ErrorCheckList.cs 1.8 KB

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  1. using System;
  2. using System.Collections.Generic;
  3. using System.Linq;
  4. using System.Text;
  5. using System.Threading.Tasks;
  6. namespace athosRT.Devices.EFEM.Task
  7. {
  8. class ErrorCheckList
  9. {
  10. }
  11. [Flags]
  12. public enum ErrorCheckList1
  13. {
  14. VAC = 1,
  15. AIR = 2,
  16. STALL = 4,
  17. TIMEOUT = 8,
  18. LIMIT = 16, // 0x00000010
  19. SENSOR = 32, // 0x00000020
  20. POSITION = 64, // 0x00000040
  21. EMS = 128, // 0x00000080
  22. COMM = 256, // 0x00000100
  23. COMM2 = 512, // 0x00000200
  24. VACON = 1024, // 0x00000400
  25. VACOFF = 2048, // 0x00000800
  26. CLAMPON = 4096, // 0x00001000
  27. CLAMPOF = 8192, // 0x00002000
  28. }
  29. [Flags]
  30. public enum ErrorCheckList2
  31. {
  32. RRTWAF = 1,
  33. CRSWAF = 2,
  34. THICKWAF = 4,
  35. THINWAF = 8,
  36. DBLWAF = 16, // 0x00000010
  37. BAOWAF = 32, // 0x00000020
  38. COMMAND = 64, // 0x00000040
  39. PODNG = 128, // 0x00000080
  40. PODMISMATCH = 256, // 0x00000100
  41. VAC_S = 512, // 0x00000200
  42. CLAMP_S = 1024, // 0x00000400
  43. SAFTY = 2048, // 0x00000800
  44. LOCKNG = 4096, // 0x00001000
  45. UNLOCKNG = 8192, // 0x00002000
  46. L_KEY_LK = 16384, // 0x00004000
  47. L_KEY_UL = 32768, // 0x00008000
  48. }
  49. [Flags]
  50. public enum ErrorCheckList3
  51. {
  52. MAP_S = 1,
  53. MAP_S1 = 2,
  54. MAP_S2 = 4,
  55. WAFLOST = 8,
  56. ALIGNNG = 16, // 0x00000010
  57. DRIVER = 32, // 0x00000020
  58. DRPOWERDOWN = 64, // 0x00000040
  59. HARDWARE = 128, // 0x00000080
  60. INTERNAL = 256, // 0x00000100
  61. E84_TIMEOUTx = 512, // 0x00000200
  62. E84_CS_VALID = 1024, // 0x00000400
  63. READFAIL = 2048, // 0x00000800
  64. PODNG = 4096, // 0x00001000
  65. PODMISMATCH = 8192, // 0x00002000
  66. VAC_S = 16384, // 0x00004000
  67. CLAMP_S = 32768, // 0x00008000
  68. }
  69. }