using Aitex.Core.RT.Device; using Aitex.Core.Util; using athosRT.Devices.EFEM.ABS; using athosRT.Modules.EFEMs; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace athosRT.Devices.EFEM.Task { public class OpenTask : CheckImp, ITask { public bool Execute(out string result, params string[] args) { string str = Args2Unit(args.Length != 0 ? args[0] : string.Empty); SystemServerModule entity1 = (SystemServerModule)this.GetEntity("System"); if (entity1 == null) { result = "PARAM_NG"; return false; } if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result)) return false; bool? nullable1 = Singleton.Instance.GetValue("WAFSHEnable"); bool flag1 = false; if (nullable1.GetValueOrDefault() == flag1 & nullable1.HasValue && !this.Check("Robot", out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result)) return false; bool? nullable2 = Singleton.Instance.GetValue("WAFSHEnable"); bool flag2 = false; if (nullable2.GetValueOrDefault() == flag2 & nullable2.HasValue && !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || this.Check(str, out result)) return false; bool? nullable3 = Singleton.Instance.GetValue("WAFSHEnable"); bool flag3 = false; if (nullable3.GetValueOrDefault() == flag3 & nullable3.HasValue) { if (!entity1.MapWafer(str, out result)) return false; } else { LoadPortServerModule entity2 = (LoadPortServerModule)this.GetEntity(str); if (entity2 == null) { result = "PARAM_NG"; return false; } if (!entity2.Open(out result)) return false; } return true; } public bool? Monitor(out string result, params string[] args) { result = string.Empty; string str = Args2Unit(args.Length != 0 ? args[0] : string.Empty); LoadPortBaseDevice device1 = DEVICE.GetDevice(str); RobotBaseDevice device2 = DEVICE.GetDevice("Robot"); if (device1.IsError || device2.IsError) { this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; return new bool?(this.CheckError(str, out result)); } SystemServerModule entity = (SystemServerModule)this.GetEntity("System"); if (device1.IsBusy || !device1.IsMapped || entity.Busy) return new bool?(); Singleton.Instance.SendMapEvent(device1); return new bool?(true); } public bool Ack(EfemCommandType type, EfemCommand cmd, params string[] args) => cmd == EfemCommand.WAFSH; } }