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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using MECF.Framework.Common.Beckhoff.Station;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Layout;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using MECF.Framework.Common.WaferHolder;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.AXIS.CANOpen;
- using CyberX8_RT.Devices.Facilities;
- using CyberX8_RT.Devices.Loader;
- using CyberX8_RT.Devices.TransPorter;
- using CyberX8_RT.Modules.Loader;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using CyberX8_RT.Devices.Metal;
- using CyberX8_RT.Devices.Rinse;
- namespace CyberX8_RT.Modules.Transporter
- {
-
- public class TransporterPickDownToRoutine : RoutineBase, IRoutine
- {
- private enum PutDownStep
- {
- CheckPreStatus,
- TargetCellUnclamp,
- TargetCellUnclampWait,
- ElevatorUp,
- ElevatorUpWait,
- ImmobilizeExtend,
- ImmobilizeExtendWait,
- SafeMoveTo,
- CheckMoveToStatus,
- GantryPosition,
- GantryPositiolWait,
- CalculatePlaceSpeed,
- PlaceDelay,
- ImmobilizeRetract,
- ImmobilizeRetractWait,
- ElevatorPosition,
- ElevatorPositionWait,
- UnlockClamp,
- UnlockClampWait,
- ElevatorLow,
- ElevatorLowWait,
- ConfirmWHPresent,
- LockClamp,
- LockClampWait,
- UpdateWaferHolder,
- GantryPositionPark,
- GantryPositionParkWait,
- End
- }
- #region 内部变量
- private string _cellName;
- private JetAxisBase _gantryAxis;
- private JetAxisBase _elevatorAxis;
- private LoaderEntity _loaderEntity;
- private JetAxisBase _loaderRotationAxis;
- private SystemFacilities _facilities;
- private TransporterUnlockRoutine _unlockRoutine;
- private TransporterLockRoutine _lockRoutine;
- private TransporterCommon _transporterCommon;
- private TransporterExtendRoutine _extendRoutine;
- private TransporterRetractRoutine _retractRoutine;
- private TransporterConflictRoutine _conflictRoutine;
- private LoaderPreTransferUnclampRoutine _preTransferUnclampRoutine;
- ProcessLayoutCellItem _cellItem;
- private int _placeTime;
- private int _placeDelayTime;
- private int _velocity;
- private int _acceleration;
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public TransporterPickDownToRoutine(string module) : base(module)
- {
- }
- /// <summary>
- /// 中止
- /// </summary>
- public void Abort()
- {
- Runner.Stop("Manual Abort");
- }
- /// <summary>
- /// 监控
- /// </summary>
- /// <returns></returns>
- public RState Monitor()
- {
- Runner.Run(PutDownStep.CheckPreStatus,CheckStartPreConfition,_delay_1ms)
- .Run(PutDownStep.TargetCellUnclamp, TargetCellUnclamp, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.TargetCellUnclampWait,TargetCellUnclampEndStatus,TargetCellUnclampStopStatus)
- //1.1 Elevator Position Up
- .Run(PutDownStep.ElevatorUp, ElevatorGotoUp, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.ElevatorUpWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- //1.2 Immobilized Extend
- .Run(PutDownStep.ImmobilizeExtend, () => { return _extendRoutine.Start(null) == RState.Running; }, NullFun, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.ImmobilizeExtendWait, () => { return CommonFunction.CheckRoutineEndState(_extendRoutine); },
- CheckImmobilizeRoutineStopStatus)
- //1.3 Move to 安全
- .Run(PutDownStep.SafeMoveTo, SafeMoveTo, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.CheckMoveToStatus, () => CommonFunction.CheckRoutineEndState(_conflictRoutine),
- CheckSafeMoveToStopStatus)
- //1.3 Gantry 移动
- .Run(PutDownStep.GantryPosition, GantryPositionToCell, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.GantryPositiolWait, CheckGantryPositionStatus, CheckGantryPositionRunStop)
- //1.4 确认Place 速度和加速度
- .Run(PutDownStep.CalculatePlaceSpeed, CalculatePownDownSpeed, _delay_1ms)
- //1.5 Pickup delay
- .Delay(PutDownStep.PlaceDelay, _placeDelayTime * 1000)
- //1.6 Immobilize Retract
- .Run(PutDownStep.ImmobilizeRetract, () => { return _retractRoutine.Start(null) == RState.Running; }, NullFun, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.ImmobilizeRetractWait, ()=> CommonFunction.CheckRoutineEndState(_retractRoutine),
- CheckRetractStopStatus)
- //.WaitWithStopCondition(PutDownStep.CellRetractedWait, CheckCellRetractRoutineEndState, CheckCellRetractRoutineStopState)
- //1.7 Elevator 移动至cell
- .Run(PutDownStep.ElevatorPosition, () => { return VerticalPositionToCell(); }, NullFun, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.ElevatorPositionWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- //1.8 Unlock clamp
- .Run(PutDownStep.UnlockClamp, () => { return _unlockRoutine.Start(null) == RState.Running; },_delay_1ms)
- .WaitWithStopCondition(PutDownStep.UnlockClampWait,()=>CommonFunction.CheckRoutineEndState(_unlockRoutine),
- CheckUnlockRoutineStopStatus)
- //1.9 Elevator Position Low
- .Run(PutDownStep.ElevatorLow, ElevatorGotoLow, _delay_1ms)
- .WaitWithStopCondition(PutDownStep.ElevatorLowWait, CheckVerticalPositionStatus, CheckVerticalPositionRunStop)
- //2.0 确认WhPresent信号
- .Wait(PutDownStep.ConfirmWHPresent,ConfirmWHPresentSensorOff,_delay_2s)
- //2.1 Lock clamp
- .Run(PutDownStep.LockClamp, () => { return _lockRoutine.Start(null) == RState.Running; },_delay_1ms)
- .WaitWithStopCondition(PutDownStep.LockClampWait,()=>CommonFunction.CheckRoutineEndState(_lockRoutine),
- CheckLockRoutineStopStatus)
- //2.2 Wafer Holder location update
- .Run(PutDownStep.UpdateWaferHolder,WaferHolderTransfer,_delay_1ms)
- //2.3 Gantry Position To Park
- .Run(PutDownStep.GantryPositionPark,GantryBackToPark,_delay_1ms)
- .WaitWithStopCondition(PutDownStep.GantryPositionParkWait,CheckGantryParkPositionStatus,CheckGantryParkPositionRunStop)
- .End(PutDownStep.End,NullFun,100);
- return Runner.Status;
- }
- /// <summary>
- /// 目标cell unclamp
- /// </summary>
- /// <returns></returns>
- private bool TargetCellUnclamp()
- {
- if (_cellName == "Loader")
- {
- bool result= _preTransferUnclampRoutine.Start() == RState.Running;
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "Loader Unclamp failed", 0);
- }
- return result;
- }
- else
- {
- _cellItem = ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(_cellName);
- if (_cellItem != null)
- {
- if (Enum.TryParse(_cellItem.ModuleName, out ModuleName cellModuleName))
- {
- if (ModuleHelper.IsRinse(cellModuleName))
- {
- RinseDevice rinseDevice = DEVICE.GetDevice<RinseDevice>(_cellItem.ModuleName);
- if (rinseDevice != null)
- {
- bool result = rinseDevice.WaferHolderClampValveOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellItem.ModuleName} Clamp off failed", 0);
- }
- return result;
- }
- }
- else if (ModuleHelper.IsMetal(cellModuleName))
- {
- MetalCellDevice metalCellDevice = DEVICE.GetDevice<MetalCellDevice>(_cellItem.ModuleName);
- if (metalCellDevice != null)
- {
- bool result = metalCellDevice.WaferHolderClampOff();
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellItem.ModuleName} Clamp off failed", 0);
- }
- return result;
- }
- }
- }
- }
- }
- return true;
- }
- /// <summary>
- /// 目标Cell Unclamp状态
- /// </summary>
- /// <returns></returns>
- private bool TargetCellUnclampEndStatus()
- {
- if(_cellName=="Loader")
- {
- return CommonFunction.CheckRoutineEndState(_preTransferUnclampRoutine);
- }
- else
- {
- _cellItem = ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(_cellName);
- if (_cellItem != null)
- {
- if (Enum.TryParse(_cellItem.ModuleName, out ModuleName cellModuleName))
- {
- if (ModuleHelper.IsRinse(cellModuleName))
- {
- RinseDevice rinseDevice = DEVICE.GetDevice<RinseDevice>(_cellItem.ModuleName);
- if (rinseDevice != null)
- {
- return rinseDevice.RinseData.WaferHolderClamp==false;
- }
- }
- else if (ModuleHelper.IsMetal(cellModuleName))
- {
- MetalCellDevice metalCellDevice = DEVICE.GetDevice<MetalCellDevice>(_cellItem.ModuleName);
- if (metalCellDevice != null)
- {
- return metalCellDevice.ClampOff;
- }
- }
- }
- }
- }
- return true;
- }
- /// <summary>
- /// 目标Cell Unclamp运行中止状态
- /// </summary>
- /// <returns></returns>
- private bool TargetCellUnclampStopStatus()
- {
- if (_cellName == "Loader")
- {
- bool result = CommonFunction.CheckRoutineStopState(_preTransferUnclampRoutine);
- if (result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "Loader Unclamp failed", 0);
- }
- return result;
- }
- return false;
- }
- /// <summary>
- /// Elevator goto Up
- /// </summary>
- /// <returns></returns>
- private bool ElevatorGotoUp()
- {
- bool result= _elevatorAxis.PositionStation("UP", false);
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "elevator goto up failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验前置条件
- /// </summary>
- /// <returns></returns>
- private bool CheckPreCondition()
- {
- if(!_gantryAxis.IsSwitchOn)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} gantry axis is not switch on ", -1);
- return false;
- }
- if (!_gantryAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} gantry axis is not homed ",-1);
- return false;
- }
- if (!_elevatorAxis.IsSwitchOn)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} elevator axis is not switch on ", -1);
- return false;
- }
- if (!_elevatorAxis.IsHomed)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} elevator axis is not homed ",-1);
- return false;
- }
-
- return true;
- }
- /// <summary>
- /// 安全避障移动
- /// </summary>
- /// <returns></returns>
- private bool SafeMoveTo()
- {
- _cellItem = ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(_cellName);
- string stationName = _cellName;
- if (_cellItem != null)
- {
- if (_cellName.ToLower() != "loader" && _cellName.ToLower() != "park")
- {
- stationName = $"Cell{_cellItem.CellId}";
- }
- }
- else
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} not in layout",0);
- return false;
- }
- var result = _gantryAxis.GetPositionByStation(stationName);
- if (result.success)
- {
- bool isPositive = false;
- if (_gantryAxis.MotionData.MotorPosition < result.position)
- {
- isPositive = true;
- }
- return _conflictRoutine.Start(result.position, isPositive) == RState.Running;
- }
- else
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} not in station list",0);
- return false;
- }
- }
- /// <summary>
- /// 检验安全避让异常结束状态
- /// </summary>
- /// <returns></returns>
- private bool CheckSafeMoveToStopStatus()
- {
- bool result = CommonFunction.CheckRoutineStopState(_conflictRoutine);
- if (result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "Safe Move failed", 0);
- }
- return result;
- }
- /// <summary>
- /// Gantry Position To cell
- /// </summary>
- /// <returns></returns>
- private bool GantryPositionToCell()
- {
- _cellItem= ProcessLayoutManager.Instance.GetProcessLayoutCellItemByModuleName(_cellName);
- bool result = false;
- if (_cellItem != null)
- {
- if (_cellName.ToLower() != "loader"&&_cellName.ToLower()!="park")
- {
- result= _gantryAxis.PositionStation($"Cell{_cellItem.CellId}",false);
- }
- else
- {
- result = _gantryAxis.PositionStation(_cellName,false);
- }
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "gantry axis motion failed", 0);
- }
- return result;
- }
- else
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} not in layout",0);
- return false;
- }
- }
- /// <summary>
- /// Elevator Position to cell
- /// </summary>
- /// <returns></returns>
- private bool VerticalPositionToCell()
- {
- bool result= false;
- if( _cellItem != null )
- {
- if (_cellName.ToLower()!="loader")
- {
- result= _elevatorAxis.PositionStation($"Cell{_cellItem.CellId}",false,_velocity,_acceleration,_acceleration);
- }
- else
- {
- result= _elevatorAxis.PositionStation(_cellName,false,_velocity,_acceleration,_acceleration);
- }
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "elevator axis motion failed", 0);
- }
- return result;
- }
- else
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} not in layout",0);
- return false;
- }
- }
- /// <summary>
- /// 检验Vertical移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalPositionStatus()
- {
- return _elevatorAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Vertical是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckVerticalPositionRunStop()
- {
- bool result= _elevatorAxis.Status == RState.Failed||_elevatorAxis.Status==RState.Timeout;
- if(result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "elevator axis motion failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验Immobile异常状态
- /// </summary>
- /// <returns></returns>
- private bool CheckImmobilizeRoutineStopStatus()
- {
- bool result= CommonFunction.CheckRoutineStopState(_extendRoutine);
- if (result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "extend failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验unlock异常状态
- /// </summary>
- /// <returns></returns>
- private bool CheckUnlockRoutineStopStatus()
- {
- bool result = CommonFunction.CheckRoutineStopState(_unlockRoutine);
- if (result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "unlock failed", 0);
- }
- return result;
- }
- /// <summary>
- /// Elevator goto low
- /// </summary>
- /// <returns></returns>
- private bool ElevatorGotoLow()
- {
- bool result= _elevatorAxis.PositionStation("LOW", false);
- if(!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "elevator goto low failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 检验Gantry移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckGantryPositionStatus()
- {
- return _gantryAxis.Status == RState.End;
- }
- /// <summary>
- /// 检验Gantry是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckGantryPositionRunStop()
- {
- bool result= _gantryAxis.Status == RState.Failed||_gantryAxis.Status==RState.Timeout;
- if(result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "gantry axis motion failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 计算放下速度
- /// </summary>
- /// <returns></returns>
- private bool CalculatePownDownSpeed()
- {
- if(_placeTime==0)
- {
- return true;
- }
- BeckhoffStationAxis stationAxis = BeckhoffStationLocationManager.Instance.GetStationAxis(Module, "Elevator", 0);
- Station upStation = stationAxis.Stations.Find(O => O.Name.EndsWith("UP")); Station cellStation = null;
- if (_cellName == "Loader")
- {
- cellStation = stationAxis.Stations.Find(O => O.Name.EndsWith("Loader"));
- }
- else
- {
- cellStation = stationAxis.Stations.Find(O => O.Name.EndsWith($"Cell{_cellItem.CellId}"));
- }
- if (upStation==null)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "UP is not in Station List",0);
- return false;
- }
- if(cellStation==null)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"Cell{_cellItem.CellId} is not in Station List",0);
- return false;
- }
- if(!double.TryParse(cellStation.Position,out double cellStationPosition))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"Cell{_cellItem.CellId} Station Position is invalid",0);
- return false;
- }
- if (!double.TryParse(upStation.Position, out double upStationPosition))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"Cell{_cellItem.CellId} Station Position is invalid",0);
- return false;
- }
- int distance =(int)(Math.Round(Math.Abs(cellStationPosition - upStationPosition)));
- double tmpVelocity = (double) distance/ _placeTime;
- _velocity = _elevatorAxis.CalculateMultiplySpeedRatio(_elevatorAxis.CalculateValueMultiplyScale(tmpVelocity));
- double tmpAccelaration = (double)(2 * distance) / Math.Pow(_placeTime, 2);
- _acceleration = _elevatorAxis.CalculateMultiplyAccelerationRatio(_elevatorAxis.CalculateValueMultiplyScale(tmpAccelaration));
- LOG.WriteBackgroundLog(eEvent.INFO_TRANSPORTER, Module, "adjust profile speed");
- return true;
- }
- /// <summary>
- /// 检验Retract 异常状态
- /// </summary>
- /// <returns></returns>
- private bool CheckRetractStopStatus()
- {
- bool result = CommonFunction.CheckRoutineStopState(_retractRoutine);
- if (result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "retract failed", 0);
- }
- return result;
- }
- /// <summary>
- /// 更新WaferHolder移动信息
- /// </summary>
- /// <returns></returns>
- private bool WaferHolderTransfer()
- {
- bool result= WaferHolderManager.Instance.TransferWaferHolder(Module,Module, _cellName);
- if (!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "tranfer waferHolder message failed", 0);
- }
- else
- {
- if (Singleton<RouteManager>.Instance.IsAutoRunning)
- {
- WaferHolderInfo waferHolderInfo = WaferHolderManager.Instance.GetWaferHolder(_cellName);
- if (waferHolderInfo != null)
- {
- string strTime = DateTime.Now.ToString("yyyy/MM/dd HH:mm:ss");
- waferHolderInfo.SchedulerModules.Add($"{strTime} {Module} => {_cellName}");
- }
- }
- }
- return result;
- }
- /// <summary>
- /// 确认WH Present Sensor off
- /// </summary>
- /// <returns></returns>
- private bool ConfirmWHPresentSensorOff()
- {
- bool result= !_transporterCommon.TransporterData.WhPresent1 &&!_transporterCommon.TransporterData.WhPresent2;
- if(!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "confirm WS Present sensor failed",0);
- }
- return result;
- }
- /// <summary>
- /// 检验Lock异常状态
- /// </summary>
- /// <returns></returns>
- private bool CheckLockRoutineStopStatus()
- {
- bool result = CommonFunction.CheckRoutineStopState(_lockRoutine);
- if(result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "lock failed", 0);
- }
- return result;
- }
- /// <summary>
- /// Gabtry是否需要回到
- /// </summary>
- /// <returns></returns>
- private bool NeedGantryBackToPark()
- {
- switch(_cellName)
- {
- case "Loader":
- case "Prewet":
- return true;
- default:
- return false;
- }
- }
- /// <summary>
- /// Gantry 回至Park
- /// </summary>
- /// <returns></returns>
- private bool GantryBackToPark()
- {
- if (NeedGantryBackToPark())
- {
- bool result= _gantryAxis.PositionStation("Park", false);
- if(!result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "gantry back to park failed",0);
- }
- return result;
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验Gantry Park移动状态
- /// </summary>
- /// <returns></returns>
- private bool CheckGantryParkPositionStatus()
- {
- if (NeedGantryBackToPark())
- {
- return _gantryAxis.Status == RState.End;
- }
- else
- {
- return true;
- }
- }
- /// <summary>
- /// 检验Gantry Park是否还在运动
- /// </summary>
- /// <returns></returns>
- private bool CheckGantryParkPositionRunStop()
- {
- if (NeedGantryBackToPark())
- {
- bool result = _gantryAxis.Status == RState.Failed||_gantryAxis.Status==RState.Timeout;
- if(result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, "gantry motion failed", 0);
- }
- return result;
- }
- else
- {
- return false;
- }
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _cellName = objs[0].ToString();
- _velocity = 0;
- _acceleration = 0;
- InitializeParameters();
- string preConfig = SC.GetConfigPreContent(_cellName);
- if (SC.ContainsItem($"{preConfig}.PlaceTimeSeconds"))
- {
- _placeTime = SC.GetValue<int>($"{preConfig}.PlaceTimeSeconds");
- }
- if (SC.ContainsItem($"{preConfig}.PlaceDelaySeconds"))
- {
- _placeDelayTime = SC.GetValue<int>($"{preConfig}.PlaceDelaySeconds");
- }
- return Runner.Start(Module, $"Pun Down To {_cellName}");
- }
- /// <summary>
- /// 初始化参数
- /// </summary>
- private void InitializeParameters()
- {
- _elevatorAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Elevator");
- _gantryAxis = DEVICE.GetDevice<JetAxisBase>($"{Module}.Gantry");
- _loaderEntity = Singleton<RouteManager>.Instance.GetModule<LoaderEntity>(ModuleName.Loader1.ToString());
- _loaderRotationAxis = DEVICE.GetDevice<JetAxisBase>($"{ModuleName.Loader1}.Rotation");
- _facilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- _unlockRoutine = new TransporterUnlockRoutine(Module);
- _lockRoutine = new TransporterLockRoutine(Module);
- _extendRoutine = new TransporterExtendRoutine(Module);
- _retractRoutine = new TransporterRetractRoutine(Module);
- _conflictRoutine = new TransporterConflictRoutine(Module);
- _transporterCommon = DEVICE.GetDevice<TransporterCommon>($"{Module}.Common");
- _preTransferUnclampRoutine = new LoaderPreTransferUnclampRoutine(ModuleName.Loader1.ToString());
- }
- /// <summary>
- /// 启动校验条件
- /// </summary>
- /// <returns></returns>
- private bool CheckStartPreConfition()
- {
- bool result = CheckPreCondition();
- if(!result)
- {
- return false;
- }
- double elevatorPosition = _elevatorAxis.MotionData.MotorPosition;
- if (!_elevatorAxis.CheckPositionIsInStation(elevatorPosition, "Up"))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} elevator axis {elevatorPosition} is not int Up station",-1);
- return false;
- }
- if (!_loaderEntity.IsHomed)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{ModuleName.Loader1} is not homed", -1);
- return false;
- }
- if (_cellName == "Loader")
- {
- double loaderRotationPosition = _loaderRotationAxis.MotionData.MotorPosition;
- if (!_loaderRotationAxis.CheckPositionIsInStation(loaderRotationPosition, "TRNPA") &&
- !_loaderRotationAxis.CheckPositionIsInStation(loaderRotationPosition, "TRNPB"))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{ModuleName.Loader1} rotation axis {loaderRotationPosition} is not int TRNPA or TRNPB station", -1);
- return false;
- }
- }
- if (!WaferHolderManager.Instance.HasWaferHolder(Module))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} does not has wafer Shuttle",-1);
- return false;
- }
- if (WaferHolderManager.Instance.HasWaferHolder(_cellName))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"Cell {_cellName} already has wafer Shuttle", -1);
- return false;
- }
- //检验Facilities
- var faciltiesResult = _facilities.CheckCDA();
- if (!faciltiesResult.result)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, faciltiesResult.reason, -1);
- return false;
- }
- //检验Lock和WH Present Sensor
- if (!_transporterCommon.TransporterData.Locked1)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} lock1 sensor is off ", -1);
- return false;
- }
- if (!_transporterCommon.TransporterData.Locked2)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} lock2 sensor is off ",-1);
- return false;
- }
- if (!_transporterCommon.TransporterData.WhPresent1)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} WS Present1 sensor is off ", -1);
- return false;
- }
- if (!_transporterCommon.TransporterData.WhPresent2)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} WS Present2 sensor is off ",-1);
- return false;
- }
- return true;
- }
- /// <summary>
- /// 重试
- /// </summary>
- /// <param name="step"></param>
- public RState Retry(int step)
- {
- InitializeParameters();
- List<Enum> preStepIds = new List<Enum>();
- return Runner.Retry(PutDownStep.CheckPreStatus, preStepIds, Module, "PickUp Moveto Retry");
- }
- /// <summary>
- /// 检验前面Unload完成状态
- /// </summary>
- /// <returns></returns>
- public bool CheckCompleteCondition(int index)
- {
- TransporterEntity transporterEntity = Singleton<RouteManager>.Instance.GetModule<TransporterEntity>(Module);
- if (transporterEntity.WaferHolderInfo != null)
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{Module} has waferholder", index);
- return false;
- }
- if (!WaferHolderManager.Instance.HasWaferHolder(_cellName))
- {
- NotifyError(eEvent.ERR_TRANSPORTER, $"{_cellName} does not have waferholder", index);
- return false;
- }
- return true;
- }
- }
- }
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