CyberX8/CyberX8_Simulator/Config/_ioDefineVenusSE.xml

<?xml version="1.0"?>
<IO_DEFINE xmlns:xsi='http://www.w3.org/2001/XMLSchema-instance' xmlns:xsd='http://www.w3.org/2001/XMLSchema'>

  <!--文件根据IO LIST_PM_VNS_SE 20230905.xlsx生成-->
  <!--生成时间：09/06/2023 10:44:54-->
  <Dig_In>
    <DI_ITEM Index="0"   Name="DI_Lid_Closed" Device="" Addr="w20.00" />
    <DI_ITEM Index="1"   Name="DI_ATM_Switch" Device="ATM_SW" Addr="w20.01" />
    <DI_ITEM Index="2"   Name="DI_PM_VAC_Switch" Device="" Addr="w20.02" />
    <DI_ITEM Index="3"   Name="DI_ESC_Coolant_Flow_SW" Device="" Addr="w20.03" />
    <DI_ITEM Index="4"   Name="DI_Water_Leak_Sensor" Device="" Addr="w20.04" />
    <DI_ITEM Index="5"   Name="DI_Lift_Pin_Up_POS" Device="" Addr="w20.05" />
    <DI_ITEM Index="6"   Name="DI_Lift_Pin_Down_POS" Device="" Addr="w20.06" />
    <DI_ITEM Index="7"   Name="DI_RF_HV_Interlock_OK" Device="Lid_VAC_Slit_Door_MATCH_INT_OK." Addr="w20.07" />
    <DI_ITEM Index="8"   Name="" />
    <DI_ITEM Index="9"   Name="DI_Turbo_Pump_Interlock" Device="Q7.12同步" Addr="w20.09" />
    <DI_ITEM Index="10"  Name="" />
    <DI_ITEM Index="11"  Name="" />
    <DI_ITEM Index="12"  Name="DI_CDA_Pressure_Switch" Device="" Addr="w20.12" />
    <DI_ITEM Index="13"  Name="DI_Coolant_Inlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.13" />
    <DI_ITEM Index="14"  Name="DI_Coolant_Outlet_TC_Broken_Alarm" Device="TC模块信号" Addr="w20.14" />
    <DI_ITEM Index="15"  Name="DI_Chamber_Pressure_10t_Gauge_Alarm" Device="VG_PPH_真空值比较" Addr="w20.15" />
    <DI_ITEM Index="16"  Name="DI_Process_Pressure_100mt_Gauge_Alarm" Device="VG PPL" Addr="w21.00" />
    <DI_ITEM Index="17"  Name="" />
    <DI_ITEM Index="18"  Name="DI_Foreline_Pressure_10t_Gauge_Alarm" Device="TC模块信号" Addr="w21.02" />
    <DI_ITEM Index="19"  Name="" />
    <DI_ITEM Index="20"  Name="" />
    <DI_ITEM Index="21"  Name="DI_Valve_Control_TC_Broken_Alarm" Device="" Addr="w21.05" />
    <DI_ITEM Index="22"  Name="" />
    <DI_ITEM Index="23"  Name="DI_Valve_Heater_On_FB" Device="Q7.13同步" Addr="w21.07" />
    <DI_ITEM Index="24"  Name="" />
    <DI_ITEM Index="25"  Name="DI_Foreline_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.09" />
    <DI_ITEM Index="26"  Name="" />
    <DI_ITEM Index="27"  Name="DI_Foreline_Heater_On_FB" Device="Q7.14同步" Addr="w21.11" />
    <DI_ITEM Index="28"  Name="DI_CHB_Wall_TC_Deviation_out_of_range" Device="值比较" Addr="w21.12" />
    <DI_ITEM Index="29"  Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.13" />
    <DI_ITEM Index="30"  Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Device="TC模块信号" Addr="w21.14" />
    <DI_ITEM Index="31"  Name="DI_CHB_Wall_Heater_On_FB" Device="Q7.15同步" Addr="w21.15" />
    <DI_ITEM Index="32"  Name="DI_CHB_Wall_OT_Switch_Alarm" Device="" Addr="w22.00" />
    <DI_ITEM Index="33"  Name=""/>
    <DI_ITEM Index="34"  Name="DI_PN2_Pressure_Switch" Device="PGN2" Addr="w22.02" Note="Gas Box" />
    <DI_ITEM Index="35"  Name="DI_MFC1_Pressure_Switch" Device="PG1" Addr="w22.03" Note="Gas Box" />
    <DI_ITEM Index="36"  Name="DI_MFC2_Pressure_Switch" Device="PG2" Addr="w22.04" Note="Gas Box" />
    <DI_ITEM Index="37"  Name="DI_MFC3_Pressure_Switch" Device="PG3" Addr="w22.05" Note="Gas Box" />
    <DI_ITEM Index="38"  Name="DI_MFC4_Pressure_Switch" Device="PG4" Addr="w22.06" Note="Gas Box" />
    <DI_ITEM Index="39"  Name="DI_MFC5_Pressure_Switch" Device="PG5" Addr="w22.07" Note="Gas Box" />
    <DI_ITEM Index="40"  Name="DI_MFC6_Pressure_Switch" Device="PG6" Addr="w22.08" Note="Gas Box" />
    <DI_ITEM Index="41"  Name="DI_MFC7_Pressure_Switch" Device="PG7" Addr="w22.09" Note="Gas Box" />
    <DI_ITEM Index="42"  Name="DI_MFC8_Pressure_Switch" Device="PG8" Addr="w22.10" Note="Gas Box" />
    <DI_ITEM Index="43"  Name="DI_He_Pressure_Switch" Device="PGHe" Addr="w22.11" Note="Gas Box" />
    <DI_ITEM Index="44"  Name="DI_ESC_He_Pressure_100t_Gauge_Alarm" Device="PGHe" Addr="w22.12" Note=""/>
    <DI_ITEM Index="45"  Name="" />
    <DI_ITEM Index="46"  Name="" />
    <DI_ITEM Index="47"  Name="" />
    <DI_ITEM Index="48"  Name="" />
    <DI_ITEM Index="49"  Name="" />
    <DI_ITEM Index="50"  Name="" />
    <DI_ITEM Index="51"  Name="DI_Gas_Box_Door_Switch" Device="" Addr="w23.03" />
    <DI_ITEM Index="52"  Name="DI_Gas_Box_Pressure_Switch" Device="" Addr="w23.04" />
    <DI_ITEM Index="53"  Name="DI_Turbo_Pump_Water_Flow_Switch" Device="" Addr="w23.05" />
    <DI_ITEM Index="54"  Name="" />
    <DI_ITEM Index="55"  Name="DI_SOURCE_RF_Water_Flow_Switch" Device="" Addr="w23.07" />
    <DI_ITEM Index="56"  Name="" />
    <DI_ITEM Index="57"  Name="" />
    <DI_ITEM Index="58"  Name="DI_TM_ROB_NOT_EXTEND_TO_PM" Device="" Addr="w23.10"/>
    <DI_ITEM Index="59"  Name="DI_TM_Slit_Door_Closed" Device="" Addr="w23.11" />
    <DI_ITEM Index="60"  Name="" />
    <DI_ITEM Index="61"  Name="" />
    <DI_ITEM Index="62"  Name="DI_Source_Match_interlock_ok" Device="" Addr="w23.14" />
    <DI_ITEM Index="63"  Name="DI_Bias_Match_interlock_ok" Device="" Addr="w23.15" />
    <DI_ITEM Index="64"  Name="" />
    <DI_ITEM Index="65"  Name="" />
    <DI_ITEM Index="66"  Name="DI_MFC9_Pressure_Switch" Device="PG9" Addr="w24.02" Note="Gas Box" />
    <DI_ITEM Index="67"  Name="DI_MFC10_Pressure_Switch" Device="PG10" Addr="w24.03" Note="Gas Box" />
    <DI_ITEM Index="68"  Name="DI_MFC11_Pressure_Switch" Device="PG11_SPARE_" Addr="w24.04" Note="Gas Box" />
    <DI_ITEM Index="69"  Name="DI_MFC12_Pressure_Switch" Device="PG12" Addr="w24.05" Note="Gas Box" />
    <DI_ITEM Index="70"  Name="" />
    <DI_ITEM Index="71"  Name="" />
    <DI_ITEM Index="72"  Name="" />
    <DI_ITEM Index="73"  Name="" />
    <DI_ITEM Index="74"  Name="DI_GASLINE_TC_Deviation_out_of_range" Device="" Addr="w24.10"/>
    <DI_ITEM Index="75"  Name="DI_GASLINE_Control_TC_Broken_Alarm" Device="" Addr="w24.11"/>
    <DI_ITEM Index="76"  Name="DI_GASLINE_Monitor_TC_Broken_Alarm" Device="" Addr="w24.12"/>
    <DI_ITEM Index="77"  Name="DI_GASLINE_Heater_On_FB" Device="" Addr="w24.13"/>
    <DI_ITEM Index="78"  Name="" />
    <DI_ITEM Index="79"  Name="" />
    <DI_ITEM Index="80"  Name="DI_CTRL_BOX_1#FAN_OK" Device="" Addr="w25.00" />
    <DI_ITEM Index="81"  Name="DI_CTRL_BOX_2#FAN_OK" Device="" Addr="w25.01"/>
    <DI_ITEM Index="82"  Name="DI_POWER_BOX_FAN_OK" Device="" Addr="w25.02"/>
    <DI_ITEM Index="83"  Name="" />
    <DI_ITEM Index="84"  Name="" />
    <DI_ITEM Index="85"  Name="" />
    <DI_ITEM Index="86"  Name="" />
    <DI_ITEM Index="87"  Name="" />
    <DI_ITEM Index="88"  Name="" />
    <DI_ITEM Index="89"  Name="" />
    <DI_ITEM Index="90"  Name="" />
    <DI_ITEM Index="91"  Name="" />
    <DI_ITEM Index="92"  Name="" />
    <DI_ITEM Index="93"  Name="" />
    <DI_ITEM Index="94"  Name="" />
    <DI_ITEM Index="95"  Name="" />
    <DI_ITEM Index="96"  Name="" />
    <DI_ITEM Index="97"  Name="" />
    <DI_ITEM Index="98"  Name="" />
    <DI_ITEM Index="99"  Name="" />
    <DI_ITEM Index="100" Name="" />
    <DI_ITEM Index="101" Name="" />
    <DI_ITEM Index="102" Name="" />
    <DI_ITEM Index="103" Name="" />
    <DI_ITEM Index="104" Name="" />
    <DI_ITEM Index="105" Name="" />
    <DI_ITEM Index="106" Name="" />
    <DI_ITEM Index="107" Name="" />
    <DI_ITEM Index="108" Name="" />
    <DI_ITEM Index="109" Name="" />
    <DI_ITEM Index="110" Name="" />
    <DI_ITEM Index="111" Name="" />
  </Dig_In>
  <Dig_Out>
    <DO_ITEM Index="0" Name="DO_PVN21" Device="GPVN21" Addr="w0.00" Note="Gas Box" />
    <DO_ITEM Index="1" Name="DO_PVN22" Device="GPVN22" Addr="w0.01" Note="Gas Box" />
    <DO_ITEM Index="2" Name="DO_PV11" Device="GPV11" Addr="w0.02" Note="Gas Box" />
    <DO_ITEM Index="3" Name="DO_PV12" Device="GPV12" Addr="w0.03" Note="Gas Box" />
    <DO_ITEM Index="4" Name="DO_PV21" Device="GPV21" Addr="w0.04" Note="Gas Box" />
    <DO_ITEM Index="5" Name="DO_PV22" Device="GPV22" Addr="w0.05" Note="Gas Box" />
    <DO_ITEM Index="6" Name="DO_PV31" Device="GPV31" Addr="w0.06" Note="Gas Box" />
    <DO_ITEM Index="7" Name="DO_PV32" Device="GPV32" Addr="w0.07" Note="Gas Box" />
    <DO_ITEM Index="8" Name="DO_PV41" Device="GPV41" Addr="w0.08" Note="Gas Box" />
    <DO_ITEM Index="9" Name="DO_PV42" Device="GPV42" Addr="w0.09" Note="Gas Box" />
    <DO_ITEM Index="10" Name="DO_N2_Valve" Device="GPVN2" Addr="w0.10" Note="Gas Box" />
    <DO_ITEM Index="11" Name="DO_MFC1_Valve" Device="GPV1" Addr="w0.11" Note="Gas Box" />
    <DO_ITEM Index="12" Name="DO_MFC2_Valve" Device="GPV2" Addr="w0.12" Note="Gas Box" />
    <DO_ITEM Index="13" Name="DO_MFC3_Valve" Device="GPV3" Addr="w0.13" Note="Gas Box" />
    <DO_ITEM Index="14" Name="DO_MFC4_Valve" Device="GPV4" Addr="w0.14" Note="Gas Box" />
    <DO_ITEM Index="15" Name="DO_MFC5_Valve" Device="GPV5" Addr="w0.15" Note="Gas Box" />
    <DO_ITEM Index="16" Name="DO_MFC6_Valve" Device="GPV6" Addr="w1.00" Note="Gas Box" />
    <DO_ITEM Index="17" Name="DO_MFC7_Valve" Device="GPV7" Addr="w1.01" Note="Gas Box" />
    <DO_ITEM Index="18" Name="DO_MFC8_Valve" Device="GPV8" Addr="w1.02" Note="Gas Box" />
    <DO_ITEM Index="19" Name="DO_PVHe1" Device="GPVHe1" Addr="w1.03" />
    <DO_ITEM Index="20" Name="DO_PVHe2" Device="GPVHe2" Addr="w1.04" />
    <DO_ITEM Index="21" Name="DO_Gas_Final_Valve" Device="PV1" Addr="w1.05" />
    <DO_ITEM Index="22" Name="DO_Soft_Pumping_Valve" Device="PV2" Addr="w1.06" />
    <DO_ITEM Index="23" Name="DO_Fast_Pumping_Valve" Device="PV3" Addr="w1.07" />
    <DO_ITEM Index="24" Name=""/>
    <DO_ITEM Index="25" Name=""/>
    <DO_ITEM Index="26" Name="DO_Lift_Pin_Up" Device="PV5" Addr="w1.10" />
    <DO_ITEM Index="27" Name="DO_Lift_Pin_Down" Device="PV5" Addr="w1.11" />
    <DO_ITEM Index="28" Name="" />
    <DO_ITEM Index="29" Name="DO_Turbo_Pump_Pumping_Valve" Device="PV6" Addr="w1.13" />
    <DO_ITEM Index="30" Name="DO_Turbo_Pump_Purge_Valve" Device="PV7" Addr="w1.14" />
    <DO_ITEM Index="31" Name="DO_Gauge_Valve" Device="PV8" Addr="w1.15" />
    <DO_ITEM Index="32" Name="DO_Reset_Signal" Device="" Addr="w2.00" />
    <DO_ITEM Index="33" Name="DO_Valve_Heater_On" Device="" Addr="w2.01" />
    <DO_ITEM Index="34" Name="DO_Foreline_Heater_On" Device="" Addr="w2.02" />
    <DO_ITEM Index="35" Name="DO_CHB_Wall_Heater_On" Device="" Addr="w2.03" />
    <DO_ITEM Index="36" Name=""/>
    <DO_ITEM Index="37" Name=""/>
    <DO_ITEM Index="38" Name=""/>
    <DO_ITEM Index="39" Name=""/>
    <DO_ITEM Index="40" Name=""/>
    <DO_ITEM Index="41" Name=""/>
    <DO_ITEM Index="42" Name=""/>
    <DO_ITEM Index="43" Name=""/>
    <DO_ITEM Index="44" Name=""/>
    <DO_ITEM Index="45" Name=""/>
    <DO_ITEM Index="46" Name="DO_Gasline_Heater_On" Device="" Addr="w2.14" />
    <DO_ITEM Index="47" Name="DO_Slit_Door_Open_Enable" Device="" Addr="w2.15"/>
    <DO_ITEM Index="48" Name="DO_PVHe3" Device="GPVHe3" Addr="w3.00" />
    <DO_ITEM Index="49" Name="DO_He_ISO" Device="PV9" Addr="w3.01" />
    <DO_ITEM Index="50" Name="" />
    <DO_ITEM Index="51" Name="" />
    <DO_ITEM Index="52" Name="DO_MFC9_Valve" Device="GPV9" Addr="w3.04" />
    <DO_ITEM Index="53" Name="DO_MFC10_Valve" Device="GPV10" Addr="w3.05" />
    <DO_ITEM Index="54" Name="DO_MFC11_Valve" Device="GPV11" Addr="w3.06" />
    <DO_ITEM Index="55" Name="DO_MFC12_Valve" Device="GPV12" Addr="w3.07" />
    <DO_ITEM Index="56" Name="DO_Main_Purge_Valve" Device="GPVM" Addr="w3.08" />
    <DO_ITEM Index="57" Name="DO_PV51" Device="GPV51" Addr="w3.09" />
    <DO_ITEM Index="58" Name="DO_PV52" Device="GPV52" Addr="w3.10" />
    <DO_ITEM Index="59" Name="DO_PV61" Device="GPV61" Addr="w3.11" />
    <DO_ITEM Index="60" Name="DO_PV62" Device="GPV62" Addr="w3.12" />
    <DO_ITEM Index="61" Name="DO_PV71" Device="GPV71" Addr="w3.13" />
    <DO_ITEM Index="62" Name="DO_PV72" Device="GPV72" Addr="w3.14" />
    <DO_ITEM Index="63" Name="DO_PV81" Device="GPV81" Addr="w3.15" />
    <DO_ITEM Index="64" Name="DO_PV82" Device="GPV82" Addr="w4.00" />
    <DO_ITEM Index="65" Name="DO_PV91" Device="GPV91" Addr="w4.01" />
    <DO_ITEM Index="66" Name="DO_PV92" Device="GPV92" Addr="w4.02" />
    <DO_ITEM Index="67" Name="DO_PVA1" Device="GPVA1" Addr="w4.03" />
    <DO_ITEM Index="68" Name="DO_PVA2" Device="GPVA2" Addr="w4.04" />
    <DO_ITEM Index="69" Name="DO_PVB1" Device="GPVB1" Addr="w4.05" />
    <DO_ITEM Index="70" Name="DO_PVB2" Device="GPVB2" Addr="w4.06" />
    <DO_ITEM Index="71" Name="DO_PVC1" Device="GPVC1" Addr="w4.07" />
    <DO_ITEM Index="72" Name="DO_PVC2" Device="GPVC2" Addr="w4.08" />
    <DO_ITEM Index="73" Name="" />
    <DO_ITEM Index="74" Name="" />
    <DO_ITEM Index="75" Name="" />
    <DO_ITEM Index="76" Name="" />
    <DO_ITEM Index="77" Name="" />
    <DO_ITEM Index="78" Name="" />
    <DO_ITEM Index="79" Name="" />
    <DO_ITEM Index="80" Name="" />
    <DO_ITEM Index="81" Name="" />
    <DO_ITEM Index="82" Name="" />
    <DO_ITEM Index="83" Name="" />
    <DO_ITEM Index="84" Name="" />
    <DO_ITEM Index="85" Name="" />
    <DO_ITEM Index="86" Name="" />
    <DO_ITEM Index="87" Name="" />
    <DO_ITEM Index="88" Name="" />
    <DO_ITEM Index="89" Name="" />
    <DO_ITEM Index="90" Name="" />
    <DO_ITEM Index="91" Name="" />
    <DO_ITEM Index="92" Name="" />
    <DO_ITEM Index="93" Name="" />
    <DO_ITEM Index="94" Name="" />
    <DO_ITEM Index="95" Name="" />
    <DO_ITEM Index="96" Name="" />
    <DO_ITEM Index="97" Name="" />
    <DO_ITEM Index="98" Name="" />
    <DO_ITEM Index="99" Name="" />
    <DO_ITEM Index="100" Name="" />
    <DO_ITEM Index="101" Name="" />
    <DO_ITEM Index="102" Name="" />
    <DO_ITEM Index="103" Name="" />
    <DO_ITEM Index="104" Name="" />
    <DO_ITEM Index="105" Name="" />
    <DO_ITEM Index="106" Name="" />
    <DO_ITEM Index="107" Name="" />
    <DO_ITEM Index="108" Name="" />
    <DO_ITEM Index="109" Name="" />
    <DO_ITEM Index="110" Name="" />
    <DO_ITEM Index="111" Name="" />
  </Dig_Out>
  <Ana_Out>
    <AO_ITEM Index="0"  Name="AO_MFC1_Flow_Setpoint" Device="" Addr="d1000" Note="MFC" />
    <AO_ITEM Index="1"  Name="AO_MFC2_Flow_Setpoint" Device="" Addr="d1002" Note="MFC" />
    <AO_ITEM Index="2"  Name="AO_MFC3_Flow_Setpoint" Device="" Addr="d1004" Note="MFC" />
    <AO_ITEM Index="3"  Name="AO_MFC4_Flow_Setpoint" Device="" Addr="d1006" Note="MFC" />
    <AO_ITEM Index="4"  Name="AO_MFC5_Flow_Setpoint" Device="" Addr="d1008" Note="MFC" />
    <AO_ITEM Index="5"  Name="AO_MFC6_Flow_Setpoint" Device="" Addr="d1010" Note="MFC" />
    <AO_ITEM Index="6"  Name="AO_MFC7_Flow_Setpoint" Device="" Addr="d1012" Note="MFC" />
    <AO_ITEM Index="7"  Name="AO_MFC8_Flow_Setpoint" Device="" Addr="d1014" Note="MFC" />
    <AO_ITEM Index="8"  Name=""  />
    <AO_ITEM Index="9"  Name=""/>
    <AO_ITEM Index="10" Name="AO_Valve_Temperature_Setpoint" Device="" Addr="d1020" Note="阀门加热设定温度" />
    <AO_ITEM Index="11" Name="AO_Valve_Temp_Limit_Setpoint" Device="" Addr="d1022" Note="Temp Limit" />
    <AO_ITEM Index="12" Name="AO_Foreline_Temperature_Setpoint" Device="" Addr="d1024" Note="前级管道设定温度" />
    <AO_ITEM Index="13" Name="AO_Foreline_Temp_Limit_Setpoint" Device="" Addr="d1026" Note="Temp Limit" />
    <AO_ITEM Index="14" Name="AO_CHB_Wall_Temperature_Setpoint" Device="" Addr="d1028" Note="腔体壁设定温度" />
    <AO_ITEM Index="15" Name="AO_CHB_Wall_Temp_Limit_Setpoint" Device="" Addr="d1030" Note="Temp Limit" />
    <AO_ITEM Index="16" Name="AO_Heartbeat" Device="" Addr="d1032" Note="PC to PLC" />
    <AO_ITEM Index="17" Name=""/>
    <AO_ITEM Index="18" Name=""/>
    <AO_ITEM Index="19" Name="" />
    <AO_ITEM Index="20" Name="" />
    <AO_ITEM Index="21" Name="" />
    <AO_ITEM Index="22" Name="" />
    <AO_ITEM Index="23" Name="" />
    <AO_ITEM Index="24" Name="" />
    <AO_ITEM Index="25" Name="AO_MFC9_Flow_Setpoint" Device="" Addr="d1050" Note="MFC" />
    <AO_ITEM Index="26" Name="AO_MFC10_Flow_Setpoint" Device="" Addr="d1052" Note="MFC" />
    <AO_ITEM Index="27" Name="AO_MFC11_Flow_Setpoint" Device="" Addr="d1054" Note="MFC" />
    <AO_ITEM Index="28" Name="AO_MFC12_Flow_Setpoint" Device="" Addr="d1056" Note="MFC" />
    <AO_ITEM Index="29" Name="" />
    <AO_ITEM Index="30" Name="AO_GASLINE_Temperature_Setpoint" Device="" Addr="d1060" Note="GASLINE 加热设定温度" />
    <AO_ITEM Index="31" Name="AO_GASLINE_Temp_Limit_Setpoint" Device="" Addr="d1062" Note="Temp Limit" />
    <AO_ITEM Index="32" Name="" />
    <AO_ITEM Index="33" Name="" />
    <AO_ITEM Index="34" Name="" />
    <AO_ITEM Index="35" Name="" />
    <AO_ITEM Index="36" Name="" />
    <AO_ITEM Index="37" Name="" />
    <AO_ITEM Index="38" Name="" />
    <AO_ITEM Index="39" Name="" />
    <AO_ITEM Index="40" Name="" />
    <AO_ITEM Index="41" Name="" />
    <AO_ITEM Index="42" Name="" />
    <AO_ITEM Index="43" Name="" />
    <AO_ITEM Index="44" Name="" />
    <AO_ITEM Index="45" Name="" />
    <AO_ITEM Index="46" Name="" />
    <AO_ITEM Index="47" Name="" />
    <AO_ITEM Index="48" Name="" />
    <AO_ITEM Index="49" Name="" />
  </Ana_Out>
  <Ana_In>
    <AI_ITEM Index="0"  Name="AI_Chamber_Pressure_10t" Device="" Addr="d2000" Note="float" />
    <AI_ITEM Index="1"  Name="AI_Process_Pressure_100mt" Device="" Addr="d2002" />
    <AI_ITEM Index="2"  Name="AI_Foreline_Pressure_10t" Device="" Addr="d2004" Note="float" />
    <AI_ITEM Index="3"  Name="AI_He_Pressure_100t" Device="" Addr="d2006" Note="float" />
    <AI_ITEM Index="4"  Name="AI_MFC1_Flow" Device="" Addr="d2008" Note="float" />
    <AI_ITEM Index="5"  Name="AI_MFC2_Flow" Device="" Addr="d2010" Note="float" />
    <AI_ITEM Index="6"  Name="AI_MFC3_Flow" Device="" Addr="d2012" Note="float" />
    <AI_ITEM Index="7"  Name="AI_MFC4_Flow" Device="" Addr="d2014" Note="float" />
    <AI_ITEM Index="8"  Name="AI_MFC5_Flow" Device="" Addr="d2016" Note="float" />
    <AI_ITEM Index="9"  Name="AI_MFC6_Flow" Device="" Addr="d2018" Note="float" />
    <AI_ITEM Index="10" Name="AI_MFC7_Flow" Device="" Addr="d2020" Note="float" />
    <AI_ITEM Index="11" Name="AI_MFC8_Flow" Device="" Addr="d2022" Note="float" />
    <AI_ITEM Index="12" Name="AI_He_Flow" Device="" Addr="d2024" Note="float" />
    <AI_ITEM Index="13" />
    <AI_ITEM Index="14" Name="AI_Valve_Control_TC_Temp" Device="" Addr="d2028" Note="float" />
    <AI_ITEM Index="15" Name="AI_Gasline_Control_TC_Temp" Device="" Addr="d2030" Note="float" />
    <AI_ITEM Index="16" Name="AI_Fline_Control_TC_Temp" Device="" Addr="d2032" Note="float" />
    <AI_ITEM Index="17" Name="AI_Gasline_Monitor_TC_Temp" Device="" Addr="d2034" Note="float" />
    <AI_ITEM Index="18" Name="AI_CHB_Wall_Control_TC_Temp" Device="" Addr="d2036" Note="float" />
    <AI_ITEM Index="19" Name="AI_CHB_Wall_Monitor_TC_Temp" Device="" Addr="d2038" Note="float" />
    <AI_ITEM Index="20" Name="AI_Coolant_Inlet_Temp" Device="" Addr="d2040" Note="float" />
    <AI_ITEM Index="21" Name="AI_Coolant_Outlet_Temp" Device="" Addr="d2042" Note="float" />
    <AI_ITEM Index="22" Name="AI_Heartbeat_FB" Device="" Addr="d2044" Note="float" />
    <AI_ITEM Index="23" Name="AI_Second" Device="" Addr="d2046" Note="float" />
    <AI_ITEM Index="24" Name="AI_Minute" Device="" Addr="d2048" Note="float" />
    <AI_ITEM Index="25" Name="AI_Time" Device="" Addr="d2050" Note="float" />
    <AI_ITEM Index="26" Name="AI_Day" Device="" Addr="d2052" Note="float" />
    <AI_ITEM Index="27" Name="AI_Month" Device="" Addr="d2054" Note="float" />
    <AI_ITEM Index="28" Name="AI_Year" Device="" Addr="d2056" Note="float" />
    <AI_ITEM Index="29" Name="" />
    <AI_ITEM Index="30" Name="" />
    <AI_ITEM Index="31" Name="AI_Chamber_Pressure_Virtual" Device="" Addr="d2062" Note="float" />
    <AI_ITEM Index="32" Name="" />
    <AI_ITEM Index="33" Name="" />
    <AI_ITEM Index="34" Name="" />
    <AI_ITEM Index="35" Name="AI_MFC9_Flow" Device="" Addr="d2070" Note="float" />
    <AI_ITEM Index="36" Name="AI_MFC10_Flow" Device="" Addr="d2072" Note="float" />
    <AI_ITEM Index="37" Name="AI_MFC11_Flow" Device="" Addr="d2074" Note="float" />
    <AI_ITEM Index="38" Name="AI_MFC12_Flow" Device="" Addr="d2076" Note="float" />
    <AI_ITEM Index="39" Name="" />
    <AI_ITEM Index="40" Name="AI_He_Pressure" Device="" Addr="d2080" Note="float" />
    <AI_ITEM Index="41" Name="" />
    <AI_ITEM Index="42" Name="" />
    <AI_ITEM Index="43" Name="" />
    <AI_ITEM Index="44" Name="" />
    <AI_ITEM Index="45" Name="" />
    <AI_ITEM Index="46" Name="" />
    <AI_ITEM Index="47" Name="" />
    <AI_ITEM Index="48" Name="" />
    <AI_ITEM Index="49" Name="" />
  </Ana_In>
</IO_DEFINE>