JET-EFEM/athos/athosRT/bin/Debug/Config/DeviceDefine.xml

<?xml version="1.0" encoding="utf-8"?>
<Configs>
  <!--硬件配置-->
  <IoCardQuantity>1</IoCardQuantity>
  <DmcCardInstalled>false</DmcCardInstalled>
  <PLCIoInstalled>true</PLCIoInstalled>
  <DisableSignalTower>true</DisableSignalTower>

  <!--LoadPort 设置项-->
  <LoadPortType>OpenStageWithWaferSize</LoadPortType>
  <LoadPortQuantity>2</LoadPortQuantity> <!--L数量,0为不配置-->
  <RFIDInstallment>00</RFIDInstallment>
  <FfuMemoBusControl>false</FfuMemoBusControl>

  <!--Robot 设置项-->
  <RobotType>NXC100</RobotType> <!--NXC100 or SR100-->
  <MotionAxisInstalled>false</MotionAxisInstalled>
  <AlignerInstalled>true</AlignerInstalled> <!--Alignner installed-->
  <OcrInstalled>false</OcrInstalled>
  <AlignerNeedMoveUpCommand>false</AlignerNeedMoveUpCommand>
  <RobotIsSingleArm>false</RobotIsSingleArm>
  <FlipperInstalled>false</FlipperInstalled> <!--Flipper installed-->
	
  <!--Load Lock(或PM)设置项-->
  <LoadLockQuantity>1</LoadLockQuantity> <!--LL或PM数量,0为不配置-->
  <LoadLockSlot>1</LoadLockSlot>
  <LLDoorControlByStation>false</LLDoorControlByStation>

  <!--EFEM指令配置项-->
  <WAFSHEnable>true</WAFSHEnable>
  
  <!--Cooling buffer-->
  <CoolingBufferInstalled>true</CoolingBufferInstalled>
  <CoolingBufferQuantity>0</CoolingBufferQuantity>
  <CoolingBufferSlot>0</CoolingBufferSlot>
  
  <!--Buffer 设置项-->
  <BufferQuantity>1</BufferQuantity> <!--Buffer数量,0为不配置-->
  <BufferSlot>8</BufferSlot>
  <MultiWaferSize>true</MultiWaferSize>
  <!--Is Maintenance-->
  <MaintenanceSignal>false</MaintenanceSignal>
  <EfemDoorOpenSignal>true</EfemDoorOpenSignal>
</Configs>