JET-EFEM/athos/athosRT/Modules/EFEMs/Routine/PlaceRoutine.cs

using Aitex.Core.Common;
using Aitex.Core.RT.Device;
using Aitex.Core.RT.Device.Unit;
using Aitex.Core.RT.Event;
using Aitex.Core.RT.SCCore;
using Aitex.Core.Util;
using Aitex.Sorter.Common;
using athosRT.Devices;
using athosRT.Devices.PA;
using athosRT.FSM;
using athosRT.tool;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
using System;
using System.Collections.Generic;
using System.Linq;
using System.Numerics;
using System.Text;
using System.Threading.Tasks;
using static athosRT.Modules.FLP.FlipperEntity;
using EV = athosRT.tool.EV;

namespace athosRT.Modules.EFEMs.Routine
{
    public class PlaceRoutine : ModuleRoutineBase, FSM.IRoutine
    {
        private string _routinename = "PlaceRoutine";
        private string _errorhead = "cannot place for the reason:";
        protected bool MultiWaferSize = Singleton<DeviceDefineManager>.Instance.GetValue<bool>(nameof(MultiWaferSize)).GetValueOrDefault();
        private SCConfigItem _scPlaceTimeout = (SCConfigItem)null;
        private int _timeout = 0;
        private int _axisTimeout = 0;
        private int _axisSpeed = 0;
        private int _alignerdelay = 0;
        private int _coolingdelay = 0;
        private int delaytime = 0;
        public LoadPort _lpDevice;
        private bool _skipWait;
        protected readonly bool HaveMotionAxis = Singleton<DeviceDefineManager>.Instance.GetValue<bool>("MotionAxisInstalled").GetValueOrDefault();
        RobotBaseDevice robot = null;
        protected Aligner aligner = null;
        protected IoCoolingBuffer buffer1 = null;
        protected IoCoolingBuffer buffer2 = null;
        protected PreAligner aligner1 = null;
        protected PreAligner aligner2 = null;
        protected LoadLockDevice ll1 = null;
        protected LoadLockDevice ll2 = null;
        protected IoCoolingBuffer _ioCoolBuffer;
        private int _existInterval = SC.GetValue<int>("Robot.Robot.ExistInterval");
        protected static readonly bool LoadLockDoorControlByStation = Singleton<DeviceDefineManager>.Instance.GetValue<bool>("LLDoorControlByStation").GetValueOrDefault();
        public ModuleName Station { get; set; }
        protected int OffsetX;
        protected int OffsetY;
        protected int OffsetZ;
        public int Slot { get; set; }
        private bool _isFlipper = false;

        public Hand Blade { get; set; }
        
        //放置
        public PlaceRoutine(ModuleName module) : base(module)
        {
            robot = DEVICE.GetDevice<RobotBaseDevice>("Robot");
            _alignerdelay = SC.GetValue<int>("System.AlignerPinDownDelay");
            _coolingdelay = SC.GetValue<int>("System.CoolingPinDownDelay");
            _scPlaceTimeout = SC.GetConfigItem("Robot.TimeLimitForPlaceWafer");
            aligner = DEVICE.GetDevice<Aligner>("Aligner");
            buffer1 = DEVICE.GetDevice<IoCoolingBuffer>("CoolingBuffer1");
            buffer2 = DEVICE.GetDevice<IoCoolingBuffer>("CoolingBuffer2");
            aligner1 = DEVICE.GetDevice<PreAligner>("Aligner1");
            aligner2 = DEVICE.GetDevice<PreAligner>("Aligner2");
            if (!HaveMotionAxis)
                return;
            _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
            _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
        }


        public RState Start(params object[] objs)
        {
            Reset();
            _isFlipper = false;
            _alignerdelay = SC.GetValue<int>("System.AlignerPinDownDelay");
            _coolingdelay = SC.GetValue<int>("System.CoolingPinDownDelay");
            _timeout = robot.RobotCommandTimeout * 1000;
            if (!Singleton<EfemEntity>.Instance.IsOnlineMode && (ModuleHelper.IsCoolingBuffer(this.Station) || ModuleHelper.IsAligner(this.Station)))
            {
                delaytime = !ModuleHelper.IsCoolingBuffer(Station) ? _alignerdelay * 1000 : _coolingdelay * 1000;
            }
            else
            {
                delaytime = 0;
            }

            if (WaferManager.Instance.CheckHasWafer(Station, Slot))
            {
                LogObject.Error(Station.ToString(), "站点有wafer 无法Place");
                return RState.Failed;
            }

            if (ModuleHelper.IsTurnOverStation(Station))
                _isFlipper = true;
            

            //LogObject.Info("Place", "Place to Wa");
            return Runner.Start(Module, "Place Routine");
        }

        public enum PlaceStep
        {
            WaitForPlaceModuleIdle,
            CoolBufferMoveUP,
            CheckBladeWaferIsExist,
            CheckBeforePlace,
            PlaceWafer,
            LoadLockCloseAtmDoor,
            WaitForCoolBuffer,
            CoolBufferMoveDown,
            WaitCoolBufferMoveDown,
            CheckAfterPlace,
            NotifyFlipperPrepare,
            NotifyFlipperOver,
        }

        public RState Monitor()
        {
            if (_isFlipper)
                Runner
                    .Wait(PlaceStep.WaitForPlaceModuleIdle, CheckFlipperIsIdle, _timeout)
                    .Run(PlaceStep.NotifyFlipperPrepare, NotifyFlipperOpen, CheckFlipperOpen, _timeout)
                    .Run(PlaceStep.CheckBeforePlace, NullFun, CheckBeforePlace, _timeout)
                    .Run(PlaceStep.PlaceWafer, PlaceWafer, WaitRobotMotion)
                    .Run(PlaceStep.NotifyFlipperOver, NotifyFlipperClose, CheckFlipperIsIdle, _timeout)
                    .End(PlaceStep.CheckAfterPlace, NullFun, CheckAfterPlace, _timeout);
            else
                Runner
                    .Run(PlaceStep.CoolBufferMoveUP,CoolBufferMoveUP, WaitCoolBufferMoveUp, _timeout)
                    .Run(PlaceStep.CheckBladeWaferIsExist,CheckBladeWaferIsExist, WaitRobotMotion, _timeout)
                    .Run(PlaceStep.CheckBeforePlace,NullFun,CheckBeforePlace, _timeout)
                    .Run(PlaceStep.PlaceWafer,PlaceWafer, WaitRobotMotion)
                    .Run(PlaceStep.LoadLockCloseAtmDoor,LoadLockCloseAtmDoor,LoadLockCloseAtmDoorOut,_timeout)
                    .Delay(PlaceStep.WaitForCoolBuffer, delaytime)
                    .Run(PlaceStep.CoolBufferMoveDown,CoolBufferMoveDown, WaitCoolBufferMoveDown, _timeout)
                    .End(PlaceStep.CheckAfterPlace, NullFun,CheckAfterPlace, _timeout);
                    //.Wait(PlaceStep.WaitCoolBufferMoveUp,WaitCoolBufferMoveUp,_timeout)
                    //.Wait(PlaceStep.WaitRobotMotion,WaitRobotMotion,_timeout)
                    //.Wait(PlaceStep.WaitRobotMotion, WaitRobotMotion, _timeout)
                    //.Wait(PlaceStep.WaitRobotMotion,WaitRobotMotion,_timeout)
                    //.Wait(PlaceStep.WaitCoolBufferMoveDown,WaitCoolBufferMoveDown,_timeout)
            return Runner.Status;
        }

        private bool CheckFlipperIsIdle()
        {
            return Singleton<RouteManager1>.Instance.GetFlipper().IsIdle;
        }

        private bool NotifyFlipperOpen()
        {
            Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.PrepareTransfer);
            return true;
        }

        private bool NotifyFlipperClose()
        {
            Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.EndTransfer);
            return true;
        }

        private bool CheckFlipperOpen()
        {
            return Singleton<RouteManager1>.Instance.GetFlipper().IsTransfer;
        }

        private bool CheckAfterPlace()
        {
            //"Check wafer information after wafer placed", this.Station, this.Slot, this.Blade
            //if (ModuleHelper.IsLoadLock(Station) && Singleton<EfemEntity>.Instance.IsOnlineMode)
            //    Singleton<WaferManager>.Instance.DeleteWafer(Station, Slot);
            switch (Blade)
            {
                case Hand.Blade1:
                    if (!CheckSensorNoWafer(ModuleName.Robot, (int)Blade))
                    {
                        LogObject.Error("Robot", "Wafer Is Still Detected on blade1 After Place!");
                        if (ModuleHelper.IsLoadPort(Station))
                            Singleton<RouteManager1>.Instance.GetLP(Station).PostMsg(268435443);
                        EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                        return false;

                    }
                    break;
                case Hand.Blade2:
                    for (int index = 0; index < robot.Blade2Slots; ++index)
                    {
                      
                        if (!CheckSensorNoWafer(ModuleName.Robot, (int)(Blade + index)))
                        {
                            LogObject.Error("Robot", "Wafer Is Still Detected on blade2 After Place!");
                            if (ModuleHelper.IsLoadPort(Station))
                                Singleton<RouteManager1>.Instance.GetLP(Station).PostMsg(268435443);
                            EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                            return false;
                        }
                    }
                    break;
                default:
                    for (int slot1 = 0; slot1 < this.robot.Blade2Slots + 1; ++slot1)
                    {
                        if (!CheckSensorNoWafer(ModuleName.Robot, slot1))
                        {
                        if (ModuleHelper.IsLoadPort(Station))
                            Singleton<RouteManager1>.Instance.GetLP(Station).PostMsg(268435443);
                            EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedAfterSend);
                            return false;
                        }
                    }
                    break;
            }
            return true;
        }

        private bool WaitCoolBufferMoveDown()
        {
            if (!Singleton<EfemEntity>.Instance.IsOnlineMode && (ModuleHelper.IsCoolingBuffer(this.Station)))
            {
                IoCoolingBuffer device = GetCoolBuffer(Station);
                if (!device.Error)
                    return device.CheckMovedDown() && !device.Busy;
                return false;
            }
            return true;
        }

        private bool CoolBufferMoveDown()
        {
            if (!Singleton<EfemEntity>.Instance.IsOnlineMode && (ModuleHelper.IsCoolingBuffer(this.Station)))
            {
                IoCoolingBuffer device = GetCoolBuffer(Station);
                string reason = "";
                if (device.CheckPinDown() || device.Move(Singleton<WaferManager>.Instance.GetWaferSize(Station, Slot), false, out reason))
                    return true;
                else
                    LogObject.Error(_routinename, _errorhead+reason);
                return false;
            }
            if (ModuleHelper.IsAligner(this.Station))
            {
                return true;
            }
            return true;
        }

        private bool CheckSensorNoWafer(ModuleName chamber, int slot) {
            if (SC.GetValue<bool>("System.IsSimulatorMode") || chamber != ModuleName.Robot)
                return Singleton<WaferManager>.Instance.CheckNoWafer(chamber, slot);
            return slot == 0 ? !robot.IsWaferPresenceOnBlade1 : !robot.IsWaferPresenceOnBlade2;
        }

        private bool LoadLockCloseAtmDoor()
        {
            if (LoadLockDoorControlByStation && ModuleHelper.IsLoadLock(this.Station) && !Singleton<EfemEntity>.Instance.IsOnlineMode)
            {
                string _reason = string.Empty;
                if (LoadLockDevice.LoadLockAtmDoorState == LoadLockDoorState.Closed || LoadLockDevice.CloseAtmDoor(out _reason))
                {
                    LogObject.Info("LL","ATM Door Closed");
                    return true;
                }
                else
                {
                    LogObject.Error("LL", $"ATM Door cannot Closed {_reason}");
                    return false;
                }
            }
            LogObject.Info("LL", "LL not has to control ATM");
            return true;

        }

        private bool LoadLockCloseAtmDoorOut() 
        {
            if (LoadLockDoorControlByStation && ModuleHelper.IsLoadLock(this.Station) && !Singleton<EfemEntity>.Instance.IsOnlineMode)
            {
                string _reason = string.Empty;
                if (LoadLockDevice.LoadLockAtmDoorState == LoadLockDoorState.Closed)
                {
                    LogObject.Info("LL", "ATM Door Closed");
                    return true;
                }
                else
                {
                    LogObject.Error("LL", "ATM Door not Closed");
                    return false;
                }
            }
            LogObject.Info("LL", "LL not has to control ATM");
            return true;
        }

        private bool PlaceWafer()
        {
            //if (!ModuleHelper.IsLoadLock(Station))
            {
                bool flag = OffsetX == 0 && OffsetY == 0 && OffsetZ == 0 ? robot.Place((RobotArmEnum)Blade, Station.ToString(), Slot) : this.robot.PlaceEx((RobotArmEnum)Blade, Station.ToString(), Slot, (float)OffsetX, (float)OffsetY, (float)OffsetZ);
                if (flag)
                {
                    LogObject.Info("Place", $"执行成功:{Station}-{Slot}");
                    return true;
                }
                else
                {
                    LogObject.Error("Place", "执行失败");
                    return false;
                }
            }
            //LogObject.Info("Place", "因是LL无法执行");
            return true;
        } 

        private bool CheckBeforePlace()
        {
            //this.Station, this.Slot, this.Blade
            string reason = "";
            if (!CheckRobotMotionInterlock(Station,Slot,out reason))
            {
                LogObject.Error("Place",$"cannot place for the reason:{reason}");
                return false;
            }
            switch (Blade) {
                case Hand.Blade1:
                    //检查 目标上有没有wafer 有就false
                    if (!Singleton<WaferManager>.Instance.CheckWafer(Station,Slot,WaferStatus.Empty))
                    {
                        return false;
                    }
                    //检查robot上有没有wafer 没有就返回false 
                    if (!Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, (int)Blade, WaferStatus.Normal))
                    {
                        //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                    if (!CheckSeneorHasWafer(ModuleName.Robot, (int)Blade))
                    {
                        //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                    //==debug
                    //if (ModuleHelper.IsLoadPort(Station) && SC.GetStringValue("CarrierInfo.LowerThicknessType") != SC.GetStringValue(string.Format("CarrierInfo.{0}ThicknessType", (object)Station)))
                    //{
                    //    //EV.PostAlarmLog(ModuleName.System.ToString(), string.Format("The wafer thickness of the lower arm is different from {0}.", (object)Station));
                    //    return false;
                    //}
                    break;
                case Hand.Blade2:
                default:
                    bool flag1 = true;
                    for (int index = 0; index < robot.Blade2Slots; ++index)
                    {
                        if (!Singleton<WaferManager>.Instance.CheckWafer(Station, Slot + index, WaferStatus.Empty))
                        {
                            //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferPresentWithRecord, (object)string.Format("Target {0}{1:D2}", (object)Station.ToString(), (object)(Slot + index + 1)));
                            return false;
                        }
                        flag1 &= Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, (int)(Blade + index), WaferStatus.Normal);
                        if (!this.CheckSeneorHasWafer(ModuleName.Robot, (int)(Blade + index)))
                        {
                            //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                            return false;
                        }
                    }
                    if (!flag1)
                    {
                        //EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedBeforeSend);
                        return false;
                    }
                    //==debug==
                    //if (ModuleHelper.IsLoadPort(Station) && SC.GetStringValue("CarrierInfo.UpperThicknessType") != SC.GetStringValue(string.Format($"CarrierInfo.{Station}ThicknessType")))
                    //{
                    //    //EV.PostAlarmLog(ModuleName.System.ToString(), string.Format("The wafer thickness of the lower arm is different from {0}.", (object)Station));
                    //    return false;
                    //}
                    break;
            }
            if (!ModuleHelper.IsCoolingBuffer(Station) || DEVICE.GetDevice<IoCoolingBuffer>(Station.ToString()).CheckPinUp())
            {
                    return true;
            }
            EV.PostWarningLog(Station.ToString(), "Can not place wafer to buffer, buffer isn't pick position.");
            return false;
        }

        private bool CheckSeneorHasWafer(ModuleName robot, int slot)
        {
            if (SC.GetValue<bool>("System.IsSimulatorMode") || robot != ModuleName.Robot)
                return Singleton<WaferManager>.Instance.CheckHasWafer(robot, slot);
            return slot == 0 ? this.robot.IsWaferPresenceOnBlade1 : this.robot.IsWaferPresenceOnBlade2;
        }

        private bool CheckBladeWaferIsExist()
        {
            if (!robot.ReadParameter(new object[3] { "CheckWaferIsPresence", (Blade == Hand.Blade1 ? 0 : 1), _existInterval }))
            {
                //手臂上有wafer 无法pick
                LogObject.Error("Robot", "手臂上无片 无法place");
                return false;
            }
            else
            {
                LogObject.Info("Robot", "手臂上有片 可以正常place");
                return true;
            }
        }

        private bool WaitRobotMotion()
        {
            if (robot.IsReady())
            {
                LogObject.Info("Robot", "robot is ready.");
                return true;
            }
            else
            {
                if (robot.IsError)
                {
                    LogObject.Info("Robot", "Robot进入Error");
                }
                return false;
            }
        }

        private bool WaitCoolBufferMoveUp()
        {
            //if (ModuleHelper.IsCoolingBuffer(Station) )
            //{
            //    IoCoolingBuffer device = GetCoolBuffer(Station);
            //    if (!device.Error)
            //        return device.CheckMovedUp() && !device.Busy;
            //    return false;
            //}
            if (ModuleHelper.IsAligner(Station))
            {
                return true;
            }
            return true;
        }

        private bool CoolBufferMoveUP()
        {
            //if (ModuleHelper.IsCoolingBuffer(Station))
            //{
            //    WaferSize size = Singleton<WaferManager>.Instance.GetWaferSize(ModuleName.Robot,0);
            //    IoCoolingBuffer device = GetCoolBuffer(Station);
            //    string _reason = "";
            //    if (device.CheckPinUp() || device.Move(size, true, out _reason))
            //    {
            //        return true;
            //    }
            //    else
            //    {
            //        LogObject.Error(_routinename, _errorhead + _reason);
            //        return false;
            //    }
            //}
            if (ModuleHelper.IsAligner(Station))
            {
                return true;
            }
            return true;
        }

        public void Abort()
        {

        }

        public IoCoolingBuffer GetCoolBuffer(ModuleName coolbufferName)
        {
            switch (coolbufferName)
            {
                //case ModuleName.Aligner1:
                //    _ioCoolBuffer = aligner1;
                //    break;
                //case ModuleName.Aligner2:
                //    this._ioCoolBuffer = aligner2;
                //    break;
                case ModuleName.CoolingBuffer1:
                    this._ioCoolBuffer = this.buffer1;
                    break;
                case ModuleName.CoolingBuffer2:
                    this._ioCoolBuffer = this.buffer2;
                    break;
            }
            return _ioCoolBuffer;
        }

        protected bool CheckRobotMotionInterlock(ModuleName chamber, int slot, out string reason)
        {
            reason = string.Empty;
            if (robot.RobotState == RobotStateEnum.Error)
            {
                reason = "robot is error.";

                if (ModuleHelper.IsLoadPort(Station))
                    Singleton<RouteManager1>.Instance.GetLP(Station).PostMsg(268435443);
                return false;
            }
            if (!robot.IsReady())
            {
                reason = string.Format("robot isn't Ready.");
                return false;
            }
            if (chamber == ModuleName.Aligner)
            {
                //if (aligner.Moving)
                //{
                //    reason = string.Format("aligner is moving.");
                //    return false;
                //}
                if (robot.IsReady())
                    return true;
                reason = string.Format("aligner isn't Ready.");
                return false;
            }
            if (ModuleHelper.IsTurnOverStation(chamber))
            {
                if (robot.IsReady())
                    return true;
            }
            if (ModuleHelper.IsLoadPort(chamber))
            {
                LoadPortBaseDevice device = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
                if (!device.IsEnableTransferWafer(out reason))
                {
                    reason = string.Format($"{chamber} isn't Ready.The reason is {reason}");
                    return false;
                }
                if (device.MapError)
                {
                    reason = string.Format("{0} Map has crossed error.", (object)chamber.ToString());
                    return false;
                }
                if (ModuleHelper.IsLoadPort(chamber) && !Singleton<RouteManager1>.Instance.GetLP(chamber).IsLoaded)
                {
                    if (Singleton<RouteManager1>.Instance.GetLP(chamber).IsDoorOpen)
                    {
                        reason = string.Format("{0} SMIF1PODOPEN signal is Off.", (object)chamber.ToString());
                        return false;
                    }
                    if (Singleton<RouteManager1>.Instance.GetLP(chamber).IsPresent)
                    {
                        reason = string.Format("{0} SensorSMIF1PODPRESENT signal is Off,Foup is presence.", (object)chamber.ToString());
                        return false;
                    }
                    if (Singleton<RouteManager1>.Instance.GetLP(chamber).IsReady)
                    {
                        reason = string.Format("{0} SensorSMIF1READY signal is Off.", (object)chamber.ToString());
                        return false;
                    }
                }
                return true;
            }
            if (ModuleHelper.IsLoadLock(chamber) || ModuleHelper.IsPm(chamber))
            {
                if (WaferManager.Instance.CheckHasWafer(chamber, 0))
                    reason = "记录中该位置有wafer";

                switch (chamber)
                {
                    case ModuleName.LL1:
                    case ModuleName.LLA:
                    case ModuleName.PMA:
                        if (!DeviceModel.LL1DoorIsOpen.Value)
                            reason = $"{chamber}门信号未开启 无法传送";
                        return DeviceModel.LL1DoorIsOpen.Value && WaferManager.Instance.CheckNoWafer(chamber, 0);
                    case ModuleName.LL2:
                    case ModuleName.LLB:
                    case ModuleName.PMB:
                        if (!DeviceModel.LL2DoorIsOpen.Value)
                            reason = $"{chamber}门信号未开启 无法传送";
                        return DeviceModel.LL2DoorIsOpen.Value && WaferManager.Instance.CheckNoWafer(chamber, 0);
                    default:
                        return true;
                }
            }
            if (ModuleHelper.IsCoolingBuffer(chamber) )
            {
                IoCoolingBuffer device = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
                if (device.Busy)
                {
                    reason = "buffer is not idle";
                    return false;
                }
                if (device.CheckPinUp())
                    return true;
                reason = "buffer pin not up position";
                return false;
            }
            if (ModuleHelper.IsAligner(Station))
            {
                //PreAligner device = DEVICE.GetDevice<PreAligner>(Station.ToString());
                //if (device.Busy)
                //{
                //    reason = "Aligner is not idle";
                //    return false;
                //}
                return true;
            }

            if (ModuleHelper.IsBuffer(Station))
            {

                return true;
            }

            reason = "error target";
            return false;
        }


        
    }
}