using Aitex.Core.Common; using Aitex.Core.RT.Device; using Aitex.Core.Util; using athosRT.Devices.EFEM.ABS; using athosRT.Modules; using athosRT.Modules.EFEMs; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace athosRT.Devices.EFEM.Task { public class QueryWaferMappingTask : CheckImp, ITask { public bool Execute(out string result, params string[] args) { string str = this.Args2Unit(args.Length != 0 ? args[0] : string.Empty); if ((LoadPortServerModule)this.GetEntity(str) == null && str != ModuleName.Buffer.ToString()) { result = "PARAM_NG"; return false; } if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result)) return false; if (ModuleHelper.IsBuffer(ModuleHelper.Converter(str))) { result = ""; return true; } return this.Check(str, out result) && this.Check(str, out result) && this.Check(str, out result) && this.Check(str, out result) && this.Check(str, out result); } public bool? Monitor(out string result, params string[] args) { result = string.Empty; string str = this.Args2Unit(args.Length != 0 ? args[0] : string.Empty); ModuleName result1; Enum.TryParse(str, out result1); if (ModuleHelper.IsBuffer(result1)) { Singleton.Instance.MapBuffer(); foreach (WaferInfo wafer in Singleton.Instance.GetWafers(result1)) result += wafer.IsEmpty ? "0" : "1"; return new bool?(true); } LoadPortBaseDevice device = DEVICE.GetDevice(str); if (device.IsError) { this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; return new bool?(this.CheckError(str, out result)); } if (device.IsBusy || !device.IsMapped) return new bool?(); result = device.SlotMap; Singleton.Instance.SendMapEvent(device); return new bool?(true); } } }