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- <?xml version="1.0" encoding="utf-8"?>
- <root system="EFEM">
- <configs name="LoadPort">
- <configs name="LP1">
- <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="120" name="TimeLimitAction" description="Time limit for on action" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="LOT:" name="CarrierIDStartString" description="CarrierIDStartString" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="QTY:" name="CarrierIDEndString" description="CarrierIDEndString" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="false" name="AutoDetectCarrierType" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="SlotsNumber" description="SlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="Disable" description="LP1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CstType" description="0:Smif;1:OpenCst" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="LP2">
- <config default="COM3" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="120" name="TimeLimitAction" description="Time limit for on action" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="LOT:" name="CarrierIDStartString" description="CarrierIDStartString" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="QTY:" name="CarrierIDEndString" description="CarrierIDEndString" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="false" name="AutoDetectCarrierType" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="SlotsNumber" description="SlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="Disable" description="LP1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="CstType" description="0:Smif;1:OpenCst" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <config default="15" name="WaitLoadTimeOut" description="" max="1000" min="1" paramter="" tag="" unit="秒" type="String" />
- <config default="30" name="TimeLimitLoadportHome" description="Loadport回原点命令超时设定" max="120" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="30" name="TimeLimitLoadportLoad" description="Load命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="20" name="TimeLimitLoadportUnload" description="Unload命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="11" name="TimeLimitLoadportClamp" description="Clamp命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="9" name="TimeLimitReadRFID" description="读RFID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="10" name="TimeLimitWriteRFID" description="写RFID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="false" name="EnableAutoLockWhenCassetteArrived" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoDockAfterIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoCarrierIdReadAfterLatch" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoMappingAfterDock" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableAutoUndockAfterUndocking" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnablePauseWhenVerifyIDFailed" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="100" name="TimeDelayNotifyCassettePresent" description="持续时间,通知Cassette拿走或者放上" max="99999" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="1" name="LoadPort1CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort2CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort3CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort4CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort5CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort6CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort7CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort8CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort9CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LoadPort10CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="LP1" name="LoadPort1CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP2" name="LoadPort2CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP3" name="LoadPort3CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP4" name="LoadPort4CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP5" name="LoadPort5CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP6" name="LoadPort6CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP7" name="LoadPort7CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP8" name="LoadPort8CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP9" name="LoadPort9CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="LP10" name="LoadPort10CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM21" name="LoadPort1CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM23" name="LoadPort2CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM25" name="LoadPort3CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM27" name="LoadPort4CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM29" name="LoadPort5CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM31" name="LoadPort6CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM7" name="LoadPort7CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM8" name="LoadPort8CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM9" name="LoadPort9CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM10" name="LoadPort10CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM1" name="LoadPort1PortName" description="LoadPort1PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM3" name="LoadPort2PortName" description="LoadPort2PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM5" name="LoadPort3PortName" description="LoadPort3PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="COM7" name="LoadPort4PortName" description="LoadPort4PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7091" name="LoadPort1CarrierIdReaderAddress" description="LP1读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7092" name="LoadPort2CarrierIdReaderAddress" description="LP2读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7093" name="LoadPort3CarrierIdReaderAddress" description="LP3读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7094" name="LoadPort4CarrierIdReaderAddress" description="LP4读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7095" name="LoadPort5CarrierIdReaderAddress" description="LP5读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7096" name="LoadPort6CarrierIdReaderAddress" description="LP6读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7097" name="LoadPort7CarrierIdReaderAddress" description="LP7读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7098" name="LoadPort8CarrierIdReaderAddress" description="LP8读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7099" name="LoadPort9CarrierIdReaderAddress" description="LP9读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:7100" name="LoadPort10CarrierIdReaderAddress" description="LP10读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort1CarrierIdReaderPage" description="LP1读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort2CarrierIdReaderPage" description="LP2读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort3CarrierIdReaderPage" description="LP3读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort4CarrierIdReaderPage" description="LP4读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort5CarrierIdReaderPage" description="LP5读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort6CarrierIdReaderPage" description="LP6读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort7CarrierIdReaderPage" description="LP7读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort8CarrierIdReaderPage" description="LP8读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort9CarrierIdReaderPage" description="LP9读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="00000004" name="LoadPort10CarrierIdReaderPage" description="LP10读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP" name="LoadPort1CassetteType" description="LP1容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP" name="LoadPort2CassetteType" description="LP2容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP" name="LoadPort3CassetteType" description="LP3容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP" name="LoadPort4CassetteType" description="LP4容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="true" name="DefaultUseRFIDForCarrierIdRead" description="默认使用RFID进行Carrier 读取" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="Robot">
- <config default="false" name="BladeUpDownReverse" description="BladeUpDownReverse" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="Blade1Enable" description="Blade1Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="Blade2Enable" description="Blade2Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="Blade2Slots" description="Slot数目" max="4" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="RobotSpeed" description="Robot速度" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="TimeLimitRobotCommand" description="Robot命令超时设定" max="200" min="0" paramter="" tag="" unit="seconds" type="Integer" />
- <config default="30" name="TimeLimitRobotHome" description="Robot回原点命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="10" name="TimeLimitForPickWafer" description="Pick命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="20" name="TimeLimitForPlaceWafer" description="Place命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="10" name="TimeLimitForExchangeWafer" description="Exchange命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="0" name="RobotCommunicationToken" description="RobotCommunicationToken" max="9999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="DualBlade1TransferEnable" description="DualBlade1TransferEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:10110" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="SlotCount" description="SlotCount" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2183900" name="WaferSize3MappingOffset" description="WaferSize3MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2285000" name="WaferSize4MappingOffset" description="WaferSize4MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2545000" name="WaferSize6MappingOffset" description="WaferSize6MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <configs name="Robot">
- <config default="1" name="Address" description="Robot address" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="3" name="SpeedLevel" description="SpeedLevel" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="100" name="ExistInterval" description="SpeedLevel" max="60000" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="IsVacuumMode" description="True:VacuumMode;False:FrictionMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="BodyNumber" description="Robot Body Number" max="65535" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="COM27" name="PortName" description="Robot COM port" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="T-00902H" name="RobotModel" description="RobotModel" max="10" min="0" paramter="" tag="" unit="" type="String" />
- <config default="20" name="RobotZSpeed" description="RobotZSpeed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="50" name="RobotABWSpeed" description="RobotABWSpeed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="980" name="Speed" description="Speed" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="98" name="RobotSpeed" description="Speed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
-
- <config default="true" name="EnableLogMessage" description="enable log" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="2" name="TimeLimitRobotCommand" description="TimeLimitRobotCommand" max="300" min="0" paramter="" tag="" unit="Seconds" type="Integer" />
- <config default="2" name="MotionTimeout" description="MotionTimeout" max="300" min="0" paramter="" tag="" unit="Seconds" type="Integer" />
- <config default="true" name="EnableGotoReady" description="EnableGotoReady" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="GotoReadyXSpeedForPick" description="Speed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="GotoReadyZDistanceForPick" description="ZDistanceForPick" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="GotoReadyXCheckWaferForPlace" description="falg1" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="GotoReadyCICheckWaferForPlace" description="falg2" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="GotoReadyXSpeedForPlace" description="Speed1" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="GotoReadyCISpeedForPlace" description="Speed2" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="GotoReadyZDistanceForPlace" description="ZDistanceForPlace" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
-
- <config default="1" name="InitCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LeftPickCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="RightPickCmdNO" description="RightPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="DualPickCmdNO" description="DualPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="5" name="LeftPlaceCmdNO" description="LeftPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="6" name="RightPlaceCmdNO" description="RightPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="7" name="DualPlaceCmdNO" description="DualPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="LeftPickSwapCmdNO" description="LeftPickSwapCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="RightPickSwapCmdNO" description="RightPickSwapCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="MapCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
- </configs>
-
- <configs name="Offset">
- <config default="99999" name="OffsetXMax" description="Offset X Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
- <config default="-9999" name="OffsetXMin" description="Offset X Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
- <config default="99999" name="OffsetYMax" description="Offset Y Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
- <config default="-9999" name="OffsetYMin" description="Offset Y Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
- <config default="99999" name="OffsetZMax" description="Offset Z Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
- <config default="-9999" name="OffsetZMin" description="Offset Z Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="OffsetForLL">
- <config default="0000,-0000,-0000" name="LLAGET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LLAPUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LLAEXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LLBGET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LLBPUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LLBEXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL1GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL1PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL1EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL2GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL2PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL2EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL3GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL3PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL3EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL4GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL4PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL4EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL5GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL5PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL5EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL6GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL6PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL6EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL7GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL7PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL7EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL8GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL8PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="LL8EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="OffsetForLP">
- <config default="FOUP,0000,-0000,-0000" name="Type1" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP2,0000,-0000,-0000" name="Type2" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP3,0000,-0000,-0000" name="Type3" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP4,0000,-0000,-0000" name="Type4" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP5,0000,-0000,-0000" name="Type5" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP6,0000,-0000,-0000" name="Type6" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP7,0000,-0000,-0000" name="Type7" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP8,0000,-0000,-0000" name="Type8" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP9,0000,-0000,-0000" name="Type9" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP10,0000,-0000,-0000" name="Type10" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP11,0000,-0000,-0000" name="Type11" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP12,0000,-0000,-0000" name="Type12" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP13,0000,-0000,-0000" name="Type13" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP14,0000,-0000,-0000" name="Type14" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP15,0000,-0000,-0000" name="Type15" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP16,0000,-0000,-0000" name="Type16" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP17,0000,-0000,-0000" name="Type17" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP18,0000,-0000,-0000" name="Type18" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP19,0000,-0000,-0000" name="Type19" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP20,0000,-0000,-0000" name="Type20" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- </configs>
- <configs name="MotionAxis">
- <config default="1000" name="AccSpeed" description="加速度" max="999999" min="0" paramter="" tag="" unit="ms" type="Integer" />
- <config default="1000" name="JogSpeed" description="JogSpeed" max="999999" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="10000" name="AutoSpeed" description="AutoSpeed" max="999999" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
- <config default="30" name="MoveTimeout" description="MoveTimeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="60" name="HomeTimeout" description="HomeTimeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- <configs name="Aligner1">
- <config default="30" name="TimeLimitAlignerHome" description="Aligner回原点命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="9" name="TimeLimitForAlignWafer" description="Align命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="0" name="AlignerCommunicationToken" description="AlignerCommunicationToken" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="AlignerReadAngle" description="读取Reader ID的角度" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="AlignerDefaultAngle" description="AlignerDefaultAngle" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="127.0.0.1:10118" name="Address" description="Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="true" name="IsEnable" description="IsEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="Aligner2">
- <config default="30" name="TimeLimitAlignerHome" description="Aligner回原点命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="9" name="TimeLimitForAlignWafer" description="Align命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="0" name="AlignerCommunicationToken" description="AlignerCommunicationToken" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="AlignerReadAngle" description="读取Reader ID的角度" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="AlignerDefaultAngle" description="AlignerDefaultAngle" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="127.0.0.1:10119" name="Address" description="Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="true" name="IsEnable" description="IsEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- </configs>
- <configs name="OcrReader">
- <config default="9" name="TimeLimitForWID" description="读WaferID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
- <config default="true" name="EnableReadLaserMarker1" description="启用读取LaserMarker" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableReadLaserMarker2" description="启用读取T7 Code,LaserMarker2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="" name="ReaderJob1Main" description="Job 1, Main ;" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="" name="ReaderJob1Slave" description="ReaderJob1Slave" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="" name="ReaderJob2Main" description="ReaderJob2Main" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="" name="ReaderJob2Slave" description="ReaderJob2Slave" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="false" name="EnablePauseOnWaferIdVerifyFailed" description="EnablePauseOnWaferIdVerifyFailed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:23" name="Address1" description="Address1" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1:24" name="Address2" description="Address2" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Fa">
- <configs name="E84">
- <config default="30" name="TP1" description="TP1" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
- <config default="30" name="TP2" description="TP2" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
- <config default="30" name="TP3" description="TP3" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
- <config default="30" name="TP4" description="TP4" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
- <config default="30" name="TP5" description="TP5" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
- </configs>
- <config default="Passive" name="ConnectionMode" description="Passive Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="127.0.0.1" name="LocalIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="5021" name="LocalPortNumber" description="LocalPortNumber" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="127.0.0.1" name="RemoteIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="5020" name="RemotePortNumber" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="45" name="T3Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="10" name="T5Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="5" name="T6Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="10" name="T7Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="5" name="T8Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableSpooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="30" name="FaLinkTestInterval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="Enabled" name="FaDefaultCommunicationState" description="Enabled /Disabled" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Online" name="FaDefaultControlState" description="Online / Offline" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Local" name="FaDefaultControlSubState" description="Local / Remote" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="DeviceId" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="System">
- <config default="001" name="EFEMNUM" description="DeviceType" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="" name="DeviceType" description="DeviceType" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="true" name="IsSimulatorMode" description="IsSimulatorMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ConfigDO32AsBuzzer" description="ConfigDO32AsBuzzer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ShowWaferID" description="ShowWaferID" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0" name="TotalWaferCount" description="TotalWaferCount" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="" name="WaferDisplayMode" description="WaferDisplayMode" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="EnableRobotGripAndUngrip" description="EnableRobotGripAndUngrip" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableUpender" description="EnableUpender" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableAligner" description="EnableAligner" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableOcrReader2" description="EnableOcrReader2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableOcrReader1" description="EnableOcrReader1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP1" description="EnableRFIDReaderLP1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP2" description="EnableRFIDReaderLP2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP3" description="EnableRFIDReaderLP3" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP4" description="EnableRFIDReaderLP4" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP5" description="EnableRFIDReaderLP5" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP6" description="EnableRFIDReaderLP6" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP7" description="EnableRFIDReaderLP7" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP8" description="EnableRFIDReaderLP8" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP9" description="EnableRFIDReaderLP9" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableRFIDReaderLP10" description="EnableRFIDReaderLP10" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="13000" name="EfemPortNumber" description="EfemPortNumber" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="COM20" name="FFUComPortName" description="FFUComPortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="800" name="FFUSetSpeed" description="FFUSetSpeed" max="1600" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="10.0.0.1" name="AdamAdapterIp" description="Adam Adapter Ip" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="true" name="OnlyLotId" description="OnlyLotId" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1" name="EfemServerLocalIp" description="Local Ip" max="0" min="0" paramter="" tag="" unit="" type="String" />
-
- <config default="600" name="TimeLimitEfemComandDelay" description="Efem Comand Deley" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
- <!--<config default="10" name="AlignerPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />-->
- <config default="0" name="AlignerPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="10" name="CoolingPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />-->
- <config default="0" name="CoolingPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="502" name="AdamAdapterPort" description="Adam Adapter Port" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="PressureDiffChannel" description="压差传感器channel" max="8" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="FFUSpeedSet" description="FFU 转速设定" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="30" name="PressureDiffMaxPressure" description="压差计最大值" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="-30" name="PressureDiffMinPressure" description="压差计最小值" max="0" min="-999999" paramter="" tag="" unit="" type="Integer" />
- <config default="-30" name="PressureDiffLowWarning" description="压差计低报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
- <config default="-30" name="PressureDiffLowLowAlarm" description="压差计低低报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
- <config default="-30" name="PressureDiffHighWarning" description="压差计高报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
- <config default="-30" name="PressureDiffHighHighAlarm" description="压差计高高报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="IsLoadLockDoorAlwaysOpen" description="IsLoadLockDoorAlwaysOpen" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsLoadLockEnableZMotion" description="是否可以在LL端执行LOAD/UNLOAD/TRANS指令" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsErrorReportEnable" description="是否能使告警上报" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsEnableIdentifyThickness" description="是否区分薄厚片" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsEnableMultiWaferSize" description="使能跑多种尺寸的wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsEnableMultiWaferSizeShow" description="使能跑多种尺寸的wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsEnableMoveInDiffSlotsNumLP" description="使能在不同槽数的lp之间传输" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="IsEnableBufferMap" description="Buffer Map 使能" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="8" name="BufferSlotCount" description="Buffer槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="Buffer1SlotCount" description="Buffer1槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="Buffer2SlotCount" description="Buffer2槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="Buffer1WaferSize" description="Buffer1晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="Buffer2WaferSize" description="Buffer2晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CoolingBuffer1Disable" description="Coolingbuffer1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CoolingBuffer2Disable" description="Coolingbuffer2不能用" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="Aligner1Disable" description="Aligner1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="Aligner2Disable" description="Aligner2不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="StopIonizerWorkingEnable" description="停止离子器使能" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="LPRobotActionIntervene" description="LP和机械手动作干涉" max="" min="" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="IsSlotShowOpposite" description="LP槽号显示" max="" min="" paramter="" tag="" unit="" type="Bool" />
-
- <configs name="FFU">
- <config default="COM40" name="Address" description="FFU COM address" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="DeviceAddress" description="FFU Station Name" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1440" name="MaxSpeed" description="FFU Station Name" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableLogMessage" description="FFU enable log" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="1" name="FFUFanSpeedSetPoint" description="FFU Fan Speed SetPoint" max="1440" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
-
-
- </configs>
- <configs name="Process">
- <!--<config default="7" name="DelayBeforeWaferPutToLL" description="Delay On Cooling Buffer Before Wafer Put To LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />-->
- <config default="0" name="DelayBeforeWaferPutToLL" description="Delay On Cooling Buffer Before Wafer Put To LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />
- <!--<config default="14" name="DelayAfterWaferPickFromLL" description="Delay On Cooling Buffer After Wafer Pick From LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />-->
- <config default="0" name="DelayAfterWaferPickFromLL" description="Delay On Cooling Buffer After Wafer Pick From LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />
- <config default="false" name="CycleEnable" description="CycleEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="3" name="CycleCount" description="CycleCount" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="true" name="CycleEnableAutoUnload" description="CycleEnableAutoUnload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CycleEnableAlign" description="CycleEnableAlign" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CycleEnableLaserMarker1" description="CycleEnableLaserMarker1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="CycleEnableLaserMarker2" description="CycleEnableLaserMarker2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="TransferStopImmediately" description="TransferStopImmediately" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableAutoUndockAfterProcessComplete" description="EnableAutoUndockAfterProcessComplete" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="OptionLoadportMonitor" description="OptionLoadportMonitor" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="OptionMainternaceMonitor" description="OptionMainternaceMonitor" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="OptionSignalTowerMonitor" description="OptionSignalTowerMonitor" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CycleSwapHand" description="Cycle Swap Hand Option" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="3" name="CyclePlaceMode" description="Transfer Mode for Cycle 1=Opposite,2=Same,3=FromTop,4=FromButtom" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="Server">
- <config default="1000" name="SendReadyInterval" description="间隔多长时间发送READY信号给E/C" max="99999" min="200" paramter="" tag="" unit="ms" type="Integer" />
- </configs>
- <configs name="Coolbuffer">
- <config default="20" name="UpTimeout" description="Move up Timeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
- <config default="20" name="DownTimeout" description="Move down Timeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
- </configs>
- <configs name="CarrierID">
- <configs name="RFIDReaderA">
- <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:7001" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="10" name="RetryTime" description="RetryTime" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="True" name="CarrierIdNeedTrimSpace" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
-
-
- </configs>
- <configs name="RFIDReaderB">
- <config default="COM3" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:7002" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="10" name="RetryTime" description="RetryTime" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="True" name="CarrierIdNeedTrimSpace" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="10" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
-
- </configs>
- <configs name="BarcodeReaderA">
- <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:55256" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="Type" description="(0=none,1=Honeywell,2=Keyence)" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
- <configs name="BarcodeReaderB">
- <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
- <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="127.0.0.1:55257" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="Type" description="(0=none,1=Honeywell,2=Keyence)" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- </configs>
- </configs>
- <configs name="CarrierInfo">
- <configs name="Carrier0">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier1">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier2">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier3">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier4">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier5">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier6">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier7">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier8">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier9">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier10">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier11">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier12">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier13">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier14">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <configs name="Carrier15">
- <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
- <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
- <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
- <config default="FOUP1" name="CarrierName0" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName1" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName2" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName3" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName4" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName5" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName6" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName7" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName8" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName9" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName10" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName11" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName12" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName13" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName14" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="FOUP1" name="CarrierName15" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset0" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset1" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset2" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset3" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset4" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset5" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset6" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset7" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset8" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset9" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset10" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset11" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset12" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset13" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset14" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Get.Offset15" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset0" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset1" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset2" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset3" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset4" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset5" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset6" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset7" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset8" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset9" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset10" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset11" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset12" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset13" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset14" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="0000,-0000,-0000" name="Put.Offset15" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="1" name="LP1BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LP1CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="2" name="LP2CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP3CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="4" name="LP4CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
-
-
-
-
- <config default="1" name="Aligner1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner21BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="Aligner2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="1" name="CoolingBuffer2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="CoolingBuffer2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="1" name="LL1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="1" name="LL2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="1" name="LL2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="3" name="LP1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP1Station0" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="6" name="LP2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="6" name="LP2Station0" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP1Station013" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP1Station113" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="6" name="LP2Station013" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="6" name="LP2Station113" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="9" name="AlignerStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="AlignerStation2" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="AlignerStation3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="AlignerStation4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="AlignerStation6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="AlignerStation8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="AlignerStation12" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="9" name="Aligner1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="Aligner2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="CoolingBuffer1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="18" name="CoolingBuffer2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="LL1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="LL2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="BufferStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="Buffer1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="Buffer2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="3" name="LP1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="6" name="LP2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="9" name="Aligner1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="Aligner2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="CoolingBuffer1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="18" name="CoolingBuffer2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="LL1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="LL2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="Buffer1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="Buffer2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="BufferStation4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="3" name="LP1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="6" name="LP2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="9" name="Aligner1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="Aligner2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="CoolingBuffer1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="18" name="CoolingBuffer2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="LL1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="LL2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="Buffer1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="Buffer2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="BufferStation6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="3" name="LP1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="6" name="LP2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
- <config default="9" name="Aligner1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="Aligner2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="CoolingBuffer1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="18" name="CoolingBuffer2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="LL1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="LL2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="21" name="Buffer1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="24" name="Buffer2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="12" name="BufferStation8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="27" name="TurnOverStationStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="TurnOverStationStation2" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="TurnOverStationStation3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="TurnOverStationStation4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="TurnOverStationStation6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="TurnOverStationStation8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
- <config default="15" name="TurnOverStationStation12" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
-
- <config default="Thick" name="LP1ThicknessType" description="LP1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Thick" name="LP2ThicknessType" description="LP2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="CoolingBuffer1ThicknessType" description="CoolingBuffer1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="CoolingBuffer2ThicknessType" description="CoolingBuffer2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="Aligner1ThicknessType" description="Aligner1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="Aligner2ThicknessType" description="Aligner2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="LL1ThicknessType" description="PMA Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="LL2ThicknessType" description="PMB Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="Buffer1ThicknessType" description="Buffer1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="NONE" name="Buffer2ThicknessType" description="Buffer2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Thick" name="UpperThicknessType" description="Upper Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- <config default="Thick" name="LowerThicknessType" description="Lower Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
- </configs>
-
-
- </root>
|