123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074 |
- <?xml version="1.0" encoding="utf-8"?>
- <root>
- <scdata name="LoadPort.LP1.PortName" value="COM11" />
- <scdata name="LoadPort.LP1.TimeLimitAction" value="130" />
- <scdata name="LoadPort.LP1.CarrierIDStartString" value="LOT:" />
- <scdata name="LoadPort.LP1.CarrierIDEndString" value="QTY:" />
- <scdata name="LoadPort.LP1.AutoDetectCarrierType" value="False" />
- <scdata name="LoadPort.LP1.SlotsNumber" value="25" />
- <scdata name="LoadPort.LP1.Disable" value="False" />
- <scdata name="LoadPort.LP1.CarrierIndex" value="0" />
- <scdata name="LoadPort.LP1.CstType" value="0" />
- <scdata name="LoadPort.LP2.PortName" value="COM13" />
- <scdata name="LoadPort.LP2.TimeLimitAction" value="120" />
- <scdata name="LoadPort.LP2.CarrierIDStartString" value="LOT:" />
- <scdata name="LoadPort.LP2.CarrierIDEndString" value="QTY:" />
- <scdata name="LoadPort.LP2.AutoDetectCarrierType" value="False" />
- <scdata name="LoadPort.LP2.SlotsNumber" value="25" />
- <scdata name="LoadPort.LP2.Disable" value="False" />
- <scdata name="LoadPort.LP2.CarrierIndex" value="0" />
- <scdata name="LoadPort.LP2.CstType" value="0" />
- <scdata name="LoadPort.WaitLoadTimeOut" value="15" />
- <scdata name="LoadPort.TimeLimitLoadportHome" value="60" />
- <scdata name="LoadPort.TimeLimitLoadportLoad" value="31" />
- <scdata name="LoadPort.TimeLimitLoadportUnload" value="20" />
- <scdata name="LoadPort.TimeLimitLoadportClamp" value="11" />
- <scdata name="LoadPort.TimeLimitReadRFID" value="9" />
- <scdata name="LoadPort.TimeLimitWriteRFID" value="10" />
- <scdata name="LoadPort.EnableAutoLockWhenCassetteArrived" value="False" />
- <scdata name="LoadPort.EnableAutoDockAfterIdRead" value="True" />
- <scdata name="LoadPort.EnableAutoCarrierIdReadAfterLatch" value="True" />
- <scdata name="LoadPort.EnableAutoMappingAfterDock" value="True" />
- <scdata name="LoadPort.EnableAutoUndockAfterUndocking" value="True" />
- <scdata name="LoadPort.EnablePauseWhenVerifyIDFailed" value="True" />
- <scdata name="LoadPort.TimeDelayNotifyCassettePresent" value="100" />
- <scdata name="LoadPort.LoadPort1CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort2CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort3CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort4CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort5CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort6CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort7CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort8CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort9CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort10CarrierMode" value="1" />
- <scdata name="LoadPort.LoadPort1CarrierLabel" value="LP1" />
- <scdata name="LoadPort.LoadPort2CarrierLabel" value="LP2" />
- <scdata name="LoadPort.LoadPort3CarrierLabel" value="LP3" />
- <scdata name="LoadPort.LoadPort4CarrierLabel" value="LP4" />
- <scdata name="LoadPort.LoadPort5CarrierLabel" value="LP5" />
- <scdata name="LoadPort.LoadPort6CarrierLabel" value="LP6" />
- <scdata name="LoadPort.LoadPort7CarrierLabel" value="LP7" />
- <scdata name="LoadPort.LoadPort8CarrierLabel" value="LP8" />
- <scdata name="LoadPort.LoadPort9CarrierLabel" value="LP9" />
- <scdata name="LoadPort.LoadPort10CarrierLabel" value="LP10" />
- <scdata name="LoadPort.LoadPort1CarrierIdReaderPortName" value="COM21" />
- <scdata name="LoadPort.LoadPort2CarrierIdReaderPortName" value="COM23" />
- <scdata name="LoadPort.LoadPort3CarrierIdReaderPortName" value="COM25" />
- <scdata name="LoadPort.LoadPort4CarrierIdReaderPortName" value="COM27" />
- <scdata name="LoadPort.LoadPort5CarrierIdReaderPortName" value="COM29" />
- <scdata name="LoadPort.LoadPort6CarrierIdReaderPortName" value="COM31" />
- <scdata name="LoadPort.LoadPort7CarrierIdReaderPortName" value="COM7" />
- <scdata name="LoadPort.LoadPort8CarrierIdReaderPortName" value="COM8" />
- <scdata name="LoadPort.LoadPort9CarrierIdReaderPortName" value="COM9" />
- <scdata name="LoadPort.LoadPort10CarrierIdReaderPortName" value="COM10" />
- <scdata name="LoadPort.LoadPort1PortName" value="COM1" />
- <scdata name="LoadPort.LoadPort2PortName" value="COM3" />
- <scdata name="LoadPort.LoadPort3PortName" value="COM5" />
- <scdata name="LoadPort.LoadPort4PortName" value="COM7" />
- <scdata name="LoadPort.LoadPort1CarrierIdReaderAddress" value="127.0.0.1:7091" />
- <scdata name="LoadPort.LoadPort2CarrierIdReaderAddress" value="127.0.0.1:7092" />
- <scdata name="LoadPort.LoadPort3CarrierIdReaderAddress" value="127.0.0.1:7093" />
- <scdata name="LoadPort.LoadPort4CarrierIdReaderAddress" value="127.0.0.1:7094" />
- <scdata name="LoadPort.LoadPort5CarrierIdReaderAddress" value="127.0.0.1:7095" />
- <scdata name="LoadPort.LoadPort6CarrierIdReaderAddress" value="127.0.0.1:7096" />
- <scdata name="LoadPort.LoadPort7CarrierIdReaderAddress" value="127.0.0.1:7097" />
- <scdata name="LoadPort.LoadPort8CarrierIdReaderAddress" value="127.0.0.1:7098" />
- <scdata name="LoadPort.LoadPort9CarrierIdReaderAddress" value="127.0.0.1:7099" />
- <scdata name="LoadPort.LoadPort10CarrierIdReaderAddress" value="127.0.0.1:7100" />
- <scdata name="LoadPort.LoadPort1CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort2CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort3CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort4CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort5CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort6CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort7CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort8CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort9CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort10CarrierIdReaderPage" value="00000004" />
- <scdata name="LoadPort.LoadPort1CassetteType" value="FOUP" />
- <scdata name="LoadPort.LoadPort2CassetteType" value="FOUP" />
- <scdata name="LoadPort.LoadPort3CassetteType" value="FOUP" />
- <scdata name="LoadPort.LoadPort4CassetteType" value="FOUP" />
- <scdata name="LoadPort.DefaultUseRFIDForCarrierIdRead" value="True" />
- <scdata name="Robot.Robot.Address" value="127.0.0.1:10110" />
- <scdata name="Robot.Robot.SpeedLevel" value="3" />
- <scdata name="Robot.Robot.ExistInterval" value="100" />
- <scdata name="Robot.Robot.IsVacuumMode" value="True" />
- <scdata name="Robot.Robot.BodyNumber" value="1" />
- <scdata name="Robot.Robot.PortName" value="COM27" />
- <scdata name="Robot.Robot.RobotModel" value="T-00902H" />
- <scdata name="Robot.Robot.RobotZSpeed" value="20" />
- <scdata name="Robot.Robot.RobotABWSpeed" value="50" />
- <scdata name="Robot.Robot.Speed" value="980" />
- <scdata name="Robot.Robot.RobotSpeed" value="98" />
- <scdata name="Robot.Robot.EnableLogMessage" value="True" />
- <scdata name="Robot.Robot.TimeLimitRobotCommand" value="60" />
- <scdata name="Robot.Robot.MotionTimeout" value="60" />
- <scdata name="Robot.Robot.EnableGotoReady" value="True" />
- <scdata name="Robot.Robot.GotoReadyXSpeedForPick" value="1" />
- <scdata name="Robot.Robot.GotoReadyZDistanceForPick" value="0" />
- <scdata name="Robot.Robot.GotoReadyXCheckWaferForPlace" value="0" />
- <scdata name="Robot.Robot.GotoReadyCICheckWaferForPlace" value="0" />
- <scdata name="Robot.Robot.GotoReadyXSpeedForPlace" value="1" />
- <scdata name="Robot.Robot.GotoReadyCISpeedForPlace" value="1" />
- <scdata name="Robot.Robot.GotoReadyZDistanceForPlace" value="0" />
- <scdata name="Robot.Robot.InitCmdNO" value="1" />
- <scdata name="Robot.Robot.LeftPickCmdNO" value="2" />
- <scdata name="Robot.Robot.RightPickCmdNO" value="3" />
- <scdata name="Robot.Robot.DualPickCmdNO" value="4" />
- <scdata name="Robot.Robot.LeftPlaceCmdNO" value="5" />
- <scdata name="Robot.Robot.RightPlaceCmdNO" value="6" />
- <scdata name="Robot.Robot.DualPlaceCmdNO" value="7" />
- <scdata name="Robot.Robot.LeftPickSwapCmdNO" value="8" />
- <scdata name="Robot.Robot.RightPickSwapCmdNO" value="9" />
- <scdata name="Robot.Robot.MapCmdNO" value="3" />
- <scdata name="Robot.Offset.OffsetXMax" value="99999" />
- <scdata name="Robot.Offset.OffsetXMin" value="-9999" />
- <scdata name="Robot.Offset.OffsetYMax" value="99999" />
- <scdata name="Robot.Offset.OffsetYMin" value="-9999" />
- <scdata name="Robot.Offset.OffsetZMax" value="99999" />
- <scdata name="Robot.Offset.OffsetZMin" value="-9999" />
- <scdata name="Robot.OffsetForLL.LLAGET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LLAPUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LLAEXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LLBGET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LLBPUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LLBEXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL1GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL1PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL1EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL2GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL2PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL2EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL3GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL3PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL3EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL4GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL4PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL4EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL5GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL5PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL5EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL6GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL6PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL6EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL7GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL7PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL7EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL8GET" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL8PUT" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLL.LL8EXCHANGE" value="0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type1" value="FOUP,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type2" value="FOUP2,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type3" value="FOUP3,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type4" value="FOUP4,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type5" value="FOUP5,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type6" value="FOUP6,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type7" value="FOUP7,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type8" value="FOUP8,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type9" value="FOUP9,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type10" value="FOUP10,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type11" value="FOUP11,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type12" value="FOUP12,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type13" value="FOUP13,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type14" value="FOUP14,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type15" value="FOUP15,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type16" value="FOUP16,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type17" value="FOUP17,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type18" value="FOUP18,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type19" value="FOUP19,0000,-0000,-0000" />
- <scdata name="Robot.OffsetForLP.Type20" value="FOUP20,0000,-0000,-0000" />
- <scdata name="Robot.BladeUpDownReverse" value="False" />
- <scdata name="Robot.Blade1Enable" value="True" />
- <scdata name="Robot.Blade2Enable" value="True" />
- <scdata name="Robot.Blade2Slots" value="1" />
- <scdata name="Robot.RobotSpeed" value="1" />
- <scdata name="Robot.TimeLimitRobotCommand" value="2" />
- <scdata name="Robot.TimeLimitRobotHome" value="30" />
- <scdata name="Robot.TimeLimitForPickWafer" value="10" />
- <scdata name="Robot.TimeLimitForPlaceWafer" value="20" />
- <scdata name="Robot.TimeLimitForExchangeWafer" value="10" />
- <scdata name="Robot.RobotCommunicationToken" value="0" />
- <scdata name="Robot.DualBlade1TransferEnable" value="True" />
- <scdata name="Robot.Address" value="127.0.0.1:10110" />
- <scdata name="Robot.SlotCount" value="1" />
- <scdata name="Robot.WaferSize3MappingOffset" value="2183900" />
- <scdata name="Robot.WaferSize4MappingOffset" value="2285000" />
- <scdata name="Robot.WaferSize6MappingOffset" value="2545000" />
- <scdata name="MotionAxis.AccSpeed" value="1000" />
- <scdata name="MotionAxis.JogSpeed" value="1000" />
- <scdata name="MotionAxis.AutoSpeed" value="10000" />
- <scdata name="MotionAxis.MoveTimeout" value="30" />
- <scdata name="MotionAxis.HomeTimeout" value="60" />
- <scdata name="Aligner1.TimeLimitAlignerHome" value="30" />
- <scdata name="Aligner1.TimeLimitForAlignWafer" value="9" />
- <scdata name="Aligner1.AlignerCommunicationToken" value="0" />
- <scdata name="Aligner1.AlignerReadAngle" value="0" />
- <scdata name="Aligner1.AlignerDefaultAngle" value="0" />
- <scdata name="Aligner1.Address" value="127.0.0.1:10118" />
- <scdata name="Aligner1.IsEnable" value="True" />
- <scdata name="Aligner2.TimeLimitAlignerHome" value="30" />
- <scdata name="Aligner2.TimeLimitForAlignWafer" value="9" />
- <scdata name="Aligner2.AlignerCommunicationToken" value="0" />
- <scdata name="Aligner2.AlignerReadAngle" value="0" />
- <scdata name="Aligner2.AlignerDefaultAngle" value="0" />
- <scdata name="Aligner2.Address" value="127.0.0.1:10119" />
- <scdata name="Aligner2.IsEnable" value="True" />
- <scdata name="OcrReader.TimeLimitForWID" value="9" />
- <scdata name="OcrReader.EnableReadLaserMarker1" value="True" />
- <scdata name="OcrReader.EnableReadLaserMarker2" value="True" />
- <scdata name="OcrReader.ReaderJob1Main" value="" />
- <scdata name="OcrReader.ReaderJob1Slave" value="" />
- <scdata name="OcrReader.ReaderJob2Main" value="" />
- <scdata name="OcrReader.ReaderJob2Slave" value="" />
- <scdata name="OcrReader.EnablePauseOnWaferIdVerifyFailed" value="False" />
- <scdata name="OcrReader.Address1" value="127.0.0.1:23" />
- <scdata name="OcrReader.Address2" value="127.0.0.1:24" />
- <scdata name="Fa.E84.TP1" value="30" />
- <scdata name="Fa.E84.TP2" value="30" />
- <scdata name="Fa.E84.TP3" value="30" />
- <scdata name="Fa.E84.TP4" value="30" />
- <scdata name="Fa.E84.TP5" value="30" />
- <scdata name="Fa.ConnectionMode" value="Passive" />
- <scdata name="Fa.LocalIpAddress" value="127.0.0.1" />
- <scdata name="Fa.LocalPortNumber" value="5021" />
- <scdata name="Fa.RemoteIpAddress" value="127.0.0.1" />
- <scdata name="Fa.RemotePortNumber" value="5020" />
- <scdata name="Fa.T3Timeout" value="45" />
- <scdata name="Fa.T5Timeout" value="10" />
- <scdata name="Fa.T6Timeout" value="5" />
- <scdata name="Fa.T7Timeout" value="10" />
- <scdata name="Fa.T8Timeout" value="5" />
- <scdata name="Fa.EnableSpooling" value="False" />
- <scdata name="Fa.FaLinkTestInterval" value="30" />
- <scdata name="Fa.FaDefaultCommunicationState" value="Enabled" />
- <scdata name="Fa.FaDefaultControlState" value="Online" />
- <scdata name="Fa.FaDefaultControlSubState" value="Local" />
- <scdata name="Fa.DeviceId" value="0" />
- <scdata name="System.FFU.Address" value="COM40" />
- <scdata name="System.FFU.DeviceAddress" value="1" />
- <scdata name="System.FFU.MaxSpeed" value="1440" />
- <scdata name="System.FFU.EnableLogMessage" value="False" />
- <scdata name="System.FFU.FFUFanSpeedSetPoint" value="1" />
- <scdata name="System.EFEMNUM" value="001" />
- <scdata name="System.DeviceType" value="" />
- <scdata name="System.IsSimulatorMode" value="True" />
- <scdata name="System.ConfigDO32AsBuzzer" value="False" />
- <scdata name="System.ShowWaferID" value="False" />
- <scdata name="System.TotalWaferCount" value="0" />
- <scdata name="System.WaferDisplayMode" value="0" />
- <scdata name="System.EnableRobotGripAndUngrip" value="True" />
- <scdata name="System.EnableUpender" value="False" />
- <scdata name="System.EnableAligner" value="False" />
- <scdata name="System.EnableOcrReader2" value="False" />
- <scdata name="System.EnableOcrReader1" value="False" />
- <scdata name="System.EnableRFIDReaderLP1" value="False" />
- <scdata name="System.EnableRFIDReaderLP2" value="False" />
- <scdata name="System.EnableRFIDReaderLP3" value="False" />
- <scdata name="System.EnableRFIDReaderLP4" value="False" />
- <scdata name="System.EnableRFIDReaderLP5" value="False" />
- <scdata name="System.EnableRFIDReaderLP6" value="False" />
- <scdata name="System.EnableRFIDReaderLP7" value="False" />
- <scdata name="System.EnableRFIDReaderLP8" value="False" />
- <scdata name="System.EnableRFIDReaderLP9" value="False" />
- <scdata name="System.EnableRFIDReaderLP10" value="False" />
- <scdata name="System.EfemPortNumber" value="13000" />
- <scdata name="System.FFUComPortName" value="COM21" />
- <scdata name="System.FFUSetSpeed" value="800" />
- <scdata name="System.AdamAdapterIp" value="10.0.0.1" />
- <scdata name="System.OnlyLotId" value="True" />
- <scdata name="System.EfemServerLocalIp" value="127.0.0.1" />
- <scdata name="System.TimeLimitEfemComandDelay" value="600" />
- <scdata name="System.AlignerPinDownDelay" value="0" />
- <scdata name="System.CoolingPinDownDelay" value="0" />
- <scdata name="System.AdamAdapterPort" value="502" />
- <scdata name="System.PressureDiffChannel" value="0" />
- <scdata name="System.FFUSpeedSet" value="8" />
- <scdata name="System.PressureDiffMaxPressure" value="30" />
- <scdata name="System.PressureDiffMinPressure" value="-30" />
- <scdata name="System.PressureDiffLowWarning" value="-30" />
- <scdata name="System.PressureDiffLowLowAlarm" value="-30" />
- <scdata name="System.PressureDiffHighWarning" value="-30" />
- <scdata name="System.PressureDiffHighHighAlarm" value="-30" />
- <scdata name="System.IsLoadLockDoorAlwaysOpen" value="True" />
- <scdata name="System.IsLoadLockEnableZMotion" value="True" />
- <scdata name="System.IsErrorReportEnable" value="False" />
- <scdata name="System.IsEnableIdentifyThickness" value="False" />
- <scdata name="System.IsEnableMultiWaferSize" value="True" />
- <scdata name="System.IsEnableMultiWaferSizeShow" value="True" />
- <scdata name="System.IsEnableMoveInDiffSlotsNumLP" value="False" />
- <scdata name="System.IsEnableBufferMap" value="True" />
- <scdata name="System.BufferSlotCount" value="8" />
- <scdata name="System.Buffer1SlotCount" value="8" />
- <scdata name="System.Buffer2SlotCount" value="8" />
- <scdata name="System.Buffer1WaferSize" value="8" />
- <scdata name="System.Buffer2WaferSize" value="8" />
- <scdata name="System.CoolingBuffer1Disable" value="False" />
- <scdata name="System.CoolingBuffer2Disable" value="False" />
- <scdata name="System.Aligner1Disable" value="False" />
- <scdata name="System.Aligner2Disable" value="False" />
- <scdata name="System.StopIonizerWorkingEnable" value="False" />
- <scdata name="System.LPRobotActionIntervene" value="True" />
- <scdata name="System.IsSlotShowOpposite" value="False" />
- <scdata name="Process.DelayBeforeWaferPutToLL" value="0" />
- <scdata name="Process.DelayAfterWaferPickFromLL" value="0" />
- <scdata name="Process.CycleEnable" value="True" />
- <scdata name="Process.CycleCount" value="2" />
- <scdata name="Process.CycleEnableAutoUnload" value="True" />
- <scdata name="Process.CycleEnableAlign" value="False" />
- <scdata name="Process.CycleEnableLaserMarker1" value="False" />
- <scdata name="Process.CycleEnableLaserMarker2" value="False" />
- <scdata name="Process.TransferStopImmediately" value="False" />
- <scdata name="Process.EnableAutoUndockAfterProcessComplete" value="False" />
- <scdata name="Process.OptionLoadportMonitor" value="True" />
- <scdata name="Process.OptionMainternaceMonitor" value="0" />
- <scdata name="Process.OptionSignalTowerMonitor" value="0" />
- <scdata name="Process.CycleSwapHand" value="False" />
- <scdata name="Process.CyclePlaceMode" value="3" />
- <scdata name="Server.SendReadyInterval" value="1000" />
- <scdata name="Coolbuffer.UpTimeout" value="20" />
- <scdata name="Coolbuffer.DownTimeout" value="20" />
- <scdata name="CarrierID.RFIDReaderA.PortName" value="COM1" />
- <scdata name="CarrierID.RFIDReaderA.BaudRate" value="9600" />
- <scdata name="CarrierID.RFIDReaderA.DataBits" value="8" />
- <scdata name="CarrierID.RFIDReaderA.Parity" value="0" />
- <scdata name="CarrierID.RFIDReaderA.StopBits" value="1" />
- <scdata name="CarrierID.RFIDReaderA.EnableLogMessage" value="True" />
- <scdata name="CarrierID.RFIDReaderA.Address" value="127.0.0.1:7001" />
- <scdata name="CarrierID.RFIDReaderA.RetryTime" value="10" />
- <scdata name="CarrierID.RFIDReaderA.CarrierIdNeedTrimSpace" value="True" />
- <scdata name="CarrierID.RFIDReaderA.ActionTimeLimit" value="10" />
- <scdata name="CarrierID.RFIDReaderB.PortName" value="COM3" />
- <scdata name="CarrierID.RFIDReaderB.BaudRate" value="9600" />
- <scdata name="CarrierID.RFIDReaderB.DataBits" value="8" />
- <scdata name="CarrierID.RFIDReaderB.Parity" value="0" />
- <scdata name="CarrierID.RFIDReaderB.StopBits" value="1" />
- <scdata name="CarrierID.RFIDReaderB.EnableLogMessage" value="True" />
- <scdata name="CarrierID.RFIDReaderB.Address" value="127.0.0.1:7002" />
- <scdata name="CarrierID.RFIDReaderB.RetryTime" value="10" />
- <scdata name="CarrierID.RFIDReaderB.CarrierIdNeedTrimSpace" value="True" />
- <scdata name="CarrierID.RFIDReaderB.ActionTimeLimit" value="10" />
- <scdata name="CarrierID.BarcodeReaderA.PortName" value="COM1" />
- <scdata name="CarrierID.BarcodeReaderA.BaudRate" value="9600" />
- <scdata name="CarrierID.BarcodeReaderA.DataBits" value="8" />
- <scdata name="CarrierID.BarcodeReaderA.Parity" value="0" />
- <scdata name="CarrierID.BarcodeReaderA.StopBits" value="1" />
- <scdata name="CarrierID.BarcodeReaderA.EnableLogMessage" value="True" />
- <scdata name="CarrierID.BarcodeReaderA.Address" value="127.0.0.1:55256" />
- <scdata name="CarrierID.BarcodeReaderA.Type" value="1" />
- <scdata name="CarrierID.BarcodeReaderB.PortName" value="COM1" />
- <scdata name="CarrierID.BarcodeReaderB.BaudRate" value="9600" />
- <scdata name="CarrierID.BarcodeReaderB.DataBits" value="8" />
- <scdata name="CarrierID.BarcodeReaderB.Parity" value="0" />
- <scdata name="CarrierID.BarcodeReaderB.StopBits" value="1" />
- <scdata name="CarrierID.BarcodeReaderB.EnableLogMessage" value="True" />
- <scdata name="CarrierID.BarcodeReaderB.Address" value="127.0.0.1:55257" />
- <scdata name="CarrierID.BarcodeReaderB.Type" value="1" />
- <scdata name="CarrierInfo.Carrier0.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier0.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier0.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier0.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier0.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier0.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier0.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier0.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier0.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier0.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier0.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier0.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier0.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier0.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier0.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier0.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier0.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier0.EnableCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier0.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier0.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier0.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier0.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier0.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier0.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier0.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier0.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier0.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier0.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier0.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier0.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier1.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier1.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier1.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier1.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier1.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier1.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier1.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier1.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier1.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier1.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier1.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier1.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier1.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier1.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier1.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier1.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier1.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier1.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier1.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier1.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier1.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier1.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier1.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier1.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier1.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier1.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier1.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier1.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier1.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier1.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier2.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier2.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier2.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier2.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier2.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier2.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier2.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier2.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier2.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier2.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier2.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier2.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier2.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier2.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier2.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier2.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier2.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier2.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier2.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier2.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier2.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier2.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier2.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier2.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier2.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier2.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier2.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier2.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier2.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier2.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier3.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier3.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier3.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier3.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier3.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier3.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier3.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier3.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier3.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier3.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier3.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier3.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier3.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier3.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier3.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier3.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier3.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier3.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier3.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier3.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier3.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier3.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier3.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier3.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier3.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier3.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier3.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier3.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier3.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier3.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier4.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier4.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier4.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier4.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier4.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier4.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier4.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier4.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier4.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier4.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier4.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier4.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier4.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier4.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier4.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier4.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier4.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier4.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier4.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier4.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier4.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier4.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier4.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier4.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier4.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier4.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier4.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier4.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier4.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier4.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier5.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier5.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier5.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier5.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier5.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier5.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier5.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier5.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier5.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier5.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier5.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier5.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier5.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier5.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier5.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier5.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier5.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier5.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier5.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier5.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier5.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier5.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier5.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier5.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier5.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier5.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier5.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier5.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier5.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier5.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier6.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier6.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier6.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier6.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier6.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier6.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier6.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier6.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier6.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier6.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier6.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier6.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier6.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier6.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier6.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier6.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier6.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier6.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier6.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier6.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier6.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier6.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier6.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier6.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier6.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier6.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier6.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier6.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier6.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier6.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier7.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier7.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier7.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier7.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier7.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier7.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier7.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier7.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier7.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier7.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier7.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier7.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier7.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier7.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier7.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier7.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier7.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier7.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier7.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier7.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier7.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier7.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier7.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier7.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier7.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier7.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier7.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier7.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier7.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier7.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier8.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier8.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier8.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier8.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier8.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier8.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier8.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier8.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier8.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier8.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier8.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier8.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier8.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier8.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier8.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier8.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier8.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier8.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier8.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier8.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier8.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier8.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier8.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier8.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier8.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier8.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier8.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier8.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier8.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier8.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier9.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier9.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier9.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier9.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier9.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier9.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier9.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier9.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier9.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier9.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier9.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier9.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier9.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier9.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier9.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier9.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier9.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier9.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier9.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier9.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier9.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier9.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier9.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier9.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier9.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier9.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier9.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier9.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier9.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier9.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier10.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier10.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier10.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier10.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier10.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier10.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier10.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier10.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier10.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier10.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier10.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier10.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier10.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier10.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier10.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier10.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier10.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier10.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier10.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier10.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier10.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier10.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier10.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier10.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier10.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier10.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier10.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier10.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier10.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier10.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier11.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier11.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier11.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier11.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier11.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier11.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier11.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier11.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier11.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier11.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier11.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier11.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier11.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier11.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier11.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier11.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier11.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier11.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier11.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier11.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier11.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier11.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier11.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier11.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier11.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier11.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier11.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier11.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier11.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier11.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier12.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier12.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier12.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier12.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier12.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier12.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier12.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier12.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier12.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier12.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier12.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier12.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier12.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier12.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier12.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier12.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier12.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier12.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier12.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier12.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier12.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier12.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier12.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier12.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier12.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier12.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier12.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier12.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier12.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier12.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier13.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier13.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier13.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier13.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier13.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier13.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier13.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier13.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier13.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier13.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier13.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier13.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier13.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier13.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier13.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier13.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier13.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier13.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier13.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier13.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier13.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier13.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier13.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier13.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier13.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier13.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier13.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier13.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier13.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier13.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier14.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier14.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier14.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier14.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier14.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier14.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier14.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier14.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier14.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier14.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier14.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier14.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier14.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier14.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier14.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier14.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier14.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier14.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier14.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier14.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier14.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier14.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier14.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier14.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier14.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier14.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier14.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier14.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier14.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier14.LP10Station" value="C01" />
- <scdata name="CarrierInfo.Carrier15.ThicknessLowLimit" value="10" />
- <scdata name="CarrierInfo.Carrier15.ThicknessHighLimit" value="5000" />
- <scdata name="CarrierInfo.Carrier15.SlotPositionBaseLine" value="75000" />
- <scdata name="CarrierInfo.Carrier15.SlotPitch" value="10000" />
- <scdata name="CarrierInfo.Carrier15.WaferCenterDeviationLimit" value="2000" />
- <scdata name="CarrierInfo.Carrier15.CarrierName" value="FOUP1" />
- <scdata name="CarrierInfo.Carrier15.GetOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier15.PutOffset" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Carrier15.CIDReaderIndex" value="0" />
- <scdata name="CarrierInfo.Carrier15.CarrierFosbMode" value="False" />
- <scdata name="CarrierInfo.Carrier15.CarrierWaferSize" value="12" />
- <scdata name="CarrierInfo.Carrier15.NeedCheckIronDoorCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier15.KeepClampedAfterUnloadCarrier" value="False" />
- <scdata name="CarrierInfo.Carrier15.DisableEvenSlot" value="False" />
- <scdata name="CarrierInfo.Carrier15.DisableOddSlot" value="False" />
- <scdata name="CarrierInfo.Carrier15.CarrierSlotsNumber" value="25" />
- <scdata name="CarrierInfo.Carrier15.EnableDualTransfer" value="False" />
- <scdata name="CarrierInfo.Carrier15.EnableCarrier" value="True" />
- <scdata name="CarrierInfo.Carrier15.ForbidAccessAboveWafer" value="False" />
- <scdata name="CarrierInfo.Carrier15.MappedByRobot" value="False" />
- <scdata name="CarrierInfo.Carrier15.LP1Station" value="0.1" />
- <scdata name="CarrierInfo.Carrier15.LP2Station" value="0.2" />
- <scdata name="CarrierInfo.Carrier15.LP3Station" value="0.3" />
- <scdata name="CarrierInfo.Carrier15.LP4Station" value="0.4" />
- <scdata name="CarrierInfo.Carrier15.LP5Station" value="C01" />
- <scdata name="CarrierInfo.Carrier15.LP6Station" value="C01" />
- <scdata name="CarrierInfo.Carrier15.LP7Station" value="C01" />
- <scdata name="CarrierInfo.Carrier15.LP8Station" value="C01" />
- <scdata name="CarrierInfo.Carrier15.LP9Station" value="C01" />
- <scdata name="CarrierInfo.Carrier15.LP10Station" value="C01" />
- <scdata name="CarrierInfo.CarrierName0" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName1" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName2" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName3" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName4" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName5" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName6" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName7" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName8" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName9" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName10" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName11" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName12" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName13" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName14" value="FOUP1" />
- <scdata name="CarrierInfo.CarrierName15" value="FOUP1" />
- <scdata name="CarrierInfo.Get.Offset0" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset1" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset2" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset3" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset4" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset5" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset6" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset7" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset8" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset9" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset10" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset11" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset12" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset13" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset14" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Get.Offset15" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset0" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset1" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset2" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset3" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset4" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset5" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset6" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset7" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset8" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset9" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset10" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset11" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset12" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset13" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset14" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.Put.Offset15" value="0000,-0000,-0000" />
- <scdata name="CarrierInfo.LP1BankNumber0" value="1" />
- <scdata name="CarrierInfo.LP1BankNumber1" value="1" />
- <scdata name="CarrierInfo.LP1BankNumber2" value="1" />
- <scdata name="CarrierInfo.LP1BankNumber3" value="1" />
- <scdata name="CarrierInfo.LP1BankNumber4" value="1" />
- <scdata name="CarrierInfo.LP2BankNumber0" value="2" />
- <scdata name="CarrierInfo.LP2BankNumber1" value="2" />
- <scdata name="CarrierInfo.LP2BankNumber2" value="2" />
- <scdata name="CarrierInfo.LP2BankNumber3" value="2" />
- <scdata name="CarrierInfo.LP2BankNumber4" value="2" />
- <scdata name="CarrierInfo.LP3BankNumber0" value="3" />
- <scdata name="CarrierInfo.LP3BankNumber1" value="3" />
- <scdata name="CarrierInfo.LP3BankNumber2" value="3" />
- <scdata name="CarrierInfo.LP3BankNumber3" value="3" />
- <scdata name="CarrierInfo.LP3BankNumber4" value="3" />
- <scdata name="CarrierInfo.LP4BankNumber0" value="4" />
- <scdata name="CarrierInfo.LP4BankNumber1" value="4" />
- <scdata name="CarrierInfo.LP4BankNumber2" value="4" />
- <scdata name="CarrierInfo.LP4BankNumber3" value="4" />
- <scdata name="CarrierInfo.LP4BankNumber4" value="4" />
- <scdata name="CarrierInfo.LP1CassetteNumber0" value="1" />
- <scdata name="CarrierInfo.LP1CassetteNumber1" value="1" />
- <scdata name="CarrierInfo.LP1CassetteNumber2" value="1" />
- <scdata name="CarrierInfo.LP1CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.LP1CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.LP2CassetteNumber0" value="2" />
- <scdata name="CarrierInfo.LP2CassetteNumber1" value="2" />
- <scdata name="CarrierInfo.LP2CassetteNumber2" value="2" />
- <scdata name="CarrierInfo.LP2CassetteNumber3" value="2" />
- <scdata name="CarrierInfo.LP2CassetteNumber4" value="2" />
- <scdata name="CarrierInfo.LP3CassetteNumber0" value="3" />
- <scdata name="CarrierInfo.LP3CassetteNumber1" value="3" />
- <scdata name="CarrierInfo.LP3CassetteNumber2" value="3" />
- <scdata name="CarrierInfo.LP3CassetteNumber3" value="3" />
- <scdata name="CarrierInfo.LP3CassetteNumber4" value="3" />
- <scdata name="CarrierInfo.LP4CassetteNumber0" value="4" />
- <scdata name="CarrierInfo.LP4CassetteNumber1" value="4" />
- <scdata name="CarrierInfo.LP4CassetteNumber2" value="4" />
- <scdata name="CarrierInfo.LP4CassetteNumber3" value="4" />
- <scdata name="CarrierInfo.LP4CassetteNumber4" value="4" />
- <scdata name="CarrierInfo.Aligner1BankNumber3" value="1" />
- <scdata name="CarrierInfo.Aligner1BankNumber4" value="1" />
- <scdata name="CarrierInfo.Aligner1BankNumber6" value="1" />
- <scdata name="CarrierInfo.Aligner1BankNumber8" value="1" />
- <scdata name="CarrierInfo.Aligner1BankNumber12" value="1" />
- <scdata name="CarrierInfo.Aligner2BankNumber3" value="1" />
- <scdata name="CarrierInfo.Aligner2BankNumber4" value="1" />
- <scdata name="CarrierInfo.Aligner2BankNumber6" value="1" />
- <scdata name="CarrierInfo.Aligner21BankNumber8" value="1" />
- <scdata name="CarrierInfo.Aligner2BankNumber12" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1BankNumber3" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1BankNumber4" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1BankNumber6" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1BankNumber8" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1BankNumber12" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2BankNumber3" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2BankNumber4" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2BankNumber6" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2BankNumber8" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2BankNumber12" value="1" />
- <scdata name="CarrierInfo.LL1BankNumber3" value="1" />
- <scdata name="CarrierInfo.LL1BankNumber4" value="1" />
- <scdata name="CarrierInfo.LL1BankNumber6" value="1" />
- <scdata name="CarrierInfo.LL1BankNumber8" value="1" />
- <scdata name="CarrierInfo.LL1BankNumber12" value="1" />
- <scdata name="CarrierInfo.LL2BankNumber3" value="1" />
- <scdata name="CarrierInfo.LL2BankNumber4" value="1" />
- <scdata name="CarrierInfo.LL2BankNumber6" value="1" />
- <scdata name="CarrierInfo.LL2BankNumber8" value="1" />
- <scdata name="CarrierInfo.LL2BankNumber12" value="1" />
- <scdata name="CarrierInfo.Aligner1CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.Aligner1CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.Aligner1CassetteNumber6" value="1" />
- <scdata name="CarrierInfo.Aligner1CassetteNumber8" value="1" />
- <scdata name="CarrierInfo.Aligner1CassetteNumber12" value="1" />
- <scdata name="CarrierInfo.Aligner2CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.Aligner2CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.Aligner2CassetteNumber6" value="1" />
- <scdata name="CarrierInfo.Aligner2CassetteNumber8" value="1" />
- <scdata name="CarrierInfo.Aligner2CassetteNumber12" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber6" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber8" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer1CassetteNumber12" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber6" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber8" value="1" />
- <scdata name="CarrierInfo.CoolingBuffer2CassetteNumber12" value="1" />
- <scdata name="CarrierInfo.LL1CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.LL1CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.LL1CassetteNumber6" value="1" />
- <scdata name="CarrierInfo.LL1CassetteNumber8" value="1" />
- <scdata name="CarrierInfo.LL1CassetteNumber12" value="1" />
- <scdata name="CarrierInfo.LL2CassetteNumber3" value="1" />
- <scdata name="CarrierInfo.LL2CassetteNumber4" value="1" />
- <scdata name="CarrierInfo.LL2CassetteNumber6" value="1" />
- <scdata name="CarrierInfo.LL2CassetteNumber8" value="1" />
- <scdata name="CarrierInfo.LL2CassetteNumber12" value="1" />
- <scdata name="CarrierInfo.LP1Station" value="3" />
- <scdata name="CarrierInfo.LP1Station0" value="3" />
- <scdata name="CarrierInfo.LP1Station1" value="3" />
- <scdata name="CarrierInfo.LP2Station" value="6" />
- <scdata name="CarrierInfo.LP2Station0" value="6" />
- <scdata name="CarrierInfo.LP2Station1" value="6" />
- <scdata name="CarrierInfo.LP1Station013" value="3" />
- <scdata name="CarrierInfo.LP1Station113" value="3" />
- <scdata name="CarrierInfo.LP2Station013" value="6" />
- <scdata name="CarrierInfo.LP2Station113" value="6" />
- <scdata name="CarrierInfo.AlignerStation" value="9" />
- <scdata name="CarrierInfo.AlignerStation2" value="9" />
- <scdata name="CarrierInfo.AlignerStation3" value="9" />
- <scdata name="CarrierInfo.AlignerStation4" value="9" />
- <scdata name="CarrierInfo.AlignerStation6" value="9" />
- <scdata name="CarrierInfo.AlignerStation8" value="9" />
- <scdata name="CarrierInfo.AlignerStation12" value="9" />
- <scdata name="CarrierInfo.Aligner1Station" value="9" />
- <scdata name="CarrierInfo.Aligner2Station" value="12" />
- <scdata name="CarrierInfo.CoolingBuffer1Station" value="15" />
- <scdata name="CarrierInfo.CoolingBuffer2Station" value="18" />
- <scdata name="CarrierInfo.LL1Station" value="21" />
- <scdata name="CarrierInfo.LL2Station" value="24" />
- <scdata name="CarrierInfo.BufferStation" value="21" />
- <scdata name="CarrierInfo.Buffer1Station" value="21" />
- <scdata name="CarrierInfo.Buffer2Station" value="24" />
- <scdata name="CarrierInfo.LP1Station4" value="3" />
- <scdata name="CarrierInfo.LP2Station4" value="6" />
- <scdata name="CarrierInfo.Aligner1Station4" value="9" />
- <scdata name="CarrierInfo.Aligner2Station4" value="12" />
- <scdata name="CarrierInfo.CoolingBuffer1Station4" value="15" />
- <scdata name="CarrierInfo.CoolingBuffer2Station4" value="18" />
- <scdata name="CarrierInfo.LL1Station4" value="21" />
- <scdata name="CarrierInfo.LL2Station4" value="24" />
- <scdata name="CarrierInfo.Buffer1Station4" value="21" />
- <scdata name="CarrierInfo.Buffer2Station4" value="24" />
- <scdata name="CarrierInfo.BufferStation4" value="12" />
- <scdata name="CarrierInfo.LP1Station6" value="3" />
- <scdata name="CarrierInfo.LP2Station6" value="6" />
- <scdata name="CarrierInfo.Aligner1Station6" value="9" />
- <scdata name="CarrierInfo.Aligner2Station6" value="12" />
- <scdata name="CarrierInfo.CoolingBuffer1Station6" value="15" />
- <scdata name="CarrierInfo.CoolingBuffer2Station6" value="18" />
- <scdata name="CarrierInfo.LL1Station6" value="21" />
- <scdata name="CarrierInfo.LL2Station6" value="24" />
- <scdata name="CarrierInfo.Buffer1Station6" value="21" />
- <scdata name="CarrierInfo.Buffer2Station6" value="24" />
- <scdata name="CarrierInfo.BufferStation6" value="12" />
- <scdata name="CarrierInfo.LP1Station8" value="3" />
- <scdata name="CarrierInfo.LP2Station8" value="6" />
- <scdata name="CarrierInfo.Aligner1Station8" value="9" />
- <scdata name="CarrierInfo.Aligner2Station8" value="12" />
- <scdata name="CarrierInfo.CoolingBuffer1Station8" value="15" />
- <scdata name="CarrierInfo.CoolingBuffer2Station8" value="18" />
- <scdata name="CarrierInfo.LL1Station8" value="21" />
- <scdata name="CarrierInfo.LL2Station8" value="24" />
- <scdata name="CarrierInfo.Buffer1Station8" value="21" />
- <scdata name="CarrierInfo.Buffer2Station8" value="24" />
- <scdata name="CarrierInfo.BufferStation8" value="12" />
- <scdata name="CarrierInfo.TurnOverStationStation" value="27" />
- <scdata name="CarrierInfo.TurnOverStationStation2" value="15" />
- <scdata name="CarrierInfo.TurnOverStationStation3" value="15" />
- <scdata name="CarrierInfo.TurnOverStationStation4" value="15" />
- <scdata name="CarrierInfo.TurnOverStationStation6" value="15" />
- <scdata name="CarrierInfo.TurnOverStationStation8" value="15" />
- <scdata name="CarrierInfo.TurnOverStationStation12" value="15" />
- <scdata name="CarrierInfo.LP1ThicknessType" value="Thick" />
- <scdata name="CarrierInfo.LP2ThicknessType" value="Thick" />
- <scdata name="CarrierInfo.CoolingBuffer1ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.CoolingBuffer2ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.Aligner1ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.Aligner2ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.LL1ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.LL2ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.Buffer1ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.Buffer2ThicknessType" value="NONE" />
- <scdata name="CarrierInfo.UpperThicknessType" value="Thick" />
- <scdata name="CarrierInfo.LowerThicknessType" value="Thick" />
- </root>
|