name="CarrierInfo.Carrier15.EnableDualTransfer" value="False" />
  835. <scdata name="CarrierInfo.Carrier15.EnableCarrier" value="True" />
  836. <scdata name="CarrierInfo.Carrier15.ForbidAccessAboveWafer" value="False" />
  837. <scdata name="CarrierInfo.Carrier15.MappedByRobot" value="False" />
  838. <scdata name="CarrierInfo.Carrier15.LP1Station" value="0.1" />
  839. <scdata name="CarrierInfo.Carrier15.LP2Station" value="0.2" />
  840. <scdata name="CarrierInfo.Carrier15.LP3Station" value="0.3" />
  841. <scdata name="CarrierInfo.Carrier15.LP4Station" value="0.4" />
  842. <scdata name="CarrierInfo.Carrier15.LP5Station" value="C01" />
  843. <scdata name="CarrierInfo.Carrier15.LP6Station" value="C01" />
  844. <scdata name="CarrierInfo.Carrier15.LP7Station" value="C01" />
  845. <scdata name="CarrierInfo.Carrier15.LP8Station" value="C01" />
  846. <scdata name="CarrierInfo.Carrier15.LP9Station" value="C01" />
  847. <scdata name="CarrierInfo.Carrier15.LP10Station" value="C01" />
  848. <scdata name="CarrierInfo.CarrierName0" value="FOUP1" />
  849. <scdata name="CarrierInfo.CarrierName1" value="FOUP1" />
  850. <scdata name="CarrierInfo.CarrierName2" value="FOUP1" />
  851. <scdata name="CarrierInfo.CarrierName3" value="FOUP1" />
  852. <scdata name="CarrierInfo.CarrierName4" value="FOUP1" />
  853. <scdata name="CarrierInfo.CarrierName5" value="FOUP1" />
  854. <scdata name="CarrierInfo.CarrierName6" value="FOUP1" />
  855. <scdata name="CarrierInfo.CarrierName7" value="FOUP1" />
  856. <scdata name="CarrierInfo.CarrierName8" value="FOUP1" />
  857. <scdata name="CarrierInfo.CarrierName9" value="FOUP1" />
  858. <scdata name="CarrierInfo.CarrierName10" value="FOUP1" />
  859. <scdata name="CarrierInfo.CarrierName11" value="FOUP1" />
  860. <scdata name="CarrierInfo.CarrierName12" value="FOUP1" />
  861. <scdata name="CarrierInfo.CarrierName13" value="FOUP1" />
  862. <scdata name="CarrierInfo.CarrierName14" value="FOUP1" />
  863. <scdata name="CarrierInfo.CarrierName15" value="FOUP1" />
  864. <scdata name="CarrierInfo.Get.Offset0" value="0000,-0000,-0000" />
  865. <scdata name="CarrierInfo.Get.Offset1" value="0000,-0000,-0000" />
  866. <scdata name="CarrierInfo.Get.Offset2" value="0000,-0000,-0000" />
  867. <scdata name="CarrierInfo.Get.Offset3" value="0000,-0000,-0000" />
  868. <scdata name="CarrierInfo.Get.Offset4" value="0000,-0000,-0000" />
  869. <scdata name="CarrierInfo.Get.Offset5" value="0000,-0000,-0000" />
  870. <scdata name="CarrierInfo.Get.Offset6" value="0000,-0000,-0000" />
  871. <scdata name="CarrierInfo.Get.Offset7" value="0000,-0000,-0000" />
  872. <scdata name="CarrierInfo.Get.Offset8" value="0000,-0000,-0000" />
  873. <scdata name="CarrierInfo.Get.Offset9" value="0000,-0000,-0000" />
  874. <scdata name="CarrierInfo.Get.Offset10" value="0000,-0000,-0000" />
  875. <scdata name="CarrierInfo.Get.Offset11" value="0000,-0000,-0000" />
  876. <scdata name="CarrierInfo.Get.Offset12" value="0000,-0000,-0000" />
  877. <scdata name="CarrierInfo.Get.Offset13" value="0000,-0000,-0000" />
  878. <scdata name="CarrierInfo.Get.Offset14" value="0000,-0000,-0000" />
  879. <scdata name="CarrierInfo.Get.Offset15" value="0000,-0000,-0000" />
  880. <scdata name="CarrierInfo.Put.Offset0" value="0000,-0000,-0000" />
  881. <scdata name="CarrierInfo.Put.Offset1" value="0000,-0000,-0000" />
  882. <scdata name="CarrierInfo.Put.Offset2" value="0000,-0000,-0000" />
  883. <scdata name="CarrierInfo.Put.Offset3" value="0000,-0000,-0000" />
  884. <scdata name="CarrierInfo.Put.Offset4" value="0000,-0000,-0000" />
  885. <scdata name="CarrierInfo.Put.Offset5" value="0000,-0000,-0000" />
  886. <scdata name="CarrierInfo.Put.Offset6" value="0000,-0000,-0000" />
  887. <scdata name="CarrierInfo.Put.Offset7" value="0000,-0000,-0000" />
  888. <scdata name="CarrierInfo.Put.Offset8" value="0000,-0000,-0000" />
  889. <scdata name="CarrierInfo.Put.Offset9" value="0000,-0000,-0000" />
  890. <scdata name="CarrierInfo.Put.Offset10" value="0000,-0000,-0000" />
  891. <scdata name="CarrierInfo.Put.Offset11" value="0000,-0000,-0000" />
  892. <scdata name="CarrierInfo.Put.Offset12" value="0000,-0000,-0000" />
  893. <scdata name="CarrierInfo.Put.Offset13" value="0000,-0000,-0000" />
  894. <scdata name="CarrierInfo.Put.Offset14" value="0000,-0000,-0000" />
  895. <scdata name="CarrierInfo.Put.Offset15" value="0000,-0000,-0000" />
  896. <scdata name="CarrierInfo.LP1BankNumber0" value="1" />
  897. <scdata name="CarrierInfo.LP1BankNumber1" value="1" />
  898. <scdata name="CarrierInfo.LP1BankNumber2" value="1" />
  899. <scdata name="CarrierInfo.LP1BankNumber3" value="1" />
  900. <scdata name="CarrierInfo.LP1BankNumber4" value="1" />
  901. <scdata name="CarrierInfo.LP2BankNumber0" value="2" />
  902. <scdata name="CarrierInfo.LP2BankNumber1" value="2" />
  903. <scdata name="CarrierInfo.LP2BankNumber2" value="2" />
  904. <scdata name="CarrierInfo.LP2BankNumber3" value="2" />
  905. <scdata name="CarrierInfo.LP2BankNumber4" value="2" />
  906. <scdata name="CarrierInfo.LP3BankNumber0" value="3" />
  907. <scdata name="CarrierInfo.LP3BankNumber1" value="3" />
  908. <scdata name="CarrierInfo.LP3BankNumber2" value="3" />
  909. <scdata name="CarrierInfo.LP3BankNumber3" value="3" />
  910. <scdata name="CarrierInfo.LP3BankNumber4" value="3" />
  911. <scdata name="CarrierInfo.LP4BankNumber0" value="4" />
  912. <scdata name="CarrierInfo.LP4BankNumber1" value="4" />
  913. <scdata name="CarrierInfo.LP4BankNumber2" value="4" />
  914. <scdata name="CarrierInfo.LP4BankNumber3" value="4" />
  915. <scdata name="CarrierInfo.LP4BankNumber4" value="4" />
  916. <scdata name="CarrierInfo.LP1CassetteNumber0" value="1" />
  917. <scdata name="CarrierInfo.LP1CassetteNumber1" value="1" />
  918. <scdata name="CarrierInfo.LP1CassetteNumber2" value="1" />
  919. <scdata name="CarrierInfo.LP1CassetteNumber3" value="1" />
  920. <scdata name="CarrierInfo.LP1CassetteNumber4" value="1" />
  921. <scdata name="CarrierInfo.LP2CassetteNumber0" value="2" />
  922. <scdata name="CarrierInfo.LP2CassetteNumber1" value="2" />
  923. <scdata name="CarrierInfo.LP2CassetteNumber2" value="2" />
  924. <scdata name="CarrierInfo.LP2CassetteNumber3" value="2" />
  925. <scdata name="CarrierInfo.LP2CassetteNumber4" value="2" />
  926. <scdata name="CarrierInfo.LP3CassetteNumber0" value="3" />
  927. <scdata name="CarrierInfo.LP3CassetteNumber1" value="3" />
  928. <scdata name="CarrierInfo.LP3CassetteNumber2" value="3" />
  929. <scdata name="CarrierInfo.LP3CassetteNumber3" value="3" />
  930. <scdata name="CarrierInfo.LP3CassetteNumber4" value="3" />
  931. <scdata name="CarrierInfo.LP4CassetteNumber0" value="4" />
  932. <scdata name="CarrierInfo.LP4CassetteNumber1" value="4" />
  933. <scdata name="CarrierInfo.LP4CassetteNumber2" value="4" />
  934. <scdata name="CarrierInfo.LP4CassetteNumber3" value="4" />
  935. <scdata name="CarrierInfo.LP4CassetteNumber4" value="4" />
  936. <scdata name="CarrierInfo.Aligner1BankNumber3" value="1" />
  937. <scdata name="CarrierInfo.Aligner1BankNumber4" value="1" />
  938. <scdata name="CarrierInfo.Aligner1BankNumber6" value="1" />
  939. <scdata name="CarrierInfo.Aligner1BankNumber8" value="1" />
  940. <scdata name="CarrierInfo.Aligner1BankNumber12" value="1" />
  941. <scdata name="CarrierInfo.Aligner2BankNumber3" value="1" />
  942. <scdata name="CarrierInfo.Aligner2BankNumber4" value="1" />
  943. <scdata name="CarrierInfo.Aligner2BankNumber6" value="1" />
  944. <scdata name="CarrierInfo.Aligner21BankNumber8" value="1" />
  945. <scdata name="CarrierInfo.Aligner2BankNumber12" value="1" />
  946. <scdata name="CarrierInfo.CoolingBuffer1BankNumber3" value="1" />
  947. <scdata name="CarrierInfo.CoolingBuffer1BankNumber4" value="1" />
  948. <scdata name="CarrierInfo.CoolingBuffer1BankNumber6" value="1" />
  949. <scdata name="CarrierInfo.CoolingBuffer1BankNumber8" value="1" />
  950. <scdata name="CarrierInfo.CoolingBuffer1BankNumber12" value="1" />
  951. <scdata name="CarrierInfo.CoolingBuffer2BankNumber3" value="1" />
  952. <scdata name="CarrierInfo.CoolingBuffer2BankNumber4" value="1" />
  953. <scdata name="CarrierInfo.CoolingBuffer2BankNumber6" value="1" />
  954. <scdata name="CarrierInfo.CoolingBuffer2BankNumber8" value="1" />
  955. <scdata name="CarrierInfo.CoolingBuffer2BankNumber12" value="1" />
  956. <scdata name="CarrierInfo.LL1BankNumber3" value="1" />
  957. <scdata name="CarrierInfo.LL1BankNumber4" value="1" />
  958. <scdata name="CarrierInfo.LL1BankNumber6" value="1" />
  959. <scdata name="CarrierInfo.LL1BankNumber8" value="1" />
  960. <scdata name="CarrierInfo.LL1BankNumber12" value="1" />
  961. <scdata name="CarrierInfo.LL2BankNumber3" value="1" />
  962. <scdata name="CarrierInfo.LL2BankNumber4" value="1" />
  963. <scdata name="CarrierInfo.LL2BankNumber6" value="1" />
  964. <scdata name="CarrierInfo.LL2BankNumber8" value="1" />
  965. <scdata name="CarrierInfo.LL2BankNumber12" value="1" />
  966. <scdata name="CarrierInfo.Aligner1CassetteNumber3" value="1" />
  967. <scdata name="CarrierInfo.Aligner1CassetteNumber4" value="1" />
  968. <scdata name="CarrierInfo.Aligner1CassetteNumber6" value="1" />
  969. <scdata name="CarrierInfo.Aligner1CassetteNumber8" value="1" />
  970. <scdata name="CarrierInfo.Aligner1CassetteNumber12" value="1" />
  971. <scdata name="CarrierInfo.Aligner2CassetteNumber3" value="1" />
  972. <scdata name="CarrierInfo.Aligner2CassetteNumber4" value="1" />
  973. <scdata name="CarrierInfo.Aligner2CassetteNumber6" value="1" />
  974. <scdata name="CarrierInfo.Aligner2CassetteNumber8" value="1" />
  975. <scdata name="CarrierInfo.Aligner2CassetteNumber12" value="1" />
  976. <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber3" value="1" />
  977. <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber4" value="1" />
  978. <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber6" value="1" />
  979. <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber8" value="1" />
  980. <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber12" value="1" />
  981. <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber3" value="1" />
  982. <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber4" value="1" />
  983. <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber6" value="1" />
  984. <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber8" value="1" />
  985. <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber12" value="1" />
  986. <scdata name="CarrierInfo.LL1CassetteNumber3" value="1" />
  987. <scdata name="CarrierInfo.LL1CassetteNumber4" value="1" />
  988. <scdata name="CarrierInfo.LL1CassetteNumber6" value="1" />
  989. <scdata name="CarrierInfo.LL1CassetteNumber8" value="1" />
  990. <scdata name="CarrierInfo.LL1CassetteNumber12" value="1" />
  991. <scdata name="CarrierInfo.LL2CassetteNumber3" value="1" />
  992. <scdata name="CarrierInfo.LL2CassetteNumber4" value="1" />
  993. <scdata name="CarrierInfo.LL2CassetteNumber6" value="1" />
  994. <scdata name="CarrierInfo.LL2CassetteNumber8" value="1" />
  995. <scdata name="CarrierInfo.LL2CassetteNumber12" value="1" />
  996. <scdata name="CarrierInfo.LP1Station" value="3" />
  997. <scdata name="CarrierInfo.LP1Station0" value="3" />
  998. <scdata name="CarrierInfo.LP1Station1" value="3" />
  999. <scdata name="CarrierInfo.LP2Station" value="6" />
  1000. <scdata name="CarrierInfo.LP2Station0" value="6" />
  1001. <scdata name="CarrierInfo.LP2Station1" value="6" />
  1002. <scdata name="CarrierInfo.LP1Station013" value="3" />
  1003. <scdata name="CarrierInfo.LP1Station113" value="3" />
  1004. <scdata name="CarrierInfo.LP2Station013" value="6" />
  1005. <scdata name="CarrierInfo.LP2Station113" value="6" />
  1006. <scdata name="CarrierInfo.AlignerStation" value="9" />
  1007. <scdata name="CarrierInfo.AlignerStation2" value="9" />
  1008. <scdata name="CarrierInfo.AlignerStation3" value="9" />
  1009. <scdata name="CarrierInfo.AlignerStation4" value="9" />
  1010. <scdata name="CarrierInfo.AlignerStation6" value="9" />
  1011. <scdata name="CarrierInfo.AlignerStation8" value="9" />
  1012. <scdata name="CarrierInfo.AlignerStation12" value="9" />
  1013. <scdata name="CarrierInfo.Aligner1Station" value="9" />
  1014. <scdata name="CarrierInfo.Aligner2Station" value="12" />
  1015. <scdata name="CarrierInfo.CoolingBuffer1Station" value="15" />
  1016. <scdata name="CarrierInfo.CoolingBuffer2Station" value="18" />
  1017. <scdata name="CarrierInfo.LL1Station" value="21" />
  1018. <scdata name="CarrierInfo.LL2Station" value="24" />
  1019. <scdata name="CarrierInfo.BufferStation" value="21" />
  1020. <scdata name="CarrierInfo.Buffer1Station" value="21" />
  1021. <scdata name="CarrierInfo.Buffer2Station" value="24" />
  1022. <scdata name="CarrierInfo.LP1Station4" value="3" />
  1023. <scdata name="CarrierInfo.LP2Station4" value="6" />
  1024. <scdata name="CarrierInfo.Aligner1Station4" value="9" />
  1025. <scdata name="CarrierInfo.Aligner2Station4" value="12" />
  1026. <scdata name="CarrierInfo.CoolingBuffer1Station4" value="15" />
  1027. <scdata name="CarrierInfo.CoolingBuffer2Station4" value="18" />
  1028. <scdata name="CarrierInfo.LL1Station4" value="21" />
  1029. <scdata name="CarrierInfo.LL2Station4" value="24" />
  1030. <scdata name="CarrierInfo.Buffer1Station4" value="21" />
  1031. <scdata name="CarrierInfo.Buffer2Station4" value="24" />
  1032. <scdata name="CarrierInfo.BufferStation4" value="12" />
  1033. <scdata name="CarrierInfo.LP1Station6" value="3" />
  1034. <scdata name="CarrierInfo.LP2Station6" value="6" />
  1035. <scdata name="CarrierInfo.Aligner1Station6" value="9" />
  1036. <scdata name="CarrierInfo.Aligner2Station6" value="12" />
  1037. <scdata name="CarrierInfo.CoolingBuffer1Station6" value="15" />
  1038. <scdata name="CarrierInfo.CoolingBuffer2Station6" value="18" />
  1039. <scdata name="CarrierInfo.LL1Station6" value="21" />
  1040. <scdata name="CarrierInfo.LL2Station6" value="24" />
  1041. <scdata name="CarrierInfo.Buffer1Station6" value="21" />
  1042. <scdata name="CarrierInfo.Buffer2Station6" value="24" />
  1043. <scdata name="CarrierInfo.BufferStation6" value="12" />
  1044. <scdata name="CarrierInfo.LP1Station8" value="3" />
  1045. <scdata name="CarrierInfo.LP2Station8" value="6" />
  1046. <scdata name="CarrierInfo.Aligner1Station8" value="9" />
  1047. <scdata name="CarrierInfo.Aligner2Station8" value="12" />
  1048. <scdata name="CarrierInfo.CoolingBuffer1Station8" value="15" />
  1049. <scdata name="CarrierInfo.CoolingBuffer2Station8" value="18" />
  1050. <scdata name="CarrierInfo.LL1Station8" value="21" />
  1051. <scdata name="CarrierInfo.LL2Station8" value="24" />
  1052. <scdata name="CarrierInfo.Buffer1Station8" value="21" />
  1053. <scdata name="CarrierInfo.Buffer2Station8" value="24" />
  1054. <scdata name="CarrierInfo.BufferStation8" value="12" />
  1055. <scdata name="CarrierInfo.TurnOverStationStation" value="27" />
  1056. <scdata name="CarrierInfo.TurnOverStationStation2" value="15" />
  1057. <scdata name="CarrierInfo.TurnOverStationStation3" value="15" />
  1058. <scdata name="CarrierInfo.TurnOverStationStation4" value="15" />
  1059. <scdata name="CarrierInfo.TurnOverStationStation6" value="15" />
  1060. <scdata name="CarrierInfo.TurnOverStationStation8" value="15" />
  1061. <scdata name="CarrierInfo.TurnOverStationStation12" value="15" />
  1062. <scdata name="CarrierInfo.LP1ThicknessType" value="Thick" />
  1063. <scdata name="CarrierInfo.LP2ThicknessType" value="Thick" />
  1064. <scdata name="CarrierInfo.CoolingBuffer1ThicknessType" value="NONE" />
  1065. <scdata name="CarrierInfo.CoolingBuffer2ThicknessType" value="NONE" />
  1066. <scdata name="CarrierInfo.Aligner1ThicknessType" value="NONE" />
  1067. <scdata name="CarrierInfo.Aligner2ThicknessType" value="NONE" />
  1068. <scdata name="CarrierInfo.LL1ThicknessType" value="NONE" />
  1069. <scdata name="CarrierInfo.LL2ThicknessType" value="NONE" />
  1070. <scdata name="CarrierInfo.Buffer1ThicknessType" value="NONE" />
  1071. <scdata name="CarrierInfo.Buffer2ThicknessType" value="NONE" />
  1072. <scdata name="CarrierInfo.UpperThicknessType" value="Thick" />
  1073. <scdata name="CarrierInfo.LowerThicknessType" value="Thick" />
  1074. </root>