1234567891011121314151617181920212223242526272829303132333435363738394041424344454647484950515253545556575859606162636465666768697071727374757677787980 |
- using Aitex.Core.RT.Device;
- using Aitex.Core.Util;
- using athosRT.Devices.EFEM.ABS;
- using athosRT.Modules.EFEMs;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- namespace athosRT.Devices.EFEM.Task
- {
- public class OpenTask : CheckImp, ITask
- {
- public bool Execute(out string result, params string[] args)
- {
- string str = Args2Unit(args.Length != 0 ? args[0] : string.Empty);
- SystemServerModule entity1 = (SystemServerModule)this.GetEntity("System");
- if (entity1 == null)
- {
- result = "PARAM_NG";
- return false;
- }
- if (!this.Check<NoReadyPolicy>(str, out result) || !this.Check<NoInitCompletedPolicy>(str, out result) || !this.Check<NoOriginCompletedPolicy>(str, out result) || !this.Check<VacPolicy>(str, out result) || !this.Check<AirPolicy>(str, out result) || !this.Check<EMSPolicy>(str, out result) || !this.Check<ErrorPolicy>(str, out result) || !this.Check<BusyPolicy>(str, out result))
- return false;
- bool? nullable1 = Singleton<DeviceDefineManager>.Instance.GetValue<bool>("WAFSHEnable");
- bool flag1 = false;
- if (nullable1.GetValueOrDefault() == flag1 & nullable1.HasValue && !this.Check<BusyPolicy>("Robot", out result) || !this.Check<HoldPolicy>(str, out result) || !this.Check<RemovePolicy>(str, out result) || !this.Check<MaintenancePolicy>(str, out result) || !this.Check<LinkPolicy>(str, out result))
- return false;
- bool? nullable2 = Singleton<DeviceDefineManager>.Instance.GetValue<bool>("WAFSHEnable");
- bool flag2 = false;
- if (nullable2.GetValueOrDefault() == flag2 & nullable2.HasValue && !this.Check<ArmExtendPolicy>(str, out result) || !this.Check<PowerDownPolicy>(str, out result) || !this.Check<NoPosPolicy>(str, out result) || !this.Check<NoPodPolicy>(str, out result) || this.Check<ClosePolicy>(str, out result))
- return false;
- bool? nullable3 = Singleton<DeviceDefineManager>.Instance.GetValue<bool>("WAFSHEnable");
- bool flag3 = false;
- if (nullable3.GetValueOrDefault() == flag3 & nullable3.HasValue)
- {
- if (!entity1.MapWafer(str, out result))
- return false;
- }
- else
- {
- LoadPortServerModule entity2 = (LoadPortServerModule)this.GetEntity(str);
- if (entity2 == null)
- {
- result = "PARAM_NG";
- return false;
- }
- if (!entity2.Open(out result))
- return false;
- }
- return true;
- }
- public bool? Monitor(out string result, params string[] args)
- {
- result = string.Empty;
- string str = Args2Unit(args.Length != 0 ? args[0] : string.Empty);
- LoadPortBaseDevice device1 = DEVICE.GetDevice<LoadPortBaseDevice>(str);
- RobotBaseDevice device2 = DEVICE.GetDevice<RobotBaseDevice>("Robot");
- if (device1.IsError || device2.IsError)
- {
- this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF;
- this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL;
- this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL;
- return new bool?(this.CheckError(str, out result));
- }
- SystemServerModule entity = (SystemServerModule)this.GetEntity("System");
- if (device1.IsBusy || !device1.IsMapped || entity.Busy)
- return new bool?();
- Singleton<EfemEntity>.Instance.SendMapEvent(device1);
- return new bool?(true);
- }
- public bool Ack(EfemCommandType type, EfemCommand cmd, params string[] args) => cmd == EfemCommand.WAFSH;
- }
- }
|