CyberX8/CyberX8_Simulator/Config/_ioDefineVenus_MF.xml

<?xml version='1.0'?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

	<!--文件根据210-0062-100-E01 20230527.xlsx生成-->
	<!--生成时间：06/02/2023 14:22:51-->
	<Dig_In>
		<DI_ITEM Index="0" Name="DI_TM_Power_On" Device="" Addr="w20.00" Note="1=OK，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="1" Name="" />
		<DI_ITEM Index="2" Name="DI_TM_In_Safety" Device="" Addr="w20.02" Note="1=OK，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="3" Name="DI_Water_Leak_Sensor" Device="" Addr="w20.03" Note="1=normal，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="4" Name="DI_TM_RB_Not_Extend_PMA" Device="" Addr="w20.04" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="5" Name="DI_TM_RB_Not_Extend_PMB" Device="" Addr="w20.05" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="6" Name="DI_TM_RB_Not_Extend_PMC" Device="" Addr="w20.06" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="7" Name="DI_TM_RB_Not_Extend_PMD" Device="" Addr="w20.07" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="8" Name="DI_TM_RB_Not_Extend_LLA" Device="" Addr="w20.08" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="9" Name="DI_TM_RB_Not_Extend_LLB" Device="" Addr="w20.09" Note="1=ON，0=OFF，Interlock-PLC" />
		<!--<DI_ITEM Index="10" Name="DI_TM_RB_In_Auto_Mode" Device="" Addr="w20.10" Note="1=ON，0=OFF，Interlock-PLC" />-->
		<DI_ITEM Index="11" Name="DI_EFEM_RB_Not_Extend_LLA" Device="" Addr="w20.11" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="12" Name="DI_EFEM_RB_Not_Extend_LLB" Device="" Addr="w20.12" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="13" Name="DI_EFEM_Side_Door_Closed" Device="" Addr="w20.13" Note="1=OK，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="14" Name="DI_TM_CHB_PCW_Flow_Switch" Device="" Addr="w20.14" Note="1=OK，0=Warning，Interlock-PLC" />
		<DI_ITEM Index="15" Name="DI_LLA_PCW_Flow_Switch" Device="" Addr="w20.15" Note="1=OK，0=Warning，Interlock-PLC" />
		<DI_ITEM Index="16" Name="DI_LLB_PCW_Flow_Switch" Device="" Addr="w21.00" Note="1=OK，0=Warning，Interlock-PLC" />
		<DI_ITEM Index="17" Name="DI_TM_CHB_Door_Closed" Device="" Addr="w21.01" Note="1=OK，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="18" Name="DI_TM_CHB_Door_Opened" Device="" Addr="w21.02" Note="1=ON，0=OFF" />
		<DI_ITEM Index="19" Name="DI_CDA_Pressure_Switch" Device="" Addr="w21.03" Note="1=OK，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="20" Name="DI_Vaccum_Pressure_Switch" Device="" Addr="w21.04" Note="1=OK，0=alarm，Interlock-PLC" />
		<DI_ITEM Index="21" Name="DI_N2_Pressure_Switch" Device="" Addr="w21.05" Note="1=OK，0=Alarm，Interlock-PLC" />
		<DI_ITEM Index="22" Name="DI_LLA_E_Slit_Door_open_Position" Device="" Addr="w21.06" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="23" Name="DI_LLA_E_Slit_Door_close_Position" Device="" Addr="w21.07" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="24" Name="DI_LLA_T_Slit_Door_open_Position" Device="" Addr="w21.08" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="25" Name="DI_LLA_T_Slit_Door_close_Position" Device="" Addr="w21.09" Note="1=ON，0=OFF，Interlock-PLC;" />
		<DI_ITEM Index="26" Name="DI_LLA_Lid_Door_Closed" Device="" Addr="w21.10" Note="1=ON，0=OFF，Interlock-PLC;信号ON时，EFEM ROB 和TM ROB可以去LLA取放片；" />
		<DI_ITEM Index="27" Name="DI_LLB_E_Slit_Door_open_Position" Device="" Addr="w21.11" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="28" Name="DI_LLB_E_Slit_Door_close_Position" Device="" Addr="w21.12" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="29" Name="DI_LLB_T_Slit_Door_open_Position" Device="" Addr="w21.13" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="30" Name="DI_LLB_T_Slit_Door_close_Position" Device="" Addr="w21.14" Note="1=ON，0=OFF，Interlock-PLC" />
		<DI_ITEM Index="31" Name="DI_LLB_Lid_Door_Closed" Device="" Addr="w21.15" Note="1=ON，0=OFF，Interlock-PLC信号ON时，EFEM ROB 和TM ROB可以去LLB取放片；" />
		<DI_ITEM Index="32" Name="DI_TM_VAC_Switch" Device="" Addr="w22.00" Note="1=ON，0=OFF，Interlock-PLC;信号ON时，PM可以开门；" />
		<DI_ITEM Index="33" Name="DI_TM_ATM_Switch" Device="" Addr="w22.01" Note="1=ON，0=OFF，Interlock-PLC;信号ON时，可以ATM功能；" />
		<DI_ITEM Index="34" Name="DI_LLA_VAC_Switch" Device="" Addr="w22.02" Note="1=ON，0=OFF，Interlock-PLC;信号ON时，LLA out door可以开门；" />
		<DI_ITEM Index="35" Name="DI_LLA_ATM_Switch" Device="" Addr="w22.03" Note="1=ON，0=OFF，Interlock-PLC;信号ON时，可以ATM功能；" />
		<DI_ITEM Index="36" Name="DI_LLB_VAC_Switch" Device="" Addr="w22.04" Note="1=OK，0=OFF，Interlock-PLC;信号ON时，LLBout door可以开门；" />
		<DI_ITEM Index="37" Name="DI_LLB_ATM_Switch" Device="" Addr="w22.05" Note="1=ON，0=OFF，Interlock-PLC;信号ON时，可以ATM功能；" />
		<DI_ITEM Index="38" Name="" />
		<DI_ITEM Index="39" Name="" />
		<DI_ITEM Index="40" Name="DI_LLA_Check_Sensor1" Device="" Addr="w22.08" />
		<DI_ITEM Index="41" Name="DI_LLA_Check_Sensor2" Device="" Addr="w22.09" />
		<DI_ITEM Index="42" Name="DI_LLA_Check_Sensor3" Device="" Addr="w22.10" />
		<DI_ITEM Index="43" Name="" />
		<DI_ITEM Index="44" Name="DI_PMA_Check_Sensor1" Device="" Addr="w22.12" />
		<DI_ITEM Index="45" Name="DI_PMA_Check_Sensor2" Device="" Addr="w22.13" />
		<DI_ITEM Index="46" Name="DI_PMA_Check_Sensor3" Device="" Addr="w22.14" />
		<DI_ITEM Index="47" Name="" />
		<DI_ITEM Index="48" Name="DI_PMB_Check_Sensor1" Device="" Addr="w23.00" />
		<DI_ITEM Index="49" Name="DI_PMB_Check_Sensor2" Device="" Addr="w23.01" />
		<DI_ITEM Index="50" Name="DI_PMB_Check_Sensor3" Device="" Addr="w23.02" />
		<DI_ITEM Index="51" Name="" />
		<DI_ITEM Index="52" Name="DI_LLB_Check_Sensor1" Device="" Addr="w23.04" />
		<DI_ITEM Index="53" Name="DI_LLB_Check_Sensor2" Device="" Addr="w23.05" />
		<DI_ITEM Index="54" Name="DI_LLB_Check_Sensor3" Device="" Addr="w23.06" />
		<DI_ITEM Index="55" Name="" />
		<DI_ITEM Index="56" Name="DI_PMC_Check_Sensor1" Device="" Addr="w23.08" />
		<DI_ITEM Index="57" Name="DI_PMC_Check_Sensor2" Device="" Addr="w23.09" />
		<DI_ITEM Index="58" Name="DI_PMC_Check_Sensor3" Device="" Addr="w23.10" />
		<DI_ITEM Index="59" Name="" />
		<DI_ITEM Index="60" Name="DI_PMD_Check_Sensor1" Device="" Addr="w23.12" />
		<DI_ITEM Index="61" Name="DI_PMD_Check_Sensor2" Device="" Addr="w23.13" />
		<DI_ITEM Index="62" Name="DI_PMD_Check_Sensor3" Device="" Addr="w23.14" />
		<DI_ITEM Index="63" Name="" />
		<DI_ITEM Index="64" Name="DI_TM_Chamber_VAC_Gauge_Alarm" Device="" Addr="w24.00" Note="0=OK，1=alarm" />
		<DI_ITEM Index="65" Name="DI_TM_Foreline_VAC_Gauge_Alarm" Device="" Addr="w24.01" Note="0=OK，1=alarm" />
		<DI_ITEM Index="66" Name="" />
		<DI_ITEM Index="67" Name="" />
		<DI_ITEM Index="68" Name="" />
		<DI_ITEM Index="69" Name="" />
		<DI_ITEM Index="70" Name="" />
		<DI_ITEM Index="71" Name="" />
		<DI_ITEM Index="72" Name="" />
		<DI_ITEM Index="73" Name="" />
		<DI_ITEM Index="74" Name="" />
		<DI_ITEM Index="75" Name="" />
		<DI_ITEM Index="76" Name="" />
		<DI_ITEM Index="77" Name="" />
		<DI_ITEM Index="78" Name="" />
		<DI_ITEM Index="79" Name="" />
		<DI_ITEM Index="80" Name="DI_LLA_Chamber_VAC_Gauge_Alarm" Device="" Addr="w25.00" Note="0=OK，1=alarm" />
		<DI_ITEM Index="81" Name="DI_LLA_Foreline_VAC_Gauge_Alarm" Device="" Addr="w25.01" Note="0=OK，1=alarm" />
		<DI_ITEM Index="82" Name="" />
		<DI_ITEM Index="83" Name="" />
		<DI_ITEM Index="84" Name="" />
		<DI_ITEM Index="85" Name="" />
		<DI_ITEM Index="86" Name="" />
		<DI_ITEM Index="87" Name="" />
		<DI_ITEM Index="88" Name="" />
		<DI_ITEM Index="89" Name="" />
		<DI_ITEM Index="90" Name="" />
		<DI_ITEM Index="91" Name="" />
		<DI_ITEM Index="92" Name="" />
		<DI_ITEM Index="93" Name="" />
		<DI_ITEM Index="94" Name="" />
		<DI_ITEM Index="95" Name="" />
		<DI_ITEM Index="96" Name="DI_LLB_Chamber_VAC_Gauge_Alarm" Device="" Addr="w26.00" Note="0=OK，1=alarm" />
		<DI_ITEM Index="97" Name="DI_LLB_Foreline_VAC_Gauge_Alarm" Device="" Addr="w26.01" Note="0=OK，1=alarm" />
		<DI_ITEM Index="98" Name="" />
		<DI_ITEM Index="99" Name="" />
		<DI_ITEM Index="100" Name="" />
		<DI_ITEM Index="101" Name="" />
		<DI_ITEM Index="102" Name="" />
		<DI_ITEM Index="103" Name="" />
		<DI_ITEM Index="104" Name="" />
		<DI_ITEM Index="105" Name="" />
		<DI_ITEM Index="106" Name="" />
		<DI_ITEM Index="107" Name="" />
		<DI_ITEM Index="108" Name="" />
		<DI_ITEM Index="109" Name="" />
		<DI_ITEM Index="110" Name="" />
		<DI_ITEM Index="111" Name="" />
	</Dig_In>
	<Dig_Out>
		<DO_ITEM Index="0" Name="DO_N2_Valve" Device="" Addr="w0.00" />
		<DO_ITEM Index="1" Name="DO_Soft_Pumping_Valve_TM" Device="" Addr="w0.01" />
		<DO_ITEM Index="2" Name="DO_Fast_Pumping_Valve_TM" Device="" Addr="w0.02" />
		<DO_ITEM Index="3" Name="DO_Purge_Valve_TM" Device="" Addr="w0.03" />
		<!--<DO_ITEM Index="4" Name="DO_Vent_Valve_TM" Device="" Addr="w0.04" />
		<DO_ITEM Index="5" Name="" Device="" Addr="w0.05" />-->
		<DO_ITEM Index="4" Name="DO_Vent_Valve_TM" Device="" Addr="w0.04" />
		<!--<DO_ITEM Index="5" Name="DO_Fast_Vent_Valve_TM" Device="" Addr="w0.05" />-->
		<DO_ITEM Index="6" Name="DO_Soft_Pumping_Valve_LLA" Device="" Addr="w0.06" />
		<DO_ITEM Index="7" Name="DO_Fast_Pumping_Valve_LLA" Device="" Addr="w0.07" />
		<DO_ITEM Index="8" Name="DO_Purge_Valve_LLA" Device="" Addr="w0.08" />
		<DO_ITEM Index="9" Name="DO_Vent_Valve_LLA" Device="" Addr="w0.09" />
		<DO_ITEM Index="10" Name="" Device="" Addr="w0.10" />
		<DO_ITEM Index="11" Name="DO_LLA_Slit_Door_E_Open" Device="" Addr="w0.11" />
		<DO_ITEM Index="12" Name="DO_LLA_Slit_Door_E_Close" Device="" Addr="w0.12" />
		<DO_ITEM Index="13" Name="DO_LLA_Slit_Door_T_Open" Device="" Addr="w0.13" />
		<DO_ITEM Index="14" Name="DO_LLA_Slit_Door_T_Close" Device="" Addr="w0.14" />
		<!--<DO_ITEM Index="15" Name="" Device="" Addr="w0.15" />-->
		<DO_ITEM Index="15" Name="DO_LLA_BIG_SMALL_SIZE_WAFER_CHECK" Device="" Addr="w0.15" />
		<DO_ITEM Index="16" Name="DO_Soft_Pumping_Valve_LLB" Device="" Addr="w1.00" />
		<DO_ITEM Index="17" Name="DO_Fast_Pumping_Valve_LLB" Device="" Addr="w1.01" />
		<DO_ITEM Index="18" Name="DO_Purge_Valve_LLB" Device="" Addr="w1.02" />
		<DO_ITEM Index="19" Name="DO_Vent_Valve_LLB" Device="" Addr="w1.03" />
		<DO_ITEM Index="20" Name="" Device="" Addr="w1.04" />
		<DO_ITEM Index="21" Name="DO_LLB_Slit_Door_E_Open" Device="" Addr="w1.05" />
		<DO_ITEM Index="22" Name="DO_LLB_Slit_Door_E_Close" Device="" Addr="w1.06" />
		<DO_ITEM Index="23" Name="DO_LLB_Slit_Door_T_Open" Device="" Addr="w1.07" />
		<DO_ITEM Index="24" Name="DO_LLB_Slit_Door_T_Close" Device="" Addr="w1.08" />
		<!--<DO_ITEM Index="25" Name="" Device="" Addr="w1.09" />-->
		<DO_ITEM Index="25" Name="DO_LLB_BIG_SMALL_SIZE_WAFER_CHECK" Device="" Addr="w1.09" />
		<DO_ITEM Index="26" Name="DO_Water_Valve_Relay" Device="" Addr="w1.10" Note="PC to PLC  w1.10  ON开启冷却水，DO-26在满足DI-03 ON条件下置ON。" />
		<DO_ITEM Index="27" Name="" Device="" Addr="w1.11" />
		<DO_ITEM Index="28" Name="DO_PMA_BIG_SMALL_SIZE_WAFER_CHECK" Device="" Addr="w1.12" Note="SMALL SIZE WAFER 置ON，BIG SIZE WAFER 置OFF."/>
		<DO_ITEM Index="29" Name="DO_PMB_BIG_SMALL_SIZE_WAFER_CHECK" Device="" Addr="w1.13" Note="SMALL SIZE WAFER 置ON，BIG SIZE WAFER 置OFF."/>
		<DO_ITEM Index="30" Name="DO_PMC_BIG_SMALL_SIZE_WAFER_CHECK" Device="" Addr="w1.14" Note="SMALL SIZE WAFER 置ON，BIG SIZE WAFER 置OFF."/>
		<DO_ITEM Index="31" Name="DO_PMD_BIG_SMALL_SIZE_WAFER_CHECK" Device="" Addr="w1.15" Note="SMALL SIZE WAFER 置ON，BIG SIZE WAFER 置OFF."/>
		<DO_ITEM Index="32" Name="" />
		<DO_ITEM Index="33" Name="" />
		<DO_ITEM Index="34" Name="" />
		<DO_ITEM Index="35" Name="" />
		<DO_ITEM Index="36" Name="" />
		<DO_ITEM Index="37" Name="" />
		<DO_ITEM Index="38" Name="" />
		<DO_ITEM Index="39" Name="" />
		<DO_ITEM Index="40" Name="" />
		<DO_ITEM Index="41" Name="" />
		<DO_ITEM Index="42" Name="" />
		<DO_ITEM Index="43" Name="" />
		<DO_ITEM Index="44" Name="" />
		<DO_ITEM Index="45" Name="" />
		<DO_ITEM Index="46" Name="" />
		<DO_ITEM Index="47" Name="" />
		<DO_ITEM Index="48" Name="" />
		<DO_ITEM Index="49" Name="" />
		<DO_ITEM Index="50" Name="" />
		<DO_ITEM Index="51" Name="" />
		<DO_ITEM Index="52" Name="" />
		<DO_ITEM Index="53" Name="" />
		<DO_ITEM Index="54" Name="" />
		<DO_ITEM Index="55" Name="" />
		<DO_ITEM Index="56" Name="" />
		<DO_ITEM Index="57" Name="" />
		<DO_ITEM Index="58" Name="" />
		<DO_ITEM Index="59" Name="" />
		<DO_ITEM Index="60" Name="" />
		<DO_ITEM Index="61" Name="" />
		<DO_ITEM Index="62" Name="" />
		<DO_ITEM Index="63" Name="" />
		<DO_ITEM Index="64" Name="DO_TM_MFC_FLOW_MODE_PRESSURE_MODE" Device="" Addr="w4.00" />
		<DO_ITEM Index="65" Name="" />
		<DO_ITEM Index="66" Name="" />
		<DO_ITEM Index="67" Name="" />
		<DO_ITEM Index="68" Name="" />
		<DO_ITEM Index="69" Name="" />
		<DO_ITEM Index="70" Name="" />
		<DO_ITEM Index="71" Name="" />
		<DO_ITEM Index="72" Name="DO_TM_VAC_ATM_MODE" Device="" Addr="w4.08" />
		<DO_ITEM Index="73" Name="" />
		<DO_ITEM Index="74" Name="" />
		<DO_ITEM Index="75" Name="" />
		<DO_ITEM Index="76" Name="" />
		<DO_ITEM Index="77" Name="" />
		<DO_ITEM Index="78" Name="" />
		<DO_ITEM Index="79" Name="" />
		<DO_ITEM Index="80" Name="" />
		<DO_ITEM Index="81" Name="" />
		<DO_ITEM Index="82" Name="" />
		<DO_ITEM Index="83" Name="" />
		<DO_ITEM Index="84" Name="" />
		<DO_ITEM Index="85" Name="" />
		<DO_ITEM Index="86" Name="" />
		<DO_ITEM Index="87" Name="" />
		<DO_ITEM Index="88" Name="" />
		<DO_ITEM Index="89" Name="" />
		<DO_ITEM Index="90" Name="" />
		<DO_ITEM Index="91" Name="" />
		<DO_ITEM Index="92" Name="" />
		<DO_ITEM Index="93" Name="" />
		<DO_ITEM Index="94" Name="" />
		<DO_ITEM Index="95" Name="" />
		<DO_ITEM Index="96" Name="" />
		<DO_ITEM Index="97" Name="" />
		<DO_ITEM Index="98" Name="" />
		<DO_ITEM Index="99" Name="" />
		<DO_ITEM Index="100" Name="" />
		<DO_ITEM Index="101" Name="" />
		<DO_ITEM Index="102" Name="" />
		<DO_ITEM Index="103" Name="" />
		<DO_ITEM Index="104" Name="" />
		<DO_ITEM Index="105" Name="" />
		<DO_ITEM Index="106" Name="" />
		<DO_ITEM Index="107" Name="" />
		<DO_ITEM Index="108" Name="" />
		<DO_ITEM Index="109" Name="" />
		<DO_ITEM Index="110" Name="" />
		<DO_ITEM Index="111" Name="" />
	</Dig_Out>
	<Ana_Out>
		<AO_ITEM Index="0" Name="" BufferOffset="0" />
		<AO_ITEM Index="1" Name="" BufferOffset="2"  />
		<AO_ITEM Index="2" Name="AO_TM_MFC1_Flow_Setpoint" BufferOffset="4" Device="" Addr="d1004" Note="MFC" />
		<AO_ITEM Index="3" Name="" BufferOffset="6" />
		<AO_ITEM Index="4" Name="" BufferOffset="8" />
		<AO_ITEM Index="5" Name="AO_TM_CHB_Pressure" BufferOffset="10" Device="" Addr="d1010" Note="TM CHB Pressure" />
		<AO_ITEM Index="6" Name="" BufferOffset="12" />
		<AO_ITEM Index="7" Name="" BufferOffset="14"  />
		<AO_ITEM Index="8" Name="AO_LLA_CHB_Pressure" BufferOffset="16" Device="" Addr="d1016" Note="LLA CHB Pressure"/>
		<AO_ITEM Index="9" Name="" BufferOffset="18" />
		<AO_ITEM Index="10" Name="" BufferOffset="20" />
		<AO_ITEM Index="11" Name="AO_LLB_CHB_Pressure" BufferOffset="22" Device="" Addr="d1022" Note="LLB CHB Pressure"  />
		<AO_ITEM Index="12" Name="" BufferOffset="24" />
		<AO_ITEM Index="13" Name="" BufferOffset="26" />
		<AO_ITEM Index="14" Name="" BufferOffset="28" />
		<AO_ITEM Index="15" Name="" BufferOffset="30" />
		<AO_ITEM Index="16" Name="" BufferOffset="32" />
		<AO_ITEM Index="17" Name="" BufferOffset="34" />
		<AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="36" Device="" Addr="d1036" Note="From PC to PLC" />
		<AO_ITEM Index="19" Name="" BufferOffset="38" />
		<AO_ITEM Index="20" Name="" BufferOffset="40" />
		<AO_ITEM Index="21" Name="" />
		<AO_ITEM Index="22" Name="" />
		<AO_ITEM Index="23" Name="" />
		<AO_ITEM Index="24" Name="" />
		<AO_ITEM Index="25" Name="" />
		<AO_ITEM Index="26" Name="" />
		<AO_ITEM Index="27" Name="" />
		<AO_ITEM Index="28" Name="" />
		<AO_ITEM Index="29" Name="" />
		<AO_ITEM Index="30" Name="" />
		<AO_ITEM Index="31" Name="" />
		<AO_ITEM Index="32" Name="" />
		<AO_ITEM Index="33" Name="" />
		<AO_ITEM Index="34" Name="" />
		<AO_ITEM Index="35" Name="" />
		<AO_ITEM Index="36" Name="" />
		<AO_ITEM Index="37" Name="" />
		<AO_ITEM Index="38" Name="" />
		<AO_ITEM Index="39" Name="" />
		<AO_ITEM Index="40" Name="" />
		<AO_ITEM Index="41" Name="" />
		<AO_ITEM Index="42" Name="" />
		<AO_ITEM Index="43" Name="" />
		<AO_ITEM Index="44" Name="" />
		<AO_ITEM Index="45" Name="" />
		<AO_ITEM Index="46" Name="" />
		<AO_ITEM Index="47" Name="" />
		<AO_ITEM Index="48" Name="" />
		<AO_ITEM Index="49" Name="" />
	</Ana_Out>
	<Ana_In>
		<AI_ITEM Index="0" Name="AI_TM_CHB_Pressure"  BufferOffset="0" Device="" Addr="d2000" />
		<AI_ITEM Index="1" Name="AI_TM_Foreline_Pressure"  BufferOffset="2" Device="" Addr="d2002" />
		<AI_ITEM Index="2" Name="" />
		<AI_ITEM Index="3" Name="" />
		<AI_ITEM Index="4" Name="" />
		<AI_ITEM Index="5" Name="AI_LLA_CHB_Pressure" BufferOffset="10"  Device="" Addr="d2010" />
		<AI_ITEM Index="6" Name="AI_LLA_LLB_Foreline_Pressure"  BufferOffset="12" Device="" Addr="d2012" />
		<AI_ITEM Index="7" Name="" />
		<AI_ITEM Index="8" Name="" />
		<AI_ITEM Index="9" Name="" />
		<AI_ITEM Index="10" Name="AI_LLB_CHB_Pressure"  BufferOffset="20" Device="" Addr="d2020" />
		<AI_ITEM Index="11" Name="" />
		<AI_ITEM Index="12" Name="" />
		<AI_ITEM Index="13" Name="" />
		<AI_ITEM Index="14" Name="" />
		<AI_ITEM Index="15" Name="AI_TM_MFC1_Flow"  BufferOffset="30" Device="" Addr="d2030" Note="MFC" />
		<AI_ITEM Index="16" Name="" />
		<AI_ITEM Index="17" Name="" />
		<AI_ITEM Index="18" Name="AI_Heartbeat_FB"  BufferOffset="36" Device="" Addr="d2036" Note="From PLC to PC" />
		<AI_ITEM Index="19" Name="" />
		<AI_ITEM Index="20" Name="" />
		<AI_ITEM Index="21" Name="AI_Second"  BufferOffset="42" Device="" Addr="d2042" />
		<AI_ITEM Index="22" Name="AI_Minute" BufferOffset="44"  Device="" Addr="d2044" />
		<AI_ITEM Index="23" Name="AI_Time"  BufferOffset="46" Device="" Addr="d2046" />
		<AI_ITEM Index="24" Name="AI_Day"  BufferOffset="48" Device="" Addr="d2048" />
		<AI_ITEM Index="25" Name="AI_Month"  BufferOffset="50" Device="" Addr="d2050" />
		<AI_ITEM Index="26" Name="AI_Year"  BufferOffset="52" Device="" Addr="d2052" />
		<AI_ITEM Index="27" Name="" />
		<AI_ITEM Index="28" Name="" />
		<AI_ITEM Index="29" Name="" />
		<AI_ITEM Index="30" Name="" />
		<AI_ITEM Index="31" Name="" />
		<AI_ITEM Index="32" Name="" />
		<AI_ITEM Index="33" Name="" />
		<AI_ITEM Index="34" Name="" />
		<AI_ITEM Index="35" Name="" />
		<AI_ITEM Index="36" Name="" />
		<AI_ITEM Index="37" Name="" />
		<AI_ITEM Index="38" Name="" />
		<AI_ITEM Index="39" Name="" />
		<AI_ITEM Index="40" Name="" />
		<AI_ITEM Index="41" Name="" />
		<AI_ITEM Index="42" Name="" />
		<AI_ITEM Index="43" Name="" />
		<AI_ITEM Index="44" Name="" />
		<AI_ITEM Index="45" Name="" />
		<AI_ITEM Index="46" Name="" />
		<AI_ITEM Index="47" Name="" />
		<AI_ITEM Index="48" Name="" />
		<AI_ITEM Index="49" Name="" />
	</Ana_In>
</IO_DEFINE>