using System; using System.Collections.Generic; using System.Linq; using System.Text; using System.Threading.Tasks; namespace athosRT.Devices.EFEM.Task { class ErrorCheckList { } [Flags] public enum ErrorCheckList1 { VAC = 1, AIR = 2, STALL = 4, TIMEOUT = 8, LIMIT = 16, // 0x00000010 SENSOR = 32, // 0x00000020 POSITION = 64, // 0x00000040 EMS = 128, // 0x00000080 COMM = 256, // 0x00000100 COMM2 = 512, // 0x00000200 VACON = 1024, // 0x00000400 VACOFF = 2048, // 0x00000800 CLAMPON = 4096, // 0x00001000 CLAMPOF = 8192, // 0x00002000 } [Flags] public enum ErrorCheckList2 { RRTWAF = 1, CRSWAF = 2, THICKWAF = 4, THINWAF = 8, DBLWAF = 16, // 0x00000010 BAOWAF = 32, // 0x00000020 COMMAND = 64, // 0x00000040 PODNG = 128, // 0x00000080 PODMISMATCH = 256, // 0x00000100 VAC_S = 512, // 0x00000200 CLAMP_S = 1024, // 0x00000400 SAFTY = 2048, // 0x00000800 LOCKNG = 4096, // 0x00001000 UNLOCKNG = 8192, // 0x00002000 L_KEY_LK = 16384, // 0x00004000 L_KEY_UL = 32768, // 0x00008000 } [Flags] public enum ErrorCheckList3 { MAP_S = 1, MAP_S1 = 2, MAP_S2 = 4, WAFLOST = 8, ALIGNNG = 16, // 0x00000010 DRIVER = 32, // 0x00000020 DRPOWERDOWN = 64, // 0x00000040 HARDWARE = 128, // 0x00000080 INTERNAL = 256, // 0x00000100 E84_TIMEOUTx = 512, // 0x00000200 E84_CS_VALID = 1024, // 0x00000400 READFAIL = 2048, // 0x00000800 PODNG = 4096, // 0x00001000 PODMISMATCH = 8192, // 0x00002000 VAC_S = 16384, // 0x00004000 CLAMP_S = 32768, // 0x00008000 } }