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- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Device.Unit;
- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.IOCore;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.SubstrateTrackings;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using athosRT.Modules.EFEMs;
- using athosRT.tool;
- namespace athosRT.Devices
- {
- public class LoadLockDevice : BaseDevice, IDevice
- {
- private IoSensor _sensorDoorOpen;
- private IoSensor _sensorArmExtendEnable;
- private IoTrigger _triggerSafetytoPM;
- private IoTrigger _triggerRBNotExtendPM;
- private static DOAccessor _openAtmDoorSignal;
- private static DOAccessor _closeAtmDoorSignal;
- private static DIAccessor _openAtmDoorFeedback;
- private static DIAccessor _closeAtmDoorFeedback;
- private static DOAccessor _openVtmDoorSignal;
- private static DOAccessor _closeVtmDoorSignal;
- private static DIAccessor _openVtmDoorFeedback;
- private static DIAccessor _closeVtmDoorFeedback;
- private bool _isDoorControledByStation;
- private static RD_TRIG atmDoorTrig = new RD_TRIG();
- private static RD_TRIG vtmDoorTrig = new RD_TRIG();
- private static LoadLockDoorState atmDoorState = LoadLockDoorState.Unknown;
- private static LoadLockDoorState vtmDoorState = LoadLockDoorState.Unknown;
- private static bool isIdle;
- private static bool isSimulator = SC.GetValue<bool>("System.IsSimulatorMode");
- private static bool isDoorAlwaysOpen = SC.GetValue<bool>("System.IsLoadLockDoorAlwaysOpen");
- public bool IsDoorOpen => !this._sensorDoorOpen.Value && this._sensorArmExtendEnable.Value;
- public static bool IsDoorOpenedByStation => LoadLockDevice._openAtmDoorFeedback.Value && !LoadLockDevice._closeAtmDoorFeedback.Value;
- public static bool IsDoorClosedByStation => LoadLockDevice._closeAtmDoorFeedback.Value && !LoadLockDevice._openAtmDoorFeedback.Value;
- public static bool IsOuterDoorOpenedByStation => LoadLockDevice._openVtmDoorFeedback.Value && !LoadLockDevice._closeVtmDoorFeedback.Value;
- public static bool IsOuterDoorClosedByStation => LoadLockDevice._closeVtmDoorFeedback.Value && !LoadLockDevice._openVtmDoorFeedback.Value;
- public static bool IsIdle => LoadLockDevice.isIdle;
- public static RD_TRIG AtmDoorTrig => LoadLockDevice.atmDoorTrig;
- public static RD_TRIG VtmDoorTrig => LoadLockDevice.vtmDoorTrig;
- public static LoadLockDoorState LoadLockAtmDoorState
- {
- get
- {
- if (LoadLockDevice.isDoorAlwaysOpen)
- return LoadLockDoorState.Opened;
- if (LoadLockDevice.isSimulator)
- {
- if (LoadLockDevice._openAtmDoorSignal != null && LoadLockDevice._openAtmDoorSignal.Value && LoadLockDevice._closeAtmDoorSignal != null && !LoadLockDevice._closeAtmDoorSignal.Value)
- return LoadLockDoorState.Opened;
- return LoadLockDevice._closeAtmDoorSignal != null && LoadLockDevice._closeAtmDoorSignal.Value && LoadLockDevice._openAtmDoorSignal != null && !LoadLockDevice._openAtmDoorSignal.Value ? LoadLockDoorState.Closed : LoadLockDoorState.Unknown;
- }
- if (LoadLockDevice._openAtmDoorFeedback != null && LoadLockDevice._openAtmDoorFeedback.Value && LoadLockDevice._closeAtmDoorFeedback != null && !LoadLockDevice._closeAtmDoorFeedback.Value)
- return LoadLockDoorState.Opened;
- return LoadLockDevice._closeAtmDoorFeedback != null && LoadLockDevice._closeAtmDoorFeedback.Value && LoadLockDevice._openAtmDoorFeedback != null && !LoadLockDevice._openAtmDoorFeedback.Value ? LoadLockDoorState.Closed : LoadLockDoorState.Unknown;
- }
- }
- public LoadLockDevice() { }
- public static LoadLockDoorState LoadLockVtmDoorState
- {
- get
- {
- if (LoadLockDevice.isDoorAlwaysOpen)
- return LoadLockDoorState.Opened;
- if (LoadLockDevice.isSimulator)
- {
- if (LoadLockDevice._openVtmDoorSignal != null && LoadLockDevice._openVtmDoorSignal.Value && LoadLockDevice._closeVtmDoorSignal != null && !LoadLockDevice._closeVtmDoorSignal.Value)
- return LoadLockDoorState.Opened;
- return LoadLockDevice._closeVtmDoorSignal != null && LoadLockDevice._closeVtmDoorSignal.Value && LoadLockDevice._openVtmDoorSignal != null && !LoadLockDevice._openVtmDoorSignal.Value ? LoadLockDoorState.Closed : LoadLockDoorState.Unknown;
- }
- if (LoadLockDevice._openVtmDoorFeedback != null && LoadLockDevice._openVtmDoorFeedback.Value && LoadLockDevice._closeVtmDoorFeedback != null && !LoadLockDevice._closeVtmDoorFeedback.Value)
- return LoadLockDoorState.Opened;
- return LoadLockDevice._closeVtmDoorFeedback != null && LoadLockDevice._closeVtmDoorFeedback.Value && LoadLockDevice._openVtmDoorFeedback != null && !LoadLockDevice._openVtmDoorFeedback.Value ? LoadLockDoorState.Closed : LoadLockDoorState.Unknown;
- }
- }
- public LoadLockDevice(
- string module,
- string name,
- int slotNumber,
- IoSensor sensorDoorOpen,
- IoSensor sensorArmExtendEnable,
- DOAccessor openAtmDoorSignal,
- DOAccessor closeAtmDoorSignal,
- DIAccessor openAtmDoorFeedback,
- DIAccessor closeAtmDoorFeedback,
- DOAccessor openVtmDoorSignal,
- DOAccessor closeVtmDoorSignal,
- DIAccessor openVtmDoorFeedback,
- DIAccessor closeVtmDoorFeedback)
- {
- this.Module = module;
- this.Name = name;
- this._sensorDoorOpen = sensorDoorOpen;
- this._sensorArmExtendEnable = sensorArmExtendEnable;
- LoadLockDevice._openAtmDoorSignal = openAtmDoorSignal;
- LoadLockDevice._closeAtmDoorSignal = closeAtmDoorSignal;
- LoadLockDevice._openAtmDoorFeedback = openAtmDoorFeedback;
- LoadLockDevice._closeAtmDoorFeedback = closeAtmDoorFeedback;
- LoadLockDevice._openVtmDoorSignal = openVtmDoorSignal;
- LoadLockDevice._closeVtmDoorSignal = closeVtmDoorSignal;
- LoadLockDevice._openVtmDoorFeedback = openVtmDoorFeedback;
- LoadLockDevice._closeVtmDoorFeedback = closeVtmDoorFeedback;
- Singleton<WaferManager>.Instance.SubscribeLocation(name, slotNumber);
- this._isDoorControledByStation = true;
- }
- public LoadLockDevice(
- string module,
- string name,
- int slotNumber,
- IoSensor sensorDoorOpen,
- IoSensor sensorArmExtendEnable,
- IoTrigger triggerSafetytoPM,
- IoTrigger triggerRBNotExtendPM)
- {
- this.Module = module;
- this.Name = name;
- this._sensorDoorOpen = sensorDoorOpen;
- this._sensorArmExtendEnable = sensorArmExtendEnable;
- this._triggerRBNotExtendPM = triggerRBNotExtendPM;
- this._triggerSafetytoPM = triggerSafetytoPM;
- Singleton<WaferManager>.Instance.SubscribeLocation(name, slotNumber);
- this._isDoorControledByStation = false;
- }
- public bool Initialize()
- {
- LoadLockDevice.isIdle = true;
- DATA.Subscribe(this.Name + ".WaferSize", (Func<object>)(() => (object)Singleton<WaferManager>.Instance.GetWafer(ModuleHelper.Converter(this.Name), 0).Size.ToString()), SubscriptionAttribute.FLAG.SaveDB);
- return true;
- }
- public void Monitor()
- {
- LoadLockDevice.atmDoorTrig.CLK = LoadLockDevice.LoadLockAtmDoorState == LoadLockDoorState.Closed;
- LoadLockDevice.vtmDoorTrig.CLK = LoadLockDevice.LoadLockVtmDoorState == LoadLockDoorState.Closed;
- //if (!LoadLockDevice.atmDoorTrig.R && !LoadLockDevice.atmDoorTrig.T && !LoadLockDevice.vtmDoorTrig.R && !LoadLockDevice.vtmDoorTrig.T || !Singleton<DeviceDefineManager>.Instance.GetValue<bool>("LLDoorControlByStation").GetValueOrDefault() || !Singleton<EfemEntity>.Instance.IsOnlineMode)
- // return;
- //Singleton<EfemEntity>.Instance.SendSigStatEvent(ModuleName.LL1);
- }
- public void Terminate()
- {
- }
- public void Reset()
- {
- }
- public static bool OpenAtmDoor(out string reason)
- {
- LoadLockDevice.isIdle = false;
- reason = string.Empty;
- EV.PostInfoLog(GetName.GetCurrentName(), "LoadLock", "Open Atm Door");
- if (LoadLockDevice._openAtmDoorSignal.Value && !LoadLockDevice._closeAtmDoorSignal.Value)
- {
- reason = "Atm door opened, can't open again";
- LoadLockDevice.isIdle = true;
- return true;
- }
- string reason1;
- LoadLockDevice._closeAtmDoorSignal.SetValue(false, out reason1);
- LoadLockDevice._openAtmDoorSignal.SetValue(true, out reason1);
- LoadLockDevice.isIdle = true;
- return true;
- }
- public static bool CloseAtmDoor(out string reason)
- {
- LoadLockDevice.isIdle = false;
- reason = string.Empty;
- EV.PostInfoLog(GetName.GetCurrentName(), "LoadLock", "Close Atm Door");
- if (LoadLockDevice._closeAtmDoorSignal.Value && !LoadLockDevice._openAtmDoorSignal.Value)
- {
- reason = "Atm door closed, can't open again";
- LoadLockDevice.isIdle = true;
- return true;
- }
- string reason1;
- LoadLockDevice._openAtmDoorSignal.SetValue(false, out reason1);
- LoadLockDevice._closeAtmDoorSignal.SetValue(true, out reason1);
- LoadLockDevice.isIdle = true;
- return true;
- }
- public static bool OpenVtmDoor(out string reason)
- {
- LoadLockDevice.isIdle = false;
- reason = string.Empty;
- EV.PostInfoLog(GetName.GetCurrentName(), "LoadLock", "Open Vtm Door");
- if (LoadLockDevice._openVtmDoorSignal.Value && !LoadLockDevice._closeVtmDoorSignal.Value)
- {
- reason = "Vtm door opened, can't open again";
- LoadLockDevice.isIdle = true;
- return true;
- }
- string reason1;
- LoadLockDevice._closeVtmDoorSignal.SetValue(false, out reason1);
- LoadLockDevice._openVtmDoorSignal.SetValue(true, out reason1);
- LoadLockDevice.isIdle = true;
- return true;
- }
- public static bool CloseVtmDoor(out string reason)
- {
- LoadLockDevice.isIdle = false;
- reason = string.Empty;
- EV.PostInfoLog(GetName.GetCurrentName(), "LoadLock", "Close Vtm Door");
- if (LoadLockDevice._closeVtmDoorSignal.Value && !LoadLockDevice._openVtmDoorSignal.Value)
- {
- reason = "Vtm door closed, can't open again";
- LoadLockDevice.isIdle = true;
- return true;
- }
- string reason1;
- LoadLockDevice._openVtmDoorSignal.SetValue(false, out reason1);
- LoadLockDevice._closeVtmDoorSignal.SetValue(true, out reason1);
- LoadLockDevice.isIdle = true;
- return true;
- }
- public void SafeytoPm(bool value)
- {
- LoadLockDevice.isIdle = false;
- EV.PostInfoLog(GetName.GetCurrentName(), "LoadLock", string.Format("set SafeytoPm{0}", (object)value));
- this._triggerSafetytoPM.SetTrigger(value, out string _);
- LoadLockDevice.isIdle = true;
- }
- public void NotExtendtoPm(bool value)
- {
- LoadLockDevice.isIdle = false;
- EV.PostInfoLog(GetName.GetCurrentName(), "LoadLock", string.Format("set NotExtendtoPm {0}", (object)value));
- this._triggerSafetytoPM.SetTrigger(value, out string _);
- LoadLockDevice.isIdle = true;
- }
- public bool IsEnableTransferWafer(out string reason)
- {
- reason = string.Empty;
- if (this._isDoorControledByStation)
- return LoadLockDevice.LoadLockAtmDoorState == LoadLockDoorState.Opened;
- if (!LoadLockDevice.isDoorAlwaysOpen && this._sensorDoorOpen != null && !this._sensorDoorOpen.Value)
- {
- reason = this.Name + " is not ready for transfer";
- return false;
- }
- reason = "";
- return true;
- }
- }
- }
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