Efem.sccfg 156 KB

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  1. <?xml version="1.0" encoding="utf-8"?>
  2. <root system="EFEM">
  3. <configs name="LoadPort">
  4. <configs name="LP1">
  5. <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  6. <config default="120" name="TimeLimitAction" description="Time limit for on action" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
  7. <config default="LOT:" name="CarrierIDStartString" description="CarrierIDStartString" max="0" min="0" paramter="" tag="" unit="" type="String" />
  8. <config default="QTY:" name="CarrierIDEndString" description="CarrierIDEndString" max="0" min="0" paramter="" tag="" unit="" type="String" />
  9. <config default="false" name="AutoDetectCarrierType" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  10. <config default="25" name="SlotsNumber" description="SlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  11. <config default="false" name="Disable" description="LP1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
  12. <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  13. <config default="0" name="CstType" description="0:Smif;1:OpenCst" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  14. </configs>
  15. <configs name="LP2">
  16. <config default="COM3" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  17. <config default="120" name="TimeLimitAction" description="Time limit for on action" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
  18. <config default="LOT:" name="CarrierIDStartString" description="CarrierIDStartString" max="0" min="0" paramter="" tag="" unit="" type="String" />
  19. <config default="QTY:" name="CarrierIDEndString" description="CarrierIDEndString" max="0" min="0" paramter="" tag="" unit="" type="String" />
  20. <config default="false" name="AutoDetectCarrierType" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  21. <config default="25" name="SlotsNumber" description="SlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  22. <config default="false" name="Disable" description="LP1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
  23. <config default="0" name="CarrierIndex" description="LP1CarrierIndex" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  24. <config default="0" name="CstType" description="0:Smif;1:OpenCst" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  25. </configs>
  26. <config default="15" name="WaitLoadTimeOut" description="" max="1000" min="1" paramter="" tag="" unit="秒" type="String" />
  27. <config default="30" name="TimeLimitLoadportHome" description="Loadport回原点命令超时设定" max="120" min="0" paramter="" tag="" unit="second" type="Integer" />
  28. <config default="30" name="TimeLimitLoadportLoad" description="Load命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  29. <config default="20" name="TimeLimitLoadportUnload" description="Unload命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  30. <config default="11" name="TimeLimitLoadportClamp" description="Clamp命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  31. <config default="9" name="TimeLimitReadRFID" description="读RFID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  32. <config default="10" name="TimeLimitWriteRFID" description="写RFID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  33. <config default="false" name="EnableAutoLockWhenCassetteArrived" description="EnableAutoLockWhenCassetteArrived" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  34. <config default="true" name="EnableAutoDockAfterIdRead" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  35. <config default="true" name="EnableAutoCarrierIdReadAfterLatch" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  36. <config default="true" name="EnableAutoMappingAfterDock" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  37. <config default="true" name="EnableAutoUndockAfterUndocking" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  38. <config default="true" name="EnablePauseWhenVerifyIDFailed" description=" " max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  39. <config default="100" name="TimeDelayNotifyCassettePresent" description="持续时间,通知Cassette拿走或者放上" max="99999" min="0" paramter="" tag="" unit="second" type="Integer" />
  40. <config default="1" name="LoadPort1CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  41. <config default="1" name="LoadPort2CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  42. <config default="1" name="LoadPort3CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  43. <config default="1" name="LoadPort4CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  44. <config default="1" name="LoadPort5CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  45. <config default="1" name="LoadPort6CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  46. <config default="1" name="LoadPort7CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  47. <config default="1" name="LoadPort8CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  48. <config default="1" name="LoadPort9CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  49. <config default="1" name="LoadPort10CarrierMode" description="Loader=1,Unloader=2,Both=3" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  50. <config default="LP1" name="LoadPort1CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  51. <config default="LP2" name="LoadPort2CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  52. <config default="LP3" name="LoadPort3CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  53. <config default="LP4" name="LoadPort4CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  54. <config default="LP5" name="LoadPort5CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  55. <config default="LP6" name="LoadPort6CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  56. <config default="LP7" name="LoadPort7CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  57. <config default="LP8" name="LoadPort8CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  58. <config default="LP9" name="LoadPort9CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  59. <config default="LP10" name="LoadPort10CarrierLabel" description="LP 上面的标记文字" max="0" min="0" paramter="" tag="" unit="" type="String" />
  60. <config default="COM21" name="LoadPort1CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  61. <config default="COM23" name="LoadPort2CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  62. <config default="COM25" name="LoadPort3CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  63. <config default="COM27" name="LoadPort4CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  64. <config default="COM29" name="LoadPort5CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  65. <config default="COM31" name="LoadPort6CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  66. <config default="COM7" name="LoadPort7CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  67. <config default="COM8" name="LoadPort8CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  68. <config default="COM9" name="LoadPort9CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  69. <config default="COM10" name="LoadPort10CarrierIdReaderPortName" description="LP读码器COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  70. <config default="COM1" name="LoadPort1PortName" description="LoadPort1PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
  71. <config default="COM3" name="LoadPort2PortName" description="LoadPort2PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
  72. <config default="COM5" name="LoadPort3PortName" description="LoadPort3PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
  73. <config default="COM7" name="LoadPort4PortName" description="LoadPort4PortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
  74. <config default="127.0.0.1:7091" name="LoadPort1CarrierIdReaderAddress" description="LP1读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  75. <config default="127.0.0.1:7092" name="LoadPort2CarrierIdReaderAddress" description="LP2读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  76. <config default="127.0.0.1:7093" name="LoadPort3CarrierIdReaderAddress" description="LP3读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  77. <config default="127.0.0.1:7094" name="LoadPort4CarrierIdReaderAddress" description="LP4读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  78. <config default="127.0.0.1:7095" name="LoadPort5CarrierIdReaderAddress" description="LP5读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  79. <config default="127.0.0.1:7096" name="LoadPort6CarrierIdReaderAddress" description="LP6读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  80. <config default="127.0.0.1:7097" name="LoadPort7CarrierIdReaderAddress" description="LP7读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  81. <config default="127.0.0.1:7098" name="LoadPort8CarrierIdReaderAddress" description="LP8读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  82. <config default="127.0.0.1:7099" name="LoadPort9CarrierIdReaderAddress" description="LP9读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  83. <config default="127.0.0.1:7100" name="LoadPort10CarrierIdReaderAddress" description="LP10读码器RFID IP地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  84. <config default="00000004" name="LoadPort1CarrierIdReaderPage" description="LP1读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  85. <config default="00000004" name="LoadPort2CarrierIdReaderPage" description="LP2读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  86. <config default="00000004" name="LoadPort3CarrierIdReaderPage" description="LP3读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  87. <config default="00000004" name="LoadPort4CarrierIdReaderPage" description="LP4读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  88. <config default="00000004" name="LoadPort5CarrierIdReaderPage" description="LP5读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  89. <config default="00000004" name="LoadPort6CarrierIdReaderPage" description="LP6读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  90. <config default="00000004" name="LoadPort7CarrierIdReaderPage" description="LP7读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  91. <config default="00000004" name="LoadPort8CarrierIdReaderPage" description="LP8读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  92. <config default="00000004" name="LoadPort9CarrierIdReaderPage" description="LP9读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  93. <config default="00000004" name="LoadPort10CarrierIdReaderPage" description="LP10读码器RFID IP Page" max="0" min="0" paramter="" tag="" unit="" type="String" />
  94. <config default="FOUP" name="LoadPort1CassetteType" description="LP1容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
  95. <config default="FOUP" name="LoadPort2CassetteType" description="LP2容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
  96. <config default="FOUP" name="LoadPort3CassetteType" description="LP3容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
  97. <config default="FOUP" name="LoadPort4CassetteType" description="LP4容器类型" max="0" min="0" paramter="" tag="" unit="" type="String" />
  98. <config default="true" name="DefaultUseRFIDForCarrierIdRead" description="默认使用RFID进行Carrier 读取" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  99. </configs>
  100. <configs name="Robot">
  101. <config default="false" name="BladeUpDownReverse" description="BladeUpDownReverse" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  102. <config default="true" name="Blade1Enable" description="Blade1Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  103. <config default="true" name="Blade2Enable" description="Blade2Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  104. <config default="1" name="Blade2Slots" description="Slot数目" max="4" min="1" paramter="" tag="" unit="" type="Integer" />
  105. <config default="1" name="RobotSpeed" description="Robot速度" max="3" min="1" paramter="" tag="" unit="" type="Integer" />
  106. <config default="2" name="TimeLimitRobotCommand" description="Robot命令超时设定" max="200" min="0" paramter="" tag="" unit="seconds" type="Integer" />
  107. <config default="30" name="TimeLimitRobotHome" description="Robot回原点命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
  108. <config default="10" name="TimeLimitForPickWafer" description="Pick命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
  109. <config default="20" name="TimeLimitForPlaceWafer" description="Place命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
  110. <config default="10" name="TimeLimitForExchangeWafer" description="Exchange命令超时设定" max="200" min="0" paramter="" tag="" unit="second" type="Integer" />
  111. <config default="0" name="RobotCommunicationToken" description="RobotCommunicationToken" max="9999" min="0" paramter="" tag="" unit="" type="Integer" />
  112. <config default="true" name="DualBlade1TransferEnable" description="DualBlade1TransferEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  113. <config default="127.0.0.1:10110" name="Address" description="ip:port" max="0" min="0" paramter="" tag="" unit="" type="String" />
  114. <config default="1" name="SlotCount" description="SlotCount" max="9" min="1" paramter="" tag="" unit="" type="Integer" />
  115. <config default="2183900" name="WaferSize3MappingOffset" description="WaferSize3MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
  116. <config default="2285000" name="WaferSize4MappingOffset" description="WaferSize4MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
  117. <config default="2545000" name="WaferSize6MappingOffset" description="WaferSize6MappingOffset" max="999999999" min="0" paramter="" tag="" unit="" type="Integer" />
  118. <configs name="Robot">
  119. <config default="1" name="Address" description="Robot address" max="0" min="0" paramter="" tag="" unit="" type="String" />
  120. <config default="3" name="SpeedLevel" description="SpeedLevel" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
  121. <config default="100" name="ExistInterval" description="SpeedLevel" max="60000" min="0" paramter="" tag="" unit="" type="Integer" />
  122. <config default="true" name="IsVacuumMode" description="True:VacuumMode;False:FrictionMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  123. <config default="1" name="BodyNumber" description="Robot Body Number" max="65535" min="0" paramter="" tag="" unit="" type="Integer" />
  124. <config default="COM27" name="PortName" description="Robot COM port" max="0" min="0" paramter="" tag="" unit="" type="String" />
  125. <config default="T-00902H" name="RobotModel" description="RobotModel" max="10" min="0" paramter="" tag="" unit="" type="String" />
  126. <config default="20" name="RobotZSpeed" description="RobotZSpeed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  127. <config default="50" name="RobotABWSpeed" description="RobotABWSpeed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  128. <config default="980" name="Speed" description="Speed" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
  129. <config default="98" name="RobotSpeed" description="Speed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  130. <config default="true" name="EnableLogMessage" description="enable log" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  131. <config default="2" name="TimeLimitRobotCommand" description="TimeLimitRobotCommand" max="300" min="0" paramter="" tag="" unit="Seconds" type="Integer" />
  132. <config default="2" name="MotionTimeout" description="MotionTimeout" max="300" min="0" paramter="" tag="" unit="Seconds" type="Integer" />
  133. <config default="true" name="EnableGotoReady" description="EnableGotoReady" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  134. <config default="1" name="GotoReadyXSpeedForPick" description="Speed" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  135. <config default="0" name="GotoReadyZDistanceForPick" description="ZDistanceForPick" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  136. <config default="0" name="GotoReadyXCheckWaferForPlace" description="falg1" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  137. <config default="0" name="GotoReadyCICheckWaferForPlace" description="falg2" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  138. <config default="1" name="GotoReadyXSpeedForPlace" description="Speed1" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  139. <config default="1" name="GotoReadyCISpeedForPlace" description="Speed2" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  140. <config default="0" name="GotoReadyZDistanceForPlace" description="ZDistanceForPlace" max="100" min="0" paramter="" tag="" unit="" type="Integer" />
  141. <config default="1" name="InitCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  142. <config default="2" name="LeftPickCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  143. <config default="3" name="RightPickCmdNO" description="RightPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  144. <config default="4" name="DualPickCmdNO" description="DualPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  145. <config default="5" name="LeftPlaceCmdNO" description="LeftPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  146. <config default="6" name="RightPlaceCmdNO" description="RightPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  147. <config default="7" name="DualPlaceCmdNO" description="DualPlaceCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  148. <config default="8" name="LeftPickSwapCmdNO" description="LeftPickSwapCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  149. <config default="9" name="RightPickSwapCmdNO" description="RightPickSwapCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  150. <config default="3" name="MapCmdNO" description="LeftPickCmdNO" max="319" min="1" paramter="" tag="" unit="" type="Integer" />
  151. </configs>
  152. <configs name="Offset">
  153. <config default="99999" name="OffsetXMax" description="Offset X Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
  154. <config default="-9999" name="OffsetXMin" description="Offset X Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
  155. <config default="99999" name="OffsetYMax" description="Offset Y Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
  156. <config default="-9999" name="OffsetYMin" description="Offset Y Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
  157. <config default="99999" name="OffsetZMax" description="Offset Z Max(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
  158. <config default="-9999" name="OffsetZMin" description="Offset Z Min(0.01[mm])" max="99999" min="-9999" paramter="" tag="" unit="" type="Integer" />
  159. </configs>
  160. <configs name="OffsetForLL">
  161. <config default="0000,-0000,-0000" name="LLAGET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  162. <config default="0000,-0000,-0000" name="LLAPUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  163. <config default="0000,-0000,-0000" name="LLAEXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  164. <config default="0000,-0000,-0000" name="LLBGET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  165. <config default="0000,-0000,-0000" name="LLBPUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  166. <config default="0000,-0000,-0000" name="LLBEXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  167. <config default="0000,-0000,-0000" name="LL1GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  168. <config default="0000,-0000,-0000" name="LL1PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  169. <config default="0000,-0000,-0000" name="LL1EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  170. <config default="0000,-0000,-0000" name="LL2GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  171. <config default="0000,-0000,-0000" name="LL2PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  172. <config default="0000,-0000,-0000" name="LL2EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  173. <config default="0000,-0000,-0000" name="LL3GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  174. <config default="0000,-0000,-0000" name="LL3PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  175. <config default="0000,-0000,-0000" name="LL3EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  176. <config default="0000,-0000,-0000" name="LL4GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  177. <config default="0000,-0000,-0000" name="LL4PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  178. <config default="0000,-0000,-0000" name="LL4EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  179. <config default="0000,-0000,-0000" name="LL5GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  180. <config default="0000,-0000,-0000" name="LL5PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  181. <config default="0000,-0000,-0000" name="LL5EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  182. <config default="0000,-0000,-0000" name="LL6GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  183. <config default="0000,-0000,-0000" name="LL6PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  184. <config default="0000,-0000,-0000" name="LL6EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  185. <config default="0000,-0000,-0000" name="LL7GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  186. <config default="0000,-0000,-0000" name="LL7PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  187. <config default="0000,-0000,-0000" name="LL7EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  188. <config default="0000,-0000,-0000" name="LL8GET" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  189. <config default="0000,-0000,-0000" name="LL8PUT" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  190. <config default="0000,-0000,-0000" name="LL8EXCHANGE" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  191. </configs>
  192. <configs name="OffsetForLP">
  193. <config default="FOUP,0000,-0000,-0000" name="Type1" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  194. <config default="FOUP2,0000,-0000,-0000" name="Type2" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  195. <config default="FOUP3,0000,-0000,-0000" name="Type3" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  196. <config default="FOUP4,0000,-0000,-0000" name="Type4" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  197. <config default="FOUP5,0000,-0000,-0000" name="Type5" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  198. <config default="FOUP6,0000,-0000,-0000" name="Type6" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  199. <config default="FOUP7,0000,-0000,-0000" name="Type7" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  200. <config default="FOUP8,0000,-0000,-0000" name="Type8" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  201. <config default="FOUP9,0000,-0000,-0000" name="Type9" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  202. <config default="FOUP10,0000,-0000,-0000" name="Type10" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  203. <config default="FOUP11,0000,-0000,-0000" name="Type11" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  204. <config default="FOUP12,0000,-0000,-0000" name="Type12" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  205. <config default="FOUP13,0000,-0000,-0000" name="Type13" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  206. <config default="FOUP14,0000,-0000,-0000" name="Type14" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  207. <config default="FOUP15,0000,-0000,-0000" name="Type15" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  208. <config default="FOUP16,0000,-0000,-0000" name="Type16" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  209. <config default="FOUP17,0000,-0000,-0000" name="Type17" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  210. <config default="FOUP18,0000,-0000,-0000" name="Type18" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  211. <config default="FOUP19,0000,-0000,-0000" name="Type19" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  212. <config default="FOUP20,0000,-0000,-0000" name="Type20" description="Type,offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  213. </configs>
  214. </configs>
  215. <configs name="MotionAxis">
  216. <config default="1000" name="AccSpeed" description="加速度" max="999999" min="0" paramter="" tag="" unit="ms" type="Integer" />
  217. <config default="1000" name="JogSpeed" description="JogSpeed" max="999999" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
  218. <config default="10000" name="AutoSpeed" description="AutoSpeed" max="999999" min="0" paramter="" tag="" unit="mm/min" type="Integer" />
  219. <config default="30" name="MoveTimeout" description="MoveTimeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
  220. <config default="60" name="HomeTimeout" description="HomeTimeout" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
  221. </configs>
  222. <configs name="Aligner1">
  223. <config default="30" name="TimeLimitAlignerHome" description="Aligner回原点命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  224. <config default="9" name="TimeLimitForAlignWafer" description="Align命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  225. <config default="0" name="AlignerCommunicationToken" description="AlignerCommunicationToken" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
  226. <config default="0" name="AlignerReadAngle" description="读取Reader ID的角度" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  227. <config default="0" name="AlignerDefaultAngle" description="AlignerDefaultAngle" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  228. <config default="127.0.0.1:10118" name="Address" description="Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
  229. <config default="true" name="IsEnable" description="IsEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  230. </configs>
  231. <configs name="Aligner2">
  232. <config default="30" name="TimeLimitAlignerHome" description="Aligner回原点命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  233. <config default="9" name="TimeLimitForAlignWafer" description="Align命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  234. <config default="0" name="AlignerCommunicationToken" description="AlignerCommunicationToken" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
  235. <config default="0" name="AlignerReadAngle" description="读取Reader ID的角度" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  236. <config default="0" name="AlignerDefaultAngle" description="AlignerDefaultAngle" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  237. <config default="127.0.0.1:10119" name="Address" description="Address" max="0" min="0" paramter="" tag="" unit="" type="String" />
  238. <config default="true" name="IsEnable" description="IsEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  239. </configs>
  240. <configs name="OcrReader">
  241. <config default="9" name="TimeLimitForWID" description="读WaferID命令超时设定" max="90" min="0" paramter="" tag="" unit="second" type="Integer" />
  242. <config default="true" name="EnableReadLaserMarker1" description="启用读取LaserMarker" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  243. <config default="true" name="EnableReadLaserMarker2" description="启用读取T7 Code,LaserMarker2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  244. <config default="" name="ReaderJob1Main" description="Job 1, Main ;" max="0" min="0" paramter="" tag="" unit="" type="String" />
  245. <config default="" name="ReaderJob1Slave" description="ReaderJob1Slave" max="0" min="0" paramter="" tag="" unit="" type="String" />
  246. <config default="" name="ReaderJob2Main" description="ReaderJob2Main" max="0" min="0" paramter="" tag="" unit="" type="String" />
  247. <config default="" name="ReaderJob2Slave" description="ReaderJob2Slave" max="0" min="0" paramter="" tag="" unit="" type="String" />
  248. <config default="false" name="EnablePauseOnWaferIdVerifyFailed" description="EnablePauseOnWaferIdVerifyFailed" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  249. <config default="127.0.0.1:23" name="Address1" description="Address1" max="0" min="0" paramter="" tag="" unit="" type="String" />
  250. <config default="127.0.0.1:24" name="Address2" description="Address2" max="0" min="0" paramter="" tag="" unit="" type="String" />
  251. </configs>
  252. <configs name="Fa">
  253. <configs name="E84">
  254. <config default="30" name="TP1" description="TP1" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
  255. <config default="30" name="TP2" description="TP2" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
  256. <config default="30" name="TP3" description="TP3" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
  257. <config default="30" name="TP4" description="TP4" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
  258. <config default="30" name="TP5" description="TP5" max="999" min="0" paramter="" tag="" unit="S" type="Integer" />
  259. </configs>
  260. <config default="Passive" name="ConnectionMode" description="Passive Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
  261. <config default="127.0.0.1" name="LocalIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
  262. <config default="5021" name="LocalPortNumber" description="LocalPortNumber" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
  263. <config default="127.0.0.1" name="RemoteIpAddress" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
  264. <config default="5020" name="RemotePortNumber" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
  265. <config default="45" name="T3Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  266. <config default="10" name="T5Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  267. <config default="5" name="T6Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  268. <config default="10" name="T7Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  269. <config default="5" name="T8Timeout" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  270. <config default="false" name="EnableSpooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  271. <config default="30" name="FaLinkTestInterval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  272. <config default="Enabled" name="FaDefaultCommunicationState" description="Enabled /Disabled" max="0" min="0" paramter="" tag="" unit="" type="String" />
  273. <config default="Online" name="FaDefaultControlState" description="Online / Offline" max="0" min="0" paramter="" tag="" unit="" type="String" />
  274. <config default="Local" name="FaDefaultControlSubState" description="Local / Remote" max="0" min="0" paramter="" tag="" unit="" type="String" />
  275. <config default="0" name="DeviceId" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
  276. </configs>
  277. <configs name="System">
  278. <config default="001" name="EFEMNUM" description="DeviceType" max="0" min="0" paramter="" tag="" unit="" type="String" />
  279. <config default="" name="DeviceType" description="DeviceType" max="0" min="0" paramter="" tag="" unit="" type="String" />
  280. <config default="true" name="IsSimulatorMode" description="IsSimulatorMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  281. <config default="false" name="ConfigDO32AsBuzzer" description="ConfigDO32AsBuzzer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  282. <config default="false" name="ShowWaferID" description="ShowWaferID" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  283. <config default="0" name="TotalWaferCount" description="TotalWaferCount" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
  284. <config default="" name="WaferDisplayMode" description="WaferDisplayMode" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
  285. <config default="true" name="EnableRobotGripAndUngrip" description="EnableRobotGripAndUngrip" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  286. <config default="false" name="EnableUpender" description="EnableUpender" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  287. <config default="false" name="EnableAligner" description="EnableAligner" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  288. <config default="false" name="EnableOcrReader2" description="EnableOcrReader2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  289. <config default="false" name="EnableOcrReader1" description="EnableOcrReader1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  290. <config default="false" name="EnableRFIDReaderLP1" description="EnableRFIDReaderLP1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  291. <config default="false" name="EnableRFIDReaderLP2" description="EnableRFIDReaderLP2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  292. <config default="false" name="EnableRFIDReaderLP3" description="EnableRFIDReaderLP3" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  293. <config default="false" name="EnableRFIDReaderLP4" description="EnableRFIDReaderLP4" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  294. <config default="false" name="EnableRFIDReaderLP5" description="EnableRFIDReaderLP5" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  295. <config default="false" name="EnableRFIDReaderLP6" description="EnableRFIDReaderLP6" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  296. <config default="false" name="EnableRFIDReaderLP7" description="EnableRFIDReaderLP7" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  297. <config default="false" name="EnableRFIDReaderLP8" description="EnableRFIDReaderLP8" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  298. <config default="false" name="EnableRFIDReaderLP9" description="EnableRFIDReaderLP9" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  299. <config default="false" name="EnableRFIDReaderLP10" description="EnableRFIDReaderLP10" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  300. <config default="13000" name="EfemPortNumber" description="EfemPortNumber" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
  301. <config default="COM20" name="FFUComPortName" description="FFUComPortName" max="0" min="0" paramter="" tag="" unit="" type="String" />
  302. <config default="800" name="FFUSetSpeed" description="FFUSetSpeed" max="1600" min="0" paramter="" tag="" unit="" type="Integer" />
  303. <config default="10.0.0.1" name="AdamAdapterIp" description="Adam Adapter Ip" max="0" min="0" paramter="" tag="" unit="" type="String" />
  304. <config default="true" name="OnlyLotId" description="OnlyLotId" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  305. <config default="127.0.0.1" name="EfemServerLocalIp" description="Local Ip" max="0" min="0" paramter="" tag="" unit="" type="String" />
  306. <config default="600" name="TimeLimitEfemComandDelay" description="Efem Comand Deley" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
  307. <!--<config default="10" name="AlignerPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />-->
  308. <config default="0" name="AlignerPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  309. <!--<config default="10" name="CoolingPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />-->
  310. <config default="0" name="CoolingPinDownDelay" description=" " max="999" min="0" paramter="" tag="" unit="" type="Integer" />
  311. <config default="502" name="AdamAdapterPort" description="Adam Adapter Port" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
  312. <config default="0" name="PressureDiffChannel" description="压差传感器channel" max="8" min="0" paramter="" tag="" unit="" type="Integer" />
  313. <config default="8" name="FFUSpeedSet" description="FFU 转速设定" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  314. <config default="30" name="PressureDiffMaxPressure" description="压差计最大值" max="999999" min="0" paramter="" tag="" unit="" type="Integer" />
  315. <config default="-30" name="PressureDiffMinPressure" description="压差计最小值" max="0" min="-999999" paramter="" tag="" unit="" type="Integer" />
  316. <config default="-30" name="PressureDiffLowWarning" description="压差计低报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
  317. <config default="-30" name="PressureDiffLowLowAlarm" description="压差计低低报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
  318. <config default="-30" name="PressureDiffHighWarning" description="压差计高报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
  319. <config default="-30" name="PressureDiffHighHighAlarm" description="压差计高高报警" max="999999" min="-999999" paramter="" tag="" unit="" type="Integer" />
  320. <config default="true" name="IsLoadLockDoorAlwaysOpen" description="IsLoadLockDoorAlwaysOpen" max="" min="" paramter="" tag="" unit="" type="Bool" />
  321. <config default="true" name="IsLoadLockEnableZMotion" description="是否可以在LL端执行LOAD/UNLOAD/TRANS指令" max="" min="" paramter="" tag="" unit="" type="Bool" />
  322. <config default="false" name="IsErrorReportEnable" description="是否能使告警上报" max="" min="" paramter="" tag="" unit="" type="Bool" />
  323. <config default="false" name="IsEnableIdentifyThickness" description="是否区分薄厚片" max="" min="" paramter="" tag="" unit="" type="Bool" />
  324. <config default="true" name="IsEnableMultiWaferSize" description="使能跑多种尺寸的wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
  325. <config default="true" name="IsEnableMultiWaferSizeShow" description="使能跑多种尺寸的wafer" max="" min="" paramter="" tag="" unit="" type="Bool" />
  326. <config default="false" name="IsEnableMoveInDiffSlotsNumLP" description="使能在不同槽数的lp之间传输" max="" min="" paramter="" tag="" unit="" type="Bool" />
  327. <config default="true" name="IsEnableBufferMap" description="Buffer Map 使能" max="" min="" paramter="" tag="" unit="" type="Bool" />
  328. <config default="8" name="BufferSlotCount" description="Buffer槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
  329. <config default="8" name="Buffer1SlotCount" description="Buffer1槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
  330. <config default="8" name="Buffer2SlotCount" description="Buffer2槽数" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
  331. <config default="8" name="Buffer1WaferSize" description="Buffer1晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
  332. <config default="8" name="Buffer2WaferSize" description="Buffer2晶圆尺寸" max="26" min="0" paramter="" tag="" unit="" type="Integer" />
  333. <config default="false" name="CoolingBuffer1Disable" description="Coolingbuffer1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
  334. <config default="false" name="CoolingBuffer2Disable" description="Coolingbuffer2不能用" max="" min="" paramter="" tag="" unit="" type="Bool" />
  335. <config default="false" name="Aligner1Disable" description="Aligner1不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
  336. <config default="false" name="Aligner2Disable" description="Aligner2不能使用" max="" min="" paramter="" tag="" unit="" type="Bool" />
  337. <config default="false" name="StopIonizerWorkingEnable" description="停止离子器使能" max="" min="" paramter="" tag="" unit="" type="Bool" />
  338. <config default="true" name="LPRobotActionIntervene" description="LP和机械手动作干涉" max="" min="" paramter="" tag="" unit="" type="Bool" />
  339. <config default="false" name="IsSlotShowOpposite" description="LP槽号显示" max="" min="" paramter="" tag="" unit="" type="Bool" />
  340. <configs name="FFU">
  341. <config default="COM40" name="Address" description="FFU COM address" max="0" min="0" paramter="" tag="" unit="" type="String" />
  342. <config default="1" name="DeviceAddress" description="FFU Station Name" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  343. <config default="1440" name="MaxSpeed" description="FFU Station Name" max="5000" min="0" paramter="" tag="" unit="" type="Integer" />
  344. <config default="false" name="EnableLogMessage" description="FFU enable log" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  345. <config default="1" name="FFUFanSpeedSetPoint" description="FFU Fan Speed SetPoint" max="1440" min="0" paramter="" tag="" unit="" type="Integer" />
  346. </configs>
  347. </configs>
  348. <configs name="Process">
  349. <!--<config default="7" name="DelayBeforeWaferPutToLL" description="Delay On Cooling Buffer Before Wafer Put To LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />-->
  350. <config default="0" name="DelayBeforeWaferPutToLL" description="Delay On Cooling Buffer Before Wafer Put To LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />
  351. <!--<config default="14" name="DelayAfterWaferPickFromLL" description="Delay On Cooling Buffer After Wafer Pick From LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />-->
  352. <config default="0" name="DelayAfterWaferPickFromLL" description="Delay On Cooling Buffer After Wafer Pick From LL" max="30" min="0" paramter="" tag="" unit="" type="Double" />
  353. <config default="false" name="CycleEnable" description="CycleEnable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  354. <config default="3" name="CycleCount" description="CycleCount" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
  355. <config default="true" name="CycleEnableAutoUnload" description="CycleEnableAutoUnload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  356. <config default="false" name="CycleEnableAlign" description="CycleEnableAlign" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  357. <config default="false" name="CycleEnableLaserMarker1" description="CycleEnableLaserMarker1" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  358. <config default="false" name="CycleEnableLaserMarker2" description="CycleEnableLaserMarker2" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  359. <config default="false" name="TransferStopImmediately" description="TransferStopImmediately" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  360. <config default="false" name="EnableAutoUndockAfterProcessComplete" description="EnableAutoUndockAfterProcessComplete" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  361. <config default="true" name="OptionLoadportMonitor" description="OptionLoadportMonitor" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  362. <config default="false" name="OptionMainternaceMonitor" description="OptionMainternaceMonitor" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
  363. <config default="false" name="OptionSignalTowerMonitor" description="OptionSignalTowerMonitor" max="0" min="0" paramter="" tag="" unit="" type="Integer" />
  364. <config default="false" name="CycleSwapHand" description="Cycle Swap Hand Option" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  365. <config default="3" name="CyclePlaceMode" description="Transfer Mode for Cycle 1=Opposite,2=Same,3=FromTop,4=FromButtom" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  366. </configs>
  367. <configs name="Server">
  368. <config default="1000" name="SendReadyInterval" description="间隔多长时间发送READY信号给E/C" max="99999" min="200" paramter="" tag="" unit="ms" type="Integer" />
  369. </configs>
  370. <configs name="Coolbuffer">
  371. <config default="20" name="UpTimeout" description="Move up Timeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
  372. <config default="20" name="DownTimeout" description="Move down Timeout" max="100" min="1" paramter="" tag="" unit="s" type="Integer" />
  373. </configs>
  374. <configs name="CarrierID">
  375. <configs name="RFIDReaderA">
  376. <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  377. <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
  378. <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  379. <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
  380. <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
  381. <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  382. <config default="127.0.0.1:7001" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
  383. <config default="10" name="RetryTime" description="RetryTime" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
  384. <config default="True" name="CarrierIdNeedTrimSpace" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  385. <config default="10" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
  386. </configs>
  387. <configs name="RFIDReaderB">
  388. <config default="COM3" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  389. <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
  390. <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  391. <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
  392. <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
  393. <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  394. <config default="127.0.0.1:7002" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
  395. <config default="10" name="RetryTime" description="RetryTime" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
  396. <config default="True" name="CarrierIdNeedTrimSpace" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  397. <config default="10" name="ActionTimeLimit" description="ActionTimeLimit" max="999" min="1" paramter="" tag="" unit="" type="Integer" />
  398. </configs>
  399. <configs name="BarcodeReaderA">
  400. <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  401. <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
  402. <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  403. <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
  404. <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
  405. <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  406. <config default="127.0.0.1:55256" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
  407. <config default="1" name="Type" description="(0=none,1=Honeywell,2=Keyence)" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  408. </configs>
  409. <configs name="BarcodeReaderB">
  410. <config default="COM1" name="PortName" description="LP COM串口地址" max="0" min="0" paramter="" tag="" unit="" type="String" />
  411. <config default="9600" name="BaudRate" description="BaudRate" max="115200" min="1" paramter="" tag="" unit="" type="Integer" />
  412. <config default="8" name="DataBits" description="DataBits" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  413. <config default="0" name="Parity" description="Parity" max="3" min="0" paramter="" tag="" unit="" type="String" />
  414. <config default="1" name="StopBits" description="StopBits" max="3" min="1" paramter="" tag="" unit="" type="String" />
  415. <config default="True" name="EnableLogMessage" description="EnableLogMessage" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  416. <config default="127.0.0.1:55257" name="Address" description="ConnectioAddress" max="0" min="0" paramter="" tag="" unit="" type="String" />
  417. <config default="1" name="Type" description="(0=none,1=Honeywell,2=Keyence)" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  418. </configs>
  419. </configs>
  420. <configs name="CarrierInfo">
  421. <configs name="Carrier0">
  422. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  423. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  424. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  425. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  426. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  427. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  428. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  429. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  430. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  431. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  432. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  433. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  434. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  435. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  436. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  437. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  438. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  439. <config default="false" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  440. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  441. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  442. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  443. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  444. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  445. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  446. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  447. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  448. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  449. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  450. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  451. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  452. </configs>
  453. <configs name="Carrier1">
  454. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  455. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  456. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  457. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  458. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  459. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  460. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  461. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  462. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  463. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  464. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  465. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  466. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  467. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  468. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  469. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  470. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  471. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  472. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  473. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  474. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  475. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  476. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  477. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  478. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  479. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  480. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  481. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  482. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  483. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  484. </configs>
  485. <configs name="Carrier2">
  486. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  487. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  488. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  489. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  490. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  491. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  492. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  493. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  494. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  495. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  496. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  497. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  498. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  499. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  500. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  501. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  502. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  503. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  504. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  505. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  506. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  507. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  508. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  509. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  510. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  511. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  512. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  513. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  514. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  515. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  516. </configs>
  517. <configs name="Carrier3">
  518. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  519. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  520. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  521. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  522. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  523. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  524. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  525. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  526. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  527. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  528. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  529. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  530. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  531. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  532. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  533. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  534. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  535. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  536. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  537. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  538. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  539. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  540. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  541. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  542. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  543. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  544. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  545. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  546. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  547. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  548. </configs>
  549. <configs name="Carrier4">
  550. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  551. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  552. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  553. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  554. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  555. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  556. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  557. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  558. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  559. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  560. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  561. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  562. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  563. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  564. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  565. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  566. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  567. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  568. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  569. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  570. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  571. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  572. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  573. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  574. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  575. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  576. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  577. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  578. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  579. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  580. </configs>
  581. <configs name="Carrier5">
  582. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  583. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  584. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  585. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  586. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  587. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  588. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  589. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  590. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  591. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  592. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  593. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  594. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  595. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  596. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  597. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  598. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  599. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  600. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  601. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  602. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  603. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  604. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  605. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  606. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  607. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  608. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  609. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  610. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  611. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  612. </configs>
  613. <configs name="Carrier6">
  614. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  615. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  616. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  617. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  618. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  619. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  620. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  621. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  622. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  623. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  624. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  625. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  626. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  627. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  628. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  629. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  630. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  631. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  632. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  633. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  634. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  635. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  636. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  637. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  638. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  639. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  640. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  641. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  642. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  643. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  644. </configs>
  645. <configs name="Carrier7">
  646. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  647. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  648. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  649. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  650. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  651. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  652. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  653. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  654. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  655. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  656. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  657. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  658. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  659. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  660. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  661. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  662. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  663. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  664. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  665. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  666. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  667. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  668. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  669. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  670. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  671. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  672. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  673. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  674. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  675. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  676. </configs>
  677. <configs name="Carrier8">
  678. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  679. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  680. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  681. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  682. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  683. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  684. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  685. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  686. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  687. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  688. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  689. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  690. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  691. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  692. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  693. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  694. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  695. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  696. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  697. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  698. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  699. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  700. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  701. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  702. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  703. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  704. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  705. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  706. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  707. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  708. </configs>
  709. <configs name="Carrier9">
  710. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  711. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  712. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  713. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  714. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  715. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  716. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  717. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  718. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  719. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  720. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  721. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  722. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  723. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  724. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  725. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  726. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  727. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  728. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  729. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  730. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  731. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  732. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  733. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  734. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  735. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  736. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  737. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  738. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  739. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  740. </configs>
  741. <configs name="Carrier10">
  742. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  743. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  744. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  745. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  746. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  747. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  748. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  749. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  750. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  751. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  752. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  753. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  754. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  755. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  756. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  757. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  758. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  759. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  760. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  761. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  762. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  763. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  764. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  765. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  766. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  767. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  768. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  769. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  770. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  771. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  772. </configs>
  773. <configs name="Carrier11">
  774. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  775. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  776. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  777. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  778. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  779. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  780. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  781. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  782. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  783. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  784. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  785. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  786. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  787. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  788. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  789. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  790. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  791. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  792. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  793. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  794. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  795. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  796. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  797. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  798. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  799. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  800. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  801. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  802. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  803. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  804. </configs>
  805. <configs name="Carrier12">
  806. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  807. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  808. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  809. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  810. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  811. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  812. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  813. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  814. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  815. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  816. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  817. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  818. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  819. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  820. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  821. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  822. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  823. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  824. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  825. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  826. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  827. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  828. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  829. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  830. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  831. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  832. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  833. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  834. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  835. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  836. </configs>
  837. <configs name="Carrier13">
  838. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  839. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  840. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  841. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  842. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  843. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  844. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  845. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  846. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  847. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  848. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  849. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  850. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  851. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  852. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  853. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  854. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  855. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  856. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  857. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  858. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  859. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  860. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  861. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  862. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  863. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  864. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  865. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  866. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  867. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  868. </configs>
  869. <configs name="Carrier14">
  870. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  871. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  872. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  873. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  874. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  875. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  876. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  877. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  878. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  879. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  880. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  881. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  882. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  883. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  884. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  885. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  886. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  887. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  888. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  889. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  890. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  891. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  892. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  893. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  894. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  895. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  896. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  897. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  898. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  899. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  900. </configs>
  901. <configs name="Carrier15">
  902. <config default="10" name="ThicknessLowLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  903. <config default="5000" name="ThicknessHighLimit" description="ThicknessLowLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  904. <config default="75000" name="SlotPositionBaseLine" description="SlotPositionBaseLine" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  905. <config default="10000" name="SlotPitch" description="SlotPitch" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  906. <config default="2000" name="WaferCenterDeviationLimit" description="WaferCenterDeviationLimit" max="999999" min="0" paramter="" tag="" unit="um" type="Integer" />
  907. <config default="FOUP1" name="CarrierName" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  908. <config default="0000,-0000,-0000" name="GetOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  909. <config default="0000,-0000,-0000" name="PutOffset" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  910. <config default="0" name="CIDReaderIndex" description="LP1CarrierIndex" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
  911. <config default="false" name="CarrierFosbMode" description="CarrierFosbMode" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  912. <config default="12" name="CarrierWaferSize" description="wafer size" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  913. <config default="false" name="NeedCheckIronDoorCarrier" description="Check Iron Door Open Before Operation" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  914. <config default="false" name="KeepClampedAfterUnloadCarrier" description="Keep Carrier Clamped after Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  915. <config default="false" name="DisableEvenSlot" description="Disable Even Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  916. <config default="false" name="DisableOddSlot" description="Disable Odd Slot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  917. <config default="25" name="CarrierSlotsNumber" description="CarrierSlotsNumber" max="50" min="0" paramter="" tag="" unit="" type="Integer" />
  918. <config default="false" name="EnableDualTransfer" description="EnableDualTransfer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  919. <config default="true" name="EnableCarrier" description="EnableCarrier" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  920. <config default="false" name="ForbidAccessAboveWafer" description="ForbidAccessAboveWafer" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  921. <config default="false" name="MappedByRobot" description="MappedByRobot" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
  922. <config default="0.1" name="LP1Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  923. <config default="0.2" name="LP2Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  924. <config default="0.3" name="LP3Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  925. <config default="0.4" name="LP4Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  926. <config default="C01" name="LP5Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  927. <config default="C01" name="LP6Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  928. <config default="C01" name="LP7Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  929. <config default="C01" name="LP8Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  930. <config default="C01" name="LP9Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  931. <config default="C01" name="LP10Station" description="Station name for robot" max="0" min="0" paramter="" tag="" unit="" type="String" />
  932. </configs>
  933. <config default="FOUP1" name="CarrierName0" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  934. <config default="FOUP1" name="CarrierName1" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  935. <config default="FOUP1" name="CarrierName2" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  936. <config default="FOUP1" name="CarrierName3" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  937. <config default="FOUP1" name="CarrierName4" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  938. <config default="FOUP1" name="CarrierName5" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  939. <config default="FOUP1" name="CarrierName6" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  940. <config default="FOUP1" name="CarrierName7" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  941. <config default="FOUP1" name="CarrierName8" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  942. <config default="FOUP1" name="CarrierName9" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  943. <config default="FOUP1" name="CarrierName10" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  944. <config default="FOUP1" name="CarrierName11" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  945. <config default="FOUP1" name="CarrierName12" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  946. <config default="FOUP1" name="CarrierName13" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  947. <config default="FOUP1" name="CarrierName14" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  948. <config default="FOUP1" name="CarrierName15" description="carrier name" max="0" min="0" paramter="" tag="" unit="" type="String" />
  949. <config default="0000,-0000,-0000" name="Get.Offset0" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  950. <config default="0000,-0000,-0000" name="Get.Offset1" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  951. <config default="0000,-0000,-0000" name="Get.Offset2" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  952. <config default="0000,-0000,-0000" name="Get.Offset3" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  953. <config default="0000,-0000,-0000" name="Get.Offset4" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  954. <config default="0000,-0000,-0000" name="Get.Offset5" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  955. <config default="0000,-0000,-0000" name="Get.Offset6" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  956. <config default="0000,-0000,-0000" name="Get.Offset7" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  957. <config default="0000,-0000,-0000" name="Get.Offset8" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  958. <config default="0000,-0000,-0000" name="Get.Offset9" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  959. <config default="0000,-0000,-0000" name="Get.Offset10" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  960. <config default="0000,-0000,-0000" name="Get.Offset11" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  961. <config default="0000,-0000,-0000" name="Get.Offset12" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  962. <config default="0000,-0000,-0000" name="Get.Offset13" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  963. <config default="0000,-0000,-0000" name="Get.Offset14" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  964. <config default="0000,-0000,-0000" name="Get.Offset15" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  965. <config default="0000,-0000,-0000" name="Put.Offset0" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  966. <config default="0000,-0000,-0000" name="Put.Offset1" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  967. <config default="0000,-0000,-0000" name="Put.Offset2" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  968. <config default="0000,-0000,-0000" name="Put.Offset3" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  969. <config default="0000,-0000,-0000" name="Put.Offset4" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  970. <config default="0000,-0000,-0000" name="Put.Offset5" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  971. <config default="0000,-0000,-0000" name="Put.Offset6" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  972. <config default="0000,-0000,-0000" name="Put.Offset7" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  973. <config default="0000,-0000,-0000" name="Put.Offset8" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  974. <config default="0000,-0000,-0000" name="Put.Offset9" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  975. <config default="0000,-0000,-0000" name="Put.Offset10" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  976. <config default="0000,-0000,-0000" name="Put.Offset11" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  977. <config default="0000,-0000,-0000" name="Put.Offset12" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  978. <config default="0000,-0000,-0000" name="Put.Offset13" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  979. <config default="0000,-0000,-0000" name="Put.Offset14" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  980. <config default="0000,-0000,-0000" name="Put.Offset15" description="offsetX,offsetY,offsetZ" max="0" min="0" paramter="" tag="" unit="" type="String" />
  981. <config default="1" name="LP1BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  982. <config default="1" name="LP1BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  983. <config default="1" name="LP1BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  984. <config default="1" name="LP1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  985. <config default="1" name="LP1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  986. <config default="2" name="LP2BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  987. <config default="2" name="LP2BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  988. <config default="2" name="LP2BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  989. <config default="2" name="LP2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  990. <config default="2" name="LP2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  991. <config default="3" name="LP3BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  992. <config default="3" name="LP3BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  993. <config default="3" name="LP3BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  994. <config default="3" name="LP3BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  995. <config default="3" name="LP3BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  996. <config default="4" name="LP4BankNumber0" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  997. <config default="4" name="LP4BankNumber1" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  998. <config default="4" name="LP4BankNumber2" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  999. <config default="4" name="LP4BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1000. <config default="4" name="LP4BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1001. <config default="1" name="LP1CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1002. <config default="1" name="LP1CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1003. <config default="1" name="LP1CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1004. <config default="1" name="LP1CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1005. <config default="1" name="LP1CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1006. <config default="2" name="LP2CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1007. <config default="2" name="LP2CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1008. <config default="2" name="LP2CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1009. <config default="2" name="LP2CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1010. <config default="2" name="LP2CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1011. <config default="3" name="LP3CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1012. <config default="3" name="LP3CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1013. <config default="3" name="LP3CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1014. <config default="3" name="LP3CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1015. <config default="3" name="LP3CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1016. <config default="4" name="LP4CassetteNumber0" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1017. <config default="4" name="LP4CassetteNumber1" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1018. <config default="4" name="LP4CassetteNumber2" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1019. <config default="4" name="LP4CassetteNumber3" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1020. <config default="4" name="LP4CassetteNumber4" description="CassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1021. <config default="1" name="Aligner1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1022. <config default="1" name="Aligner1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1023. <config default="1" name="Aligner1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1024. <config default="1" name="Aligner1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1025. <config default="1" name="Aligner1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1026. <config default="1" name="Aligner2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1027. <config default="1" name="Aligner2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1028. <config default="1" name="Aligner2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1029. <config default="1" name="Aligner21BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1030. <config default="1" name="Aligner2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1031. <config default="1" name="CoolingBuffer1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1032. <config default="1" name="CoolingBuffer1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1033. <config default="1" name="CoolingBuffer1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1034. <config default="1" name="CoolingBuffer1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1035. <config default="1" name="CoolingBuffer1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1036. <config default="1" name="CoolingBuffer2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1037. <config default="1" name="CoolingBuffer2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1038. <config default="1" name="CoolingBuffer2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1039. <config default="1" name="CoolingBuffer2BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1040. <config default="1" name="CoolingBuffer2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1041. <config default="1" name="LL1BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1042. <config default="1" name="LL1BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1043. <config default="1" name="LL1BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1044. <config default="1" name="LL1BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1045. <config default="1" name="LL1BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1046. <config default="1" name="LL2BankNumber3" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1047. <config default="1" name="LL2BankNumber4" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1048. <config default="1" name="LL2BankNumber6" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1049. <config default="1" name="LL2BankNumber8" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1050. <config default="1" name="LL2BankNumber12" description="BaseBankNumber" max="15" min="0" paramter="" tag="" unit="" type="Integer" />
  1051. <config default="1" name="Aligner1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1052. <config default="1" name="Aligner1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1053. <config default="1" name="Aligner1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1054. <config default="1" name="Aligner1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1055. <config default="1" name="Aligner1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1056. <config default="1" name="Aligner2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1057. <config default="1" name="Aligner2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1058. <config default="1" name="Aligner2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1059. <config default="1" name="Aligner2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1060. <config default="1" name="Aligner2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1061. <config default="1" name="CoolingBuffer1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1062. <config default="1" name="CoolingBuffer1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1063. <config default="1" name="CoolingBuffer1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1064. <config default="1" name="CoolingBuffer1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1065. <config default="1" name="CoolingBuffer1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1066. <config default="1" name="CoolingBuffer2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1067. <config default="1" name="CoolingBuffer2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1068. <config default="1" name="CoolingBuffer2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1069. <config default="1" name="CoolingBuffer2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1070. <config default="1" name="CoolingBuffer2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1071. <config default="1" name="LL1CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1072. <config default="1" name="LL1CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1073. <config default="1" name="LL1CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1074. <config default="1" name="LL1CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1075. <config default="1" name="LL1CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1076. <config default="1" name="LL2CassetteNumber3" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1077. <config default="1" name="LL2CassetteNumber4" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1078. <config default="1" name="LL2CassetteNumber6" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1079. <config default="1" name="LL2CassetteNumber8" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1080. <config default="1" name="LL2CassetteNumber12" description="BaseCassetteNumber" max="5" min="1" paramter="" tag="" unit="" type="Integer" />
  1081. <config default="3" name="LP1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1082. <config default="3" name="LP1Station0" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1083. <config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1084. <config default="6" name="LP2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1085. <config default="6" name="LP2Station0" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1086. <config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1087. <config default="3" name="LP1Station013" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1088. <config default="3" name="LP1Station113" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1089. <config default="6" name="LP2Station013" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1090. <config default="6" name="LP2Station113" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1091. <config default="9" name="AlignerStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1092. <config default="9" name="AlignerStation2" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1093. <config default="9" name="AlignerStation3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1094. <config default="9" name="AlignerStation4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1095. <config default="9" name="AlignerStation6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1096. <config default="9" name="AlignerStation8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1097. <config default="9" name="AlignerStation12" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1098. <config default="9" name="Aligner1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1099. <config default="12" name="Aligner2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1100. <config default="15" name="CoolingBuffer1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1101. <config default="18" name="CoolingBuffer2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1102. <config default="21" name="LL1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1103. <config default="24" name="LL2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1104. <config default="21" name="BufferStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1105. <config default="21" name="Buffer1Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1106. <config default="24" name="Buffer2Station" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1107. <config default="3" name="LP1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1108. <!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
  1109. <config default="6" name="LP2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1110. <!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
  1111. <config default="9" name="Aligner1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1112. <config default="12" name="Aligner2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1113. <config default="15" name="CoolingBuffer1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1114. <config default="18" name="CoolingBuffer2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1115. <config default="21" name="LL1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1116. <config default="24" name="LL2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1117. <config default="21" name="Buffer1Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1118. <config default="24" name="Buffer2Station4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1119. <config default="12" name="BufferStation4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1120. <config default="3" name="LP1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1121. <!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
  1122. <config default="6" name="LP2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1123. <!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
  1124. <config default="9" name="Aligner1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1125. <config default="12" name="Aligner2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1126. <config default="15" name="CoolingBuffer1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1127. <config default="18" name="CoolingBuffer2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1128. <config default="21" name="LL1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1129. <config default="24" name="LL2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1130. <config default="21" name="Buffer1Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1131. <config default="24" name="Buffer2Station6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1132. <config default="12" name="BufferStation6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1133. <config default="3" name="LP1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1134. <!--<config default="3" name="LP1Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
  1135. <config default="6" name="LP2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1136. <!--<config default="6" name="LP2Station1" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />-->
  1137. <config default="9" name="Aligner1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1138. <config default="12" name="Aligner2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1139. <config default="15" name="CoolingBuffer1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1140. <config default="18" name="CoolingBuffer2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1141. <config default="21" name="LL1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1142. <config default="24" name="LL2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1143. <config default="21" name="Buffer1Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1144. <config default="24" name="Buffer2Station8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1145. <config default="12" name="BufferStation8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1146. <config default="27" name="TurnOverStationStation" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1147. <config default="15" name="TurnOverStationStation2" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1148. <config default="15" name="TurnOverStationStation3" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1149. <config default="15" name="TurnOverStationStation4" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1150. <config default="15" name="TurnOverStationStation6" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1151. <config default="15" name="TurnOverStationStation8" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1152. <config default="15" name="TurnOverStationStation12" description="Station" max="99" min="1" paramter="" tag="" unit="" type="Integer" />
  1153. <config default="Thick" name="LP1ThicknessType" description="LP1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1154. <config default="Thick" name="LP2ThicknessType" description="LP2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1155. <config default="NONE" name="CoolingBuffer1ThicknessType" description="CoolingBuffer1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1156. <config default="NONE" name="CoolingBuffer2ThicknessType" description="CoolingBuffer2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1157. <config default="NONE" name="Aligner1ThicknessType" description="Aligner1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1158. <config default="NONE" name="Aligner2ThicknessType" description="Aligner2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1159. <config default="NONE" name="LL1ThicknessType" description="PMA Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1160. <config default="NONE" name="LL2ThicknessType" description="PMB Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1161. <config default="NONE" name="Buffer1ThicknessType" description="Buffer1 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1162. <config default="NONE" name="Buffer2ThicknessType" description="Buffer2 Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1163. <config default="Thick" name="UpperThicknessType" description="Upper Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1164. <config default="Thick" name="LowerThicknessType" description="Lower Thickness Type" max="0" min="0" paramter="" tag="" unit="" type="String" />
  1165. </configs>
  1166. </root>