JET-EFEM/athos/athosRT/Devices/EFEM/EfemCommand.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Text;
using System.Threading.Tasks;

namespace athosRT.Devices.EFEM
{
    public enum EfemCommand
    {
        READY,
        INIT,
        ORGSH,
        LOCK,
        UNLOCK,
        DOCK,
        UNDOCK,
        OPEN,
        CLOSE,
        WAFSH,
        MAPDT,
        LOAD,
        UNLOAD,
        GOTO,
        TRANS,
        CHANGE,
        MPNT,
        ALIGN,
        ALIGN2,
        LIFT,
        HOME,
        HOLD,
        RESTR,
        ABORT,
        EMS,
        ERROR,
        CLAMP,
        STATE,
        MODE,
        TRANSREQ,
        SIGOUT,
        SIGSTAT,
        EVENT,
        CSTID,
        USDEFINE,
        THICKNESS,
    }
}