SchedulerPuf.cs 19 KB

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  1. using Aitex.Core.RT.Fsm;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.Util;
  4. using MECF.Framework.Common.Equipment;
  5. using MECF.Framework.Common.Schedulers;
  6. using CyberX8_Core;
  7. using CyberX8_RT.Modules.PUF;
  8. using CyberX8_RT.Modules;
  9. using CyberX8_RT.Schedulers.EfemRobot;
  10. using System;
  11. using System.Collections.Generic;
  12. using System.Linq;
  13. using System.Text;
  14. using System.Threading.Tasks;
  15. using CyberX8_RT.Modules.Loader;
  16. using Aitex.Core.RT.Log;
  17. using MECF.Framework.Common.SubstrateTrackings;
  18. using Aitex.Core.Common;
  19. using MECF.Framework.Common.Utilities;
  20. using CyberX8_RT.Devices.AXIS;
  21. using Aitex.Core.RT.Device;
  22. using CyberX8_RT.Dispatch;
  23. using MECF.Framework.Common.RecipeCenter;
  24. namespace CyberX8_RT.Schedulers.Puf
  25. {
  26. public class SchedulerPuf : SchedulerModule
  27. {
  28. private enum OperationStep
  29. {
  30. None,
  31. ReadyForSwap,
  32. WaitForLoaderUnloadComplete,
  33. Swap,
  34. CheckSwapComplete,
  35. GotoRobotForPick,
  36. WaitForRobotPick,
  37. PufBackToPark,
  38. CheckParkComplete
  39. }
  40. #region 内部变量
  41. private PUFEntity _pufEntity;
  42. private LoaderEntity _loaderEntity;
  43. private OperationStep _currentOperation;
  44. private EfemEntity _efemEntity;
  45. private bool _forward = false;
  46. private bool _isProductionWafer = false;
  47. #endregion
  48. #region 属性
  49. /// <summary>
  50. /// 是否空闲
  51. /// </summary>
  52. public override bool IsIdle
  53. {
  54. get { return _state == RState.End; }
  55. }
  56. /// <summary>
  57. /// 是否错误
  58. /// </summary>
  59. public override bool IsError
  60. {
  61. get { return _state == RState.Failed || _state == RState.Timeout; }
  62. }
  63. #endregion
  64. /// <summary>
  65. /// 构造函数
  66. /// </summary>
  67. /// <param name="module"></param>
  68. public SchedulerPuf(ModuleName moduleName) : base(moduleName.ToString())
  69. {
  70. _efemEntity = Singleton<RouteManager>.Instance.EFEM;
  71. _pufEntity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(moduleName.ToString());
  72. _loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
  73. }
  74. /// <summary>
  75. /// 执行
  76. /// </summary>
  77. /// <param name="parameter"></param>
  78. /// <returns></returns>
  79. public override bool RunProcess(object recipe, object parameter, List<SchedulerSyncModuleMessage> syncMessages)
  80. {
  81. _isProductionWafer = false;
  82. _forward = (bool)parameter;
  83. if (_forward)
  84. {
  85. _currentOperation = OperationStep.ReadyForSwap;
  86. //B面是否有片
  87. if (WaferManager.Instance.CheckHasWafer(Module, 1))
  88. {
  89. _state = RState.Running;
  90. return _pufEntity.CheckToPostMessage<PUFSTATE, PUFMSG>(eEvent.ERR_PUF, Module.ToString(),
  91. (int)PUFMSG.ReadyForSwap);
  92. }
  93. return false;
  94. }
  95. else
  96. {
  97. _currentOperation = OperationStep.None;
  98. return true;
  99. }
  100. }
  101. /// <summary>
  102. /// 监控执行
  103. /// </summary>
  104. /// <returns></returns>
  105. public override bool MonitorProcess(SchedulerSequence schedulerSequence, bool hasMatchWafer)
  106. {
  107. //当前状态为ReadyForSwap
  108. if (_currentOperation == OperationStep.ReadyForSwap)
  109. {
  110. //若Puf已经完成ReadyForSwap动作,状态变更为WaitForSwap
  111. if (_pufEntity.State == (int)PUFSTATE.WaitForSwap)
  112. {
  113. //当前操作变量为WaitFor LoaderUnload Complete
  114. _currentOperation = OperationStep.WaitForLoaderUnloadComplete;
  115. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is WaitForLoaderUnloadComplete");
  116. }
  117. }
  118. else if (_currentOperation == OperationStep.WaitForLoaderUnloadComplete)
  119. {
  120. //Loader Entity Unload all
  121. if (CheckDualPufStateCanExecuteLoaderUnloadAll(hasMatchWafer))
  122. {
  123. PostLoaderEntityUnloadAllSide();
  124. }
  125. }
  126. //puf 进行Swap
  127. else if(_currentOperation==OperationStep.Swap)
  128. {
  129. bool result = _pufEntity.CheckToPostMessage<PUFSTATE,PUFMSG>(eEvent.ERR_PUF, Module.ToString(),
  130. (int)PUFMSG.Swap);
  131. if(result)
  132. {
  133. _currentOperation = OperationStep.CheckSwapComplete;
  134. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is CheckSwapComplete");
  135. }
  136. }
  137. else if(_currentOperation==OperationStep.CheckSwapComplete)
  138. {
  139. //puf完成Swap后运动至Robot让Robot取片
  140. PostPufEntityGotoRobotForPick();
  141. }
  142. else if(_currentOperation==OperationStep.GotoRobotForPick)
  143. {
  144. //Efem 将Dummy片运输至Dummy Casstete
  145. PostEfemRobotTransferToDummyCassete();
  146. }
  147. else if(_currentOperation==OperationStep.WaitForRobotPick)
  148. {
  149. //等待Efem Robot完成传片
  150. if (RobotMoveHelper.Instance.IsBusy)
  151. {
  152. RobotMoveHelper.Instance.Monitor(Module.ToString());
  153. }
  154. if(RobotMoveHelper.Instance.IsPickCompleted)
  155. {
  156. _currentOperation = OperationStep.PufBackToPark;
  157. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is PufBackToBack");
  158. }
  159. }
  160. else if(_currentOperation==OperationStep.PufBackToPark)
  161. {
  162. if (RobotMoveHelper.Instance.IsBusy)
  163. {
  164. RobotMoveHelper.Instance.Monitor(Module.ToString());
  165. }
  166. //Puf运动至Park安全位置
  167. bool result = _pufEntity.CheckToPostMessage<PUFSTATE, PUFMSG>(eEvent.ERR_PUF, Module.ToString(),
  168. (int)PUFMSG.RobotPickComplete);
  169. if (result)
  170. {
  171. _currentOperation = OperationStep.CheckParkComplete;
  172. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is CheckParkComplete");
  173. }
  174. }
  175. else if(_currentOperation==OperationStep.CheckParkComplete)
  176. {
  177. if (RobotMoveHelper.Instance.IsBusy)
  178. {
  179. RobotMoveHelper.Instance.Monitor(Module.ToString());
  180. }
  181. //判定Puf运动是否完成
  182. if (_pufEntity.IsIdle&&RobotMoveHelper.Instance.IsIdle)
  183. {
  184. _state = RState.End;
  185. }
  186. }
  187. return false;
  188. }
  189. /// <summary>
  190. /// 检验Dual puf 是不是都处于WaitForSwap 状态,保证Loader可以UnloadAll
  191. /// </summary>
  192. /// <returns></returns>
  193. private bool CheckDualPufStateCanExecuteLoaderUnloadAll(bool hasMatchWafer)
  194. {
  195. bool puf1ready = true;
  196. if(ModuleHelper.IsInstalled(ModuleName.PUF1))
  197. {
  198. PUFEntity puf1Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF1.ToString());
  199. if(hasMatchWafer)
  200. {
  201. //B面有Wafer
  202. if (WaferManager.Instance.CheckHasWafer(ModuleName.PUF1,1))
  203. {
  204. puf1ready = puf1Entity.State == (int)PUFSTATE.WaitForSwap;
  205. }
  206. else
  207. {
  208. puf1ready = false;
  209. }
  210. }
  211. else
  212. {
  213. //任务仅一片Wafer,同时模块为PUF2
  214. if(Module==ModuleName.PUF2)
  215. {
  216. puf1ready = puf1Entity.IsIdle;
  217. }
  218. }
  219. }
  220. if(!puf1ready)
  221. {
  222. return false;
  223. }
  224. bool puf2ready = true;
  225. if (ModuleHelper.IsInstalled(ModuleName.PUF2))
  226. {
  227. PUFEntity puf2Entity = Singleton<RouteManager>.Instance.GetModule<PUFEntity>(ModuleName.PUF2.ToString());
  228. if(hasMatchWafer)
  229. {
  230. //B面有Wafer
  231. if (WaferManager.Instance.CheckHasWafer(ModuleName.PUF2, 1))
  232. {
  233. puf2ready = puf2Entity.State == (int)PUFSTATE.WaitForSwap;
  234. }
  235. else
  236. {
  237. puf2ready = false;
  238. }
  239. }
  240. else
  241. {
  242. //任务仅一片Wafer,同时模块为PUF1
  243. if (Module == ModuleName.PUF1)
  244. {
  245. puf2ready = puf2Entity.IsIdle;
  246. }
  247. }
  248. }
  249. if(!puf2ready)
  250. {
  251. return false;
  252. }
  253. //Loader中没有WaferHolder
  254. if(_loaderEntity.WaferHolderInfo==null)
  255. {
  256. return false;
  257. }
  258. if (_loaderEntity.State == (int)LOADERSTATE.WaitForUnload)
  259. {
  260. JetAxisBase _loadTransporterGantryAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Transporter2}.Gantry");
  261. if (_loadTransporterGantryAxis != null && !_loadTransporterGantryAxis.JudgeCompareTargetStation("Loader", "Right"))
  262. {
  263. return false;
  264. }
  265. }
  266. return true;
  267. }
  268. /// <summary>
  269. /// LoaderEntity Unload All
  270. /// </summary>
  271. private void PostLoaderEntityUnloadAllSide()
  272. {
  273. //当前loader状态机为WaitForUnload
  274. if (_loaderEntity.State == (int)LOADERSTATE.WaitForUnload&&_currentOperation==OperationStep.WaitForLoaderUnloadComplete)
  275. {
  276. //触发loaderEntity UnloadAll
  277. _loaderEntity.CheckToPostMessage<LOADERSTATE, LoaderMSG>(eEvent.WARN_LOADER, ModuleName.Loader1.ToString(),
  278. (int)LoaderMSG.UnloadAll);
  279. }
  280. //若Loader Unload操作完成,状态变更为WaitForLoad,puf操作变更为Swap
  281. else if (_loaderEntity.State == (int)LOADERSTATE.WaitForLoad)
  282. {
  283. _currentOperation = OperationStep.Swap;
  284. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is Swap");
  285. }
  286. else if (_loaderEntity.State == (int)LOADERSTATE.Unloading)
  287. {
  288. return;
  289. }
  290. //else
  291. //{
  292. // LOG.WriteLog(eEvent.ERR_PUF, Module.ToString(), $"Loader1 Current State {(LOADERSTATE)_loaderEntity.State} is not avaible");
  293. // _state = RState.Failed;
  294. //}
  295. }
  296. /// <summary>
  297. /// PUF Entity运动至Robot准备让robot pick
  298. /// </summary>
  299. private void PostPufEntityGotoRobotForPick()
  300. {
  301. if (_pufEntity.Module == ModuleName.PUF2)
  302. {
  303. if (_pufEntity.State == (int)PUFSTATE.AferSwapParkStation)
  304. {
  305. bool result = _pufEntity.CheckToPostMessage<PUFSTATE, PUFMSG>(eEvent.ERR_PUF, Module.ToString(),
  306. (int)PUFMSG.ReadyForRobotPick);
  307. if (result)
  308. {
  309. NotifyWaferTaskSchedulerLoaderComplete();
  310. _currentOperation = OperationStep.GotoRobotForPick;
  311. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is GotoRobotForPick");
  312. }
  313. }
  314. }
  315. else
  316. {
  317. if (_pufEntity.State == (int)PUFSTATE.AferSwapParkStation)
  318. {
  319. JetAxisBase loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
  320. if (loaderRotationAxis != null && loaderRotationAxis.CheckPositionIsInStation(loaderRotationAxis.MotionData.MotorPosition, "TRNPA"))
  321. {
  322. if (_loaderEntity.State == (int)LOADERSTATE.Loading || _loaderEntity.IsIdle)
  323. {
  324. bool result = _pufEntity.CheckToPostMessage<PUFSTATE, PUFMSG>(eEvent.ERR_PUF, Module.ToString(),
  325. (int)PUFMSG.ReadyForRobotPick);
  326. if (result)
  327. {
  328. NotifyWaferTaskSchedulerLoaderComplete();
  329. _currentOperation = OperationStep.GotoRobotForPick;
  330. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is GotoRobotForPick");
  331. }
  332. }
  333. }
  334. }
  335. }
  336. }
  337. /// <summary>
  338. /// 通知Wafer对应的SchedulerLoader工序已经完成
  339. /// </summary>
  340. private void NotifyWaferTaskSchedulerLoaderComplete()
  341. {
  342. //puf A面是否存在Wafer
  343. if (WaferManager.Instance.CheckHasWafer(_pufEntity.Module, 0))
  344. {
  345. WaferInfo waferInfo = WaferManager.Instance.GetWafer(_pufEntity.Module, 0);
  346. if (waferInfo!=null&&waferInfo.WaferType==WaferType.Production)
  347. {
  348. _isProductionWafer = true;
  349. WaferTask waferTask = WaferTaskManager.Instance.GetWaferTask(waferInfo.WaferID);
  350. if (waferTask!=null)
  351. {
  352. waferTask.UpdateLoaderSchedulerSequenceComplete();
  353. }
  354. }
  355. }
  356. }
  357. /// <summary>
  358. /// 将Dummy片移动至Dummy Cassete
  359. /// </summary>
  360. private void PostEfemRobotTransferToDummyCassete()
  361. {
  362. if (_pufEntity.State == (int)PUFSTATE.WaitForRobotPick)
  363. {
  364. //生产片待EfemRobot取完片进行PufBackToPark状态
  365. if (_isProductionWafer)
  366. {
  367. bool hasWafer = WaferManager.Instance.CheckHasWafer(_pufEntity.Module, 0);
  368. if (!hasWafer)
  369. {
  370. _currentOperation = OperationStep.PufBackToPark;
  371. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is PufBackToPark");
  372. }
  373. }
  374. else
  375. {
  376. //A面Wafer
  377. WaferInfo waferInfo = WaferManager.Instance.GetWafer(_pufEntity.Module, 0);
  378. if (waferInfo == null)
  379. {
  380. return;
  381. }
  382. //Dummy片
  383. if (waferInfo.WaferType == WaferType.Assit)
  384. {
  385. if (_efemEntity.IsIdle)
  386. {
  387. var result = SchedulerSequenceManager.Instance.GetAvaibleDummySlots();
  388. if (result.moduleName != ModuleName.Unknown)
  389. {
  390. MoveItem moveItem = new MoveItem(_pufEntity.Module, 0, result.moduleName, result.slot, Aitex.Sorter.Common.Hand.Blade1);
  391. if(RobotMoveHelper.Instance.IsIdle)
  392. {
  393. RobotMoveHelper.Instance.Start(moveItem,Module.ToString());
  394. _currentOperation = OperationStep.WaitForRobotPick;
  395. LOG.WriteLog(eEvent.INFO_PUF, Module.ToString(), "Current Operation is WaitForRobotPick");
  396. }
  397. }
  398. else
  399. {
  400. LOG.WriteBackgroundLog(eEvent.WARN_PUF, Module.ToString(), "dummy slot is empty");
  401. }
  402. }
  403. else
  404. {
  405. LOG.WriteBackgroundLog(eEvent.WARN_PUF, Module.ToString(), $"wafer {waferInfo.WaferID} efem is not idle");
  406. }
  407. }
  408. else
  409. {
  410. LOG.WriteBackgroundLog(eEvent.WARN_PUF, Module.ToString(), $"wafer {waferInfo.WaferID} is not dummy wafer");
  411. }
  412. }
  413. }
  414. }
  415. /// <summary>
  416. /// 检验前置条件
  417. /// </summary>
  418. /// <param name="sequenceIndex"></param>
  419. /// <param name="parameter"></param>
  420. /// <returns></returns>
  421. public override bool CheckPrecondition(List<SchedulerSequence> schedulerSequences, int sequenceIndex, object parameter, string materialId, ref string reason)
  422. {
  423. if (_state == RState.Running)
  424. {
  425. reason = "scheduler module is already running";
  426. return false;
  427. }
  428. if (_pufEntity==null)
  429. {
  430. reason = "Puf entity is null";
  431. return false;
  432. }
  433. bool forward=(bool)parameter;
  434. if(forward)
  435. {
  436. if (_pufEntity.State == (int)PUFSTATE.WaitForRobotPlace)
  437. {
  438. return true;
  439. }
  440. else
  441. {
  442. reason = $"{_pufEntity.Module} forward,but state is not WaitForRobotPlace";
  443. return false;
  444. }
  445. }
  446. else
  447. {
  448. if (_pufEntity.State == (int)PUFSTATE.WaitForRobotPick)
  449. {
  450. return true;
  451. }
  452. else
  453. {
  454. reason = $"{_pufEntity.Module} backward,but state is not WaitForRobotPick";
  455. return false;
  456. }
  457. }
  458. }
  459. /// <summary>
  460. /// 获取可用资源
  461. /// </summary>
  462. /// <param name="sequenceIndex"></param>
  463. /// <param name="parameter"></param>
  464. /// <returns></returns>
  465. public override bool GetAvaibleMaterial(int sequenceIndex, object parameter)
  466. {
  467. return true;
  468. }
  469. }
  470. }