JET-EFEM/athos/athosRT/bin/Debug/Config/_ioDefineCard1.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

  <Dig_In>
    <DI_ITEM Index="0" Name="DI_WaterLeakSW" BufferOffset="0" Addr="DI-00" Description="Water Leak SW"/>
    <DI_ITEM Index="1" Name="DI_WaterFlowSW" BufferOffset="1" Addr="DI-01" Description="Water Flow SW"/>
    <DI_ITEM Index="2" Name="DI_GratingSensorIN1" BufferOffset="2" Addr="DI-02" Description="Grating Sensor IN1"/>
    <DI_ITEM Index="3" Name="DI_EFEMCSTDoorClosed" BufferOffset="3" Addr="DI-03" Description="EFEM CST Door  Closed"/>

    <DI_ITEM Index="5" Name="DI_CoolingBuffer1PinUp" BufferOffset="5" Addr="DI-05" Description="C1_Lift Pin Up_Sensor"/>
    <DI_ITEM Index="6" Name="DI_CoolingBuffer1PinDown" BufferOffset="6" Addr="DI-06" Description="C1_Lift Pin Down_Sensor"/>
    <DI_ITEM Index="7" Name="DI_CoolingBuffer1Inch3Up" BufferOffset="7" Addr="DI-07" Description="C1_Guide Pin Small Up_Sensor"/>
    <DI_ITEM Index="8" Name="DI_CoolingBuffer1Inch3Down" BufferOffset="8" Addr="DI-08" Description="C1_Guide Pin Small Down_Sensor"/>
    <DI_ITEM Index="9" Name="DI_CoolingBuffer1Inch4Up" BufferOffset="9" Addr="DI-09" Description="C1_Guide Pin Medium Up_Sensor"/>
    <DI_ITEM Index="10" Name="DI_CoolingBuffer1Inch4Down" BufferOffset="10" Addr="DI-10" Description="C1_Guide Pin Medium Down_Sensor"/>
    
    <DI_ITEM Index="11" Name="DI_CoolingBuffer2PinUp" BufferOffset="11" Addr="DI-11" Description="C2_Lift Pin Up_Sensor"/>
    <DI_ITEM Index="12" Name="DI_CoolingBuffer2PinDown" BufferOffset="12" Addr="DI-12" Description="C2_Lift Pin Down_Sensor"/>
    <DI_ITEM Index="13" Name="DI_CoolingBuffer2Inch3Up" BufferOffset="13" Addr="DI-13" Description="C2_Guide Pin Small Up_Sensor"/>
    <DI_ITEM Index="14" Name="DI_CoolingBuffer2Inch3Down" BufferOffset="14" Addr="DI-14" Description="C2_Guide Pin Small Down_Sensor"/>
    <DI_ITEM Index="15" Name="DI_CoolingBuffer2Inch4Up" BufferOffset="15" Addr="DI-15" Description="C2_Guide Pin Medium Up_Sensor"/>
    <DI_ITEM Index="16" Name="DI_CoolingBuffer2Inch4Down" BufferOffset="16" Addr="DI-16" Description="C2_Guide Pin Medium Down_Sensor"/>
    
    <DI_ITEM Index="17" Name="DI_Buffer3PinUp" BufferOffset="17" Addr="DI-17" Description="A1_Lift Pin Up_Sensor"/>
    <DI_ITEM Index="18" Name="DI_Buffer3PinDown" BufferOffset="18" Addr="DI-18" Description="A1_Lift Pin Down_Sensor"/>
    <DI_ITEM Index="19" Name="DI_Buffer3Inch3Up" BufferOffset="19" Addr="DI-19" Description="A1_Guide Pin Small Up_Sensor"/>
    <DI_ITEM Index="20" Name="DI_Buffer3Inch3Down" BufferOffset="20" Addr="DI-20" Description="A1_Guide Pin Small Down_Sensor"/>
    <DI_ITEM Index="21" Name="DI_Buffer3Inch4Up" BufferOffset="21" Addr="DI-21" Description="A1_Guide Pin Medium Up_Sensor"/>
    <DI_ITEM Index="22" Name="DI_Buffer3Inch4Down" BufferOffset="22" Addr="DI-22" Description="A1_Guide Pin Medium Down_Sensor"/>
    
    <DI_ITEM Index="23" Name="DI_Buffer4PinUp" BufferOffset="23" Addr="DI-23" Description="A2_Lift Pin Up_Sensor"/>
    <DI_ITEM Index="24" Name="DI_Buffer4PinDown" BufferOffset="24" Addr="DI-24" Description="A2_Lift Pin Down_Sensor"/>
    <DI_ITEM Index="25" Name="DI_Buffer4Inch3Up" BufferOffset="25" Addr="DI-25" Description="A2_Guide  Pin Small Up_Sensor"/>
    <DI_ITEM Index="26" Name="DI_Buffer4Inch3Down" BufferOffset="26" Addr="DI-26" Description="A2_Guide Pin Small Down_Sensor"/>
    <DI_ITEM Index="27" Name="DI_Buffer4Inch4Up" BufferOffset="27" Addr="DI-27" Description="A2_Guide Pin Medium Up_Sensor"/>
    <DI_ITEM Index="28" Name="DI_Buffer4Inch4Down" BufferOffset="28" Addr="DI-28" Description="A2_Guide Pin Medium Down_Sensor"/>

    <DI_ITEM Index="30" Name="DI_FFUalarm" BufferOffset="30" Addr="DI-30" Description="FFU alarm"/>
    <DI_ITEM Index="31" Name="DI_CDAPressureSW" BufferOffset="31" Addr="DI-31" Description="CDA Pressure SW"/>
    <DI_ITEM Index="32" Name="DI_VACPressureSW" BufferOffset="32" Addr="DI-32" Description="VAC Pressure SW"/>
    <DI_ITEM Index="33" Name="DI_IONCDAPressureSW" BufferOffset="33" Addr="DI-33" Description="ION CDA  Pressure SW"/>
    <DI_ITEM Index="34" Name="DI_IONAlarmSIGNAL" BufferOffset="34" Addr="DI-34" Description="ION Alarm SIGNAL"/>
    <DI_ITEM Index="35" Name="DI_EFEMSideDoorClosed" BufferOffset="35" Addr="DI-35" Description="EFEM Side Door  Closed"/>
    <DI_ITEM Index="36" Name="DI_PMASystemInterlock" BufferOffset="36" Addr="DI-36" Description="PMA System Interlock"/>
    <DI_ITEM Index="37" Name="DI_PMBSystemInterlock" BufferOffset="37" Addr="DI-37" Description="PMB System Interlock"/>

    <DI_ITEM Index="39" Name="DI_MaintenanceMode" BufferOffset="39" Addr="DI-39" Description="Maintenance Mode"/>
    <DI_ITEM Index="40" Name="DI_EFEMPowerON" BufferOffset="40" Addr="DI-40" Description="EFEM Power ON"/>

    <DI_ITEM Index="42" Name="DI_RobotTPusing" BufferOffset="42" Addr="DI-42" Description="Robot  TP using"/>
    <DI_ITEM Index="43" Name="DI_RobotEMStoEFEM" BufferOffset="43" Addr="DI-43" Description="Robot   EMS  to EFEM"/>
    <DI_ITEM Index="44" Name="DI_RobotEnabletoEFEM" BufferOffset="44" Addr="DI-44" Description="Robot   Enable to EFEM"/>
    <DI_ITEM Index="45" Name="DI_RobotRemotetoEFEM(spareInterfaceIO)" BufferOffset="45" Addr="DI-45" Description="Robot   Remote to EFEM(spare  Interface IO)"/>
    <DI_ITEM Index="46" Name="DI_RBReady(spareInterfaceIO)" BufferOffset="46" Addr="DI-46" Description="RB Ready(spare  Interface IO)"/>
    <DI_ITEM Index="47" Name="DI_RBError(spareInterfaceIO)" BufferOffset="47" Addr="DI-47" Description="RB  Error(spare  Interface IO)"/>
    <DI_ITEM Index="48" Name="DI_RBNotExtendPMA" BufferOffset="48" Addr="DI-48" Description="RB Not Extend PMA"/>
    <DI_ITEM Index="49" Name="DI_RBNotExtendPMB" BufferOffset="49" Addr="DI-49" Description="RB Not Extend PMB"/>
    <DI_ITEM Index="50" Name="DI_RBNotExtendSIMF1" BufferOffset="50" Addr="DI-50" Description="RB Not Extend SIMF1"/>
    <DI_ITEM Index="51" Name="DI_RBNotExtendSIMF2" BufferOffset="51" Addr="DI-51" Description="RB Not Extend SIMF2"/>
    <DI_ITEM Index="52" Name="DI_RBupperArmhavewafer" BufferOffset="52" Addr="DI-52" Description="RB upper Arm have wafer"/>
    <DI_ITEM Index="53" Name="DI_RBlowerArmhavewafer" BufferOffset="53" Addr="DI-53" Description="RB lower Arm have wafer"/>

    <DI_ITEM Index="55" Name="DI_SMIF1PODOPEN" BufferOffset="55" Addr="DI-55" Description="SMIF1 POD OPEN"/>
    <DI_ITEM Index="56" Name="DI_SMIF1PODPRESENT" BufferOffset="56" Addr="DI-56" Description="SMIF1 POD PRESENT"/>
    <DI_ITEM Index="57" Name="DI_SMIF1READY" BufferOffset="57" Addr="DI-57" Description="SMIF1 READY"/>
    <DI_ITEM Index="58" Name="DI_SMIF1MAPPINGSENSORLASER" BufferOffset="58" Addr="DI-58" Description="SMIF1 MAPPING SENSOR LASER"/>

    <DI_ITEM Index="60" Name="DI_SMIF2PODOPEN" BufferOffset="60" Addr="DI-60" Description="SMIF2 POD OPEN"/>
    <DI_ITEM Index="61" Name="DI_SMIF2PODPRESENT" BufferOffset="61" Addr="DI-61" Description="SMIF2 POD PRESENT"/>
    <DI_ITEM Index="62" Name="DI_SMIF2READY" BufferOffset="62" Addr="DI-62" Description="SMIF2 READY"/>
    <DI_ITEM Index="63" Name="DI_SMIF2MAPPINGSENSORLASER" BufferOffset="63" Addr="DI-63" Description="SMIF2 MAPPING SENSOR LASER"/>




  </Dig_In>

  <Dig_Out>
		
		<DO_ITEM Index="0" Name="DO_Redlight" BufferOffset="0" Addr="DO-00" Description="Red light"/>
    <DO_ITEM Index="1" Name="DO_Yellowlight" BufferOffset="1" Addr="DO-01" Description="Yellow light"/>
    <DO_ITEM Index="2" Name="DO_Greenlight" BufferOffset="2" Addr="DO-02" Description="Green light"/>
    
    <DO_ITEM Index="3" Name="DO_Bulelight" BufferOffset="3" Addr="DO-03" Description="Bule light"/>
    <DO_ITEM Index="4" Name="DO_Buzzer1" BufferOffset="4" Addr="DO-04" Description="Buzzer1"/>
    <DO_ITEM Index="5" Name="DO_Buzzer2" BufferOffset="5" Addr="DO-05" Description="Buzzer2"/>

    <DO_ITEM Index="7" Name="DO_CoolingBuffer1PinUp" BufferOffset="7" Addr="DO-07" Description="C1_Lift Pin Up_SV"/>
    <DO_ITEM Index="8" Name="DO_CoolingBuffer1PinDown" BufferOffset="8" Addr="DO-08" Description="C1_Lift Pin Down_SV"/>
    <DO_ITEM Index="9" Name="DO_CoolingBuffer1Inch3Up" BufferOffset="9" Addr="DO-09" Description="C1_Guide Pin Small Up_SV"/>
    <DO_ITEM Index="10" Name="DO_CoolingBuffer1Inch3Down" BufferOffset="10" Addr="DO-10" Description="C1_Guide Pin Small  Down_SV"/>
    <DO_ITEM Index="11" Name="DO_CoolingBuffer1Inch4Up" BufferOffset="11" Addr="DO-11" Description="C1_Guide Pin Medium Up_SV"/>
    <DO_ITEM Index="12" Name="DO_CoolingBuffer1Inch4Down" BufferOffset="12" Addr="DO-12" Description="C1_Guide Pin Medium Down_SV"/>
    
    <DO_ITEM Index="13" Name="DO_CoolingBuffer2PinUp" BufferOffset="13" Addr="DO-13" Description="C2_Lift Pin Up_SV"/>
    <DO_ITEM Index="14" Name="DO_CoolingBuffer2PinDown" BufferOffset="14" Addr="DO-14" Description="C2_Lift Pin Down_SV"/>
    <DO_ITEM Index="15" Name="DO_CoolingBuffer2Inch3Up" BufferOffset="15" Addr="DO-15" Description="C2_Guide Pin Small Up_SV"/>
    <DO_ITEM Index="16" Name="DO_CoolingBuffer2Inch3Down" BufferOffset="16" Addr="DO-16" Description="C2_Guide Pin Small Down_SV"/>
    <DO_ITEM Index="17" Name="DO_CoolingBuffer2Inch4Up" BufferOffset="17" Addr="DO-17" Description="C2_Guide Pin Medium Up_SV"/>
    <DO_ITEM Index="18" Name="DO_CoolingBuffer2Inch4Down" BufferOffset="18" Addr="DO-18" Description="C2_Guide Pin Medium Down_SV"/>
    
    <DO_ITEM Index="19" Name="DO_Buffer3PinUp" BufferOffset="19" Addr="DO-19" Description="A1_Lift Pin Up_SV"/>
    <DO_ITEM Index="20" Name="DO_Buffer3PinDown" BufferOffset="20" Addr="DO-20" Description="A1_Lift Pin Down_SV"/>
    <DO_ITEM Index="21" Name="DO_Buffer3Inch3Up" BufferOffset="21" Addr="DO-21" Description="A1_Guide Pin Small Up_SV"/>
    <DO_ITEM Index="22" Name="DO_Buffer3Inch3Down" BufferOffset="22" Addr="DO-22" Description="A1_Guide Pin Small Down_SV"/>
    <DO_ITEM Index="23" Name="DO_Buffer3Inch4Up" BufferOffset="23" Addr="DO-23" Description="A1_Guide Pin Medium Up_SV"/>
    <DO_ITEM Index="24" Name="DO_Buffer3Inch4Down" BufferOffset="24" Addr="DO-24" Description="A1_Guide Pin Medium Down_SV"/>
    
    
    <DO_ITEM Index="25" Name="DO_Buffer4PinUp" BufferOffset="25" Addr="DO-25" Description="A2_Lift Pin Up_SV"/>
    <DO_ITEM Index="26" Name="DO_Buffer4PinDown" BufferOffset="26" Addr="DO-26" Description="A2_Lift Pin Down_SV"/>
    <DO_ITEM Index="27" Name="DO_Buffer4Inch3Up" BufferOffset="27" Addr="DO-27" Description="A2_Guide Pin Small Up_SV"/>
    <DO_ITEM Index="28" Name="DO_Buffer4Inch3Down" BufferOffset="28" Addr="DO-28" Description="A2_Guide Pin Small Down_SV"/>
    <DO_ITEM Index="29" Name="DO_Buffer4Inch4Up" BufferOffset="29" Addr="DO-29" Description="A2_Guide Pin Medium Up_SV"/>
    <DO_ITEM Index="30" Name="DO_Buffer4Inch4Down" BufferOffset="30" Addr="DO-30" Description="A2_Guide Pin Medium Down_SV"/>




    <DO_ITEM Index="35" Name="DO_EFEMSideDoorClosed" BufferOffset="35" Addr="DO-35" Description="EFEM Side Door Closed"/>
    <DO_ITEM Index="36" Name="DO_RBNotExtendPMA" BufferOffset="36" Addr="DO-36" Description="RB Not Extend PMA"/>
    <DO_ITEM Index="37" Name="DO_RBNotExtendPMB" BufferOffset="37" Addr="DO-37" Description="RB Not Extend PMB"/>


    <DO_ITEM Index="40" Name="DO_Pause/ResumetoRobot" BufferOffset="40" Addr="DO-40" Description="Pause/Resume to Robot"/>
    <DO_ITEM Index="41" Name="DO_EnableToRobot(Spare)" BufferOffset="41" Addr="DO-41" Description="Enable To Robot(Spare)"/>
    <DO_ITEM Index="42" Name="DO_EMSToRobot(Spare)" BufferOffset="42" Addr="DO-42" Description="EMS To Robot(Spare)"/>





    <DO_ITEM Index="48" Name="DO_SafetytoPMA" BufferOffset="48" Addr="DO-48" Description="Safety to PMA (DOOR OPEN)"/>
    <DO_ITEM Index="49" Name="DO_SafetytoPMB" BufferOffset="49" Addr="DO-49" Description="Safety to PMB (DOOR OPEN)"/>
    <DO_ITEM Index="50" Name="DO_SafetytoSMIF1" BufferOffset="50" Addr="DO-50" Description="Safety to SMIF1"/>
    <DO_ITEM Index="51" Name="DO_SafetytoSMIF2" BufferOffset="51" Addr="DO-51" Description="Safety to SMIF2"/>



    <DO_ITEM Index="55" Name="DO_RBbusytoSIMF1" BufferOffset="55" Addr="DO-55" Description="RB  busy to SIMF1（Interlock）"/>




    <DO_ITEM Index="60" Name="DO_RBbusytoSIMF2" BufferOffset="60" Addr="DO-60" Description="RB  busy  to SIMF2（Interlock）"/>





  </Dig_Out>
</IO_DEFINE>