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- <?xml version="1.0" encoding="utf-8" ?>
- <DeviceModelDefine type="EFEM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
- <IoAligners assembly="athosRT" classType="athosRT.Devices.IODevices.IoAligner">
- <IoAligner module="System" id ="Aligner" display="Aligner" schematicId=""
- diRobot2AlignerEnable="DI_PreAlignerEnableToRobot"
- diRobotNotExtend="DI_RBNotExtendPreAligner"></IoAligner>
- </IoAligners>
-
- <JetFlippers assembly="athosRT" classType="athosRT.Devices.FLP.JetFlipper">
- <JetFlipper module="System" id ="TurnOverStation" display="TurnOverStation" schematicId=""
- diFlipperTurnOverOriginSensor="DI_FlipperTurnOverOriginSensor"
- diFlipperTurnOverHorizontalSensor="DI_FlipperTurnOverHorizontalSensor"
- diFlipperTurnOverMotorPosCompleted="DI_FlipperTurnOverMotorPosCompleted"
- diFlipperTurnOverMotorAlarm="DI_FlipperTurnOverMotorAlarm"
- diFlipperEnableToRobot="DI_FlipperEnableToRobot"
- diFlipperClampClosedSensor="DI_FlipperClampClosedSensor"
- diFlipperClampOpenedSensor="DI_FlipperClampOpenedSensor"
- diFlipperClampMotorPosCompleted="DI_FlipperClampMotorPosCompleted"
- diFlipperClampMotorAlarm="DI_FlipperClampMotorAlarm"
- doFlipperTurnOverMotorModeSW="DO_FlipperTurnOverMotorModeSW"
- doFlipperClampMotorModeSW="DO_FlipperClampMotorModeSW"
- doFlipperTurnOverStartStop="DO_FlipperTurnOverStartStop/HOME"
- doFlipperClampSTARTSTOP="DO_FlipperClampSTART-STOP/HOME"
- doFlipperTurnOverSEL0="DO_FlipperTurnOverSEL0/JOGP"
- doFlipperTurnOverSEL1="DO_FlipperTurnOverSEL1/JOGN"
- doFlipperTurnOverSEL2="DO_FlipperTurnOverSEL2/JOG0"
- doFlipperClampSEL0="DO_FlipperClampSEL0/JOGP"
- doFlipperClampSEL1="DO_FlipperClampSEL1/JOGN"
- doFlipperClampSEL2="DO_FlipperClampSEL2/JOG0"
- doFlipperClampPGMRES="DO_FlipperClampPGMRES/ALM-RST"
- doFlipperTurnOverPgmres="DO_FlipperTurnOverPgmres/ALM-RST"
- />
- </JetFlippers>
- <IoSignalTowers assembly="athosRT" classType="athosRT.Devices.IoSignalTower">
- <IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
- doRed="DO_Redlight" doYellow="DO_Yellowlight" doGreen="DO_Greenlight"
- doBlue="DO_Bulelight" doBuzzer1="DO_Buzzer1" doBuzzer2="DO_Buzzer2" doBuzzer3="" doBuzzer4="" doBuzzer5=""/>
- </IoSignalTowers>
- <IoSensors>
- <IoSensor module="System" id="LP1Presence" di="DI_LP1Presence" textOutTrigValue="" alarmText=""/>
- <IoSensor module="System" id="LP1Placement" di="DI_LP1FoupPlacement" textOutTrigValue="" alarmText=""/>
- <IoSensor module="System" id="LP2Presence" di="DI_LP2Presence" textOutTrigValue="" alarmText=""/>
- <IoSensor module="System" id="LP2Placement" di="DI_LP2FoupPlacement" textOutTrigValue="" alarmText=""/>
- <IoSensor module="System" id="LL1DoorIsOpen" di="DI_PMADoorOpenedInterlock" textOutTrigValue="" alarmText=""/>
- <IoSensor module="System" id="LL2DoorIsOpen" di="DI_PMBDoorOpenedInterlock" textOutTrigValue="" alarmText=""/>
- <IoSensor module="System" id="SensorWaterLeakSW" di="DI_WaterLeakSW" textOutTrigValue="false" alarmText="Water Leak Alarm"/>
- <IoSensor module="System" id="SensorWaterFlowSW" di="DI_WaterFlowSW" textOutTrigValue="false" warningText="Water Flow Warning "/>
- <IoSensor module="System" id="SensorGratingSensorIN1" di="DI_GratingSensorIN1" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorEFEMCSTDoorClosed" di="DI_EFEMCSTDoorClosed" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorFFUalarm" di="DI_FFUalarm" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorCDAPressureSW" di="DI_CDAPressureSW" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorVACPressureSW" di="DI_VACPressureSW" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorIONCDAPressureSW" di="DI_IONCDAPressureSW" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorIONAlarmSIGNAL" di="DI_IONAlarmSIGNAL" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorEFEMSideDoorClosed" di="DI_EFEMSideDoorClosed" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorPMASystemInterlock" di="DI_PMASystemInterlock" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorPMBSystemInterlock" di="DI_PMBSystemInterlock" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorMaintenanceMode" di="DI_MaintenanceMode" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorEFEMPowerON" di="DI_EFEMPowerON" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRobotTPusing" di="DI_RobotTPusing" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRobotEMStoEFEM" di="DI_RobotEMStoEFEM" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRobotEnabletoEFEM" di="DI_RobotEnabletoEFEM" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRobotRemotetoEFEM" di="DI_RobotRemotetoEFEM(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBReady" di="DI_RBReady(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRobotError" di="DI_RBError(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendPMA" di="DI_RBNotExtendPMA" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendPMB" di="DI_RBNotExtendPMB" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendSIMF1" di="DI_RBNotExtendSIMF1" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBNotExtendSIMF2" di="DI_RBNotExtendSIMF2" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBupperArmhavewafer" di="DI_RBupperArmhavewafer" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorRBlowerArmhavewafer" di="DI_RBlowerArmhavewafer" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF1PODOPEN" di="DI_SMIF1PODOPEN" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF1PODPRESENT" di="DI_SMIF1PODPRESENT" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF1READY" di="DI_SMIF1READY" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF1MAPPINGSENSORLASER" di="DI_SMIF1MAPPINGSENSORLASER" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF2PODOPEN" di="DI_SMIF2PODOPEN" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF2PODPRESENT" di="DI_SMIF2PODPRESENT" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF2READY" di="DI_SMIF2READY" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="SensorSMIF2MAPPINGSENSORLASER" di="DI_SMIF2MAPPINGSENSORLASER" textOutTrigValue="true" warningText=""/>
- <IoSensor module="System" id="FlipperEnableToRobot" di="DI_FlipperEnableToRobot" textOutTrigValue="false" alarmText=""/>
- <IoSensor module="System" id="PreAlignerEnableToRobot" di="DI_PreAlignerEnableToRobot" textOutTrigValue="false" alarmText=""/>
- </IoSensors>
- <IoTriggers>
- <IoTrigger id="TrigSafetytoSMIF1" display="" schematicId="" unit="" doTrigger="DO_RobotSafetyToLP1"/>
- <IoTrigger id="TrigSafetytoSMIF2" display="" schematicId="" unit="" doTrigger="DO_RobotSafetyToLP2"/>
- <IoTrigger id="TrigRBbusytoSIMF1" display="" schematicId="" unit="" doTrigger="DO_OKToOperateLP1"/>
- <IoTrigger id="TrigRBbusytoSIMF2" display="" schematicId="" unit="" doTrigger="DO_OKToOperateLP2"/>
- <IoTrigger id="TrigEFEMSideDoorClosed" display="" schematicId="" unit="" doTrigger="DO_EFEMSideDoorClosed"/>
- <IoTrigger id="TrigRBNotExtendPMA" display="" schematicId="" unit="" doTrigger="DO_RBNotExtendPMA"/>
- <IoTrigger id="TrigRBNotExtendPMB" display="" schematicId="" unit="" doTrigger="DO_RBNotExtendPMB"/>
- <IoTrigger id="TrigPauseResumetoRobot" display="" schematicId="" unit="" doTrigger="DO_Pause/ResumetoRobot"/>
- <IoTrigger id="TrigEnableToRobot" display="" schematicId="" unit="" doTrigger="DO_EnableToRobot(Spare)"/>
- <IoTrigger id="TrigEMSToRobot" display="" schematicId="" unit="" doTrigger="DO_EMSToRobot(Spare)"/>
- <IoTrigger id="TrigSafetytoPMA" display="" schematicId="" unit="" doTrigger="DO_SafetytoPMA"/>
- <IoTrigger id="TrigSafetytoPMB" display="" schematicId="" unit="" doTrigger="DO_SafetytoPMB"/>
- </IoTriggers>
- </DeviceModelDefine>
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