using Aitex.Core.RT.Device; using Aitex.Core.RT.SCCore; using Aitex.Core.Util; using Aitex.Sorter.Common; using athosRT.Devices.EFEM.ABS; using MECF.Framework.Common.Equipment; using MECF.Framework.Common.SubstrateTrackings; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadPorts.LoadPortBase; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots; using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robots.RobotBase; using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; using EV = athosRT.tool.EV; namespace athosRT.Devices.EFEM.Task { public class GotoTask : CheckImp, ITask { public bool EnableGotoReady => !SC.ContainsItem("Robot.Robot.EnableGotoReady") || SC.GetValue("Robot.Robot.EnableGotoReady"); public bool Execute(out string result, params string[] args) { string str = "Robot"; this.GetEntity(str); ModuleName target = ModuleName.System; int slot = 1; if (!this.ParseMoveTarget(args[0], out target, out slot)) { result = "PARAM_NG"; return false; } Hand arm = Hand.Blade2; if (!this.ParseMoveArm(args[1], out arm)) { result = "PARAM_NG"; return false; } bool flag = !Singleton.Instance.CheckHasWafer(ModuleName.Robot, arm == Hand.Blade2 ? 1 : 0); if (!this.MultiWaferSize) ; if (!this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result) || !this.Check(str, out result)) return false; RobotBaseDevice device = DEVICE.GetDevice(str); string reason; if (ModuleHelper.IsLoadPort(target) && !DEVICE.GetDevice(target.ToString()).IsEnableTransferWafer(out reason)) { EV.PostWarningLog("EFEM", "Can not goto, " + reason); result = "NOPOS"; return false; } if (!this.EnableGotoReady) return true; object[] objArray; if (flag) objArray = new object[4] { (object) arm, (object) target, (object) (slot - 1), (object) RobotPostionEnum.PickReady }; else objArray = new object[4] { (object) arm, (object) target, (object) (slot - 1), (object) RobotPostionEnum.PlaceReady }; device.GoTo(objArray); return true; } public bool? Monitor(out string result, params string[] args) { result = string.Empty; RobotBaseDevice device = DEVICE.GetDevice("Robot"); if (device.IsError) { this.flag1 = ErrorCheckList1.VAC | ErrorCheckList1.AIR | ErrorCheckList1.STALL | ErrorCheckList1.LIMIT | ErrorCheckList1.SENSOR | ErrorCheckList1.POSITION | ErrorCheckList1.EMS | ErrorCheckList1.COMM | ErrorCheckList1.COMM2 | ErrorCheckList1.VACON | ErrorCheckList1.VACOFF | ErrorCheckList1.CLAMPON | ErrorCheckList1.CLAMPOF; this.flag2 = ErrorCheckList2.RRTWAF | ErrorCheckList2.CRSWAF | ErrorCheckList2.THICKWAF | ErrorCheckList2.THINWAF | ErrorCheckList2.DBLWAF | ErrorCheckList2.BAOWAF | ErrorCheckList2.COMMAND | ErrorCheckList2.PODNG | ErrorCheckList2.PODMISMATCH | ErrorCheckList2.VAC_S | ErrorCheckList2.CLAMP_S | ErrorCheckList2.SAFTY | ErrorCheckList2.LOCKNG | ErrorCheckList2.UNLOCKNG | ErrorCheckList2.L_KEY_LK | ErrorCheckList2.L_KEY_UL; this.flag3 = ErrorCheckList3.MAP_S | ErrorCheckList3.MAP_S1 | ErrorCheckList3.MAP_S2 | ErrorCheckList3.WAFLOST | ErrorCheckList3.ALIGNNG | ErrorCheckList3.DRIVER | ErrorCheckList3.DRPOWERDOWN | ErrorCheckList3.HARDWARE | ErrorCheckList3.INTERNAL | ErrorCheckList3.E84_TIMEOUTx | ErrorCheckList3.E84_CS_VALID | ErrorCheckList3.READFAIL; return new bool?(this.CheckError("Robot", out result)); } return device.IsReady() ? new bool?(true) : new bool?(); } } }