using Aitex.Core.RT.Device; using Aitex.Core.Util; using Aitex.Sorter.Common; using athosRT.Devices.EFEM.ABS; using athosRT.Modules; using athosRT.Modules.EFEMs.Tasks; using athosRT.tool; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace athosRT.Devices.EFEM.Task { public class MpntTask : CheckImp, ITask { private bool ParseTaskEnum(string args, out MpntTaskEnum taskEnum) { taskEnum = MpntTaskEnum.ParamNg; string str = args; switch (str) { case "G1": taskEnum = MpntTaskEnum.G1; break; case "GB": taskEnum = MpntTaskEnum.GB; break; case "G4": taskEnum = MpntTaskEnum.G4; break; case "P1": taskEnum = MpntTaskEnum.P1; break; case "PB": taskEnum = MpntTaskEnum.PB; break; case "P4": taskEnum = MpntTaskEnum.P4; break; default: return false; } return true; } private bool IsGetCommand(MpntTaskEnum taskEnum) => taskEnum == MpntTaskEnum.G1 || taskEnum == MpntTaskEnum.GB || taskEnum == MpntTaskEnum.G4; public bool Execute(out string result, params string[] args) { string str = "Robot"; this.GetEntity(str); ModuleName target = ModuleName.System; MpntTaskEnum taskEnum = MpntTaskEnum.ParamNg; int slot = 1; if (!this.ParseMoveTarget(args[0], out target, out slot)) { result = "PARAM_NG"; return false; } if (!this.ParseTaskEnum(args[1], out taskEnum)) { result = "PARAM_NG"; return false; } Hand arm = Hand.Blade2; if (!this.ParseMoveArm(args[2], out arm)) { result = "PARAM_NG"; return false; } if (!ModuleHelper.IsLoadLock(target)) { result = "PARAM_NG"; return false; } if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result)) return false; if (!this.Check(str, out result)) { LogObject.Warning("MPNTTask " , str + " Busy"); return false; } if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(target.ToString(), out result) || !this.Check(target.ToString(), out result) || !this.Check(target.ToString(), out result)) return false; if (!ModuleHelper.IsLoadLock(target) && !Singleton.Instance.CheckNoWafer(target, slot - 1)) { result = "WAFER"; return false; } if (!this.Check(str, out result)) return false; if (!Singleton.Instance.IsIdle) { LogObject.Warning("MpntTask", "MpntTask RouteManager is Busy"); result = "BUSY"; return false; } if (this.IsGetCommand(taskEnum)) { if (taskEnum == MpntTaskEnum.GB) { switch (arm) { case Hand.Blade1: if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot, 0)) { result = "WAFER"; return false; } break; case Hand.Blade2: if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot, 1)) { result = "WAFER"; return false; } break; default: if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot, 0)) { result = "WAFER"; return false; } if (!Singleton.Instance.CheckNoWafer(ModuleName.Robot, 1)) { result = "WAFER"; return false; } break; } } this._token = Singleton.Instance.Invoke("MPNTPick", new object[4] { (object) target.ToString(), (object) (slot - 1), (object) arm, (object) taskEnum }); return true; } if (taskEnum == MpntTaskEnum.PB) { switch (arm) { case Hand.Blade1: if (!Singleton.Instance.CheckHasWafer(ModuleName.Robot, 0)) { result = "NONWAF"; return false; } break; case Hand.Blade2: if (!Singleton.Instance.CheckHasWafer(ModuleName.Robot, 1)) { result = "NONWAF"; return false; } break; default: if (!Singleton.Instance.CheckHasWafer(ModuleName.Robot, 0)) { result = "NONWAF"; return false; } if (!Singleton.Instance.CheckHasWafer(ModuleName.Robot, 1)) { result = "NONWAF"; return false; } break; } } this._token = Singleton.Instance.Invoke("MPNTPlace", new object[4] { (object) target.ToString(), (object) (slot - 1), (object) arm, (object) taskEnum }); return true; } public bool? Monitor(out string result, params string[] args) { result = string.Empty; RobotBaseDevice device = DEVICE.GetDevice("Robot"); if (device.IsError) { this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; return new bool?(this.CheckError("Robot", out result)); } return Singleton.Instance.IsIdle && device.IsReady() && !device.IsBusy && Singleton.Instance.CheckAcked(this._token) ? new bool?(true) : new bool?(); } } }