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- using Aitex.Core.RT.Device;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using MECF.Framework.Common.RecipeCenter;
- using MECF.Framework.Common.Routine;
- using MECF.Framework.Common.Utilities;
- using CyberX8_Core;
- using CyberX8_RT.Devices.AXIS;
- using CyberX8_RT.Devices.Facilities;
- using CyberX8_RT.Devices.SRD;
- using System;
- using System.Collections.Generic;
- using System.Linq;
- using System.Reflection;
- using System.Runtime.InteropServices;
- using System.Text;
- using System.Threading;
- using System.Threading.Tasks;
- namespace CyberX8_RT.Modules.SRD
- {
- internal class SRDPresenceTestRoutine : RoutineBase, IRoutine
- {
- private enum PresenceTestStep
- {
- Ready,
- CloseDoor,
- CheckCloseDoor,
- ChuckVacuumOn,
- RunWafer,
- RunWaferWait,
- InitialUnloadingStateMachine,
- Unloading,
- UnloadingWait,
- End
- }
- #region 内部变量
- /// <summary>
- /// Rotation Axis
- /// </summary>
- private JetAxisBase _rotationAxis;
- /// <summary>
- /// Arm Axis
- /// </summary>
- private JetAxisBase _armAxis;
- /// <summary>
- /// SRD Common
- /// </summary>
- private SrdCommonDevice _srdCommon;
- /// <summary>
- /// recipe名称
- /// </summary>
- private string _recipe;
- /// <summary>
- /// SRD Recipe
- /// </summary>
- private SrdRecipe _srdRecipe;
- /// <summary>
- /// Module
- /// </summary>
- private string _module;
- /// <summary>
- /// Wafer Presence Test功能是否启用
- /// </summary>
- private bool _presenceTestEnabled;
- /// <summary>
- /// Run wafer Recipe Routine
- /// </summary>
- private SRDRunWaferRecipeRoutine _runWaferRecipRoutine;
- /// <summary>
- /// Unload Routine
- /// </summary>
- private SRDUnloadRoutine _unloadRoutine;
- #endregion
- #region 属性
- /// <summary>
- /// 当前子状态机
- /// </summary>
- public string CurrentStateMachine
- {
- get { return GetCurrentStateMachine(); }
- }
- #endregion
- /// <summary>
- /// 构造函数
- /// </summary>
- /// <param name="module"></param>
- public SRDPresenceTestRoutine(string module) : base(module)
- {
- _module = module;
- _srdCommon = DEVICE.GetDevice<SrdCommonDevice>($"{module}.Common");
- _runWaferRecipRoutine = new SRDRunWaferRecipeRoutine(module);
- _unloadRoutine = new SRDUnloadRoutine(module);
- }
- /// <summary>
- /// Abort
- /// </summary>
- public void Abort()
- {
- if(_unloadRoutine.Monitor() == RState.Running)
- {
- _unloadRoutine.Abort();
- }
- if (_runWaferRecipRoutine.Monitor() == RState.Running)
- {
- _runWaferRecipRoutine.Abort();
- }
- Runner.Stop("Presence Test Abort");
- if (_srdCommon != null)
- {
- _srdCommon.EnterErrorOperation();
- }
- }
- public RState Monitor()
- {
- Runner.Wait(PresenceTestStep.Ready, CheckReadyStatus, _delay_1ms)
- .Run(PresenceTestStep.CloseDoor, CloseDoor, CheckDoorClosed, _delay_1s)
- .Run(PresenceTestStep.ChuckVacuumOn, EngageChuckVacuum, CheckVacuum, _delay_1s)
- .Run(PresenceTestStep.RunWafer, () => { return StartRunWaferRecipeRoutine(_recipe); }, _delay_1ms)
- .WaitWithStopCondition(PresenceTestStep.RunWaferWait, CheckRunWaferRoutineCompleteStatus, CheckRunWaferRoutineErrorStatus)
- .Run(PresenceTestStep.Unloading, () => { return StartUnloadingRoutine(); }, _delay_1ms)
- .WaitWithStopCondition(PresenceTestStep.UnloadingWait, CheckUnloadingRoutineCompleteStatus, CheckUnloadingRoutineErrorStatus)
- .End(PresenceTestStep.End, NullFun, _delay_1ms);
- return Runner.Status;
- }
- /// <summary>
- /// 启动
- /// </summary>
- /// <param name="objs"></param>
- /// <returns></returns>
- public RState Start(params object[] objs)
- {
- _recipe = objs[0].ToString();
- _srdRecipe = RecipeFileManager.Instance.LoadGenericityRecipe<SrdRecipe>(_recipe);
- if (_srdRecipe == null)
- {
- LOG.WriteLog(eEvent.INFO_SRD, Module.ToString(), $"Start Run Wafer State Machine, recipe[{_recipe}] is null");
- return RState.Failed;
- }
- Runner.Start(Module, "PresenceTest");
- return RState.Running;
- }
- private bool CheckReadyStatus()
- {
- //Arm是否开启,是否home
- _armAxis = DEVICE.GetDevice<JetAxisBase>($"{_module}.Arm");
- if (_armAxis.IsSwitchOn)
- {
- if (!_armAxis.IsHomed)
- {
- LOG.WriteLog(eEvent.ERR_SRD, _module, "Arm is not swicth on");
- return false;
- }
- }
- else
- {
- LOG.WriteLog(eEvent.ERR_SRD, _module, "Arm is not home");
- return false;
- }
- //Rotation是否开启,是否home
- _rotationAxis = DEVICE.GetDevice<JetAxisBase>($"{_module}.Rotation");
- if (_rotationAxis.IsSwitchOn)
- {
- if (!_rotationAxis.IsHomed)
- {
- LOG.WriteLog(eEvent.ERR_SRD, _module, "Rotation is not homed");
- return false;
- }
- }
- else
- {
-
- LOG.WriteLog(eEvent.ERR_SRD, _module, "Rotation is not switched on ");
- return false;
-
- }
- //检查N2与CDA
- SystemFacilities systemFacilities = DEVICE.GetDevice<SystemFacilities>("System.Facilities");
- var result = systemFacilities.CheckCDAN2();
- if (!result.result)
- {
- LOG.WriteLog(eEvent.ERR_SRD, _module, $"CheckCDAN2 is failed");
- return false;
- }
-
- //Wafer Presence Test功能是否开启
- if (SC.ContainsItem($"SRD.{_module}EnablePresenceCheckvalue"))
- {
- _presenceTestEnabled = SC.GetValue<bool>($"SRD.{_module}EnablePresenceCheckvalue");
- if (!_presenceTestEnabled)
- {
- LOG.WriteLog(eEvent.ERR_SRD, _module, $"{_module}EnablePresenceCheckvalue is unable");
- return false;
- }
- }
- else
- {
- LOG.WriteLog(eEvent.ERR_SRD, _module, $"Config dosen't have EnablePresenceCheckvalue");
- return false;
- }
- return true;
- }
- /// <summary>
- /// Close Door
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool CloseDoor()
- {
- bool result = _srdCommon.DoorCloseAction("", null);
- if (!result)
- {
- return false;
- }
- return result;
- }
- /// <summary>
- /// 检验DoorClosed
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool CheckDoorClosed()
- {
- if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)
- {
- return false;
- }
- return _srdCommon.Status == RState.End && _srdCommon.CommonData.DoorClosed;
- }
- /// <summary>
- /// Chuck Vacuum On
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool EngageChuckVacuum()
- {
- bool result = _srdCommon.ChuckVacuumOnAction("", null);
- if (!result)
- {
- return false;
- }
- return result;
- }
- /// <summary>
- /// 检查真空状态
- /// </summary>
- /// <param name="param"></param>
- /// <returns></returns>
- private bool CheckVacuum()
- {
- if (_srdCommon.Status == RState.Failed || _srdCommon.Status == RState.Timeout)
- {
- return false;
- }
- return _srdCommon.Status == RState.End && !_srdCommon.CommonData.ChuckVacuum;
- }
- #region SRD RunWaferRecipeRoutine
- /// <summary>
- /// 启动RunWaferRecipeRoutine
- /// </summary>
- /// <param name="recipe"></param>
- /// <returns></returns>
- private bool StartRunWaferRecipeRoutine(string recipe)
- {
- bool presenceTestFlag = true;
- return _runWaferRecipRoutine.Start(_srdRecipe, presenceTestFlag) == RState.Running;
- }
- /// <summary>
- /// 检验RunWaferRecipeRoutine是否完成
- /// </summary>
- /// <returns></returns>
- private bool CheckRunWaferRoutineCompleteStatus()
- {
- return CommonFunction.CheckRoutineEndState(_runWaferRecipRoutine);
- }
- /// <summary>
- /// 检验RunWaferRecipeRoutine是否出错
- /// </summary>
- /// <returns></returns>
- private bool CheckRunWaferRoutineErrorStatus()
- {
- bool result = CommonFunction.CheckRoutineStopState(_runWaferRecipRoutine);
- if (result && _srdCommon != null)
- {
- _srdCommon.EnterErrorOperation();
- }
- return result;
- }
- #endregion
- #region SRD UnloadingRoutine
- /// <summary>
- /// 启动UnloadingRoutine
- /// </summary>
- /// <param name="recipe"></param>
- /// <returns></returns>
- private bool StartUnloadingRoutine()
- {
- return _unloadRoutine.Start() == RState.Running;
- }
- /// <summary>
- /// 检验UnloadingRoutine是否完成
- /// </summary>
- /// <returns></returns>
- private bool CheckUnloadingRoutineCompleteStatus()
- {
- return CommonFunction.CheckRoutineEndState(_unloadRoutine);
- }
- /// <summary>
- /// 检验UnloadingRoutine是否出错
- /// </summary>
- /// <returns></returns>
- private bool CheckUnloadingRoutineErrorStatus()
- {
- return CommonFunction.CheckRoutineStopState(_unloadRoutine);
- }
-
- #endregion
- /// <summary>
- /// 获取当前子状态机
- /// </summary>
- private string GetCurrentStateMachine()
- {
- string result;
- if (Runner.CurrentStep.ToString() == "Ready")
- {
- result = "Ready";
- }
- else if (Runner.CurrentStep.ToString().Contains("RunWafer"))
- {
- result = _runWaferRecipRoutine.CurrentStep;
- }
- else if (Runner.CurrentStep.ToString().Contains("Unloading"))
- {
- result = _unloadRoutine.CurrentStep;
- }
- else
- {
- result = "End";
- }
- return result;
- }
- }
- }
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