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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using athosRT.Devices;
- using athosRT.Devices.PA;
- using athosRT.FSM;
- using athosRT.tool;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Numerics;
- using System.Text;
- using System.Threading.Tasks;
- using System.Xml.Linq;
- using static athosRT.Modules.FLP.FlipperEntity;
- using EV = athosRT.tool.EV;
- namespace athosRT.Modules.EFEMs.Routine
- {
- public class SwapRoutine : ModuleRoutineBase, FSM.IRoutine
- {
- private SCConfigItem _scSwapTimeout = (SCConfigItem)null;
- private int _timeout = 0;
- public LoadPort _lpDevice;
- private int _offsetXPick;
- private int _offsetYPick;
- private int _offsetZPick;
- private int _offsetXPlace;
- private int _offsetYPlace;
- private int _offsetZPLace;
- private Hand _pickHand;
- private int _alignerdelay = 0;
- private int _coolingdelay = 0;
- private int delaytime = 0;
- protected int OffsetX;
- protected int OffsetY;
- protected int OffsetZ;
- public ModuleName Source { get; set; }
- public int Slot { get; set; }
- public Hand PlaceBlade { get; set; }
- RobotBaseDevice robot;
- private int _existInterval = SC.GetValue<int>("Robot.Robot.ExistInterval");
- protected Aligner aligner = null;
- protected IoCoolingBuffer buffer1 = null;
- protected IoCoolingBuffer buffer2 = null;
- protected PreAligner aligner1 = null;
- protected PreAligner aligner2 = null;
- protected LoadLockDevice ll1 = null;
- protected LoadLockDevice ll2 = null;
- protected IoCoolingBuffer _ioCoolBuffer;
- private bool _IsFlipper = false;
- public SwapRoutine(ModuleName module) : base(module)
- {
- Module = module;
- Name = "Swap Routine";
- _scSwapTimeout = SC.GetConfigItem("Robot.TimeLimitForPlaceWafer");
- robot = DEVICE.GetDevice<RobotBaseDevice>("Robot");
- aligner = DEVICE.GetDevice<Aligner>("Aligner");
- buffer1 = DEVICE.GetDevice<IoCoolingBuffer>("CoolingBuffer1");
- buffer2 = DEVICE.GetDevice<IoCoolingBuffer>("CoolingBuffer2");
- aligner1 = DEVICE.GetDevice<PreAligner>("Aligner1");
- aligner2 = DEVICE.GetDevice<PreAligner>("Aligner2");
- }
- public RState Monitor()
- {
- if (_IsFlipper)
- Runner
- .Wait(SwapStep.WaitForSwapIdle, CheckFlipperIsIdle, _timeout)
- .Run(SwapStep.NotifyFlipperPrepare, NotifyFlipperOpen, CheckFlipperOpen, _timeout)
- .Run(SwapStep.CheckBlade1WaferIsExist, fCheckBlade1WaferIsExist, fRobotReady, _timeout)
- .Run(SwapStep.CheckBlade2WaferIsExist, fCheckBlade2WaferIsExist, fRobotReady, _timeout)
- .Run(SwapStep.CheckBeforeSwap, NullFun, fCheckBeforeSwap, _timeout)
- //.Run(SwapStep.SwapWafer, fSwapWafer, fWaitRobotMotion, _timeout)
- .Run(SwapStep.PickWafer, fPickWafer, fWaitRobotMotion, _timeout)
- .Run(SwapStep.PlaceWafer, fPlaceWafer, fWaitRobotMotion, _timeout)
- .Delay(SwapStep.TimeDelay, delaytime)
- .Run(SwapStep.NotifyFlipperOver, NotifyFlipperClose, CheckFlipperIsIdle, _timeout)
- .End(SwapStep.CheckAfterSwap, NullFun, fCheckAfterSwap, _timeout);
- else
- if(ModuleHelper.IsBuffer(Source))
- Runner
- .Run(SwapStep.CoolBufferMoveUP, fCoolBufferMoveUP, fWaitCoolBufferMoveUp, _timeout)
- .Run(SwapStep.CheckBlade1WaferIsExist,fCheckBlade1WaferIsExist, fRobotReady, _timeout)
- .Run(SwapStep.CheckBlade2WaferIsExist,fCheckBlade2WaferIsExist, fRobotReady, _timeout)
- .Run(SwapStep.CheckBeforeSwap,NullFun,fCheckBeforeSwap,_timeout)
- //.Run(SwapStep.SwapWafer,fSwapWafer, fWaitRobotMotion, _timeout)
- .Run(SwapStep.PickWafer,fPickWafer, fWaitRobotMotion, _timeout)
- .Run(SwapStep.PlaceWafer,fPlaceWafer, fWaitRobotMotion, _timeout)
- .Delay(SwapStep.TimeDelay, delaytime)
- .Run(SwapStep.CoolBufferMoveDown,fCoolBufferMoveDown, fWaitCoolBufferMoveDown, _timeout)
- .End(SwapStep.CheckAfterSwap,NullFun,fCheckAfterSwap,_timeout);
- else
- Runner
- .Run(SwapStep.CoolBufferMoveUP, fCoolBufferMoveUP, fWaitCoolBufferMoveUp, _timeout)
- .Run(SwapStep.CheckBlade1WaferIsExist, fCheckBlade1WaferIsExist, fRobotReady, _timeout)
- .Run(SwapStep.CheckBlade2WaferIsExist, fCheckBlade2WaferIsExist, fRobotReady, _timeout)
- .Run(SwapStep.CheckBeforeSwap, NullFun, fCheckBeforeSwap, _timeout)
- .Run(SwapStep.SwapWafer, fSwapWafer, fWaitRobotMotion, _timeout)
- //.Run(SwapStep.PickWafer,fPickWafer, fWaitRobotMotion, _timeout)
- //.Run(SwapStep.PlaceWafer,fPlaceWafer, fWaitRobotMotion, _timeout)
- .Delay(SwapStep.TimeDelay, delaytime)
- .Run(SwapStep.CoolBufferMoveDown, fCoolBufferMoveDown, fWaitCoolBufferMoveDown, _timeout)
- .End(SwapStep.CheckAfterSwap, NullFun, fCheckAfterSwap, _timeout);
- return Runner.Status;
- }
- private bool fWaitCoolBufferMoveDown()
- {
- if (ModuleHelper.IsCoolingBuffer(this.Source))
- {
- IoCoolingBuffer device = GetCoolBuffer(Source);
- if (!device.Error)
- return device.CheckMovedDown() && !device.Busy;
- return false;
- }
- if (ModuleHelper.IsAligner(Source))
- {
- //PreAligner device = DEVICE.GetDevice<PreAligner>(Source.ToString());
- //if (device.Busy)
- //{
- // return false;
- //}
- return true;
- }
- return true;
- }
- private bool fCheckAfterSwap()
- {
- if (PlaceBlade == Hand.Blade1)
- {
- if (!this.CheckSensorNoWafer(ModuleName.Robot, 0))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
- return false;
- }
- if (!this.CheckSeneorHasWafer(ModuleName.Robot, 1))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- else
- {
- if (!this.CheckSensorNoWafer(ModuleName.Robot, 1))
- {
- return false;
- }
- if (!this.CheckSeneorHasWafer(ModuleName.Robot, 0))
- {
- return false;
- }
- }
- return true;
- }
- private bool fCoolBufferMoveDown()
- {
- if (ModuleHelper.IsCoolingBuffer(this.Source))
- {
- IoCoolingBuffer device = GetCoolBuffer(Source);
- if (device.CheckPinDown() || device.Move(Singleton<WaferManager>.Instance.GetWaferSize(this.Source, this.Slot), false, out _))
- return true;
- return false;
- }
- if (ModuleHelper.IsAligner(Source))
- {
- //PreAligner device = DEVICE.GetDevice<PreAligner>(Source.ToString());
- //if (device.Busy)
- //{
- // return false;
- //}
- return true;
- }
- return true;
- }
- private bool fPlaceWafer()
- {
- if (!ModuleHelper.IsLoadLock(Source))
- {
- if (!ModuleHelper.IsCoolingBuffer(Source))
- {
- if (_offsetXPlace == 0 && _offsetYPlace == 0 && _offsetZPLace == 0 ? robot.Place((RobotArmEnum)PlaceBlade, Source.ToString(), Slot) : robot.PlaceEx((RobotArmEnum)_pickHand, Source.ToString(), Slot, _offsetXPlace, _offsetYPlace, _offsetZPLace))
- {
- LogObject.Info("System", "Swap place成功");
- return true;
- }
- else
- {
- LogObject.Error("System", "Swap place失败");
- return false;
- }
- }
- }
- return true;
- }
- private bool fWaitRobotMotion()
- {
- if (robot.IsError)
- {
- LogObject.Info("Robot", "Robot进入Error");
- return false;
- }
- return robot.IsReady();
- }
- private bool fPickWafer()
- {
- if (!ModuleHelper.IsLoadLock(Source))
- {
- if (!ModuleHelper.IsCoolingBuffer(Source))
- {
- if (_offsetXPick == 0 && _offsetYPick == 0 && _offsetZPick == 0 ? robot.Pick((RobotArmEnum)_pickHand, Source.ToString(), Slot) : robot.PickEx((RobotArmEnum)_pickHand, Source.ToString(), Slot, _offsetXPick, _offsetYPick, _offsetZPick))
- {
- LogObject.Info("System", "Swap pick成功");
- return true;
- }
- else
- {
- LogObject.Error("System", "Swap pick失败");
- return false;
- }
- }
- }
- return true;
- }
- private bool fSwapWafer()
- {
- if (!ModuleHelper.IsLoadLock(Source))
- {
- if (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source)||ModuleHelper.IsTurnOverStation(Source))
- {
- if (OffsetX == 0 && OffsetY == 0 && OffsetZ == 0 ? robot.Swap((RobotArmEnum)_pickHand, Source.ToString(), Slot) : robot.SwapEx((RobotArmEnum)_pickHand, Source.ToString(), Slot, OffsetX, OffsetY, OffsetZ))
- {
- LogObject.Info("System", "Swap成功");
- return true;
- }
- else
- {
- LogObject.Error("System", "Swap失败");
- return false;
- }
- }
- }
- else
- {
- if (OffsetX == 0 && OffsetY == 0 && OffsetZ == 0 ? robot.Swap((RobotArmEnum)_pickHand, Source.ToString(), Slot) : robot.SwapEx((RobotArmEnum)_pickHand, Source.ToString(), Slot, OffsetX, OffsetY, OffsetZ))
- {
- LogObject.Info("System", "Swap成功");
- return true;
- }
- else
- {
- LogObject.Error("System", "Swap失败");
- return false;
- }
- }
- return true;
- //this.Source, this.Slot, this._pickHand, this.OffsetX, this.OffsetY, this.OffsetZ
-
- }
- private bool fCheckBeforeSwap()
- {
- //this.Source, this.Slot, this._pickHand
- if (!CheckRobotMotionInterlock(Source, Slot, out _))
- {
- return false;
- }
- if (_pickHand == Hand.Blade1)
- {
- if (!Singleton<WaferManager>.Instance.CheckWafer(Source, Slot, WaferStatus.Normal))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, (object)string.Format("target {0}{1:D2}", (object)Source.ToString(), (object)(Slot + 1)));
- return false;
- }
- if (Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Normal))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
- return false;
- }
- if (CheckSeneorHasWafer(ModuleName.Robot, 0))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
- return false;
- }
- if (!Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, 1, WaferStatus.Normal))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (CheckSensorNoWafer(ModuleName.Robot, 1))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- }
- else
- {
- if (!Singleton<WaferManager>.Instance.CheckWafer(Source, Slot, WaferStatus.Normal))
- {
- //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, (object)string.Format("target {0}{1:D2}", (object)Source.ToString(), (object)(Slot + 1)));
- return false;
- }
- if (Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, 1, WaferStatus.Normal))
- {
- return false;
- }
- if (this.CheckSeneorHasWafer(ModuleName.Robot, 1))
- {
- return false;
- }
- if (!Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Normal))
- {
- return false;
- }
- if (this.CheckSensorNoWafer(ModuleName.Robot, 0))
- {
- return false;
- }
- }
- return true;
- }
- private bool fRobotReady() {
- if (robot.IsReady())
- {
- LogObject.Info("robot", "RobotReady");
- return true;
- }
- else
- {
- //LogObject.Error("robot", "RobotReady");
- return false;
- }
- }
- private bool fCheckBlade2WaferIsExist()
- {
- if (robot.ReadParameter(new object[3]
- {
- "CheckWaferIsPresence",
- 1,//blade2
- _existInterval
- }))
- {
- //机械臂2存在wafer
- LogObject.Info("System","Blade2存在wafer");
- return true;
- }
- else
- {
- //机械臂2存在wafer
- LogObject.Error("System", "Blade2不存在wafer");
- return false;
- }
- }
- private bool fCheckBlade1WaferIsExist()
- {
- if (robot.ReadParameter(new object[3]
- {
- "CheckWaferIsPresence",
- 0,//blade1
- _existInterval
- }))
- {
- //机械臂1存在wafer
- LogObject.Info("System", "Blade1存在wafer");
- return true;
- }
- else
- {
- //机械臂1存在wafer
- LogObject.Error("System", "Blade1不存在wafer");
- return false;
- }
- }
-
- private bool fWaitCoolBufferMoveUp()
- {
- if (ModuleHelper.IsCoolingBuffer(Source))
- {
- //this.robot, Hand.Blade1, this._timeout
- IoCoolingBuffer device = GetCoolBuffer(Source);
- if (!device.Error)
- {
- //检查上升的情况 并等其空闲
- return device.CheckMovedUp() && !device.Busy;
- }
- return false;
- }
- if (ModuleHelper.IsAligner(Source))
- {
- return true;
- }
- return true;
- }
- private bool fCoolBufferMoveUP()
- {
- if (ModuleHelper.IsCoolingBuffer(Source))
- {
- IoCoolingBuffer device = GetCoolBuffer(Source);
- //上升了 如果没有就命令上升
- if (device.CheckPinUp() || device.Move(Singleton<WaferManager>.Instance.GetWaferSize(Source, Slot), true, out _))
- return true;
- return false;
- }
- if (ModuleHelper.IsAligner(Source))
- {
- return true;
- }
- return true;
- }
- private bool CheckFlipperIsIdle()
- {
- return Singleton<RouteManager1>.Instance.GetFlipper().IsIdle;
- }
- private bool NotifyFlipperOpen()
- {
- Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.PrepareTransfer);
- return true;
- }
- private bool NotifyFlipperClose()
- {
- Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.EndTransfer);
- return true;
- }
- private bool CheckFlipperOpen()
- {
- return Singleton<RouteManager1>.Instance.GetFlipper().IsTransfer;
- }
- public RState Start(params object[] objs)
- {
- Reset();
- _IsFlipper = false;
- _timeout =robot.RobotCommandTimeout;
- _alignerdelay = SC.GetValue<int>("System.AlignerPinDownDelay");
- _coolingdelay = SC.GetValue<int>("System.CoolingPinDownDelay");
- _timeout = robot.RobotCommandTimeout * 1000;
- if (ModuleHelper.IsTurnOverStation(Source))
- _IsFlipper = true;
- if (!Singleton<EfemEntity>.Instance.IsOnlineMode && (ModuleHelper.IsCoolingBuffer(Source) || ModuleHelper.IsAligner(Source)))
- {
- delaytime = !ModuleHelper.IsCoolingBuffer(Source) ? _alignerdelay * 1000 : _coolingdelay * 1000;
- }
- else
- {
- delaytime = 0;
- }
- _pickHand = Hand.Blade1;
- if (PlaceBlade == Hand.Blade1)
- _pickHand = Hand.Blade2;
- return Runner.Start(Module, Name);
- }
- public void Abort()
- {
- }
- protected bool CheckRobotMotionInterlock(ModuleName chamber, int slot, out string reason)
- {
- reason = string.Empty;
- if (robot.RobotState == RobotStateEnum.Error)
- {
- reason = "robot is error.";
- return false;
- }
- if (!robot.IsReady())
- {
- reason = string.Format("robot isn't Ready.");
- return false;
- }
- if (chamber == ModuleName.Aligner || ModuleHelper.IsTurnOverStation(chamber))
- {
- //if (aligner.Moving)
- //{
- // reason = string.Format("aligner is moving.");
- // return false;
- //}
- if (robot.IsReady())
- return true;
- reason = string.Format("aligner isn't Ready.");
- return false;
- }
- if (ModuleHelper.IsLoadPort(chamber))
- {
- LoadPortBaseDevice device = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
- if (!device.IsEnableTransferWafer(out reason))
- {
- reason = string.Format($"{chamber} isn't Ready.The reason is {reason}");
- return false;
- }
- if (device.MapError)
- {
- reason = string.Format("{0} Map has crossed error.", (object)chamber.ToString());
- return false;
- }
- if (chamber.Equals(ModuleName.LP1))
- {
- if (!DeviceModel.SensorSMIF1PODOPEN.Value)
- {
- reason = string.Format("{0} SMIF1PODOPEN signal is Off.", (object)chamber.ToString());
- return false;
- }
- if (!DeviceModel.SensorSMIF1PODPRESENT.Value)
- {
- reason = string.Format("{0} SensorSMIF1PODPRESENT signal is Off,Foup is presence.", (object)chamber.ToString());
- return false;
- }
- if (!DeviceModel.SensorSMIF1READY.Value)
- {
- reason = string.Format("{0} SensorSMIF1READY signal is Off.", (object)chamber.ToString());
- return false;
- }
- }
- else if (chamber.Equals(ModuleName.LP2))
- {
- if (!DeviceModel.SensorSMIF2PODOPEN.Value)
- {
- reason = string.Format("{0} SMIF2PODOPEN signal is Off.", (object)chamber.ToString());
- return false;
- }
- if (!DeviceModel.SensorSMIF2PODPRESENT.Value)
- {
- reason = string.Format("{0} SensorSMIF2PODPRESENT signal is Off,Foup is not presence .", (object)chamber.ToString());
- return false;
- }
- if (!DeviceModel.SensorSMIF2READY.Value)
- {
- reason = string.Format("{0} SensorSMIF2READY signal is Off.", (object)chamber.ToString());
- return false;
- }
- }
- return true;
- }
- if (ModuleHelper.IsLoadLock(chamber))
- return DEVICE.GetDevice<LoadLockDevice>(chamber.ToString()).IsEnableTransferWafer(out reason);
- if (ModuleHelper.IsCoolingBuffer(chamber))
- {
- IoCoolingBuffer device = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
- if (device.Busy)
- {
- reason = "buffer is not idle";
- return false;
- }
- if (device.CheckPinUp())
- return true;
- reason = "buffer pin not up position";
- return false;
- }
- if (ModuleHelper.IsAligner(chamber))
- {
- //PreAligner device = DEVICE.GetDevice<PreAligner>(chamber.ToString());
- //if (device.Busy)
- //{
- // reason = "Aligner is not Idle";
- // return false;
- //}
- return true;
- }
- if (ModuleHelper.IsBuffer(chamber))
- {
- return true ;
- }
- reason = "error target";
- return false;
- }
- protected bool CheckSensorNoWafer(ModuleName chamber, int slot)
- {
- if (SC.GetValue<bool>("System.IsSimulatorMode") || chamber != ModuleName.Robot)
- return Singleton<WaferManager>.Instance.CheckNoWafer(chamber, slot);
- return slot == 0 ? !robot.IsWaferPresenceOnBlade1 : !robot.IsWaferPresenceOnBlade2;
- }
- protected bool CheckSeneorHasWafer(ModuleName chamber, int slot)
- {
- if (SC.GetValue<bool>("System.IsSimulatorMode") || chamber != ModuleName.Robot)
- return Singleton<WaferManager>.Instance.CheckHasWafer(chamber, slot);
- return slot == 0 ? robot.IsWaferPresenceOnBlade1 : robot.IsWaferPresenceOnBlade2;
- }
- public enum SwapStep
- {
- WaitForSwapIdle,
- CoolBufferMoveUP,
- WaitCoolBufferMoveUp,
- CheckBlade1WaferIsExist,
- CheckBlade2WaferIsExist,
- CheckBeforeSwap,
- SwapWafer,
- PickWafer,
- WaitRobotMotion,
- PlaceWafer,
- CoolBufferMoveDown,
- WaitCoolBufferMoveDown,
- CheckAfterSwap,
- TimeDelay,
- NotifyFlipperPrepare,
- NotifyFlipperOver,
- }
- public IoCoolingBuffer GetCoolBuffer(ModuleName coolbufferName)
- {
- switch (coolbufferName)
- {
- //case ModuleName.Aligner1:
- // _ioCoolBuffer = aligner1;
- // break;
- //case ModuleName.Aligner2:
- // this._ioCoolBuffer = this.aligner2;
- // break;
- case ModuleName.CoolingBuffer1:
- this._ioCoolBuffer = this.buffer1;
- break;
- case ModuleName.CoolingBuffer2:
- this._ioCoolBuffer = this.buffer2;
- break;
- }
- return _ioCoolBuffer;
- }
- }
- }
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