EfemSimulator.cs 14 KB

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486
  1. using System;
  2. using System.Text.RegularExpressions;
  3. using System.Threading;
  4. using System.Threading.Tasks;
  5. using Aitex.Core.UI.Control;
  6. using MECF.Framework.Simulator.Core.Driver;
  7. using Aitex.Core.Util;
  8. using CyberX8_Core;
  9. namespace CyberX8_Simulator.Devices
  10. {
  11. class EfemSimulatorServer : SocketDeviceSimulator
  12. {
  13. private const string CMD_PATTERN = "^MOV|^SET|^GET";
  14. private const string SCMD = @"(?<=\:)(.*?)(?=\/)";
  15. private const string SFOUP = @"(?<=P)(\d{1})(?=[\;\/])";
  16. private const string ACK = "ACK";
  17. private string[] _slotMap = new string[25];
  18. private PeriodicJob _HwThread;
  19. private bool _bCommReady;
  20. private bool _isDoorOpen;
  21. private bool _isPlaced;
  22. public int WaferSize = 3;
  23. public string SlotMap
  24. {
  25. get { return string.Join("", _slotMap); }
  26. }
  27. public bool _isVacuumError { get; set; }
  28. public bool _isAirError { get; set; }
  29. public bool _isFlowError { get; set; }
  30. public bool _isLeak { get; set; }
  31. public bool _isMaintain { get; set; }
  32. public bool _isWaferPresent { get; set; }
  33. public bool _isMaintainDoorOpen { get; private set; }
  34. public bool _isProtrude1 { get; set; }
  35. public bool _isProtrude2 { get; set; }
  36. public bool _isProtrude3 { get; set; }
  37. public EfemSimulatorServer() : base(13001, -1, "\r", ' ')
  38. {
  39. for (int i = 0; i < _slotMap.Length; i++)
  40. _slotMap[i] = "0";
  41. _HwThread = new PeriodicJob(5000, OnSendEvent, "EfemHardware", true);
  42. }
  43. private bool OnSendEvent()
  44. {
  45. if (IsConnected)
  46. {
  47. if (!_bCommReady)
  48. {
  49. OnWriteMessage("INF:READY/COMM;");
  50. }
  51. }
  52. else
  53. {
  54. _bCommReady = false;
  55. }
  56. return true;
  57. }
  58. protected override void ProcessUnsplitMessage(string str)
  59. {
  60. if (!_bCommReady && str.Contains("ACK:READY/COMM"))
  61. {
  62. _bCommReady = true;
  63. }
  64. if (!Regex.IsMatch(str, CMD_PATTERN))
  65. return;
  66. // 发送ACK 表示收到
  67. string ack = Regex.Replace(str, CMD_PATTERN, ACK);
  68. OnWriteMessage(ack);
  69. // 处理INF
  70. OnWork(ack);
  71. }
  72. internal void SetCassetteDoor(bool doorOpen)
  73. {
  74. if (doorOpen != _isDoorOpen)
  75. {
  76. _isDoorOpen = doorOpen;
  77. SendSystemData();
  78. }
  79. }
  80. internal void SetMaintain(bool maintain)
  81. {
  82. if (maintain != _isMaintain)
  83. {
  84. _isMaintain = maintain;
  85. SendSystemData();
  86. }
  87. }
  88. internal void SetProtrude1(bool protrude)
  89. {
  90. if (protrude != _isProtrude1)
  91. {
  92. _isProtrude1 = protrude;
  93. SendLP1Data();
  94. }
  95. }
  96. internal void SetProtrude2(bool protrude)
  97. {
  98. if (protrude != _isProtrude2)
  99. {
  100. _isProtrude2 = protrude;
  101. SendLP2Data();
  102. }
  103. }
  104. internal void SetProtrude3(bool protrude)
  105. {
  106. if (protrude != _isProtrude3)
  107. {
  108. _isProtrude3 = protrude;
  109. SendLP3Data();
  110. }
  111. }
  112. private void OnWork(string strACK)
  113. {
  114. // match basic
  115. Match m1 = Regex.Match(strACK, SCMD);
  116. // get mock delay time
  117. string sBasic = m1.Groups[1].Value;
  118. if (string.IsNullOrEmpty(sBasic))
  119. return;
  120. Thread thread=new Thread(new ParameterizedThreadStart(OnWorkThread));
  121. thread.IsBackground = true;
  122. thread.Start(new object[] { sBasic, strACK });
  123. }
  124. private void OnWorkThread(object obj)
  125. {
  126. object[] args = (object[])obj;
  127. string sBasic = args[0].ToString();
  128. string strACK=args[1].ToString();
  129. EfemOperation op = EfemConstant.ToOperation(sBasic);
  130. ushort millionSec = this.SimuOperationTime(op);
  131. // delay
  132. //await Task.Delay(millionSec);
  133. if (millionSec != 0)
  134. {
  135. Thread.Sleep(millionSec);
  136. }
  137. // build the INF string
  138. string strINF = string.Empty;
  139. switch (EfemConstant.ToOperation(sBasic))
  140. {
  141. case EfemOperation.GetWaferInfo:
  142. strINF = strACK.Replace(ACK, "INF");
  143. strINF = strINF.TrimEnd(';');
  144. strINF += "/1111111111111110001111111;";
  145. break;
  146. case EfemOperation.Home:
  147. string s1 = "EVT:SIGSTAT/P1/00000381/00000000;\rEVT:SIGSTAT/P2/00000381/00000000;\rEVT:SIGSTAT/P3/00000381/00000000;\rEVT:SIGSTAT/System/0000FFF7/00000004;\r";
  148. strINF = s1 + strACK.Replace(ACK, "INF");
  149. SendSystemData();
  150. SendLP1Data();
  151. SendLP2Data();
  152. SendLP3Data();
  153. OnWriteMessage(strACK.Replace(ACK, "INF"));
  154. return;
  155. case EfemOperation.Map:
  156. case EfemOperation.Load:
  157. Match m2 = Regex.Match(strACK, SFOUP);
  158. if (m2.Success)
  159. {
  160. string map = string.Join("", _slotMap);
  161. string s2 = $"EVT:MAPDT/P{m2.Groups[1].Value}/{map};\r";
  162. strINF = s2 + strACK.Replace(ACK, "INF");
  163. }
  164. break;
  165. case EfemOperation.StateTrack:
  166. strINF = "INF:STATE/TRACK/000;";
  167. break;
  168. case EfemOperation.Align:
  169. case EfemOperation.Pick:
  170. case EfemOperation.Place:
  171. case EfemOperation.Orgsh:
  172. case EfemOperation.Light:
  173. case EfemOperation.SigStatus:
  174. default:
  175. strINF = strACK.Replace(ACK, "INF");
  176. break;
  177. }
  178. OnWriteMessage(strINF);
  179. }
  180. private void SendLP1Data()
  181. {
  182. uint data = GetLP1Data1();
  183. string msg = $"EVT:SIGSTAT/P1/{data:X8}/00000000;";
  184. OnWriteMessage(msg);
  185. }
  186. private void SendLP2Data()
  187. {
  188. uint data = GetLP2Data1();
  189. string msg = $"EVT:SIGSTAT/P2/{data:X8}/00000000;";
  190. OnWriteMessage(msg);
  191. }
  192. private void SendLP3Data()
  193. {
  194. uint data = GetLP3Data1();
  195. string msg = $"EVT:SIGSTAT/P3/{data:X8}/00000000;";
  196. OnWriteMessage(msg);
  197. }
  198. private void SendSystemData()
  199. {
  200. uint data = GetSystemData1();
  201. string msg = $"EVT:SIGSTAT/System/{data:X8}/00000000;";
  202. OnWriteMessage(msg);
  203. }
  204. private ushort SimuOperationTime(EfemOperation op)
  205. {
  206. ushort sec = 0;
  207. switch (op)
  208. {
  209. case EfemOperation.Map:
  210. case EfemOperation.GetWaferInfo:
  211. sec = 2200;
  212. break;
  213. case EfemOperation.Pick:
  214. case EfemOperation.Place:
  215. case EfemOperation.Orgsh:
  216. sec = 2200;
  217. break;
  218. case EfemOperation.Light:
  219. case EfemOperation.SigStatus:
  220. sec = 0;
  221. break;
  222. case EfemOperation.Align:
  223. sec = 100;
  224. break;
  225. default:
  226. sec = 100;
  227. break;
  228. }
  229. return sec;
  230. }
  231. public void PlaceCarrier1()
  232. {
  233. _isPlaced = true;
  234. SendLP1Data();
  235. }
  236. public void RemoveCarrier1()
  237. {
  238. _isPlaced = false;
  239. SendLP1Data();
  240. }
  241. public void PlaceCarrier2()
  242. {
  243. _isPlaced = true;
  244. SendLP2Data();
  245. }
  246. public void RemoveCarrier2()
  247. {
  248. _isPlaced = false;
  249. SendLP2Data();
  250. }
  251. public void PlaceCarrier3()
  252. {
  253. _isPlaced = true;
  254. SendLP3Data();
  255. }
  256. public void RemoveCarrier3()
  257. {
  258. _isPlaced = false;
  259. SendLP3Data();
  260. }
  261. public void ClearWafer()
  262. {
  263. for (int i = 0; i < _slotMap.Length; i++)
  264. {
  265. _slotMap[i] = "0";
  266. }
  267. }
  268. public void SetAllWafer()
  269. {
  270. for (int i = 0; i < _slotMap.Length; i++)
  271. {
  272. _slotMap[i] = "1";
  273. }
  274. }
  275. public void SetUpWafer()
  276. {
  277. for (int i = 0; i < _slotMap.Length; i++)
  278. {
  279. _slotMap[i] = i > 15 ? "1" : "0";
  280. }
  281. }
  282. public void SetLowWafer()
  283. {
  284. for (int i = 0; i < _slotMap.Length; i++)
  285. {
  286. _slotMap[i] = i < 10 ? "1" : "0";
  287. }
  288. }
  289. public void RandomWafer()
  290. {
  291. Random _rd = new Random();
  292. for (int i = 0; i < _slotMap.Length; i++)
  293. {
  294. //_slotMap[i] = (i % 9).ToString();
  295. _slotMap[i]= _rd.Next(0, 10) < 6 ? "0" : "1";
  296. }
  297. }
  298. private uint GetLP1Data1()
  299. {
  300. uint data1 = 0x0u;
  301. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  302. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  303. switch (WaferSize)
  304. {
  305. case 3:
  306. //data1 |= 0x00000040u;
  307. data1 |= 0x00000080u;
  308. data1 |= 0x00000100u;
  309. break;
  310. case 4:
  311. data1 |= 0x00000040u;
  312. //data1 |= 0x00000080u;
  313. data1 |= 0x00000100u;
  314. break;
  315. case 6:
  316. data1 |= 0x00000040u;
  317. data1 |= 0x00000080u;
  318. //data1 |= 0x00000100u;
  319. break;
  320. }
  321. data1 |= (!_isProtrude1) ? 0x00000200u : 0x0;
  322. return data1;
  323. }
  324. private uint GetLP2Data1()
  325. {
  326. uint data1 = 0x0u;
  327. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  328. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  329. switch (WaferSize)
  330. {
  331. case 3:
  332. //data1 |= 0x00000040u;
  333. data1 |= 0x00000080u;
  334. data1 |= 0x00000100u;
  335. break;
  336. case 4:
  337. data1 |= 0x00000040u;
  338. //data1 |= 0x00000080u;
  339. data1 |= 0x00000100u;
  340. break;
  341. case 6:
  342. data1 |= 0x00000040u;
  343. data1 |= 0x00000080u;
  344. //data1 |= 0x00000100u;
  345. break;
  346. }
  347. data1 |= (!_isProtrude2) ? 0x00000200u : 0x0;
  348. return data1;
  349. }
  350. private uint GetLP3Data1()
  351. {
  352. uint data1 = 0x0u;
  353. data1 |= (_isPlaced ? 0x00000001u : 0x0);
  354. data1 |= (!_isPlaced ? 0x00000002u : 0x0);
  355. switch (WaferSize)
  356. {
  357. case 3:
  358. //data1 |= 0x00000040u;
  359. data1 |= 0x00000080u;
  360. data1 |= 0x00000100u;
  361. break;
  362. case 4:
  363. data1 |= 0x00000040u;
  364. //data1 |= 0x00000080u;
  365. data1 |= 0x00000100u;
  366. break;
  367. case 6:
  368. data1 |= 0x00000040u;
  369. data1 |= 0x00000080u;
  370. //data1 |= 0x00000100u;
  371. break;
  372. }
  373. data1 |= (!_isProtrude3) ? 0x00000200u : 0x0;
  374. return data1;
  375. }
  376. private uint GetSystemData1()
  377. {
  378. uint data1 = 0x0u;
  379. //0:
  380. data1 |= (!_isVacuumError ? 0x00000001u : 0x0);
  381. //3:
  382. data1 |= (!_isAirError ? 0x00000004u : 0x0);
  383. //4 Flow gauge Sensor Warning
  384. data1 |= (_isFlowError ? 0x00000010u : 0x0);
  385. //5 Leakage Sensor Warning
  386. data1 |= (_isLeak ? 0x00000020u : 0x0);
  387. //6:Door switch Door close
  388. data1 |= (!_isMaintainDoorOpen ? 0x00000040u : 0x0);
  389. //7 Drive power Normal
  390. data1 |= 0x00000080u;
  391. //8 Differential pressure sensor setting 1 Normal
  392. data1 |= 0x00000100u;
  393. //9 Differential pressure sensor setting 1 Normal
  394. data1 |= 0x00000200u;
  395. //10 Ionizer alarm Normal
  396. data1 |= 0x00000400u;
  397. //11 FFU alarm Normal
  398. data1 |= 0x00000800u;
  399. //12 Area sensor(Reserved) Not blocked
  400. data1 |= 0x00001000u;
  401. //13 Mode switch RUN
  402. data1 |= (!_isMaintain ? 0x00002000u : 0x0);
  403. //14 Robot Wafer Present No presence
  404. data1 |= (!_isWaferPresent ? 0x00004000u : 0x0);
  405. //15 Cassette Door Door Closed
  406. data1 |= (!_isDoorOpen ? 0x00008000u : 0x0);
  407. return 65535;
  408. }
  409. }
  410. }