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JET-EFEM
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athos
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athosRT
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Devices
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DeviceModel.cs

DeviceModel.cs 3.6 KB
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  1. using Aitex.Core.RT.Device.Unit;
    2. 

  2. using athosRT.Devices.FLP;
    3. 

  3. using athosRT.Devices.IODevices;
    4. 

  4. using System;
    5. 

  5. using System.Collections.Generic;
    6. 

  6. using System.Linq;
    7. 

  7. using System.Text;
    8. 

  8. using System.Threading.Tasks;
    9. 

  9. 

  10. namespace athosRT.Devices
    11. 

  11. {
    12. 

  12.     public class DeviceModel
    13. 

  13.     {
    14. 

  14.         public static IoSignalTower SignalTower;
    15. 

  15.         public static JetFlipper TurnOverStation;
    16. 

  16.         public static IoCoolingBuffer CoolingBuffer1;
    17. 

  17.         public static IoCoolingBuffer CoolingBuffer2;
    18. 

  18.         public static IoAligner Aligner1;
    19. 

  19.         public static IoSensor SensorWaterLeakSW;
    20. 

  20.         public static IoSensor SensorWaterFlowSW;
    21. 

  21.         public static IoSensor SensorGratingSensorIN1;
    22. 

  22.         public static IoSensor SensorEFEMCSTDoorClosed;
    23. 

  23.         public static IoSensor SensorFFUalarm;
    24. 

  24.         public static IoSensor SensorCDAPressureSW;
    25. 

  25.         public static IoSensor SensorVACPressureSW;
    26. 

  26.         public static IoSensor SensorIONCDAPressureSW;
    27. 

  27.         public static IoSensor SensorIONAlarmSIGNAL;
    28. 

  28.         public static IoSensor SensorEFEMSideDoorClosed;
    29. 

  29.         public static IoSensor SensorPMASystemInterlock;
    30. 

  30.         public static IoSensor SensorPMBSystemInterlock;
    31. 

  31.         public static IoSensor SensorMaintenanceMode;
    32. 

  32.         public static IoSensor SensorEFEMPowerON;
    33. 

  33.         public static IoSensor SensorRobotTPusing;
    34. 

  34.         public static IoSensor SensorRobotEMStoEFEM;
    35. 

  35.         public static IoSensor SensorRobotEnabletoEFEM;
    36. 

  36.         public static IoSensor SensorRobotRemotetoEFEM;
    37. 

  37.         public static IoSensor SensorRBReady;
    38. 

  38.         public static IoSensor SensorRobotError;
    39. 

  39.         public static IoSensor SensorRBNotExtendPMA;
    40. 

  40.         public static IoSensor SensorRBNotExtendPMB;
    41. 

  41.         public static IoSensor SensorRBNotExtendSIMF1;
    42. 

  42.         public static IoSensor SensorRBNotExtendSIMF2;
    43. 

  43.         public static IoSensor SensorRBupperArmhavewafer;
    44. 

  44.         public static IoSensor SensorRBlowerArmhavewafer;
    45. 

  45.         public static IoSensor SensorSMIF1PODOPEN;
    46. 

  46.         public static IoSensor SensorSMIF1PODPRESENT;
    47. 

  47.         public static IoSensor SensorSMIF1READY;
    48. 

  48.         public static IoSensor SensorSMIF1MAPPINGSENSORLASER;
    49. 

  49.         public static IoSensor SensorSMIF2PODOPEN;
    50. 

  50.         public static IoSensor SensorSMIF2PODPRESENT;
    51. 

  51.         public static IoSensor SensorSMIF2READY;
    52. 

  52.         public static IoSensor SensorSMIF2MAPPINGSENSORLASER;
    53. 

  53.         public static IoTrigger TrigEFEMSideDoorClosed;
    54. 

  54.         public static IoTrigger TrigRBNotExtendPMA;
    55. 

  55.         public static IoTrigger TrigRBNotExtendPMB;
    56. 

  56.         public static IoTrigger TrigPauseResumetoRobot;
    57. 

  57.         public static IoTrigger TrigEnableToRobot;
    58. 

  58.         public static IoTrigger TrigEMSToRobot;
    59. 

  59.         public static IoTrigger TrigSafetytoPMA;
    60. 

  60.         public static IoTrigger TrigSafetytoPMB;
    61. 

  61.         public static IoTrigger TrigSafetytoSMIF1;
    62. 

  62.         public static IoTrigger TrigSafetytoSMIF2;
    63. 

  63.         public static IoTrigger TrigRBbusytoSIMF1;
    64. 

  64.         public static IoTrigger TrigRBbusytoSIMF2;
    65. 

  65.         public static IoSensor SensorCoolingStageSLOT1WaferON;
    66. 

  66.         public static IoSensor SensorCoolingStageSLOT2WaferON;
    67. 

  67.         public static IoSensor SensorCoolingStageSLOT3WaferON;
    68. 

  68.         public static IoSensor SensorCoolingStageSLOT4WaferON;
    69. 

  69.         public static IoSensor SensorCoolingStageSLOT5WaferON;
    70. 

  70.         public static IoSensor SensorCoolingStageSLOT6WaferON;
    71. 

  71.         public static IoSensor SensorPreAlignerWaferOn;
    72. 

  72. 

  73.         public static IoSensor LP1Presence;
    74. 

  74.         public static IoSensor LP1Placement;
    75. 

  75.         public static IoSensor LP2Presence;
    76. 

  76.         public static IoSensor LP2Placement;
    77. 

  77.         public static IoSensor LL1DoorIsOpen;
    78. 

  78.         public static IoSensor LL2DoorIsOpen;
    79. 

  79.     }
    80. 

  80. }
    81. 

  81.