DeviceModelNew.xml 8.8 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110
  1. <?xml version="1.0" encoding="utf-8" ?>
  2. <DeviceModelDefine type="EFEM" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" >
  3. <IoAligners assembly="athosRT" classType="athosRT.Devices.IODevices.IoAligner">
  4. <IoAligner module="System" id ="Aligner" display="Aligner" schematicId=""
  5. diRobot2AlignerEnable="DI_PreAlignerEnableToRobot"
  6. diRobotNotExtend="DI_RBNotExtendPreAligner"></IoAligner>
  7. </IoAligners>
  8. <JetFlippers assembly="athosRT" classType="athosRT.Devices.FLP.JetFlipper">
  9. <JetFlipper module="System" id ="TurnOverStation" display="TurnOverStation" schematicId=""
  10. diFlipperTurnOverOriginSensor="DI_FlipperTurnOverOriginSensor"
  11. diFlipperTurnOverHorizontalSensor="DI_FlipperTurnOverHorizontalSensor"
  12. diFlipperTurnOverMotorPosCompleted="DI_FlipperTurnOverMotorPosCompleted"
  13. diFlipperTurnOverMotorAlarm="DI_FlipperTurnOverMotorAlarm"
  14. diFlipperEnableToRobot="DI_FlipperEnableToRobot"
  15. diFlipperClampClosedSensor="DI_FlipperClampClosedSensor"
  16. diFlipperClampOpenedSensor="DI_FlipperClampOpenedSensor"
  17. diFlipperClampMotorPosCompleted="DI_FlipperClampMotorPosCompleted"
  18. diFlipperClampMotorAlarm="DI_FlipperClampMotorAlarm"
  19. doFlipperTurnOverMotorModeSW="DO_FlipperTurnOverMotorModeSW"
  20. doFlipperClampMotorModeSW="DO_FlipperClampMotorModeSW"
  21. doFlipperTurnOverStartStop="DO_FlipperTurnOverStartStop/HOME"
  22. doFlipperClampSTARTSTOP="DO_FlipperClampSTART-STOP/HOME"
  23. doFlipperTurnOverSEL0="DO_FlipperTurnOverSEL0/JOGP"
  24. doFlipperTurnOverSEL1="DO_FlipperTurnOverSEL1/JOGN"
  25. doFlipperTurnOverSEL2="DO_FlipperTurnOverSEL2/JOG0"
  26. doFlipperClampSEL0="DO_FlipperClampSEL0/JOGP"
  27. doFlipperClampSEL1="DO_FlipperClampSEL1/JOGN"
  28. doFlipperClampSEL2="DO_FlipperClampSEL2/JOG0"
  29. doFlipperClampPGMRES="DO_FlipperClampPGMRES/ALM-RST"
  30. doFlipperTurnOverPgmres="DO_FlipperTurnOverPgmres/ALM-RST"
  31. />
  32. </JetFlippers>
  33. <IoSignalTowers assembly="athosRT" classType="athosRT.Devices.IoSignalTower">
  34. <IoSignalTower module="System" id ="SignalTower" display="Signal Tower" schematicId=""
  35. doRed="DO_Redlight" doYellow="DO_Yellowlight" doGreen="DO_Greenlight"
  36. doBlue="DO_Bulelight" doBuzzer1="DO_Buzzer1" doBuzzer2="DO_Buzzer2" doBuzzer3="" doBuzzer4="" doBuzzer5=""/>
  37. </IoSignalTowers>
  38. <IoSensors>
  39. <IoSensor module="System" id="LP1Presence" di="DI_LP1Presence" textOutTrigValue="" alarmText=""/>
  40. <IoSensor module="System" id="LP1Placement" di="DI_LP1FoupPlacement" textOutTrigValue="" alarmText=""/>
  41. <IoSensor module="System" id="LP2Presence" di="DI_LP2Presence" textOutTrigValue="" alarmText=""/>
  42. <IoSensor module="System" id="LP2Placement" di="DI_LP2FoupPlacement" textOutTrigValue="" alarmText=""/>
  43. <IoSensor module="System" id="LL1DoorIsOpen" di="DI_PMADoorOpenedInterlock" textOutTrigValue="" alarmText=""/>
  44. <IoSensor module="System" id="LL2DoorIsOpen" di="DI_PMBDoorOpenedInterlock" textOutTrigValue="" alarmText=""/>
  45. <IoSensor module="System" id="SensorWaterLeakSW" di="DI_WaterLeakSW" textOutTrigValue="false" alarmText="Water Leak Alarm"/>
  46. <IoSensor module="System" id="SensorWaterFlowSW" di="DI_WaterFlowSW" textOutTrigValue="false" warningText="Water Flow Warning "/>
  47. <IoSensor module="System" id="SensorGratingSensorIN1" di="DI_GratingSensorIN1" textOutTrigValue="true" warningText=""/>
  48. <IoSensor module="System" id="SensorEFEMCSTDoorClosed" di="DI_EFEMCSTDoorClosed" textOutTrigValue="true" warningText=""/>
  49. <IoSensor module="System" id="SensorFFUalarm" di="DI_FFUalarm" textOutTrigValue="true" warningText=""/>
  50. <IoSensor module="System" id="SensorCDAPressureSW" di="DI_CDAPressureSW" textOutTrigValue="true" warningText=""/>
  51. <IoSensor module="System" id="SensorVACPressureSW" di="DI_VACPressureSW" textOutTrigValue="true" warningText=""/>
  52. <IoSensor module="System" id="SensorIONCDAPressureSW" di="DI_IONCDAPressureSW" textOutTrigValue="true" warningText=""/>
  53. <IoSensor module="System" id="SensorIONAlarmSIGNAL" di="DI_IONAlarmSIGNAL" textOutTrigValue="true" warningText=""/>
  54. <IoSensor module="System" id="SensorEFEMSideDoorClosed" di="DI_EFEMSideDoorClosed" textOutTrigValue="true" warningText=""/>
  55. <IoSensor module="System" id="SensorPMASystemInterlock" di="DI_PMASystemInterlock" textOutTrigValue="true" warningText=""/>
  56. <IoSensor module="System" id="SensorPMBSystemInterlock" di="DI_PMBSystemInterlock" textOutTrigValue="true" warningText=""/>
  57. <IoSensor module="System" id="SensorMaintenanceMode" di="DI_MaintenanceMode" textOutTrigValue="true" warningText=""/>
  58. <IoSensor module="System" id="SensorEFEMPowerON" di="DI_EFEMPowerON" textOutTrigValue="true" warningText=""/>
  59. <IoSensor module="System" id="SensorRobotTPusing" di="DI_RobotTPusing" textOutTrigValue="true" warningText=""/>
  60. <IoSensor module="System" id="SensorRobotEMStoEFEM" di="DI_RobotEMStoEFEM" textOutTrigValue="true" warningText=""/>
  61. <IoSensor module="System" id="SensorRobotEnabletoEFEM" di="DI_RobotEnabletoEFEM" textOutTrigValue="true" warningText=""/>
  62. <IoSensor module="System" id="SensorRobotRemotetoEFEM" di="DI_RobotRemotetoEFEM(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
  63. <IoSensor module="System" id="SensorRBReady" di="DI_RBReady(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
  64. <IoSensor module="System" id="SensorRobotError" di="DI_RBError(spareInterfaceIO)" textOutTrigValue="true" warningText=""/>
  65. <IoSensor module="System" id="SensorRBNotExtendPMA" di="DI_RBNotExtendPMA" textOutTrigValue="true" warningText=""/>
  66. <IoSensor module="System" id="SensorRBNotExtendPMB" di="DI_RBNotExtendPMB" textOutTrigValue="true" warningText=""/>
  67. <IoSensor module="System" id="SensorRBNotExtendSIMF1" di="DI_RBNotExtendSIMF1" textOutTrigValue="true" warningText=""/>
  68. <IoSensor module="System" id="SensorRBNotExtendSIMF2" di="DI_RBNotExtendSIMF2" textOutTrigValue="true" warningText=""/>
  69. <IoSensor module="System" id="SensorRBupperArmhavewafer" di="DI_RBupperArmhavewafer" textOutTrigValue="true" warningText=""/>
  70. <IoSensor module="System" id="SensorRBlowerArmhavewafer" di="DI_RBlowerArmhavewafer" textOutTrigValue="true" warningText=""/>
  71. <IoSensor module="System" id="SensorSMIF1PODOPEN" di="DI_SMIF1PODOPEN" textOutTrigValue="true" warningText=""/>
  72. <IoSensor module="System" id="SensorSMIF1PODPRESENT" di="DI_SMIF1PODPRESENT" textOutTrigValue="true" warningText=""/>
  73. <IoSensor module="System" id="SensorSMIF1READY" di="DI_SMIF1READY" textOutTrigValue="true" warningText=""/>
  74. <IoSensor module="System" id="SensorSMIF1MAPPINGSENSORLASER" di="DI_SMIF1MAPPINGSENSORLASER" textOutTrigValue="true" warningText=""/>
  75. <IoSensor module="System" id="SensorSMIF2PODOPEN" di="DI_SMIF2PODOPEN" textOutTrigValue="true" warningText=""/>
  76. <IoSensor module="System" id="SensorSMIF2PODPRESENT" di="DI_SMIF2PODPRESENT" textOutTrigValue="true" warningText=""/>
  77. <IoSensor module="System" id="SensorSMIF2READY" di="DI_SMIF2READY" textOutTrigValue="true" warningText=""/>
  78. <IoSensor module="System" id="SensorSMIF2MAPPINGSENSORLASER" di="DI_SMIF2MAPPINGSENSORLASER" textOutTrigValue="true" warningText=""/>
  79. <IoSensor module="System" id="FlipperEnableToRobot" di="DI_FlipperEnableToRobot" textOutTrigValue="false" alarmText=""/>
  80. <IoSensor module="System" id="PreAlignerEnableToRobot" di="DI_PreAlignerEnableToRobot" textOutTrigValue="false" alarmText=""/>
  81. </IoSensors>
  82. <IoTriggers>
  83. <IoTrigger id="TrigSafetytoSMIF1" display="" schematicId="" unit="" doTrigger="DO_RobotSafetyToLP1"/>
  84. <IoTrigger id="TrigSafetytoSMIF2" display="" schematicId="" unit="" doTrigger="DO_RobotSafetyToLP2"/>
  85. <IoTrigger id="TrigRBbusytoSIMF1" display="" schematicId="" unit="" doTrigger="DO_OKToOperateLP1"/>
  86. <IoTrigger id="TrigRBbusytoSIMF2" display="" schematicId="" unit="" doTrigger="DO_OKToOperateLP2"/>
  87. <IoTrigger id="TrigEFEMSideDoorClosed" display="" schematicId="" unit="" doTrigger="DO_EFEMSideDoorClosed"/>
  88. <IoTrigger id="TrigRBNotExtendPMA" display="" schematicId="" unit="" doTrigger="DO_RBNotExtendPMA"/>
  89. <IoTrigger id="TrigRBNotExtendPMB" display="" schematicId="" unit="" doTrigger="DO_RBNotExtendPMB"/>
  90. <IoTrigger id="TrigPauseResumetoRobot" display="" schematicId="" unit="" doTrigger="DO_Pause/ResumetoRobot"/>
  91. <IoTrigger id="TrigEnableToRobot" display="" schematicId="" unit="" doTrigger="DO_EnableToRobot(Spare)"/>
  92. <IoTrigger id="TrigEMSToRobot" display="" schematicId="" unit="" doTrigger="DO_EMSToRobot(Spare)"/>
  93. <IoTrigger id="TrigSafetytoPMA" display="" schematicId="" unit="" doTrigger="DO_SafetytoPMA"/>
  94. <IoTrigger id="TrigSafetytoPMB" display="" schematicId="" unit="" doTrigger="DO_SafetytoPMB"/>
  95. </IoTriggers>
  96. </DeviceModelDefine>