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- using Aitex.Core.Common;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Event;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using athosRT.Devices;
- using athosRT.Devices.PA;
- using athosRT.FSM;
- using athosRT.tool;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Numerics;
- using System.Text;
- using System.Threading.Tasks;
- using static athosRT.Modules.FLP.FlipperEntity;
- using EV = athosRT.tool.EV;
- namespace athosRT.Modules.EFEMs.Routine
- {
- public class PickRoutine : ModuleRoutineBase, FSM.IRoutine
- {
- protected bool MultiWaferSize = Singleton<DeviceDefineManager>.Instance.GetValue<bool>(nameof(MultiWaferSize)).GetValueOrDefault();
- private SCConfigItem _scPickTimeout = null;
- private int _timeout = 0;
- private int _axisTimeout = 0;
- private int _axisSpeed = 0;
- public double WaitForPickTime = 0.0;
- private LoadPort _lpDevice;
- private bool _skipWait;
- protected readonly bool HaveMotionAxis = Singleton<DeviceDefineManager>.Instance.GetValue<bool>("MotionAxisInstalled").GetValueOrDefault();
- public ModuleName Source { get; set; }
- public int Slot { get; set; }
- public Hand Blade { get; set; }
- protected int OffsetX;
- protected int OffsetY;
- protected int OffsetZ;
- public RobotBaseDevice robot;
- protected Aligner aligner = null;
- protected IoCoolingBuffer buffer1 = null;
- protected IoCoolingBuffer buffer2 = null;
- protected PreAligner aligner1 = null;
- protected PreAligner aligner2 = null;
- protected LoadLockDevice ll1;
- protected LoadLockDevice ll2;
- protected IoCoolingBuffer _ioCoolBuffer;
- private int _existInterval = SC.GetValue<int>("Robot.Robot.ExistInterval");
- private bool _isFlipper = false;
- public PickRoutine(ModuleName module) : base(module)
- {
- robot = DEVICE.GetDevice<RobotBaseDevice>("Robot");
- _scPickTimeout = SC.GetConfigItem("Robot.TimeLimitForPickWafer");
- aligner = DEVICE.GetDevice<Aligner>("Aligner");
- buffer1 = DEVICE.GetDevice<IoCoolingBuffer>("CoolingBuffer1");
- buffer2 = DEVICE.GetDevice<IoCoolingBuffer>("CoolingBuffer2");
- aligner1 = DEVICE.GetDevice<PreAligner>("Aligner1");
- aligner2 = DEVICE.GetDevice<PreAligner>("Aligner2");
- if (!HaveMotionAxis)
- return;
- _axisTimeout = SC.GetValue<int>("MotionAxis.MoveTimeout");
- _axisSpeed = SC.GetValue<int>("MotionAxis.AutoSpeed");
- }
- public RState Start(params object[] objs)
- {
- Reset();
- _isFlipper = false;
- _timeout = robot.RobotCommandTimeout * 1000;
- ModuleName moduleName = ModuleName.System;
- string module = moduleName.ToString();
- object[] objArray = new object[1];
- moduleName = Source;
- objArray[0] = (object)string.Format("{0}{1:D2} by {2}", (object)moduleName.ToString(), (object)(this.Slot + 1), (object)this.Blade.ToString());
- //EV.PostMessage<EventEnum>(module, EventEnum.PickingWaferFromChamberBegins, objArray);
- if (ModuleHelper.IsTurnOverStation(Source))
- _isFlipper = true;
- if (Singleton<WaferManager>.Instance.CheckNoWafer(Source, Slot))
- {
- LogObject.Error("robot", $"cannot pick from Source:{Source} Slot:{Slot} to {Blade} as no wafer");
- return RState.Failed;
- }
- return Runner.Start(Module, "Pick Routine");
- }
- public RState Monitor()
- {
- if (_isFlipper)
- Runner
- .Wait(PickStep.WaitForPickModuleIdle, CheckFlipperIsIdle, (int)WaitForPickTime * 1000)
- .Run(PickStep.NotifyFlipperPrepare, NotifyFlipperOpen, CheckFlipperOpen, 80 * 1000)
- .Run(PickStep.CheckBladeWaferIsExist, CheckBladeWaferIsExist, WaitRobotMotion, _timeout)
- .Run(PickStep.CheckBeforePick, NullFun, CheckBeforePick, _timeout)
- .Run(PickStep.PickWafer, PickWafer, WaitRobotMotion, 100000)
- .Run(PickStep.NotifyFlipperOver, NotifyFlipperClose, CheckFlipperIsIdle,_timeout)
- .End(PickStep.CheckAfterPick, NullFun, CheckAfterPick, _timeout);
- else
- Runner
- .Delay(PickStep.WaitForPickModuleIdle, (int)WaitForPickTime * 1000)
- .Run(PickStep.CoolBufferMoveUP, CoolBufferMoveUP, WaitCoolBufferMoveUp, _timeout)
- .Run(PickStep.CheckBladeWaferIsExist, CheckBladeWaferIsExist, WaitRobotMotion, _timeout)
- .Run(PickStep.CheckBeforePick, NullFun, CheckBeforePick, _timeout)
- .Run(PickStep.PickWafer, PickWafer, WaitRobotMotion, 100000)
- .End(PickStep.CheckAfterPick, NullFun,CheckAfterPick, _timeout);
- return Runner.Status;
- }
- private bool CheckAfterPick()
- {
- switch (Blade)
- {
- case Hand.Blade1:
- if (!CheckSeneorHasWafer(ModuleName.Robot, (int)Blade))
- {
- LogObject.Error("Robot", "Wafer Is Not Detected on blade1 After Pick");
-
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- break;
- case Hand.Blade2:
- for (int index = 0; index < robot.Blade2Slots; ++index)
- {
- if (!CheckSeneorHasWafer(ModuleName.Robot, 1 + index))
- {
- LogObject.Error("Robot", "Wafer Is Not Detected on blade2 After Pick");
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- break;
- default:
- for (int slot1 = 0; slot1 < robot.Blade2Slots + 1; ++slot1)
- {
- if (!CheckSeneorHasWafer(ModuleName.Robot, slot1))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferNotDetectedAfterPick);
- return false;
- }
- }
- break;
- }
- return true;
- }
- private bool PickWafer()
- {
- bool flag = OffsetX == 0 && OffsetY == 0 && OffsetZ == 0 ? robot.Pick((RobotArmEnum)Blade, Source.ToString(), Slot) : robot.PickEx((RobotArmEnum)Blade, Source.ToString(), Slot, (float)OffsetX, (float)OffsetY, (float)OffsetZ);
- if (flag)
- {
- LogObject.Info("robot",$"pick from Source:{Source} Slot:{Slot} to {Blade}");
- return true;
- }
-
- {
- LogObject.Error("robot", $"cannot pick from Source:{Source} Slot:{Slot} to {Blade}");
- return false;
- }
- }
- private bool CheckBeforePick()
- {
- //"Check wafer information", this.Source, this.Slot, this.Blade,
- string reason ="";
- if (!CheckRobotMotionInterlock(Source, Slot, out reason))
- {
- LogObject.Error("System", reason);
- return false;
- }
- switch (Blade)
- {
- case Hand.Blade1:
- if (ModuleHelper.IsLoadLock(Source) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- {
- //Singleton<WaferManager>.Instance.CreateWafer(Source, Slot, WaferStatus.Normal);
- }
- else if (!Singleton<WaferManager>.Instance.CheckWafer(Source, Slot, WaferStatus.Normal))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, (object)string.Format("target {0}{1:D2}", (object)Source.ToString(), (object)(Slot + 1)));
- return false;
- }
- if (!Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, 0, WaferStatus.Empty))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (!CheckSensorNoWafer(ModuleName.Robot, 0))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(Source) && !CheckSeneorHasWafer(Source, Slot))
- {
- EV.PostWarningLog(Source.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- break;
- case Hand.Blade2:
- bool flag1 = true;
- for (int index = 0; index < robot.Blade2Slots; ++index)
- {
- //if (ModuleHelper.IsLoadLock(Source) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- // Singleton<WaferManager>.Instance.CreateWafer(Source, Slot, WaferStatus.Normal);
- //else
- // flag1 = Singleton<WaferManager>.Instance.CheckWafer(Source, Slot + index, WaferStatus.Normal);
- if (!Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, (int)(Blade + index), WaferStatus.Empty))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (!CheckSensorNoWafer(ModuleName.Robot, (int)(Blade + index)))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(Source))
- {
- flag1 = CheckSeneorHasWafer(Source, Slot + index);
- if (!flag1)
- {
- EV.PostWarningLog(Source.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- if (!flag1)
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, string.Format("target {0}{1:D2}", (object)Source.ToString(), (object)(Slot + 1)));
- return false;
- }
- break;
- default:
- bool flag2 = true;
- for (int slot1 = 0; slot1 < robot.Blade2Slots + 1; ++slot1)
- {
- //if (ModuleHelper.IsLoadLock(Source) && Singleton<EfemEntity>.Instance.IsOnlineMode)
- // Singleton<WaferManager>.Instance.CreateWafer(Source, Slot, WaferStatus.Normal);
- //else
- // flag2 = Singleton<WaferManager>.Instance.CheckWafer(Source, Slot, WaferStatus.Normal);
- if (!Singleton<WaferManager>.Instance.CheckWafer(ModuleName.Robot, slot1, WaferStatus.Empty))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (!CheckSensorNoWafer(ModuleName.Robot, slot1))
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferDetectedBeforePick);
- return false;
- }
- if (ModuleHelper.IsBuffer(Source) && Blade == Hand.Both)
- {
- flag2 &= this.CheckSeneorHasWafer(Source, Slot + slot1);
- if (!flag2)
- {
- EV.PostWarningLog(Source.ToString(), "Can not pick wafer from buffer, Buffer slot has no wafer.");
- return false;
- }
- }
- }
- if (!flag2)
- {
- EV.PostMessage<EventEnum>(ModuleName.System.ToString(), EventEnum.WaferAbsentWithoutRecord, string.Format("target {0}{1:D2}", (object)Source.ToString(), (object)Slot));
- return false;
- }
- break;
- }
- if (!ModuleHelper.IsCoolingBuffer(Source) || DEVICE.GetDevice<IoCoolingBuffer>(Source.ToString()).CheckPinUp())
- return true;
- EV.PostWarningLog(Source.ToString(), "Can not pick wafer from buffer, buffer isn't pick position.");
- return false;
- }
-
- private bool WaitRobotMotion()
- {
- if (!robot.IsBusy)
- {
- LogObject.Info("Robot", "Robot准备完毕");
- if (robot.IsError)
- {
- if (ModuleHelper.IsLoadPort(Source))
- Singleton<RouteManager1>.Instance.GetLP(Source).PostMsg(268435443);
- LogObject.Info("Robot", "Robot进入Error");
- return false;
- }
- return true;
- }
- else
- {
- //LogObject.Error("Robot", "等待Robot准备完毕");
- return false;
- }
- }
- private bool CheckBladeWaferIsExist()
- {
- //this.robot, this.Blade, this._timeout
- if (!robot.ReadParameter(new object[3] { "CheckWaferIsPresence", (Blade == Hand.Blade1 ? 0 : 1), _existInterval }))
- {
- //手臂上有wafer 无法pick
- LogObject.Error("Robot", "手臂上有片 无法pick");
- return false;
- }
- else
- {
- LogObject.Info("Robot", "手臂上无片 可以正常pick");
- return true;
- }
- }
- private bool WaitCoolBufferMoveUp()
- {
- if (ModuleHelper.IsCoolingBuffer(Source))
- {
- IoCoolingBuffer device = GetCoolBuffer(Source);
- if (!device.Error)
- return device.CheckMovedUp() && !device.Busy;
- return false;
- }
- return true;
- }
- private bool CoolBufferMoveUP()
- {
- //(4, this.GetCoolBuffer(this.Source), Singleton<WaferManager>.Instance.GetWaferSize(this.Source, this.Slot), this._timeout);
-
- if (ModuleHelper.IsCoolingBuffer(Source))
- {
- WaferSize size = Singleton<WaferManager>.Instance.GetWaferSize(Source, Slot);
- IoCoolingBuffer device = GetCoolBuffer(Source);
- try
- {
- return (device.CheckPinUp() || device.Move(size, true, out _)) ? true : false;
- }
- catch (Exception ex)
- {
- Trace.WriteLine($"{Name} Error:{ex}");
- LogObject.Error(Name, $"Error:{ex}");
- }
- }
- return true;
- }
- public void Abort()
- {
- }
- public IoCoolingBuffer GetCoolBuffer(ModuleName coolbufferName)
- {
- switch (coolbufferName)
- {
- //case ModuleName.Aligner1:
- // _ioCoolBuffer = aligner1;
- // break;
- //case ModuleName.Aligner2:
- // _ioCoolBuffer = aligner2;
- // break;
- case ModuleName.CoolingBuffer1:
- _ioCoolBuffer = buffer1;
- break;
- case ModuleName.CoolingBuffer2:
- _ioCoolBuffer = buffer2;
- break;
- }
- return _ioCoolBuffer;
- }
- protected bool CheckRobotMotionInterlock(ModuleName chamber, int slot, out string reason)
- {
- LogObject.Info("Robot",$"chamber:{chamber},slot:{slot}");
- reason = string.Empty;
- if (robot.RobotState == RobotStateEnum.Error)
- {
- reason = "robot is error.";
- if(ModuleHelper.IsLoadPort(Source))
- Singleton<RouteManager1>.Instance.GetLP(Source).PostMsg(268435443);
- return false;
- }
- if (!robot.IsReady())
- {
- reason = string.Format("robot isn't Ready.");
- return false;
- }
- if (chamber == ModuleName.Aligner || ModuleHelper.IsTurnOverStation(chamber))
- {
- //if (aligner.Moving)
- //{
- // reason = string.Format("aligner is moving.");
- // return false;
- //}
- if (robot.IsReady())
- return true;
- reason = string.Format("aligner isn't Ready.");
- return false;
- }
- if (ModuleHelper.IsLoadPort(chamber))
- {
- LoadPortBaseDevice device = DEVICE.GetDevice<LoadPortBaseDevice>(chamber.ToString());
- string lpreason = string.Empty;
- if (!device.IsEnableTransferWafer(out reason))
- {
- reason = string.Format($"{chamber} isn't Ready.The reason is {lpreason}");
- return false;
- }
- if (device.MapError)
- {
- reason = string.Format("{0} Map has crossed error.", (object)chamber.ToString());
- return false;
- }
- if (ModuleHelper.IsLoadPort(chamber) && !Singleton<RouteManager1>.Instance.GetLP(chamber).IsLoaded)
- {
- if (Singleton<RouteManager1>.Instance.GetLP(chamber).IsDoorOpen)
- {
- reason = string.Format("{0} SMIF1PODOPEN signal is Off.", (object)chamber.ToString());
- return false;
- }
- if (Singleton<RouteManager1>.Instance.GetLP(chamber).IsPresent)
- {
- reason = string.Format("{0} SensorSMIF1PODPRESENT signal is Off,Foup is presence.", (object)chamber.ToString());
- return false;
- }
- if (Singleton<RouteManager1>.Instance.GetLP(chamber).IsReady)
- {
- reason = string.Format("{0} SensorSMIF1READY signal is Off.", (object)chamber.ToString());
- return false;
- }
- }
- return true;
- }
- if (ModuleHelper.IsLoadLock(chamber))
- {
- if (WaferManager.Instance.CheckNoWafer(chamber, 0))
- reason = "记录中该位置没有wafer";
- switch (chamber)
- {
- case ModuleName.LL1:
- case ModuleName.LLA:
- case ModuleName.PMA:
- if (!DeviceModel.LL1DoorIsOpen.Value)
- reason = $"{chamber}门信号未开启 无法传送";
- return DeviceModel.LL1DoorIsOpen.Value && WaferManager.Instance.CheckHasWafer(chamber, 0);
- case ModuleName.LL2:
- case ModuleName.LLB:
- case ModuleName.PMB:
- if (!DeviceModel.LL2DoorIsOpen.Value)
- reason = $"{chamber}门信号未开启 无法传送";
- return DeviceModel.LL2DoorIsOpen.Value && WaferManager.Instance.CheckHasWafer(chamber, 0);
- default:
- return true;
- }
- }
- //return DEVICE.GetDevice<LoadLockDevice>(chamber.ToString()).IsEnableTransferWafer(out reason);
- if (ModuleHelper.IsCoolingBuffer(chamber))
- {
- IoCoolingBuffer device = DEVICE.GetDevice<IoCoolingBuffer>(chamber.ToString());
- if (device.Busy)
- {
- reason = "buffer is not idle";
- return false;
- }
- if (device.CheckPinUp())
- return true;
- reason = "buffer pin not up position";
- return false;
- }
- if (ModuleHelper.IsAligner(chamber))
- {
- //Singleton<WaferManager>.Instance.CheckHasWafer(chamber, 1);
- //PreAligner device = DEVICE.GetDevice<PreAligner>(chamber.ToString());
- //if (device.Busy)
- //{
- // reason = "Aligner is not Idle";
- // return false;
- //}
- return true;
- }
- if (ModuleHelper.IsBuffer(chamber))
- {
- return true;
- }
- reason = "error target";
- return false;
- }
- protected bool CheckSensorNoWafer(ModuleName chamber, int slot)
- {
- if (SC.GetValue<bool>("System.IsSimulatorMode") || chamber != ModuleName.Robot)
- return Singleton<WaferManager>.Instance.CheckNoWafer(chamber, slot);
- return slot == 0 ? !robot.IsWaferPresenceOnBlade1 : !robot.IsWaferPresenceOnBlade2;
- }
- protected bool CheckSeneorHasWafer(ModuleName chamber, int slot)
- {
- if (SC.GetValue<bool>("System.IsSimulatorMode") || chamber != ModuleName.Robot)
- return Singleton<WaferManager>.Instance.CheckHasWafer(chamber, slot);
- return slot == 0 ? robot.IsWaferPresenceOnBlade1 : robot.IsWaferPresenceOnBlade2;
- }
- private bool CheckFlipperIsIdle()
- {
- return Singleton<RouteManager1>.Instance.GetFlipper().IsIdle;
- }
- private bool NotifyFlipperOpen()
- {
- Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.PrepareTransfer);
- return true;
- }
- private bool NotifyFlipperClose()
- {
- Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.EndTransfer);
- return true;
- }
- private bool CheckFlipperOpen()
- {
- if (!Singleton<RouteManager1>.Instance.GetFlipper().IsTransfer)
- {
- Singleton<RouteManager1>.Instance.GetFlipper().PostMsg(FlipperMSG.PrepareTransfer);
- return false;
- }
- else
- return true;
- }
- public enum PickStep
- {
- WaitForPickModuleIdle,
- CoolBufferMoveUP,
- CheckBladeWaferIsExist,
- CheckBeforePick,
- PickWafer,
- CheckAfterPick,
- NotifyFlipperPrepare,
- NotifyFlipperOver,
- }
- }
- }
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