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- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace athosRT.Devices.EFEM.Task
- {
- class ErrorCheckList
- {
- }
- [Flags]
- public enum ErrorCheckList1
- {
- VAC = 1,
- AIR = 2,
- STALL = 4,
- TIMEOUT = 8,
- LIMIT = 16, // 0x00000010
- SENSOR = 32, // 0x00000020
- POSITION = 64, // 0x00000040
- EMS = 128, // 0x00000080
- COMM = 256, // 0x00000100
- COMM2 = 512, // 0x00000200
- VACON = 1024, // 0x00000400
- VACOFF = 2048, // 0x00000800
- CLAMPON = 4096, // 0x00001000
- CLAMPOF = 8192, // 0x00002000
- }
- [Flags]
- public enum ErrorCheckList2
- {
- RRTWAF = 1,
- CRSWAF = 2,
- THICKWAF = 4,
- THINWAF = 8,
- DBLWAF = 16, // 0x00000010
- BAOWAF = 32, // 0x00000020
- COMMAND = 64, // 0x00000040
- PODNG = 128, // 0x00000080
- PODMISMATCH = 256, // 0x00000100
- VAC_S = 512, // 0x00000200
- CLAMP_S = 1024, // 0x00000400
- SAFTY = 2048, // 0x00000800
- LOCKNG = 4096, // 0x00001000
- UNLOCKNG = 8192, // 0x00002000
- L_KEY_LK = 16384, // 0x00004000
- L_KEY_UL = 32768, // 0x00008000
- }
- [Flags]
- public enum ErrorCheckList3
- {
- MAP_S = 1,
- MAP_S1 = 2,
- MAP_S2 = 4,
- WAFLOST = 8,
- ALIGNNG = 16, // 0x00000010
- DRIVER = 32, // 0x00000020
- DRPOWERDOWN = 64, // 0x00000040
- HARDWARE = 128, // 0x00000080
- INTERNAL = 256, // 0x00000100
- E84_TIMEOUTx = 512, // 0x00000200
- E84_CS_VALID = 1024, // 0x00000400
- READFAIL = 2048, // 0x00000800
- PODNG = 4096, // 0x00001000
- PODMISMATCH = 8192, // 0x00002000
- VAC_S = 16384, // 0x00004000
- CLAMP_S = 32768, // 0x00008000
- }
-
- }
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